TW482830B - Device and method for clamping single crystals - Google Patents

Abstract

In the process of clamping heavy single crystals, the device and the method of this invention are capable of clamping a portion with good duplication in its shape and size. This can offset the declining of the clamping force induced by the shrinkage of single crystals during cooling process. The single-crystal clamping device according to this invention includes: a single-crystal lifting wire for lifting the seed crystal dipped into the melted liquid; means for winding up the single-crystal lifting wire; a polygon-link body consisted of multiple pin-connected links, capable of deforming in a horizontal plan by altering the positions of link pins; means for deforming the polygon-link body so as to urge the polygon-link body to clamp the portion near the end of the single crystal being lifted and accommodated within the polygon-link body; and means for synchronizing the rotation and the ascending/descending movements of the polygon-link body with the winding-up and the rotation movements of the single-crystal lifting wire.

Description

482830 Μ '____ B7 V. Description of the invention (1) — 1 ~ The present invention relates to a single crystal holding device and a single crystal holding method, wherein the holding device is installed on a single crystal manufacturing device using the cz method. Refers to the production of large single crystals. Monocrystalline silicon is generally manufactured by the CZ method. In the cz method, a polycrystalline silicon block is filled into a quartz crucible in a single crystal manufacturing apparatus, and then the quartz crucible is heated by a heater disposed around the quartz crucible to dissolve the polycrystalline silicon block, and then immersed in the melt A seed crystal mounted on a seed holder. Then, the seed holder and the quartz crucible are respectively driven to rotate in the same or opposite directions, and at the same time, the seed holder is pulled to grow a single crystal fragment of a certain diameter and length. When seed crystals are immersed in the melt, translocation occurs due to thermal shock. In order to ensure that the translocation does not propagate from the seed crystal to the growing single crystal, the reduced portion having a diameter of several millimeters is formed under the seed crystal by the Dash's neck method, so that the translocation is released to the surface of the reduced portion. After confirming no indexing, a shoulder was formed and the single crystal was enlarged to a predetermined diameter. Then, the pulling operation is shifted to the formation of the single crystal body portion. In recent years, with the increase in the length and diameter of single crystals, their weight has also increased. The Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs has printed a large number of copies, and as a result, the strength of the shrinking department has approached its limit. Therefore, in the practice of conventional pulling and pulling, there is a risk of neck damage, and single crystals cannot be pulled safely. In order to solve this problem, after the Dash method is used, there is no indexing, and the method of holding a single crystal by clamping a holder is used. Since most of the weight of the single crystal is supported by the gripper, breakage of the reduced portion can be prevented, and even when the reduced portion breaks, the drop of the single crystal can be prevented by the gripper. $ 纸 尺 新 财 X Tear-off is-) 482830 A7 B7 V. Description of the invention (2) For example, in the single crystal growth device disclosed in Japanese Patent Publication No. 5-65477, an openable and closable holding arm and a single The neck of the crystal is snapped to suspend a single crystal. Also, in the single crystal pulling device disclosed in Japanese Patent Publication No. 7-515, a plurality of claws held at a predetermined angle are provided at the lower end of the liftable grip. The claw is engaged with the neck of the single crystal to suspend the single crystal. In addition, in the single crystal pulling device disclosed in Japanese Patent Publication No. 7-103000, a plurality of claws that engage with the neck of the single crystal are provided. The single crystal is suspended by a plurality of holding levers that can be opened and closed by lifting movement and a ring that prevents the holding levers from opening. Still other similar institutions are disclosed in Japanese Unexamined Patent Publication No. 9-2893 and Japanese Unexamined Patent Publication No. 5-270974. However, when holding the reduced portion formed in the single crystal with various grippers, there are the following disadvantages: (1) In the process of forming the reduced portion, it is difficult to control the shape by adjusting the pulling speed of the single crystal and the temperature of the melt, which is difficult. The shapes of the plurality of reduced portions are made reproducible. Therefore, the engagement state is different for each single crystal. (2) In the case where a single crystal is held by applying mechanical pressure to a grip, the holding force decreases as the single crystal shrinks due to cooling of the single crystal. Therefore, single crystals cannot be reliably held, and the problem remains unsolved. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the note on luxury on the back before completing this page) In view of the above-mentioned shortcomings, the present invention aims to provide a single crystal holding device and a single crystal holding method. In the process of holding a large weight of single crystals, the apparatus and method of the present invention can hold a portion having good shape and size reproducibility. This compensates for the reduction in holding force caused by the shrinkage of the single crystal during the cooling process. In order to achieve the above purpose, the single crystal holding device of the present invention includes: This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 male f) Printed by the Consumer Cooperatives of the Central Standards Bureau Staff of the Ministry of Economic Affairs 482830 A7 --- ---------- B7 V. Description of the invention (3) _ _ ^, = said to pull the cable to pull the seed crystals immersed in the melt; Take up the crystal pull-up cable; the polygonal link body is composed of a plurality of connecting rods, and can be deformed in the horizontal plane by changing the position of the link pin; The inside of the rod body deforms the polygonal cup to hold the vicinity of the end of the single crystal in the pull; and the rotary lifting mechanism allows the lifting and turning of the polygonal link body and the crystal pull cable Take-up and rotation are synchronized. The single crystal holding device according to the present invention is designed to deform a polygonal link body, and the polygonal link body holds a single knot surrounded by the polygonal link body. According to the above configuration, the space between the links provided on the opposite side is narrowed, and the single crystal can be held by the links. Because the lifting movement and rotation of the polygonal link body are synchronized with the winding and turning of the crystal pull wire, there will be no friction caused by the rotation or lifting speed difference between the polygonal link body and the crystal pull wire. The single crystal holding device further includes: a load cell for pulling the cable to detect the load applied to the crystal pull wire; a total load using the load cell to detect the load applied to the crystal pull cable and A total weight of the polygonal link body, and a control device for controlling a ratio between a load applied to the crystalline pull cable and a load applied to the polygonal link body to prevent a single load in the pull Breakage of crystals. According to the above configuration, the load applied to the crystalline pull cable, that is, the load applied to the neck is detected by the pull cable with a dynamometer; and the load applied to the polygonal link body can be the total load The difference between the detection value of the dynamometer and the detection value of the dynamometer for the pull cable is detected. Therefore, this paper size applies the Chinese National Standard (CNS) Λ4 gauge (210X297 mm temMMt tmaBMJ —1 n ^ i eMtmmmt in · — · ϋϋ am ai ^ ii m · I 1.1_1 i 1 i ^,-° (Please Read the notes on the back before filling in this page} I t 482830 A7 V. Description of the invention (4) The control device can control the load distribution and the pulling of the single crystal based on the detection value. According to the device of the invention, it can be lifted freely The frame is provided with: the crystal pulling cable winding device; a vacuum container having the polygonal connecting rod body, and installed in an air-tight manner on the upper part of the single crystal manufacturing device; the total load is measured by a dynamometer A load applied to the vacuum container; and a vacuum container turning mechanism for rotating the vacuum container. According to the above-mentioned configuration, a mechanism for winding a crystal pulling cable, a mechanism for driving a polygonal connecting rod body, and the above-mentioned two types of force gauges are It is housed in a frame that can be raised and lowered freely. Therefore, single crystal pulling can be performed by winding the crystal pulling cable or driving the frame upward. The first polygonal link body driving mechanism in the single crystal holding device of the present invention Special The utility model has a polygonal link body driving mechanism, and the polygonal link body driving mechanism is hydraulically driven by a hydraulic actuator or a motor and is vertically held in the single crystal manufacturing device and is driven by the motor or the hydraulic actuator. It consists of two grip levers moving in the horizontal direction; and the link pin located at the opposite position of the polygonal link body is connected to the lower end of the grip levers. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (Please Read the precautions on the back before filling in this page.) According to the above configuration, the holding lever is maintained in a vertical posture and is driven to move in the horizontal direction. The polygonal link body connected to the lower end of the holding lever is guided to deform to Holding a single crystal. The second polygonal link body driving mechanism in the single crystal holding device of the present invention is characterized by having a polygonal link body driving mechanism, and the polygonal link body driving mechanism is wound by two cables. Drum, two polygonal connecting rod driving cables suspended from the reels, a plurality of pulleys installed at the lower end of the vacuum container, and driving cables with the polygonal connecting rods In order to move this paper lengthwise, this paper scale applies the Chinese National Standard (CNS) Λ4 Regulation (210X 297 male f) -re > 厶 C3 A7 ----------- H7 V. Description of the Invention (5)- Evening angle is composed of a guide plate with a cup pin of the cup body; and the link pin located at the opposite position of the polygonal link body is connected to the lower ends of the holding rods. According to the above configuration, 'located in a polygon shape' The connecting rod pin of the opposite position of the connecting rod body is connected to the driving line of the polygonal connecting rod body. When the thin wire winding mechanism winds up the evening connecting rod. When driving the winding, the connecting rod pin of the polygonal connecting rod body It moves longitudinally; and the polygonal connecting rod is deformed to hold the single crystal. The device of the present invention is characterized in that it has a holding force recovery function in the case where the single crystal shrinks by cooling and the holding force of the single crystal holding device decreases. Then, the holding force is maintained until the pulled single crystal is taken out of the single crystal manufacturing apparatus. If the early crystal shrinks, then the load applied to the crystal pulling fiber will increase abnormally, and the load applied to the single crystal holding device will decrease. If the value measured by the dynamometer of the crystal puller wire exceeds the preset load, the grip lever will be forced to move or the polygonal link will drive the mirror line based on the instruction signal of the control device to be taken up even more. Therefore, the holding force of the single crystal of the polygonal link body is restored ', and this state is maintained. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The device of the present invention is characterized in that a holding member having a circular arc-shaped cross section for holding a single crystal reduction portion is mounted on the inner side of the connecting rod of the polygonal connecting rod body. If the holding member surrounding the reduced portion of the single crystal is mounted on the polygonal link body, both the single crystal body and the reduced portion can be held. In this case, a holding member having an arc-shaped cross section supports the cone near the reduced portion :. The holding member does not tightly tighten the narrowed portion, and damage or destruction of the narrowed portion can be prevented. Second, the single crystal holding method of the present invention is characterized in that:

(Please read the notes on the back before filling in this page) f This paper is applicable to CNS Λ4 · (21Gx297; ^ y

ι · ο 厶 O Five-member Ministry of Economic Affairs Central Standards Bureau employee consumer cooperative printed the invention description (--------- Around the early crystallization of the passenger / angular link body to a predetermined position 'Polygonal link body by The driving force holds the 变形 ^ f, f, and deforms to move or roll the crystal in the horizontal direction. 'See holding the single crystal body. That is, the method includes the following steps: ^ Shishi, Λ 1] Steps: Preparation steps 'Preparation of single crystal holding device' has a polygon frame which is fixed and freely raised and lowered, surrounds a polygonal connecting rod body holding the single crystal, and winds up a cable winding of a pull cable for pulling seed crystals. Device; formation of a cow's dunk immersed in the melt through the pull cable

-Han Jiji, Q ,,, " Said and taken up by the coiling device, and grow a single crystal from this type of crystal; single-handed Shi said 4m 4 Shi μ, thousand ... said holding steps, adjust the The lifting speed of the frame and the winding speed of the pull-out cable set by the cable are relatively close to the upper end of the single crystal, and then the holding rod is horizontally moved. Shou Xidong or the angular link body drives the winding of the cable to deform the polygonal link body to hold the single crystal body; and a pulling step, which pulls the single crystal by raising the frame . According to the above process, the single crystal can be deformed and held by the polygonal link body, and the single crystal body can be held with a predetermined force. Still another single crystal holding method of the present invention is characterized in that the reduced portion formed between the shoulder and the neck of the single crystal or the reduced portion formed in the single crystal body is formed by the inside of the connecting rod mounted on the polygonal connecting rod body. It is held by a side holding member. If the polygonal link body is guided to rise a short distance to contact the reduced portion after the polygonal link body has been deformed and the holding member has been guided to surround the reduced portion, the single crystal can be held without tightening the reduced portion . The single crystal holding method of the present invention is characterized in that the Chinese National Standard (CNS) Λ4 specification (210X297 male f) is applicable to the dimensions of a single paper sheet ^. Ί ^ J AWI (Please read the notes on the back before filling in (This page) 482830 __ _____ ^ V. Description of the invention (7) ~ In the process of crystal, part of the weight of the single crystal is borne by the single crystal holding device; In the case where part of the weight of the single crystal is borne by the single crystal holding device The single crystal neck will not break. According to the method described above, the load distribution between the single crystal holding device and the neck of the single crystal is preset, and a control device controls the load based on the detection signals of the pull-line force gauge and the total load force-force gauge. distributed. Therefore, the single crystal neck will not break when pulling the single crystal. The present invention can be more fully understood from the following detailed description and examples with drawings. Embodiments and Examples of the Invention Hereinafter, embodiments of a single crystal holding dress and a single crystal holding method according to the present invention will be described with reference to the drawings. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the note on the back and note # .Fill in this page first) • I. Figure 1 is a vertical cross-sectional view showing the general structure of the single crystal holding device of the first embodiment. As shown in Fig. 1, a vacuum container 2 is provided on the upper portion of the single crystal manufacturing apparatus 1. The vacuum container 2 is divided into three wounds by the support plates 2a and 2b. A reel 4 for taking up the crystal pull-out guide wire 3 and a pull-winding force gauge 5 for detecting the load applied to the crystal pull-out wire 3 are mounted on the support plate 2b. The crystal pulling lens line 3 hangs down the center of the early crystal manufacturing apparatus 1, and a bracket 6 is fixed at its lower end. A crystal 7 is mounted in the seed holder 6. A single crystal 9 is pulled under the seed crystal 7. Before the single crystal 9 is pulled, a neck 8 is formed by applying a dash-neck method. Another lever driving motor 12 is mounted on the support plate 2a. The motor 12 is used to drive the two cylindrical holding rods u of the single crystal holding device 10 to move in the horizontal direction. Two ball screws are set on the two paper sizes of the holding rod drive motor 12, respectively. The Chinese National Standard (CNS) Λ4 Regulations (2 丨 〇 < 297 public praise) 482830 A7 137 Employees' Cooperatives of the Central Standards Bureau of the Ministry of Economy Print the description of the invention (8) ---- A level dog is on the motor shaft 13. The two ball screws are turned back synchronously from 13 by the two horses' wires and bite pregnancy, and they are respectively rotated with the upper screwdrivers 11 ^ ^ ′ and Ό of the two cylindrical holding rods 11 ^. Two pillar-shaped holding rods 11 are vertically installed in the single crystal manufacturing apparatus 1, ΛΛ ^, and a polygonal link body (please read the note on the back ** Matters #. Fill out this page) is connected to its lower end. Oil or gas that can expand and contract in the left and right directions can be used as the driving device for the two columnar grips 11. 5 —The pulley 15 is installed at the lower part of the vacuum container 2, and the support plate 2b is supported by the total load of the women's wear on the pulley 15 by the force p. The total load dynamometer 16 is used to detect the total load applied to the crystal pulling cable restraining device 10 'and then input the total load to ^ ° said :). The control device calculates the load based on the total load using the dynamometer 16 and: ㈣ 置 = = 5 5 detection value calculated by the single crystal holding device 10 support coffee: the device 2 is mounted on a frame 18 by a vacuum sheet 17: and = Equipment :: Rotation motor 19 on wood 18 turns. And prepare μ 丄 via a thrust shaft

The bearing 21 is supported by a support cylinder 20 mounted on the frame 18. The frame W is raised and lowered from the vacuum container 2 by a lifting device (not shown) (for example, raised and lowered by turning the ball screw). The frame 18 and a free room 22 are connected to a telescopic bag 23 which is freely retractable. The lower end of the lock chamber 22 is connected to the figure via the upper chamber 24). Fig. 2 is a perspective view of a polygonal link body 14, which is composed of four equilateral links 14a and four link pins 14b. Two diagonal link pins 1 fl are connected to the lower end of the grip lever u. When the two grip levers u move toward the center, the polygonal link body 14 is square. When the two holding rods 11 are moved outward, the polygonal link body 14 is deformed to a diamond shape and holds the single crystal 9. The grip lever u, the equilateral link 14a, and the link pin 14b are made of a heat-resistant metal such as molybdenum. It is also suitable for 11 paper sizes (210X 297 mm) 482830 A7 B7 V. Description of the invention (9) When the two holding rods 11 move toward the center, the polygonal link body 14 is deformed into a rhombus Way to build. In order to improve the holding ability of the polygonal link body 14, it is recommended to form an unevenness 14c on the inner side of the equilateral link 14a (see FIG. 3), or to form a circular arc protrusion 14d on the inner side of the equilateral link 14a (see Figure 4). Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The following describes the single crystal holding method. First, a seed crystal 7 as shown in FIG. 1 is mounted in a seed holder 6. The shrinking process, the shoulder forming process, and the body forming process are controlled by winding the crystal pulling cable 3. At this time, the control device (not shown) controls the pulling of the single crystal based on the detection value of the force gauge 5 for pulling the cable. After holding and pulling the single crystal 9 to a position suitable for holding, the polygonal link body 14 of the single crystal holding device 10 is guided to conform to the position of the single crystal 9. In the first single crystal holding method, the polygonal link body 14 is maintained at a position suitable for holding, waiting for the pulling of the single crystal 9. When the single crystal 9 is pulled to an appropriate position, the winding of the crystal pulling cable 3 stops, and the frame 18 starts to rise at the same speed as the crystal pulling cable 3 before stopping. The movement from the crystal puller cable 3 to the frame 18 is performed immediately. Since the diameter of the single crystal 9 is controlled based on the detection values of the total load dynamometer 16 and the pull-out cable load cell 5, the movement from the crystal pull-out cable 3 to the frame 18 can be performed smoothly. The control device controls the pulling of the single crystal based on the feedback of the weight detection signal of the rising speed of the moving rear frame 18. At this time, the polygonal link body 14 is in a standby position. As shown in FIG. 5 (a), the square formed by the quadrilateral link 14a is a square, and a predetermined gap is on the inner side of the quadrilateral link 14a. And the outer peripheral portion of the single crystal body 9a surrounded by the quadrilateral link 14a. In the case of pull-out cables from crystals 3 to 12, this paper size applies the Chinese National Standard (CNS) Λ4 specification (210X 297 mm) 482830 A7 B7 V. Description of the invention (10) The movement of the frame 18, as shown in Figure 1 The illustrated lever driving motor 12 is rotated to move the lever 11 outward. Accordingly, the polygonal link body 14 is deformed into a rhombus and the quadrilateral link 14a holds the body 9a. The control device controls the turning speed and the torque of the grip lever driving motor 12 so as to avoid causing any vibration or shock to the single crystal when the polygonal link body 14 is deformed to contact the body 9a, and to avoid excessive application of the single crystal when tightening Face pressure. In the second single crystal holding method, the polygonal link body 14 is combined with the single crystal 9 at an arbitrary position where the lower end of the bellows 23 shown in FIG. 1 is high. If the polygonal link body 14 rises at a speed Va (mm / min), and the control device instructs the crystal pull cable 3 to move at a speed Vb (mm / min) based on the detection signal of the pull-out force gauge 5 When coiling, the coiling speed of the crystal pulling lead wire 3 should be Vb-Va (mm / min). On the other hand, if the polygonal link body 14 decreases at a speed Va (mm / min), the winding speed of the crystal pulling cable 3 should be Vb + Va (mm / min). Printed by a cooperative (please read the note on the back and fill out the page on this page first) As mentioned above, by moving the polygonal connecting rod 14 relative to the single crystal, the single crystal body can be held at any position. If the temperature profile of the single crystal in the furnace is known, it can control the holding position corresponding to the temperature, that is, hold the single crystal in a temperature region that stabilizes the silicon of the material mechanics or prevents pollution. After the polygonal link body 14 is combined with the single crystal, the crystal pulling cable 3 is released to transfer a portion of the weight of the single crystal to the single crystal holding device side. For example, a load of about 5 kg remains on the crystal puller cable side, and therefore, detachment from the crystal puller cable 3 of the reel 4 can be prevented by loosening the crystal puller cable 3. When the pulling weight is increased, it is advantageous to pull the single crystal by leaving a load on the crystal pulling cable 3 side that does not damage the neck portion 8. Applied to crystal pull 13 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X 297 male #) 482830 kl B7 V. Description of the invention (11) The load on cable 3 is drawn by the force gauge 5 Monitoring, and when the detection load exceeds a preset value, the feedback of the detection load is input to the reel 4 to release the crystal pulling cable 3. Accordingly, the load applied to the neck portion 8 can be kept constant. When the single crystal is cooled and shrunk, the bonding state between the single crystal holding device and the single crystal becomes loose and the load is shifted to the crystal pulling cable side. As shown in FIG. 1, when the detection value of the pull-out cable force gauge 5 exceeds the preset value of the crystal pull-up pull wire 3, the grip lever drive motor 12 will be driven to rotate to control the The indication signal of the device moves the columnar holding rod 11 further outward. Accordingly, the polygonal link body 14 becomes flatter. At the same time, the torque of the holding rod driving the motor 12 is designed to such an extent that the single crystal 9 will not be damaged. The tightening function of the polygonal link body 14 corresponding to the shrinkage of the single crystal is not only applied to the growth process of the single crystal, but also suitable for the cooling process of disintegration in the cooling chamber and moving the single crystal to a handling device. Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs.—. 1 · — — (Please read the notes on the back-¾ fill out this page) f Figure 6 shows the model of the lower structure of the single crystal holding device of the second embodiment. Illustration. In this single crystal holding device, a holding rod driving motor, a pair of motor shafts and a holding rod are additionally mounted on the holding rod driving motor 12. Adjacent motor shaft is 90 °. Corner set. Therefore, the single crystal 9 is held by the two polygonal link bodies 14, 25, and the single crystal holding ability is improved. Fig. 7 is a perspective view of a lower structure of a single crystal holding device according to a third embodiment. Fig. 8 is a diagram showing a single-crystal holding device of a third embodiment in which a polygonal link body is mounted, in which (a) is a top view, and (b) is a cross-sectional view of a line A-A in the center. In the single crystal grasping device, the grasping member 14e is attached to the inner side surface of the quadrangle link 14a of the polygonal link body 14. According to this arrangement, 14 paper sizes are applicable to the Chinese National Standard (CNS) Λ4 specification (210X 297 cm) 482830 — ~ ～ V. Description of the invention (12 early, multiple positions of u on the reduced part with poor shape reproducibility)上 被 把 #. In the vicinity of the outer periphery of the reading which is different from the gripping single crystal body, the polygonal link body 14 needs only the inner part of the part where the reduced portion 9b is located. Degree, and it is not necessary to extend between the maximum diameter and the minimum diameter to the guide formed in the separation prevention plate 26, and the guide pin 27 of 2 = is separated to prevent the movement stroke of the plate 26; The second guide of the guide groove 26a = slides freely. When ^ ^ 啕 鳊 is right, the distance between the two holding rods 11 is the most two or four: the inner diameter of the holding member is one between the maximum diameter of the reduced part and = small straight only The holding member 14e can prevent cracking at the reduced portion, and the knife] square stop plate 26 can increase the rigid reduced portion 9b of the polygonal link body 14. The central government bureau of the Ministry of Economic Affairs's consumer cooperative prints it at the reduced j 4 9b When combined with the polygonal link body 14, The angular link body i 4 descends at a speed of Va (mm / min), and the winding speed of the crystal puller is controlled at Vb + Va (mm / min), so the winding speed Vb (mm indicated by the control device) / min) can be held. After that, the polygonal link body 14 is guided to move to the position of the smallest diameter of the reduced portion 9b. Then, the grip lever η is driven to move outward, thereby changing the inner diameter of the grip member 14e. To a value D. Next, the single crystal holding device is raised relative to the single crystal. With this arrangement, the holding member 14e contacts the upper conical surface of the reduced portion 9b. In this case, the operation speed is the same as that of the first embodiment. Crystallization drawing speed of 15 paper sizes is applicable to Chinese national standard ([Chemical] 8 4 specifications (210 乂 297 公 #)

， Manually, (Day and Day bow cable load-frame device at preset load. Beer Day ^ Switch to rising J 9 and Figure 10 are the single single crystal holding method applying the invention & + Illustration of the other embodiments of the single pull device by the daily holding device Fig. 19 The figure shows the method of connecting 9d by a polygon in the process of pulling the pull rod K 曰 盆 _ 访 士加 Λ Η Hold a body under the neck 8 and then-the body 9 (1 with a diameter smaller than the enlarged portion%) is formed to pull a single crystal with a diameter of 1. 10th RS5_ 产 私 2 丨 oo 虿 预 " Enlarge again The $ 10 picture is not in the process of pulling-single crystallization. Another way to hold the body 9d by the horn-shaped link body 14 is to form a body 9d having a diameter smaller than the preset diameter of the body under the neck 8, ―: A single crystal quilt with a preset enlarged diameter is used. These two methods focus on the single crystal body with good shape and size reproducibility. The body 9d size material is easy to control: and the single crystal can be surely held. In the single crystal holding device shown in Fig. And Fig. M, the size of the polygonal link body can be minimized. Printed by the Ministry of Standards and Staff ’s Consumer Cooperatives. Figure 11 is a top view of the lever driving mechanism in the upper structure of the single crystal holding device of the fourth embodiment. The upper and lower polygonal connecting rods are arranged in the single crystal holding device. Fig. 12 is a view viewed from the z direction in Fig. 11. The four lever driving motors 28 are 90 through 90 through the vacuum sheet 29. The outside of the vacuum container 2. The four grip lever driving motors 28 are synchronously driven based on the detection signal of the control device. The ball screw shaft 30 mounted on each grip lever driving motor 28 is screwed with the slider 31. As shown in FIG. 12 As shown in the figure, the slider 31 can slide on the support plate 2a which is restricted to the slide guide 32 laid on the support plate 2a. The upper end of the holding rod 11 is combined with the slider 31 and can be dug in the paper 16 formed in the support plate 2a. Applicable to Chinese National Standard (CNS) Λ4 gauge (210x29 * 7 public) 482830 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (14) 孑 L 2c moves inside and outside. A polygonal link body Connected to a pair The lower end of the holding rod is combined by two opposite sliders. The other polygonal link body is connected to the lower end of the other pair of holding rods and is combined by the other two opposite sliders. Only one pair of holding rods may be provided The driving motor 28 is connected to a pair of holding rods 11 at opposite positions, and is connected only by a polygonal link body. Fig. 13 is a longitudinal sectional view showing a schematic configuration of a single crystal holding device according to a fifth embodiment. Fig. 14 It is a view viewed from the Z direction in Fig. 13. Fig. 15 is a top view of the guide plate. The holding device is designed to deform a polygonal link body by a cable to hold a single crystal. As shown in Fig. 13, A motor 34 is installed on the cable drum 4 for winding the crystal pulling cable 3, and two cable drums 35 are installed on both sides of each motor 34 respectively. As shown in Figs. 13 and 14, two pairs of pulley pressing plates 36 are mounted on the left and right sides of the bottom of the vacuum container 2, respectively. The two sets of pulleys 37, 38, 39 are held by two pairs of pulley pressing plates 36, and are respectively disposed on the left and right sides of the holding device. The cable 40 wound around the cable drum 35 is suspended in the vacuum container 2 and is coupled to the block 41 via pulleys 37, 38, 39. The block 41 is connected to the link pin 14b of the polygonal link body 14 by a link pin extension shaft 42. The moving shafts 43 projecting left and right on a horizontal plane are mounted on the block 41, respectively. The two guide plates 44 are respectively mounted on the outer sides of the pulley pressing plate 36. As shown in FIG. 15, a guide groove 44 a is formed in a central portion of the guide plate 44. The moving shaft 43 is movable in the guide groove 44a. When the polygonal link body 14 is in standby, the moving shaft 43 is stationary at the "eight" position of the guide groove 44a. The structure of the above holding device is the same as the structure in Fig. 1 with the same symbol and its explanation is omitted. 17 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210 乂 297 mm) U φII (Please read the note on the back first, and fill in this page with the note A)

-SVJ 5. Description of the invention (I5), the polygonal connecting rod body 14 of the device and the single crystal 2 motor are 34㈣ the instruction signal of the control unit is rotated to take two to one presetΪ, and the block 41 is pulled toward the pulley line 40 , Door, moon wheel 39. Simultaneously move the guide groove 44a of the guide plate 44 of the shaft 43 to slide from the "A" position to the "B" position. ^ Guide Polygon The long shaft 42 and the link pin 14b move outward together with the block 41. Accordingly, the stem-shaped link body 14 is deformed from a square shape to a rhombus shape, and holds a single company. In the fifth embodiment of the holding device, instead of the holding rod: the cable is used to drive the polygonal link body; therefore, the weight of the single crystal holding device can be used as described above, and the effect of the single crystal holding device and method according to the present invention Available. ⑴It is not necessary to hold the conventional shape and size with poor reproducibility. ^ Since the polygonal link body can be used to hold the single crystal body, the single crystal with a stable holding state and a large weight can be surely held. It is also easier to adjust the position of the holding device of the present invention in the vertical direction than when the single crystal is held in the reduced portion. (2) In the process of holding the single crystal, the vibration and shock when contacting the single crystal can be avoided by controlling the deformation speed of the polygonal link body. Therefore, the single crystal can be smoothly held. Printed by the Central Bureau of Consumer Affairs, Ministry of Economic Affairs (3) The single crystal can be fixedly held by a preset pressing force by controlling the torque of the motor or the hydraulic pressure of the hydraulic actuator used to drive the polygonal link body. Therefore, the single crystal will not be damaged. (4) The load applied to the neck and the polygonal link body is distributed based on the detection value of the load cell, and the load applied to the neck is controlled within an allowable range. Therefore, 'neck breakage can be reliably prevented. The load applied to the neck can be adjusted by 18 paper sizes to the Chinese National Standard (CNS) Α4. (210x 297 ^ — A7

482830 V. Description of the invention (16) Set to any value within the allowable range, so the weight of the single crystal that can be pulled can be increased by taking into consideration the capacity of the holding device and the above-mentioned load distribution. (5) The Π motor is used to wind up the crystal pull wire and the polygonal connecting rod body, so the winding speed is the same. Therefore, in the case where the single crystal is held by the polygonal link body, the subtle difference between the rotation speeds of any two individual motors causes the friction between the single crystal and the polygonal link body to be removed. Therefore, the single crystal can be smoothly and safely held. (6) In the case where the crystal pulling wire and the single crystal holding device are used to pull the single crystal at the same time, the single crystal can be held and a preset pulling operation in the pulling operation using only the crystal pulling cable Pulled down at speed. Therefore, the present invention can be easily applied to a conventional high-accuracy single crystal growth technique. (7) In cases where the holding force decreases due to the shrinkage of the single crystal, the holding force can be returned. Therefore, there is no danger of the single crystal falling, and safety is high. (8) If the holding member is attached to the polygonal link body, a reduced portion having a wide range of shapes and sizes can be held. Brief description of the drawings: Fig. 1 is a longitudinal sectional view showing a schematic configuration of the single crystal holding device of the first embodiment; Fig. 2 is a perspective view of a polygonal link body; and Fig. 3 is an equilateral side of the polygonal link body An explanatory diagram of an example of the shape of the inner side surface of the link; FIG. 4 (polygonal opening)) An explanatory diagram of another example of the inner side shape of the equilateral link of the link body; FIG. 5 is a deformed state of the polygonal link body (A) r I ^ L ------ I Aw— * ^ (Please read the notes on the back before filling out this page) Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

482830 A7 B7 V. Description of the invention (17) before holding the single crystal, (b) after holding the single crystal; FIG. 6 is a schematic diagram of the lower structure of the single crystal holding device of the second embodiment; FIG. A perspective view of the lower structure of the single crystal holding device of the third embodiment; FIG. 8 is a diagram of the single crystal holding device of the third embodiment with a polygonal link body installed, of which (a) is a top view, (b) (A) is a sectional view of the center line AA; FIG. 9 is an explanatory diagram of another embodiment of a single crystal holding method using the single crystal holding device of the present invention; and FIG. 10 is a diagram of a single crystal holding device using the single crystal holding device of the present invention. An explanatory view of another embodiment of the crystal holding method; FIG. 11 is a top view of the upper structure of the single crystal holding device of the fourth embodiment, and FIG. 12 is a view viewed from the Z direction in FIG. 11; FIG. 13 This is a vertical cross-sectional view of the outline of the single crystal holding device of the fifth embodiment. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Figure 14 is from Figure 13. Observed in Z direction ; And FIG. 15 is a top view of the guide plate. DESCRIPTION OF SYMBOLS: 1 single crystal manufacturing device, 2 vacuum container, 3 crystal puller cables, 4, 35 cable drums, 5 puller cable dynamometers, 7 types of crystals, 8 necks, 9 single crystals, 9a, 9d body part, 9b reduction part, 10 single crystal holding device, 11 holding rod, 20 paper size applicable to China National Standard (CNS) A4 specification (210 X 297 mm) 482830 A7 B7 V. Description of the invention (18) 12, 28 grip lever drive motors, 14, 25 polygonal link bodies, 14a equilateral links, 14b link pins, 14e grip members, 16 total load dynamometers, 18 frame, 26 separation prevention plate 37, 38, 39 pulleys, 40 polygonal connecting rod drive cables, 44 guide plates. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 21 This paper size applies to China National Standard (CNS) A4 (210X 297 mm)

Claims (1)

482830 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, "σ a said pulling wire" to pull the seed crystals immersed in the melt · Winding and winding device, winding the crystal pulling cable; The angular link body is formed by connecting a plurality of links, and can be deformed in the horizontal plane by changing the position of the link pin; the polygonal link body deforming device, inside the polygonal link body, makes the polygonal link body Deformed to hold the vicinity of the end of the single crystal in the pull; and a rotary lifting device to synchronize the lifting and turning of the polygonal link body with the winding and rotating of the crystal pull wire. 2. The single crystal holding device according to item 1 of the scope of the patent application, further comprising: a dynamometer for pulling the winding wire to detect the load applied to the crystalline pulling gauge wire; using a dynamometer for the total load, To detect the total load applied to the crystal pulling lead wire and the polygonal link body; and a control device to control the load applied to the crystal pulling lead wire and the weight of the evening angular link body The ratio of the device to prevent the breakage of the single crystal in the pulling. 3. The single crystal holding device according to item 1 of the scope of patent application, wherein the freely lifting frame is provided with: the crystal pulling cable winding device; a vacuum container having the polygonal link body, and It is air-tightly installed on the upper part of the single crystal manufacturing device; This paper size is applicable to Chinese National Standard (CNS) M specification (210X297 mm) (Please read the precautions on the back before filling this page) C.. 482830 The total load is measured by a load cell, and the load applied to the vacuum container is detected; and, a vacuum rotary mechanism is used to rotate the vacuum container. 4. The single-crystal holding device according to item 1 of the scope of the patent application, which has a horn-shaped connecting rod driving mechanism, and the polygonal connecting rod driving mechanism is driven by a liquid H or a motor and is held vertically in the In the single crystal manufacturing device, two holding rods moving in the horizontal direction by the motor or the hydraulic actuator are formed; and a link pin located at an opposite position of the polygonal link body is connected to the holding rods. The lower end of the rod. 5. The single-crystal holding device according to item 1 of the scope of the patent application, which has a polygonal link body driving mechanism ', and the polygonal link body driving mechanism is composed of two winding reels, Two polygonal connecting rod driving cables, a plurality of pulleys installed at the lower end of the vacuum container, and the guide pins of the polygonal connecting rod driving longitudinally moving rod guides as the polygonal connecting rod driving cables are wound up The connecting rod pin located at the opposite position of the polygonal connecting rod body is connected to the lower ends of the holding rods. Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, and installed-•-(Please read the precautions on the back before filling out this page) -Order 6 · Single crystal holding device as described in item 1 of the scope of patent application, where The polygonal connecting rod system adjusts the interval inside the connecting rod, and has a holding force recovery function in the case where the holding force of the single crystal holding device is reduced by shrinking the single crystal by cooling, thereby maintaining the holding force until it is pulled The single crystal is taken out from the single crystal manufacturing apparatus. 7. The single crystal holding device according to item 1 of the scope of application for a patent, wherein a holding member having an arc-shaped cross-section of the holding single crystal reduction portion is mounted on a connecting rod constituting the polygonal link body. Inside. 23 This paper size applies Chinese National Standard (CNS) A4 (210X297 mm) 482830 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A8? 8s · D8 VI. Application for patent scope 8.-A single crystal holding method, including the following Steps: A preparation step prepares a single crystal holding device which has a polygonal link body fixed to a freely elevating frame to hold the single crystal and a cable for winding a pull wire for pulling seed crystals. A wire winding device; a forming step of pulling a single crystal immersed in the melt through the pulling cable, and winding the single crystal through the winding device to grow a single crystal from the crystal; a single crystal holding step, After adjusting the lifting speed of the frame and the winding speed of the pull cable of the cable winding device, after the polygonal link body is relatively close to the upper end of the single crystal, the holding rod is horizontally adjusted. Moving in the direction or winding of the angular link body to drive the cable to deform the polygonal link body to hold the single crystal body; and a pulling step to pull the single crystal by raising the frame9. The single crystal holding method according to item 8 in the scope of the patent application, wherein the single crystal holding step is a reduction portion formed between a shoulder and a neck portion of the single crystal or a reduction portion formed in the single crystal body. It is held by a holding member mounted on the inner side surface of the polygonal link body. 10. The single crystal holding method as described in item 8 of the scope of the patent application, wherein the pulling step further includes a control step that controls the ascent speed of the frame and the winding speed of the winding device. In the growth of crystals, when part or all of the weight of the single crystal is borne by the single crystal holding device, and part of the weight is borne, the weight of the neck that does not break is borne by the neck. (Please read the precautions on the back before filling out this page) Order-24 This paper size applies to China National Standard (CNS) A4 specification (210X297 mm)