593802 A7 ___________________________B7 五、發明説明（i ~ '~~ 本發明是有關於一種單結晶夾持裝置，其中夾持裝 置是安裝於一利用CZ(Cz〇Chralski)法的單結晶製造裝置 上，特別是指用在拉引大重量單結晶的過程中。 單結晶矽一般是由CZ法製造。在CZ法中，多結 晶矽塊被充填入一單結晶製造裝置中的石英坩堝中，然 後由设置在石英坩堝周圍的加熱器加熱以溶解多結晶矽 塊。之後一安裝在種支架上的種結晶浸潰在融液中。然 後，種支架和石英坩堝分別被驅動以在相同或相反方向 上回轉，同時種支架被拉引以成長一有所定直徑和長度 的早結晶碎禱塊。 當種結晶在融液中浸潰時，因遭受熱衝擊而使差排 發生。為了確保差排不會從種結晶傳播至成長中的單結 曰曰 直從數公厘的縮小部由Dash’s neck法在種結晶下 方幵/成，以使差排釋放至縮小部表面。在確認無差排化 後，一肩部形成且單結晶被放大至所定直徑。然後，拉 引操作轉移至形成單結晶本體部。 近年來，隨著單結晶長度和直徑的增加，其重量也 增大，且縮小部強度已趨近極限。為了解決這個問題， 成個方法已被提出，例如，在由Dash’s neck法使單结晶 無差排化後，一放大部和一直徑比放大部小的頸部在縮 小部和肩部之間形成。由於單結晶的大部份重量由夾持 具支持，縮小部破斷可被防止。又即使當縮小部破斷時， 單結晶的落下可被防止。例如，在日本特公平545477 號公報所揭露的單結晶成長裝置中，一可被驅動而開閉 本紙張尺錢 Α7 部 中 A 卑 1\ ：τ 消 合 竹 a 卬 f 、發明説明（2 ' ~ -- 的夹持#與一單結晶的頸部卡合，以懸吊單結晶。又在 日本特公平7_515號公報所揭露的單結晶拉引裝置中， 、复數X所疋角度停止的爪設置在可被驅動而昇降的夾 持具的下端。爪與單結晶頸部卡合以懸吊單結晶。另外， 在曰本特公平7-103_號公報所揭露的單結晶拉引襄置 中:複數與單結晶頸部卡合的爪被設置。單結晶由複數 t昇降移動而可被驅動而開閉的夾持槓桿和-防止夾持 槓桿開啟的環而被懸吊。 曰^而’在日本特公平5-65477號公報所揭露的單結 Γ裝置中，當在拉引操作中，單結晶重量增加至使 早、、、。晶存在掉落的危險性時，夾持臂將被驅動而開啟。 在日本特公，7·515號公報所揭露的單結晶拉引裝置 :’在夾持單結晶前，㈣臂接觸單結晶且㈣。單結 二由於上述夾持操作而搖動，因此單結晶的結晶化率可 j低又在日本特公平7_S15號或特公平厂⑼刪號 么報所揭露的單結晶拉引裝置中，夾持爪的昇降衝程大， 因此被拉引單結晶的長度受到限制。 有鐘於上述的缺點，本發明的目的是提供_種單結 曰曰爽持裝置’在其夾持形成在單結日日日縮小部和肩部之間 =:?:可吸收衝擊和振動，且可防 啟而使早結晶掉落。 為了達到上述目的，本發明的單結晶夾持裝置的第 :發明係用以夾持單結晶，且該單結晶具有形成在種結 曰曰之下端的縮小部、連接該縮小部的放大部以及直徑比 項 f 訂 f 本紙張尺度適標準（CNS ) A4規格(- 593802 A7 B7 部 中 头 準 ϋ j 消 令 竹 Μ 卬 f 、發明説明（： 該放大部小的頸部，其特徵在於包括：夾持治具本體， 連結至昇降裝置；以及複數夾持爪，藉由連桿而可自由 開關地連結於該夾持治具本體，且除了於夾持該單結晶 頸部時外，可回避與該單結晶接觸。 根據上述構成，在夾持爪夾持單結晶頸部前，夾持 爪不接觸單結晶，因此防止無用的振動或衝擊施加於被 拉引的單結曰曰上，藉此，多結晶化可被避免。據此，單 結晶成長可安定地持續。 又本發明的單結晶夾持裝置的第二發明是第一發明 的實施例，其特徵在於當該等炎持爪在開啟狀態時， X 4夾持爪的爪部停止在該放大部的更外側位置，且當 該等夾持爪在關閉狀態時，該等夾持爪的爪部停止在該 頸部的更外側位置。 根據上述構成，如果夾持爪保持在開啟狀態，單結 晶夾持裝置可不被干涉而下降至一在夾持爪和單結晶 大^之間的所疋位置。又即使爽持爪被驅動而關閉以人 持皁結晶頸部，其將不會與頸部衝突。因此，振動或衝 擊將不被施加於被拉引的單結晶上，且單結晶可被平順 地夾持。 、 S ^本發明的單結晶夾持裝置的第三發明剌於單結 曰曰製le裝置，且夹持成長中的單結晶的頸部拉引，其中 夾持治具本體，由中空圓筒形狀或中空多角形狀 、请和上端部分別固定在該筒的任意的複數部位而向下 延伸的支持棒所構t複數夾持爪，連結至樞接在該等 面 之 注 項 参 訂 放 夾 ^02 ^02 五 B7 、發明説明（4) 支持棒的任意高度的複數連桿，且於下端具有朝内側彎 曲的爪。卩，開閉裝置，藉由使該等夾持爪相對應於該等 支持棒上下移動，而開閉該等夾持爪；以及昇降裝置， 用以不同於該開閉裝置來將該等夾持爪定位於該單結晶 頸部定位，而連結至該筒。 根據上述構成，單結晶夾持裝置藉由複數樞接在支 持棒上的連桿而與夾持爪連接，其從巾空圓筒形狀或中 f多!形狀的筒垂下。支持棒、連桿和夾持爪構成一四 即連桿機構；因此，如果夾持爪藉由開閉裝置被驅動而 上下移動，夾持爪同時開啟或關閉。當在開啟狀態時， 位於夾持爪下端的爪部可不被任何干涉而通過單結晶放 大部外側m閉時’爪部可夹持單結晶頸部。又連結 至中空圓筒形狀或中空多角形狀的筒的昇降裝置可進^ 炎持治具的定位和單結晶拉引。 本發明的單結晶夾持裝置的第六發明係用於單結晶 製造裝置’且夾持拉引+的單結晶的頸部而朝上方拉引， ，特徵在於包括：中㈣筒形狀或中空多角形狀的筒； 支持棒’上端部分定在該筒的任意的複數部位而向 下=伸，複數連桿，-端可轉動地安裝在該等支持棒的 =μ ;複數夾持爪’可轉動地安裝㈣複數連桿的 另-、部，且於前端具有朝内側彎曲的爪部；開閉裝置， 連結於該等夾持爪，而相對應於該等支持棒上下移動， 夾持爪而開閉；以及昇降裝置，用以不同於該 開閉裝置’連結至該筒而昇降筒，且將該等夾持爪定位593802 A7 ___________________________B7 V. Description of the invention (i ~ '~~ The present invention relates to a single crystal holding device, wherein the holding device is installed on a single crystal manufacturing device using the CZ (CzChralski) method, especially Refers to the process of pulling a large amount of single crystal. Single crystal silicon is generally manufactured by the CZ method. In the CZ method, a polycrystalline silicon block is filled into a quartz crucible in a single crystal manufacturing device, and is then set in The heater around the quartz crucible is heated to dissolve the polycrystalline silicon block. After that, a seed crystal mounted on the seed holder is immersed in the melt. Then, the seed holder and the quartz crucible are driven to rotate in the same or opposite directions, respectively. At the same time, the seed scaffold was pulled to grow a piece of early crystal fragmentation with a certain diameter and length. When the seed crystal was immersed in the melt, the differential discharge occurred due to the thermal shock. In order to ensure that the differential discharge would not be removed from the seed The crystals spread to the growing single knot, and the shrinking part straight from a few millimeters was dangled / formed under the seed crystal by the Dash's neck method to release the differential discharge to the surface of the reduced part. It was confirmed that there was no differential discharge. After that, a shoulder portion is formed and the single crystal is enlarged to a predetermined diameter. Then, the pulling operation is shifted to form the single crystal body portion. In recent years, as the length and diameter of the single crystal have increased, its weight has also increased and the portion has been reduced. The strength has approached the limit. In order to solve this problem, a method has been proposed. For example, after the single crystal is discharged without difference by the Dash's neck method, an enlarged portion and a neck smaller in diameter than the enlarged portion are in the reduced portion. It is formed between the shoulder and the shoulder. Since most of the weight of the single crystal is supported by the gripper, breakage of the reduced portion can be prevented. Even when the reduced portion is broken, the drop of the single crystal can be prevented. For example, in Japan In the single crystal growth device disclosed in Japanese Patent Publication No. 545477, one can be driven to open and close the paper rule A7 in the paper A1: τ 合 合 竹 a 卬 f ， Instruction of the invention (2 '~- The # is engaged with the neck of a single crystal to suspend the single crystal. In the single crystal pulling device disclosed in Japanese Patent Publication No. 7_515, the claw that stops at an angle of plural X is set to be driven. Lifting clamp The lower end of the claw is engaged with the single crystal neck to suspend the single crystal. In addition, the single crystal pull disclosed in Japanese Patent Publication No. 7-103_ is set: the plural is engaged with the single crystal neck The claw is set. The single crystal is suspended by a clamping lever that can be driven to open and close by plural t lifting and moving, and a ring that prevents the clamping lever from opening. It is disclosed in Japanese Patent Publication No. 5-65477. In the single-junction Γ device, when the weight of the single crystal is increased to make early ,,, and so on during the pulling operation, the clamping arm will be driven to open when the crystal is in danger of falling. In Japan, 7 · The single crystal pulling device disclosed in the No. 515 bulletin: 'Before holding the single crystal, the stern arm is in contact with the single crystal and swells. The single knot is shaken due to the clamping operation described above, so the crystallization rate of the single crystal can be low. In the single crystal pulling device disclosed in Japanese Special Fair No. 7_S15 or Special Fair Factory No. Moda, the clamping claws The lifting stroke is large, so the length of the single crystal being pulled is limited. Due to the disadvantages mentioned above, the purpose of the present invention is to provide a _Single knot device called "Shuang holding device" in which the clamping is formed between the shrinking portion and the shoulder portion of the single knot every day =:?: Can absorb shock and vibration , And can prevent the start and make early crystallization fall. In order to achieve the above object, the first invention of the single crystal holding device of the present invention is to hold a single crystal, and the single crystal has a reduced portion formed at the lower end of the seed crystal, an enlarged portion connected to the reduced portion, and Diameter ratio f Order f Standard paper size (CNS) A4 specification (-593802 A7 B7 Part middle head 头 j elimination bamboo M 卬 f) Description of invention (: The small neck of the enlarged part is characterized by including : The clamping jig body is connected to the lifting device; and a plurality of clamping claws are freely switchable to the clamping jig body by a connecting rod, and can be used in addition to clamping the single crystal neck. Avoid contact with the single crystal. According to the above configuration, the clamping claw does not contact the single crystal before the clamping claw clamps the neck of the single crystal, so that useless vibration or impact is prevented from being applied to the pulled single knot. Thereby, polycrystallization can be avoided. Accordingly, the growth of the single crystal can be stably continued. The second invention of the single crystal holding device of the present invention is an embodiment of the first invention, which is characterized in that when the When the claw is open The claws of the X 4 clamping claws are stopped at a position further outside the enlarged part, and when the clamping claws are in a closed state, the claws of the clamping claws are stopped at a more outer position of the neck. Structure, if the holding claw is kept in the open state, the single crystal holding device can be lowered to a position between the holding claw and the single crystal without interference, and even if the holding claw is driven to close the human The neck of the soap-holding crystal will not conflict with the neck. Therefore, vibration or shock will not be applied to the pulled single crystal, and the single crystal can be smoothly clamped. The third invention of the crystal clamping device is based on a single knot device, and clamps the neck of a growing single crystal. The clamp body is held in a hollow cylindrical shape or a hollow polygonal shape. The upper part and the upper part are respectively fixed to arbitrary plural parts of the cylinder, and a plurality of clamping jaws constituted by the support rods extending downward are connected to the note-setting reference clamps which are pivotally connected to the faces ^ 02 ^ 02 five B7, Description of the Invention (4) A plurality of rods supporting an arbitrary height of a stick, At the lower end, there are claws bent toward the inside. 卩, an opening and closing device that opens and closes the clamping claws by moving the clamping claws up and down corresponding to the support rods; and a lifting device that is different from the opening and closing According to the above configuration, the single crystal clamping device is connected to the clamping claw by a plurality of connecting rods pivotally connected to the supporting rod. It hangs down from the shape of a hollow cylinder or a cylinder with multiple f! Shapes. The support rod, connecting rod, and clamping claw constitute one or four link mechanisms; therefore, if the clamping claw is driven to move up and down by the opening and closing device When the clamping claw is opened or closed at the same time, when in the open state, the claw portion located at the lower end of the clamping claw can be closed by the outer m of the single crystal magnification portion without any interference. The claw portion can clamp the single crystal neck. The lifting device connected to the hollow cylindrical shape or the hollow polygonal shape cylinder can be used for positioning and single crystal pulling of the inflammation fixture. The sixth invention of the single crystal holding device of the present invention is used in a single crystal manufacturing device, and is pulled upward by clamping the neck of the single crystal of the pull +, and is characterized by including a hollow cylinder shape or a hollow polygon. Shaped tube; the upper end of the support rod is fixed at any plural positions of the tube and downwards = extension, plural links,-end is rotatably mounted on the support rods = μ; the plural clamping claws can be rotated The other-and multiple parts of the ㈣ plural link are installed on the ground, and the front end has a claw part bent toward the inside; the opening and closing device is connected to the clamping claws, and moves up and down corresponding to the support rods to open and close the claws. And a lifting device, which is different from the opening-closing device to be connected to the tube to lift the tube, and to position the clamping claws
593802 A7593802 A7
五、發明説明 【發明的實施形態及實施例】 m不說明本發明的單結晶夾持裳 施例。第i岐安裝於單結晶製造裝置上的單社 裝置的概略構成的模式圖，其中—單結晶夾持 一被拉引的單結晶。如第1圖所示，-金屬線捲取嫱= t安裝在單結晶製造裝置的上端，種支架3藉由— 結晶拉引金屬線2從金屬線捲取機構丨垂下。—安裝在 種支架3中的種結晶浸潰於儲存在石英㈣4中的融液 卜然後’縮小部6形成，之後單結晶7的放大部 頸部7b、肩部7c和本體部7d陸續形成。 單結晶夾持治具1G從三個方向夾持單結晶7的頸 部7b。單結晶夾持治具1〇藉由三個金屬線u和三個金 屬線12從金屬線捲取機構1垂下。金屬線11、ρ圍繞 結：拉引金屬線2。如後述，種支架3可自由地通過； 結晶夾持治具1 〇的中空圓筒狀筒i 3 A。 第2圖是在單結曰曰曰夾持裝置垂下的單結晶爽持治具 的立體圖。在第2圖中，單結晶夾持治具1()是在夹持^ 勢的狀態。單結晶夾持治具10包括一夾持治具本體13 ; 複數連桿14、15 ;三個夾持爪16，每一個分別由三個金 屬線12之一垂下；以及複數分開防止板17。夾持治具 本體13由中空圓筒狀筒13A和三個支持棒13B所構成， 後者以120。固定在中空圓筒狀筒13A下端且垂直向下延 伸。一 >fT止器13a向外延伸且在水平方向上在每一支持 棒13B下端上形成。夾持治具本體13的筒13A在本實 她例中為中空圓筒形狀n 形成。當爽持爪16在_狀11=1角形狀 夾持爪16下端的爪部位置 …限制位於 連接至支持棒13B。—四—、丨、16糟由連桿14、15 的支持棒Ua、連桿14、=旱機構由夾持治具本體13 數分開防止板π以可自由夾::二：構成。又複 本體U的筒13A的外周面上轉的方式被安袭在夾持治具 端結合的_㈣= 自由 相對於夾持治具本體”降至 =由端與凹部14a結合，以限制夾持爪“：止 早二夾持治具10由翻或嫣等耐熱金屬製成。又夹持爪 16的數目並不限定為3 ;其也可為2或4。 第3圖是金屬線捲取機構的說明圖。第4圖是金屬 線捲取機構的上視圖。如第3和4圖所顯示，一捲取社 ，拉引金屬線2的捲筒21和—馬達（未圖示）是設置在金 屬線捲取機構1中央。三組馬達（未圖示）和捲筒22以及 二組馬達（未圖示）和捲筒23以等角設置在捲筒Μ周圍。 捲筒22被用以捲取金屬線u以昇降夹持治具本體。捲 筒23被用以捲取金屬線12以昇降夾持爪。捲筒2卜22、 23分別被安裝在感測！| 24、25、26上。一由結晶回轉 用馬達28和一皮帶29驅動而回轉的滑輪27是安裝在金 屬線捲取機構1上。 以下參考第5〜8圖說明單結晶夾持裝置的操作。為 了說明方便，夾持爪、懸吊治具本體的金屬線和懸吊夾 A7 B7 發明説明（8) 持爪的金屬線的數目在帛5〜8圖中分別為2。如第5圖 所示，單結晶婦治具1G麵長巾的單結晶7上方保持 待機，直到拉引操作進行至本體形成過程。此時，具有 凹部14a的連桿14和連桿15維持水平，且分開防歧 Π自由端與夾持爪16的上部内側接觸。在此狀況下， 單結晶夾持治纟H)被，，開啟，，4夾持爪16下端的間隔 為最大。上述間隔比單結晶7放大部％的直徑大許多。 由於分開防歧17限制夾持爪16移動，當單結晶夾持 治具10下降時，夾持爪16將不接觸放大部以。 當單結晶7重量在成長過程中達到一既定值時，一 從重量感測器來_單結晶7重量的偵測訊號被輸入控 制裝置。基於上述偵測訊號，控制裝置從單結晶夾持治 具10被懸吊時驅動金屬線捲筒，且懸吊夾持治具本體13 的金屬線11和懸吊夾持爪16的金屬線12以相同速度同 時被釋放。據此，單結晶夾持治具丨Q在開啟的狀態下被 下降至一所定位置（見第6圖），且夾持爪16的先端不會 接觸放大部7a而被下降至比放大部7a還低的位置。之 後，金屬線11和丨2以與結晶拉引金屬線2相同的速度 被捲取，且單結晶7和單結晶夾持治具1〇之間的相對位 置被保持不變。 然後’夾持爪16的捲筒被驅動以相同速度同時釋 放懸吊夾持爪16的金屬線12。藉此，只有夾持爪16下 降（見第7圖），且當夾持爪16接觸位在夾持治具本體13 下知的停止器13a時，停止下降。此時，夾持爪丨6先端 (請先閱讀背面之注意事項再填寫本頁)V. Description of the Invention [Implementation Modes and Examples of the Invention] The embodiment of the single crystal holding clothes of the present invention will not be described. A schematic diagram of a schematic configuration of a single-shaft device mounted on a single-crystal manufacturing apparatus in the i-th, in which a single crystal holds a pulled single crystal. As shown in Fig. 1,-metal wire winding 嫱 = t is installed at the upper end of the single crystal manufacturing device, and the seed holder 3 is suspended from the metal wire winding mechanism by-crystal pulling the metal wire 2. -The seed crystal installed in the seed holder 3 is immersed in the melt stored in the quartz crystal 4 and then the 'reduction portion 6 is formed, and then the enlarged portion of the single crystal 7 is formed by the neck portion 7b, the shoulder portion 7c, and the body portion 7d. The single crystal holding jig 1G holds the neck portion 7b of the single crystal 7 from three directions. The single crystal holding jig 10 is suspended from the metal wire winding mechanism 1 by three metal wires u and three metal wires 12. Metal wires 11, ρ surround the junction: pull metal wires 2. As described later, the seed holder 3 can pass freely; the hollow cylindrical tube i 3 A of the crystal holding jig 10. Fig. 2 is a perspective view of a single crystal refreshing jig suspended from a single knot holding device. In FIG. 2, the single crystal holding jig 1 () is in a state of holding potential. The single crystal holding jig 10 includes a holding jig body 13; a plurality of connecting rods 14, 15; three holding claws 16, each of which is suspended by one of three metal wires 12, respectively; and a plurality of separation preventing plates 17. The holding jig body 13 is composed of a hollow cylindrical tube 13A and three support rods 13B, the latter being 120. It is fixed at the lower end of the hollow cylindrical tube 13A and extends vertically downward. A > fT stopper 13a extends outward and is formed on the lower end of each support rod 13B in the horizontal direction. The tube 13A holding the jig body 13 is formed in a hollow cylindrical shape n in this example. When the cool holding claw 16 is in the _ shape 11 = 1 angle shape, the position of the claw portion at the lower end of the holding claw 16 is limited to the position connected to the support rod 13B. —Four—, 丨, and 16 are composed of the supporting rods Ua of the connecting rods 14 and 15, the connecting rods 14 and the drought mechanism are separated by the holding jig body 13 to prevent the plate π from being clamped freely :: 2 :. The way of turning the outer peripheral surface of the cylinder 13A of the main body U is combined with the end of the holding fixture _㈣ = free relative to the holding fixture body "down to = the end is combined with the recess 14a to limit the holding Holding claw ": Zhizao II holding jig 10 is made of heat-resistant metal such as Fan or Yan. The number of holding claws 16 is not limited to three; it may also be two or four. Fig. 3 is an explanatory diagram of a wire winding mechanism. Fig. 4 is a top view of the wire winding mechanism. As shown in Figs. 3 and 4, a reel company, a reel 21 and a motor (not shown) for drawing the metal wire 2 are provided in the center of the metal wire reeling mechanism 1. Three sets of motors (not shown) and the reel 22 and two sets of motors (not shown) and the reel 23 are arranged around the reel M at an equal angle. The reel 22 is used for winding the metal wire u to lift and clamp the jig body. The reel 23 is used to wind the metal wire 12 to raise and lower the clamping claw. The reels 2 and 22, 23 are installed in the sensing respectively! | On 24, 25, 26. A pulley 27 driven by a crystal rotation motor 28 and a belt 29 to rotate is mounted on the metal wire take-up mechanism 1. The operation of the single crystal holding device will be described below with reference to FIGS. 5 to 8. For the convenience of explanation, the clamping jaws, the metal wires of the suspension fixture body and the suspension clamp A7 B7 Description of the invention (8) The number of the metal wires of the holding jaws is 2 in the figures 帛 5 ~ 8. As shown in Fig. 5, the single crystal 7 of the single crystal gynecological 1G face towel is kept on standby until the pulling operation is performed to the main body forming process. At this time, the connecting rod 14 and the connecting rod 15 having the recessed portions 14a are maintained horizontally, and the free ends of the split prevention Π are in contact with the upper inner side of the clamping claw 16. In this case, the single crystal gripper (H) is turned on, and the interval between the lower ends of the four gripper claws 16 is maximized. The interval is much larger than the diameter of 7% of the enlarged portion of the single crystal. Since the separation claw 17 restricts the movement of the clamping claw 16, when the single crystal clamping jig 10 is lowered, the clamping claw 16 will not contact the enlarged portion. When the weight of the single crystal 7 reaches a predetermined value during the growth process, a detection signal of the weight of the single crystal 7 from the weight sensor is input to the control device. Based on the above detection signal, the control device drives the metal wire reel from the single crystal holding jig 10 while being suspended, and hangs the metal wire 11 of the holding jig body 13 and the metal wire 12 of the hanging clamping claw 16. Simultaneously released at the same speed. According to this, the single crystal clamping jig 丨 Q is lowered to a predetermined position (see FIG. 6) in the opened state, and the tip of the clamping claw 16 does not contact the enlarged portion 7 a and is lowered to the enlarged portion 7 a. Still low position. Thereafter, the metal wires 11 and 2 are wound up at the same speed as the crystal pulling metal wire 2, and the relative position between the single crystal 7 and the single crystal holding jig 10 is maintained unchanged. The reel of the 'gripper claw 16 is then driven at the same speed to simultaneously release the wire 12 from which the gripper claw 16 is suspended. Thereby, only the clamping claw 16 is lowered (see FIG. 7), and when the clamping claw 16 contacts the stopper 13a located under the clamping jig body 13, it stops descending. At this time, the gripper 丨 6 tips (please read the precautions on the back before filling this page)
-、1T A7 、發明説明（9 此“主〆 ’月動而掉入凹部⑷（見第5圖广因 被”關門"Κ 16的開啟被抑制。此時，單結晶夾持治具10 才，且夾持爪16下端的間隔為最小。上述間隔比 =曰7的頸部7b的直徑大。由於停止器…先端接觸 夾持爪16,夾持爪16先端不接觸頸部几。 之後’懸吊夾持治具本體13的金屬線#懸吊爽 , #金屬線12以相同速度同時被捲取，且單結晶 持治具1〇上升以驅動夹持爪16先端接觸頸部7b的上 圓錐面而夾持單結晶7。在這場合中，單結晶夾持治具1〇 的上升速度餘制在比單結晶7㈣速度稍大的值。確 保所有j持爪16與單結晶7接觸且使施加於夾持爪Μ 上的負/寺均等化，可藉由用以偵測施加於每-夾持爪16 上的荷重的重量感測器的偵測值來進行。在施加於每一 炎持爪16上的負荷已均等化後’單結晶夾持治具ι〇的 上升速度被控制與單結晶7拉引速度相等。 部 A il 準 工 消 f: 合 竹 印 f 在単結晶夾持治具1〇已夾持單結晶7後，縮小部 負擔-所定荷重，且單結晶夾持治具1〇負擔單結晶7的 殘餘重量。由單結晶夾持治具1〇負擔單結晶全部重量是 容易地，然而單結晶爽持治具10的負擔能力可由與縮小 部分享部份單結晶重量而增加。用則貞測施加於爽持治 具本體13的荷重的重量感測器可偵測施加於單結晶夾持 治具10上的荷重。偵測施加於夾持爪16上的荷重的重 量感測器被用以進行夾持爪16荷重的均一化。 本紙張尺度適( CNS } ( 21()χ297_·γ 593802 A7 B7 五、發明説明（1〇 ) " 【發明效果】 如上述’本發明有下列優點。 ⑴當從待機位置下降單m持治具至夾持m 時，或當關閉夾持爪以保持其於夾持姿勢時，央持爪廉 不會接觸單結晶。又當夾持單結晶時，施加於每-夾拍 2上的荷重由重量感測器偵測，由調整金屬線捲取量使 =重均等。因此’成長中的單結晶夾持時沒有振動或衝 擊，且防止其多結晶化。 、⑺因為防止夾持爪開啟的裝置是設置在單結晶夹持 冶具上，即使單結晶在被夾持後重量增加，單結晶將不 會從單結晶夾持治具掉落。 (3)單結晶夾持治具垂直方向長度短，因此 持治具將不限制成長的單結晶軸方向長度。 ⑷如上述，大直徑和大軸向長度的單結晶的品質和 生產性可被增進。 【圖式簡單說明】 第1圖是安裝於單結晶製造裝置±的單結晶爽持裝 置的概略構成的模式圖； Μ浐部中^榀^-XJm 5消贽合竹淞印擘 (請先閱讀背面之注意事項再填寫本頁) 第2圖是單結晶夾持治具的立體圖； 第3圖是金屬線捲取機構的說明圖； 第4圖是金屬線捲取機構的上視圖； 第5圖是單結晶緒治具在—被拉引單結晶之上的 位置待機時的模式圖； 第6圖是單結晶夾持治具下降至—所定位置的模式 t纸張尺度剌巾酬家標準（CNS ) M規格（21()>< 297公 以 五、發明説明（ τ^\ · 園， 第7圖是單結晶失持料在㈣狀態的模式圖 及 第8圖疋單U持治具失持單結晶時的模式圖。 【符號說明】 1金屬線捲取機構；2結晶拉引金屬線；6頸部； 7單結晶；7a放大直徑部；1〇單結晶夾持治具；u、 12金屬線；I3夾持治具本體；1;3a停止器；M、is連 桿；16夾持爪；17分開防止板；2卜22、23捲筒；24、 25、26重量感測器。 社叫先閱讀背面之注意事項再填寫本頁j -丁 本紙張尺度適用中國國家標準（CNS ) A4規格（210X 297公釐）-、 1T A7 、 Explanation of the invention (9 The "main 〆 'falls into the recess ⑷" (see Figure 5 because of the closing of the door " K 16). At this time, the single crystal clamping jig 10 And the interval between the lower ends of the clamping claws 16 is the smallest. The above interval is larger than the diameter of the neck portion 7b of = 7. Because the stopper ... the tip contacts the clamping claw 16 and the clamping claw 16 does not contact the neck. 'Hanging clamp wire 13's metal wire #suspend cool, #metal wire 12 is coiled at the same speed at the same time, and the single crystal jig 10 rises to drive the tip of the clamping claw 16 to contact the neck 7b The single crystal 7 is held on the upper conical surface. In this case, the rising speed of the single crystal holding jig 10 is set to a value slightly larger than the speed of the single crystal 7 确保. Ensure that all j holding claws 16 are in contact with the single crystal 7 And the equalization of the negative / temple applied to the clamping claw M can be performed by the detection value of the weight sensor for detecting the load applied to each-clamping claw 16. After the load on the inflammation holding claw 16 has been equalized, the rising speed of the 'single crystal holding jig' is controlled to be equal to the pulling speed of the single crystal 7 Part A il quasi-industrial consumption f: 竹 竹 印 f After the single crystal 7 has been held by the 単 crystal holding jig 10, the load on the part is reduced to a predetermined load, and the single crystal holding jig 10 bears the single crystal 7 Residual weight. It is easy to bear the entire weight of the single crystal by the single crystal holding fixture 10. However, the load capacity of the single crystal holding fixture 10 can be increased by sharing a part of the weight of the single crystal with the reduced portion. The weight sensor that holds the load of the jig body 13 can detect the load applied to the single crystal clamping jig 10. The weight sensor that detects the load applied to the clamping claw 16 is used for clamping Uniformity of the load of the holding claw 16. The paper size is appropriate (CNS) (21 () χ297_ · γ 593802 A7 B7 V. Description of the invention (10) " [Effect of the invention] As described above, the present invention has the following advantages. ⑴ 当When the single-m holding fixture is lowered from the standby position to the holding m, or when the holding claw is closed to keep it in the holding position, the central holding claw does not contact the single crystal. When the single crystal is held, it is applied to The load on each clip 2 is detected by a weight sensor and adjusted by a metal wire coil The amount is equal to the weight. Therefore, 'the growing single crystal has no vibration or impact during clamping, and prevents its polycrystallization. ⑺ Because the device that prevents the clamping claw from opening is set on the single crystal clamping tool, even if the single crystal The weight of the crystal will increase after being clamped, and the single crystal will not fall from the single crystal clamping jig. (3) The vertical length of the single crystal clamping jig is short, so the jig will not restrict the growth of the single crystal axis. Directional length. As mentioned above, the quality and productivity of single crystals with large diameters and large axial lengths can be improved. [Brief description of the drawings] Figure 1 is a single crystal holding device installed in a single crystal manufacturing device ± Schematic diagram of the general structure; ^ 榀 ^ -XJm 5 eliminates the combination of bamboo and bamboo seals in the Μ 浐 部 (please read the precautions on the back before filling out this page) Figure 2 is a perspective view of the single crystal clamping fixture; Fig. 3 is an explanatory diagram of the metal wire winding mechanism; Fig. 4 is a top view of the metal wire winding mechanism; and Fig. 5 is a schematic diagram of the single crystal thread fixture in a standby position above the pulled single crystal ; Figure 6 is the single crystal clamping fixture down to- Set the model t paper standard (CNS) M standard (21 () > < 297 public five. Description of the invention (τ ^ \ · Park, Figure 7 is a single crystal misplaced material in ㈣ A schematic diagram of the state and FIG. 8 are schematic diagrams when the single U gripper is out of a single crystal. [Symbol description] 1 metal wire winding mechanism; 2 crystal pulling metal wire; 6 neck; 7 single crystal; 7a enlarged diameter portion; 10 single crystal clamping jig; u, 12 metal wire; I3 clamping rule With body; 1; 3a stopper; M, is connecting rod; 16 clamping claw; 17 separate prevention plate; 2 Bu 22, 23 reel; 24, 25, 26 weight sensor. The company asked to read the notes on the back before filling in this page. J -ding This paper size is applicable to China National Standard (CNS) A4 (210X 297 mm)