442 8 3 Ο 經濟部中央樣丰局負工消资合作社印裝 Α7 Β7五、發明説明（1 ) 技術領域 本發明係關於容易將拉引上來的半導體塊（ ingot )取 出的半導體單晶拉引裝置。 背景技術 從前使用於積體電路等的矽晶圓，係將藉由單晶拉引 裝置所拉引的半導體塊切成薄片而製作的，近年來伴隨著 積體電路的大容量化|對於將大口徑的半導體塊安定地拉 引上來之單晶拉引裝置的要求越來越強，而因應此要求已 有種種的單晶拉引裝置被提案出來、被實用化。 例如日本專利特公昭6 0 — 4 1 0 3 8號公報，記載 著於主室及頂室所構成的真空室內，設置收容著熔解的矽 的坩鍋，於頂室的上方，被可自由水平迴旋地被設置收容 被拉引的半導體塊之拉引室之單晶拉引裝置》 於上述公報所記載的單晶拉引裝置，拉引室的上部設 有拉引機構，由此拉引機構向拉引室內垂下的鋼索下端裝 設有種晶，使種晶浸漬於熔解的矽熔液中，藉由拉引機構 將鋼索捲起，同時使附著於種晶的矽單晶成長，以產生半 導體塊，而於拉引室內拉起半導體塊》所被拉起的半導體 塊係在拉引室與頂室之間切離之後，使拉引室水平旋轉再 由拉引室內回收的方式構成的。 但是，於上述從前的單晶拉引裝置，被設於拉引室上 部的拉引機構因爲不具有供決定拉引位置之用的位置決定 手段，所以直到使拉引室旋轉至拉引位置爲止使其下端接 (請先閱讀背面之注$項再填寫本頁) 訂 -後丨_ 本紙張尺度遑用中國國家標準（CNS ) A4規格（210X297公羞） -4 * ^ 44283 ^ A7 B7 鯉濟部中央標率局員工消费合作社印製 五、發明説明（2 ) 續於頂室，而在開始單晶的拉引作業時，拉引機構的位置 會產生誤差，因此會有不能夠進行高精度的單晶拉引作業 的不便。 特別是，在使主室內或拉引室內成爲真空的場合，由 於主室的接地面的影響，或是由於抽真空所導致支撐著拉 引室的圓柱變型等原因，使得拉引機構不安定，結果無法 得到高精度的半導體塊，而有產生不良品的不便。 此外，被拉起的半導體塊，在收容於拉引室內的狀態 以手動的方式使拉引室水平迴旋至回收位置而回收，但是 在使拉引室迴旋時所產生的衝擊或是慣性，會使位於鋼索 與半導體塊的接續部之結晶的頸部折損，而有半導體塊落 下的危險。 特別是近年來，半導體塊的直徑增大重量也增加的緣 故，而頻繁產生由於頸部折損而導致的落下事故等不便β 發明之揭示 本發明係爲了改善相關的從前之種種不便而發明者| 目的在於提供可以高精度地決定拉引手段的位置決定，前 且在迴旋拉引室時半導體塊較少有落下之虞的單晶拉引裝 置。 未達成上述目的•本發明之一實施樣態爲： 一種單晶拉引裝置，其特徵爲具備： 真空室， 立設於前述真空室附近的圓柱， (請先W讀背面之注意事項再填寫本頁) 訂 線！ 本紙張尺度速用中國國家揉率{ CNS ) A4規格（2丨0X297公釐） -5- 44283 Ο Α7 Β7 經濟部中去橾车局貝工消费合作社印装 五、發明説明（3 ) 自由切離地被接續於前述真空室的上部，於前述圓柱 透過迴旋手段可自由水平迴旋以及自由升降地被支撐的拉 引室， 使前述拉引室升降的舉起手段， 被設於前述拉引室的上部*藉由旋轉手段使其水平旋 轉，同時藉由通過前述拉引室內捲起向前述真空室內垂下 的索條，而將單晶拉起的結晶拉引手段，及 將前述結晶拉引手段決定於旋轉位置之結晶拉引位置 的位置決定手段。 藉由上述構成，因爲使由結晶取出位置向結晶拉引位 置迴旋的拉引室以及結晶拉引手段以很好的精度決訂於拉 引位置，所以可以達成與從前的結晶拉引手段被固定之單 晶拉引裝置同樣的精度之單晶拉引，藉此，可以獲得高品 質的半導體塊。 於上述構成，前述迴旋手段，以由： 被固定於前述圓柱的垂直的支軸1 被自由旋轉以及自由上下移動地被支撐於前述支軸， 而前述拉引室的支撐構件被固著之支撐筒， 被設置爲對於前述支軸不能旋轉且可與前述支撐筒一 起上下移大齒輪， 被軸述拉引室的支撐構件，與前述大齒輪咬合 的小齒輪， 由旋轉驅動前述小齒輪的伺服馬達所形成的迴旋馬達 所構成者較佳。 (請先Μ讀背面之注意事項再填寫本頁) 本纸張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） -6- 44283 0 , A7 B7 經濟部中央樣準局貝工消費合作社印11 五、發明説明（4 ) 藉由此構成，於單晶拉引之後，將拉引室迴旋至結晶 取出位置時，藉由將伺服馬達所構成的迴旋馬達予以加減 速控制，可以不發生衝擊而將拉引室迴旋至結晶取出位置 的緣故，所以可以防止由於迴旋時所產生的衝擊而導致結 晶的頸部折損使半導體落下的意外發生》 於上述構成，前述位置決定手段以設置於前述圓柱的 上部，以及中介於前述拉引室與前述結晶拉引手段之間的 支撐台之間者較佳。 藉由此構成，在結晶拉引手段的附近可以決定結晶拉 引手段的位置，因此位置決定精度大幅提高。 於上述構成，前述位置決定手段，以由： 於前述圓柱以及前述支撐台之一方在垂直面內自由旋 轉地被支撐的基準輥，及 被設於前述圓柱及前述支撐台的另一方，具有具備相 等於前述基準輥的外徑的間隔之一對基準面，於前述一對 基準面間嵌入前述基準輥而藉由被從側方限制住而決定前 述迴旋位置的基準導引所構成者較佳。 藉由此構成，因爲可以簡單的構成決定高精度的定位 位置，同時於單晶的拉引過程，可以維持拉引開始位置的 定位精度。 於上述構成，前述位置決定手段的基準輥，以軸接於 被設置成可在上下方向自由滑動滑動構件，藉由推壓手段 將前述滑動構件向下方推壓者較佳。 藉由此構成，結晶拉引手段的迴旋位置偏移，而使得 (讀先閱讀背面之注意事項再填寫本頁) 訂 線！ 本纸張尺度適用中國囷家標準（CNS>A4規格（210X297公釐） 442830 Α7 Β7 經濟部中央標準局貝工消资合作社印製 五、發明説明（5 ) 基準輥抵接於基準導引的上面等的場合，隨著拉引室的下 降同時推壓手段也收縮的緣故*所以可以防止由於過大的 外力而導致位置決定手段的破損》 於上述構成，於前述位置決定手段的附近，以設有檢 測前述單晶拉引手段的迴旋位置的偏移之第1偏移檢測器 ，及檢測前述單晶拉引手段的上下位置的偏移之第2偏移 檢測器者較佳。 藉由此構成，藉由來自第1及第2偏移檢測器的訊號 ，而可以容易地確認結晶拉引手段是否被決定於正確的位 置，同時在被確認爲異常的場合，藉由使裝置自動停止， 可以防止本裝置產生重大事故的危險於未然。 於上述構成，前述舉起手段，以由：油壓缸所構成的 舉起油缸，及 切換/遮斷對前述舉起油缸之來自油壓源的油壓供給 的伺服閥所構成者較佳。 根據此構成*藉由使用伺服閥，可以緩和在升降拉引 室時所產生的衝擊，所以可以防止由於衝擊使得半導體快 的頸部折損，而使半導體塊落下的危險於未然》 供實施發明之較佳的實施樣態 以下參照圖面詳細說明本發明之一實施形態。 第1圖係單晶拉引裝置的側面圖，第2圖以下係各部 的詳細圖。 於這些圖中，1係裝置本體，於較地板面F L更低的 (請先閲讀背面之注意事項再填寫本頁) •11 線 本紙伕尺度適用中國國家標準（CNS ) Μ規格（210Χ297公釐） -8 - 4 42 8 3 0 a? B7 經濟部中央橾準扃男工消費合作社印製 五、發明説明（6 ) 位置的基座2上透過架台3設置有真空室4 »於真空室4 附近，圓柱1 a被立設爲其下端部固著於架台3。 上述真空室4，係由底面位於與地板面FL幾乎等高 的位置的主室4 a ，與自由開閉閉鎖此主室4 a的上面開 口的頂室4b所構成。頂室4b，在向設於主室4a內的 坩鍋（未圖示）內投入矽等材料時，自由迴旋於水平方向 e 於被開口於上述頂室4 b的上部的開口部4 c ，被自 由切離地連接著成爲筒狀的拉引室5的下端。 上述拉引室5，幾乎垂直設立於頂室4b的上方，透 過被固著於其外周部的支撐構件5 b以及迴旋手段可水平 自由迴旋地被支撐於圓柱1 a。 上述迴旋手段6，於圓柱1 a的上部側，具有上下端 透過托架lb而被固著的垂直支軸6 a，於此支軸6 a被 水平自由迴旋同時上下自由滑動地支撐著》 於上述迴旋筒6 b，透過支撐構件5 b安裝著上述拉 引室5，同時於支撐構件5 b的下部，安裝著上述迴旋手 段6的驅動源之迴旋馬達7。 上述迴旋馬達7係由伺服馬達構成*其旋轉軸7 a透 過計時皮帶等動力傳達手段6 c ·被接續於被軸支在支撐 構件5 b的下部的中間軸6 d的上端部。於中間軸6 d的 下端，被固著有構成舉起手段8的咬合於被固定在舉起構 件8 a的大齒輪6 e之小齒輪6 f。 上述舉起構件8 a，被上下自由滑動地支撐於支軸 (諳先Μ讀背面之注意事項再填寫本萸) 本紙伕尺度適用中國國家標準（CNS ) Α4^格（2丨0Χ297公釐） -9- 44283 0 A7 B7 經濟部中央梂準局員工消费合作社印製 五 、發明説明 (7 ) 1 1 6 a 於 上 面支軸6 a 貫通 中 心 部 的 上 述 大 齒 輪 6 e被 固 1 | 定 著 1 於 此 大齒輪6 e 的上 面 } 由 上 方 抵 接 著 上 述 迴旋 筒 1 | 6 b 的 下 端 請 1 1 I 上 述 舉 起手段8， 係由 舉 起 構 件 8 a 透 過 此舉 起 it « n ! 1 構 件 8 a 使 上述迴旋筒 6 b 上 下 移 動 的 油 壓 缸 所 構 成的 舉 背 面 之 1 1 起 油 缸 8 b ，以及對舉 起油 缸 8 b 切 換 / 遮 斷 來 白 油壓 源 注 意 1 I 事 1 2 7 的 油 壓 供給的伺服 閥2 8 所 構 成 : 舉 起 油 缸 8 b的 上 項 再 1 部 被安 裝 於將支軸6 a的下端固定在圓柱1 a 的托架 1 本 t 1 1 b 上 〇 頁 1 1 由 上 述 舉起油缸8 b向 上 方 突 出 的 活 塞 桿 8 C 的先 端 1 1 ♦ 被 固 著 於 上述舉起構 件8 a 的 外 周 部 d 舉起構 件 8 a 1 1 I 被 抵 接 於 外 周面的一部 份被 布 設 於 圓 柱 1 a 的 停 止 轉動 導 訂 1 引 1 C 藉 由舉起油缸 8 b 沿 著 支 軸 6 a 上 下 移 動 時以 使 1 [ I 不 回 轉 的 方 式止住轉動 〇 1 1 另 一 方 面，於拉引 室5 的 上 部 9 結 晶 拉 引 手 段 透過 支 1 1 撐 台 1 2 以 及旋轉手段 1 3被固定華' 線 i 上 述 結 晶拉引手段 14 於 具 有 上 部 白 由 開 閉 的外 蓋 1 1 I 1 4 a 的 筐 體1 4 b內 ，設 有捲 取 鋼 絲 或鋼 索 所 構 成的 索 1 1 條的捲取機 1 4 c。 1 I 而 由 此 捲取機1 4 c.所 伸 出 的 索 條 1 5 通 過 旋轉 手 1 1 段 1 3 以 及 支撐台1 2 內向 拉 引 室 5 內 垂 下 於 其 先端 部 1 I 藉 由 結 著 被 安裝著種晶 (未圖示〕 < > 1 1 上 述 旋 轉手段1 3 ，具 有 於 從 下 方 支 撐 結 晶 拉 引手 段 1 1 1 4 的 旋 轉 軸 1 3 a， 透過 無 端 皮 帶 1 3 b 被 接 續 的旋 轉 1 1 1 本紙張尺度適用中國國家樣準（CNS ) A4規格（210X297公釐） 442830 a7 B7 經濟部中央樣準局貝工消費合作社印製 五、發明説明（8 ) 驅動源1 3 c，藉由此旋轉驅動源1 3使結晶拉引手段 1 4旋轉* 此外，於上述支撐台1 2與圓柱1 a的上端之間，設 有使結晶拉引手段1 4高精度的位於迴旋位置之結晶拉引 位置A的位置決定手段1 7。 上述位置決定手段1 7，如第5圖至第8圖所示，從 圓柱1 a突出設置的固定托架1 d的先端設有基準導引 17a，而於支撐台12側設有基準輥17b » 上述基準導引1 7 a，如第7圖所示具有較基準輥 17b稍大直徑的圓孔17c，此圓孔17c係以相等於 基準輥1 7 b的外徑的間隔經由平行的一對基準面1 7 d 之間的開口部連通於開口於上邊的推拔部1 7 e ，藉由使 基準輥1 7 b停止於上述基準面1 7 d之間，可以使結晶 拉引手段1 4正確地決定位置於結晶拉引位置A。 此外，於圓孔1 7 c內突出設有從下方向上伸的停止 器1 7 f '此停止器1 7 ί ，即使拉伸室5以及結晶拉引 手段1 4被決定於結晶拉引位置A，在真空室4不在拉引 室5之下的場合，制止基準輥1 7超過所需地下降，具有 供防止拉引室5以及結晶拉引手段14下降超過必要程度 的作用。 進而，上述基準輥1 7 b，外周面被形成爲剖面圓弧 狀，透過軸1 7 g自由旋轉地被支撐於滑動構件1 7 h。 上述滑動構件1 7 h，被上下自由滑動地被支撐於被 固定在支撐台1 2的滑動導引1 7 i 。於滑動構件17h (請先W讀背面之注意事項再填寫本頁) 订 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐> -11 - A4283 0 A7 B7 經濟部中央標準扃兵工消费合作社印製 五、發明説明（9 ) 的上方’設有被固著於支撐台1 2的上側部分的，由壓縮 彈簧1 9 a與彈簧調整螺絲1 9 b所構成的推壓手段，藉 由此推壓手段1 8使滑動構件1 7 h被朝向下方推壓。於 滑動構件1 7 h的下部，透過連接構件1 8 a被安裝著擋 塊（dog) 1 8，藉由以此擋塊1 8使由限制開關所構成的 上下位置偏移檢測器2 0動作，而檢測出結晶拉引手段1 4的上下方向的位置偏移。 又，於支撐台1 2側，如第5圖及第6圖所示，設有 呈圓柱狀的一對擋塊2 1，2 2，這些擋塊2 1、22藉 由使被設置於固定托架1d上之拉引室5的迴旋半徑的外 周側附近的限制開關所構成的迴旋位置偏移檢測器2 3、 2 4動作，而檢測出結晶拉引手段1 4的迴旋位置偏移。 其次，說明如上述般構成的單晶拉引裝置的作用。 於單晶的拉引作業時，首先使迴旋手段6的迴旋馬達 7旋轉，使位於第9圖的半導體塊取出位置B的拉引室5 ，以支軸6 a爲中心沿著迴旋軌跡C向真空室4側迴旋。 拉引室5到達真空室4的上方時，使舉起手段8的舉 起油缸8 b收縮，而使拉引室5下降的話，經由由被設於 拉引室5上部的支撐台1 2的基準輥1 7 b被設於固定托 架1 d的基準導引1 7 a的推拔部1 7 e而於基準面 1 7 d間由上方嵌入，而高精度地決定對於真空室4之被 設置於拉引室5的上部的結晶拉引手段1 4。 又，於上述動作，被設於支撐台1 2側的圓柱狀擋塊 2 1、2 2，因爲使被設於固定托架1 d上的拉引室5的 (請先閲讀背面之注$項再填寫本頁) 訂 崦！ 本紙張尺度逋用中國國家輮準< CNS ) A4規格（210X297公釐} -12- 44283 0 A7 B7 五、發明説明（10 ) 經濟部中央樣準局負工消费合作社印東 迴旋半徑的外周側附近的迴旋位置偏移檢測器2 3、2 4 動作，所以藉由來自迴旋位置偏移檢測器2 3、24的訊 號而檢測出結晶拉引手段14是否被決定於正確的迴旋位 置的同時，因爲擋塊1 8使上下位置偏移檢測器2 0動作 .，所以藉由來自上下位置偏移檢測器2 0的訊號，而檢測 出事否在上下方向被決定正確的位置。 如以上所述，結束了對頂室4 b之拉引室5的接續的 話，真空室4及拉引室5內被減壓，藉由旋轉手段1 3使 由結晶拉引手段1 4垂下的索條1 5的先端索結著的種晶 旋轉的同時，使浸潰於在真空室4內熔解的矽熔融液內· 開始單晶的拉引。 而·在拉引單晶時，藉由位置決定手段1 7使結晶拉 引手段1 4總是被決定於結晶拉引位置A的緣故，所以可 以藉與從前的結晶拉引手段被固定住的結晶拉引裝置同樣 的精度來拉引單晶。 另一方面，在結束單晶的拉引之後，被拉引上來的半 導體塊1 0被收容於拉引室5內之後，首先使真空室4及 拉引室5內回復大氣壓之後*於拉引室5的下端與頂室 4b之間切離。而藉由舉起手段8的舉起油缸8b，使位 置決定手段1 7的基準輥1 7 b向上升直到較基準導引 1 7 a更突出爲止。 此時爲了避免由於衝擊而使得接續著索條1 5與半導 體塊1 0之間的頸部1 6折損，藉由使用伺服閥2 8，而 使在切換閥時由於淸洗（surge )壓力等所產生的衝擊抑制 (請先Μ讀背面之注意事項再填寫本頁) 訂 -味！ 表紙張尺度適用中國國家標率（CNS ) Α4現格（210X297公釐） 442830 A7 B7 經濟部中央標準局負工消費合作社印製 五、發明説明（n > 於最小限度，而使拉引室5上升。 而，當拉引室5到達指定高度之後，使迴旋手段6的 迴旋馬達7旋轉，以支軸6 a爲中心使拉引室5迴旋至半 導體塊取出位置B爲止。 此時，爲了避免由於結晶的頸部1 6由於衝擊而折損 使得半導體塊1 0落下，而在迴旋開始時與迴旋時（等速 迴旋）以及迴旋停止時不產生衝擊的方式控制伺服馬達所 構成的迴旋馬達7的加減速。而當拉引室5達到半導體塊 取出位置B時，被設於迴旋筒6 a側的擋塊2 5使由限制 開關所構成的取出位置檢測器2 6動作的緣故，迴旋馬達 7被停止，拉引室5被停止於半導體塊取出位置B。 又，此時的停止位置因爲不需要高精度，所以取出位 置檢測器2 6設置於支軸6 a的附近》 如以上所述使拉引室5停止於半導體塊取出位置B之 後，藉由結晶拉引手段1 4伸出索條1 5使半導體塊1 〇 下降，而從拉引室5內取出。此時因爲可以在方便作業的 較低位置取出半導體塊1 0，所以與從前要從較真空室4 更上方之處取出半導體塊的從前的拉引裝置相比，取出作 業也可以更容易而且更安全地進行。 而，在結束半導體塊1 0的取出時，清掃拉引室5內 等之後，將新的種晶（未圖示）安裝於索條1 5而將索條 1 5捲起，進行下一次拉引作業的準備。如此這般，藉由 反復進行上述動作，可以連續進行單晶的拉引。 又，上述動作中基準輥1 7 b不嵌入基準導引1 7 a --------^ — ------ΐτ------终 (请先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS > Α4規格（210X297公釐} -14- 44283 0 經濟部中央樣準局貝工消费合作社印装 A7 B7_五、發明説明（12) 的話，因爲擋塊1 8會使上下位置偏移檢測器2 0動作， 所以藉由來自此上下位置偏移檢測器2 0的訊號使得動作 緊急停止，可以防止裝置的誤動作或者被損壞》 又，本發明雖然針對例示的實施形態加以說明，但是 關於揭示的實施形態，只要在不逸脫本發明的要旨的範圍 內，也可以進行種種的變更、省略或是追加設計，此應爲 熟悉該技術之業者所明白者。亦即，本發明並不以上述實 施形態爲限，亦包含藉由被記載於申請專利範圍的要素所 規定的範圍以及其均等範圍。 圖面之簡單說明 本發明，藉由以下的詳細說明以及顯示本發明的實施 形態之附圖，應能夠更淸楚地理解》又，附圖所示地實施 形態，並非供特定本發明之用者|僅係提供便於說明以及 理解之用者，本發明並非以此爲限。 第1圖係根據本發明的單晶拉引裝置之一實施形態的 側面圖。 第2圖係上述實施形態之單晶拉引裝置之迴旋手段附 近的擴大圖。 第3圖係第2圖的m方向的箭視圖》 第4圖係第1圖的IV圓內之擴大圖。 第5圖係第4圖的V方向的箭視圖。 第6圖係第5圖的VI方向的箭視圖。 第7圖係第6圖的W方向的箭視圖。 ---------!------ir------^ < (請先昶讀背面之注意事項再填寫本頁〕 本紙張尺度適用中國國家樣準（CNS > A4规格（2丨0X297公釐） -15- 442830 A7 B7 五、發明説明（13 ) 第8圖係第6圖的vm方向的箭視圖。 第9圖係供說明上述實施形態之單晶拉引裝置的作用 經濟部中央揉準局員工消費合作社印製 之說明圖。 符號說明 F L 地板面， 1 裝置本體， la 圓柱.， 1 b 托架， 2 基座， 3 架台， 4 真空室，’ 4 a 主室， 4 b 頂室， 4 c 開口部* 5 拉引室， 5 b 支撐構件， 6 迴旋手段， 6 a 垂直支軸· 6 b 迴旋筒， 6 c 動力傳達手段， 6 d 中間軸， 6 e 大齒輪， 6 f 小齒輪， 7 迴旋馬達， 7 a 旋轉軸， 8 舉起手段， 8 a 舉起構件， 8 b 舉起油缸， 8 c 活塞桿， 1 2 支撐台， 13 旋轉手段， 1 3 a 旋轉軸， 13 b 無端皮帶， 1 3 c 旋轉驅動源， 14 結晶拉引手段， 1 4 a 外蓋， 14 b 筐體， 1 4 c 捲取機， 15 索條， 1 7 位置決定手段， 17 a 基準導引， 1 7 b 基準輥， 本紙張尺度適用中國國家樣準（CNS ) A4規格（2丨0X297公釐） (請先閱讀背面之注意Ϋ項再填寫本頁) 訂 竦！ -16- A4283 0 A7 B7 五、發明说明（14) 1 7 c 圓孔， 1 7 d 1 7 e 推拔部， 2 7 2 8 伺服閥。 基準面 油壓源， (請先Μ讀背面之注意事項再填寫本頁) ,1 Γ J/. M濟部中央揉隼局I工消费合作社印袈442 8 3 Ο Printed by the Central Samples Bureau of the Ministry of Economic Affairs, Consumers and Consumers Cooperatives A7 B7 V. Description of the Invention (1) Technical Field The present invention relates to a semiconductor single crystal puller that easily pulls out a semiconductor block (ingot) that is pulled up. Device. 2. Description of the Related Art Silicon wafers previously used in integrated circuits and the like are manufactured by slicing a semiconductor block drawn by a single crystal pulling device into thin slices. In recent years, with the increase in the capacity of integrated circuits, Large-caliber semiconductor blocks have been increasingly demanded for single-crystal pulling devices to be pulled up stably. In response to these requirements, various single-crystal drawing devices have been proposed and put into practical use. For example, Japanese Patent Laid-Open Publication No. 60-40-1 038 describes that a crucible containing molten silicon is installed in a vacuum chamber composed of a main chamber and a top chamber, and can be freely leveled above the top chamber. A single-crystal pulling device for a pulling chamber for accommodating a pulled semiconductor block is rotatably provided. In the single-crystal pulling device described in the above publication, a pulling mechanism is provided at the upper part of the pulling chamber, thereby pulling the mechanism. Seed crystals are installed at the lower end of the steel wire hanging in the pulling chamber, so that the seed crystals are immersed in the molten silicon melt, and the steel wire is rolled up by the pulling mechanism, and the silicon single crystals attached to the seed crystals are grown to produce The semiconductor block is pulled up in the pulling chamber. The semiconductor block being pulled up is cut off between the pulling chamber and the top chamber, the pulling chamber is rotated horizontally, and then the pulling chamber is recovered. However, in the previous single crystal pulling device, since the pulling mechanism provided at the upper part of the pulling chamber does not have a position determining means for determining the pulling position, the pulling mechanism is rotated until the pulling chamber is rotated to the pulling position. Make the bottom end (please read the note on the back before filling in this page) Order-After 丨 _ This paper size adopts China National Standard (CNS) A4 specification (210X297), -4 * ^ 44283 ^ A7 B7 carp Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs of the People's Republic of China. 5. Description of the invention (2) Continued in the top chamber, and when the single crystal pulling operation is started, the position of the pulling mechanism will cause an error, so it will not be possible to perform high Inconvenience of precision single crystal pulling operation. In particular, when the main room or the drawing room is made to be a vacuum, the drawing mechanism is unstable due to the influence of the ground plane of the main room or the cylindrical deformation that supports the drawing room due to evacuation. As a result, a high-precision semiconductor block cannot be obtained, and there is an inconvenience that defective products are produced. In addition, the pulled-up semiconductor block is manually retracted horizontally to the recovery position and recovered in a state of being accommodated in the pull-out chamber, but the impact or inertia generated when the pull-out chamber is rotated may cause The neck of the crystal located at the junction between the steel cable and the semiconductor block is broken, and there is a danger that the semiconductor block may fall. Especially in recent years, the diameter of semiconductor blocks has increased due to the increase in weight, and inconveniences such as falling accidents due to neck breakage frequently occur. Β Disclosure of the Invention The present invention is an inventor to improve related inconveniences of the past The purpose is to provide a single crystal pulling device that can determine the position of the pulling means with high accuracy, and that the semiconductor block is less likely to fall when the pulling room is rotated. The above objective is not achieved • One embodiment of the present invention is: a single crystal pulling device, which is characterized by: a vacuum chamber, a cylinder standing near the aforementioned vacuum chamber, (please read the precautions on the back before filling (This page) Order! This paper is a standard for China's national kneading rate {CNS) A4 specification (2 丨 0X297 mm) -5- 44283 〇 Α7 Β7 Printed by the Ministry of Economic Affairs of the Quoting and Carriage Bureau, Shellfisher Consumer Cooperatives. 5. Description of the invention (3) Free cutting The ground is connected to the upper part of the vacuum chamber, and the pulling chamber supported by the cylinder can be freely rotated horizontally and freely raised and lowered by the turning means, and the lifting means for lifting the pulling chamber is provided in the pulling chamber. The upper part of * is a crystal pulling means for pulling a single crystal by rotating it horizontally by a rotating means, and pulling a rope suspended in the vacuum chamber through the pulling chamber, and pulling the crystal The position determining means of the crystal pulling position determined by the rotation position. With the above-mentioned configuration, since the pulling chamber and the crystal pulling means which are rotated from the crystal pulling position to the crystal pulling position are determined at the pulling position with good accuracy, it can be fixed to the former crystal pulling means. The single crystal pulling device has the same precision as the single crystal pulling device, thereby obtaining a high-quality semiconductor block. In the above configuration, the turning means is: the vertical support shaft 1 fixed to the cylinder is supported by the support shaft so as to be freely rotated and freely moved up and down, and the support member of the pull chamber is fixedly supported The cylinder is configured to be non-rotatable to the support shaft and to move the large gear up and down together with the support cylinder, a supporting member of the drawing room of the shaft, a pinion gear meshing with the large gear, and the servo driving the small gear by rotation. A motor formed by a rotary motor is preferred. (Please read the precautions on the back before filling in this page) This paper size applies to Chinese National Standard (CNS) Α4 size (210X297 mm) -6- 44283 0, A7 B7 Central Samples Bureau, Ministry of Economic Affairs, Shellfish Consumer Cooperative印 11 V. Description of the invention (4) With this structure, when the pulling chamber is rotated to the crystal take-out position after the single crystal is pulled, the acceleration and deceleration control of the rotary motor constituted by the servo motor can be avoided. Since the pull chamber is rotated to the crystal take-out position by impact, the semiconductor can be prevented from accidentally falling due to the neck breakage of the crystal caused by the impact generated during the rotation. In the above configuration, the position determining means is provided in the foregoing The upper part of the column and the support table between the pulling chamber and the crystal pulling means are preferred. With this configuration, since the position of the crystal pulling means can be determined in the vicinity of the crystal pulling means, the position determination accuracy is greatly improved. In the above configuration, the position determining means is provided by: a reference roller supported on one of the cylinder and the support base so as to be rotatable in a vertical plane, and the other of the cylinder and the support base provided with: One pair of reference surfaces, which is equal to the interval of the outer diameter of the reference roller, is preferably composed of a reference guide in which the reference roller is inserted between the pair of reference surfaces and the turning position is determined by being restricted from the side. . With this configuration, a simple configuration can be used to determine a high-precision positioning position, and at the same time, the positioning accuracy of the drawing start position can be maintained during the pulling process of the single crystal. In the above configuration, it is preferable that the reference roller of the position determining means is axially connected to the sliding member provided to be able to slide freely in the vertical direction, and the sliding member is pushed downward by the pressing means. With this structure, the rotation position of the crystal pulling means is shifted, so that (read the precautions on the back before filling this page) to order the line! This paper size is in accordance with China's standard (CNS > A4 size (210X297 mm) 442830 Α7 Β7 Printed by the Beige Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy In the above cases, as the pulling chamber is lowered, the pressing means is also contracted *, so that the position determination means can be prevented from being damaged due to excessive external force. In the above configuration, the position determination means is provided near the position determination means. It is preferable to have a first shift detector that detects a shift in the turning position of the single crystal pulling means, and a second shift detector that detects a shift in the upper and lower positions of the single crystal pulling means. The structure can easily confirm whether the crystal pulling means is determined at the correct position by the signals from the first and second offset detectors, and at the same time, when the abnormality is confirmed, the device is automatically stopped. It is possible to prevent the danger of major accidents caused by this device. In the above-mentioned structure, the aforementioned lifting means includes: lifting a cylinder constituted by a hydraulic cylinder, and switching / interrupting the aforementioned lifting means. According to this structure, the servo valve of the hydraulic cylinder that supplies hydraulic pressure from the hydraulic pressure source is better. By using the servo valve, the impact generated during the lifting of the pull chamber can be mitigated, so the semiconductor can be prevented from being caused by the impact. The neck is damaged, so that the danger of the semiconductor block falling is not taken into consideration. A preferred embodiment of the invention is described below with reference to the drawings. One embodiment of the present invention is described in detail below. Figure 1 is a side view of a single crystal pulling device Below, Figure 2 is a detailed diagram of each part. In these figures, the 1 series device body is lower than the floor surface FL (please read the precautions on the back before filling this page) • 11 line paper size is applicable to China National Standards (CNS) M specifications (210 × 297 mm) -8-4 42 8 3 0 a? B7 Printed by the Central Ministry of Economic Affairs, Zhunzhen Men ’s Consumer Cooperatives. 5. Description of the invention (6) The base 2 is located on the base. 3 is provided with a vacuum chamber 4 »Near the vacuum chamber 4, a cylinder 1a is erected so that its lower end is fixed to the stand 3. The above-mentioned vacuum chamber 4 is a main chamber whose bottom surface is located almost at the same height as the floor surface FL. 4 a, open with freedom The top chamber 4b, which is open at the upper surface of the main chamber 4a, is closed. When the top chamber 4b is charged with a material such as silicon into a crucible (not shown) provided in the main chamber 4a, it is free to rotate in a horizontal direction e. The opening 4 c opened in the upper part of the top chamber 4 b is freely cut off and connected to the lower end of the cylindrical drawing chamber 5. The drawing chamber 5 is set up almost vertically above the top chamber 4 b. The support member 5 b fixed to the outer peripheral part and the turning means can be supported horizontally and freely on the cylinder 1 a. The turning means 6 is provided on the upper side of the cylinder 1 a with upper and lower ends penetrating through the bracket lb. The fixed vertical support shaft 6 a is supported by the horizontal free rotation and freely sliding up and down. At the rotation barrel 6 b, the pulling chamber 5 is installed through the support member 5 b, and the support A rotating motor 7 as a driving source of the rotating means 6 is mounted below the member 5b. The swing motor 7 is composed of a servo motor. The rotating shaft 7 a passes through a power transmission means 6 c such as a timing belt. It is connected to the upper end of the intermediate shaft 6 d which is supported on the lower portion of the support member 5 b. At the lower end of the intermediate shaft 6d, a small gear 6f that is engaged with the large gear 6e fixed to the lifting member 8a is engaged with the lifting means 8 and is engaged with the small gear 6f. The lifting member 8 a is supported by the support shaft freely sliding up and down. (Please read the notes on the back before filling in this paper.) The paper dimensions are applicable to the Chinese National Standard (CNS) Α4 ^ grid (2 丨 0 × 297 mm). -9- 44283 0 A7 B7 Printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs. 5. Description of the invention (7) 1 1 6 a Above the support shaft 6 a The above-mentioned large gear 6 that penetrates the center is fixed 1 | 1 on the top of this large gear 6 e} abut against the lower end of the above-mentioned rotating barrel 1 | 6 b from above, please 1 1 I the above lifting means 8 is caused by the lifting member 8 a through which it «n! 1 member 8 a 1 of the lifting back surface formed by the hydraulic cylinder that moves the above-mentioned rotating cylinder 6 b up and down 1 1 lifting the cylinder 8 b, and switching / blocking the lifting cylinder 8 b to the white oil pressure source Note 1 I event 1 2 7 The servo valve 2 8 for hydraulic pressure supply is composed of: the upper part of the cylinder 8 b is lifted up and another part is mounted on a bracket that fixes the lower end of the support shaft 6 a to the cylinder 1 a 1 This t 1 1 b Previous 〇Page 1 1 The tip end of the piston rod 8 C protruding upward from the lifting cylinder 8 b 1 1 ♦ is fixed to the outer peripheral portion d of the lifting member 8 a d lifting member 8 a 1 1 I Part of the abutment on the outer peripheral surface is arranged on the cylinder 1 a Stop rotation guide 1 引 1 C When the cylinder 8 b is moved up and down along the support shaft 6 a to make 1 [I not The rotation method stops the rotation. On the other hand, in the upper part 9 of the pulling chamber 5, the crystal pulling means is fixed by the support 1 1 and the rotating means 1 3, and the crystal pulling means 14 are fixed. In a casing 1 4 b having an upper cover 1 1 I 1 4 a that is opened and closed, a coiler 1 4 c made of a wire or a steel cord is provided. 1 I and thus the winder 1 4 c. The extended rope 1 5 is rotated by the hand 1 1 section 1 3 and the support table 1 2 the inward pulling chamber 5 is suspended inward at its leading end 1 I by binding A seed crystal (not shown) is mounted. ≪ > 1 1 The rotating means 1 3 has a rotating shaft 1 3 a which supports the crystal pulling means 1 1 1 4 from below, and is connected through an endless belt 1 3 b. The rotation of the paper 1 1 1 This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) 442830 a7 B7 Printed by the Shell Specimen Consumer Cooperative of the Central Sample Standard Bureau of Ministry of Economy The crystal pulling and pulling means 14 is rotated by the rotation driving source 13, and the crystal pulling and pulling means 14 is provided at the turning position with high precision between the support table 12 and the upper end of the cylinder 1a. The position determining means 17 of the crystal pulling position A. As shown in FIGS. 5 to 8, the position determining means 17 is provided with a reference guide at the tip of the fixed bracket 1 d protruding from the cylinder 1 a. 17a, and on the support side 12 The reference roller 17b is provided »The above-mentioned reference guide 17a has a circular hole 17c having a slightly larger diameter than the reference roller 17b as shown in Fig. 7. This circular hole 17c has a diameter equal to the outer diameter of the reference roller 17b. The interval communicates with the pushing portion 1 7 e opened on the upper side through an opening between a pair of parallel reference surfaces 17 d. By stopping the reference roller 1 7 b between the reference surfaces 17 d, the The crystal pulling means 14 correctly determines the position at the crystal pulling position A. In addition, a stopper 1 7 f which protrudes upward from the bottom is protruded inside the circular hole 1 7 c, even if it is stretched. The chamber 5 and the crystal pulling means 14 are determined at the crystal pulling position A. When the vacuum chamber 4 is not below the pulling chamber 5, the reference roller 17 is prevented from falling more than necessary, and the pulling chamber 5 is provided for preventing the pulling. And the effect of the crystal pulling means 14 falling more than necessary. Furthermore, the reference roll 1 7 b has an outer peripheral surface formed in a circular arc shape in section, and is supported by the sliding member 17 h freely through the shaft 17 g. The above The slide member 17 h is supported by the slide fixed to the support base 12 in a freely sliding manner. 1 7 i. 17h at the sliding member (please read the precautions on the back before filling this page) The size of the paper is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm > -11-A4283 0 A7 B7 Economy Printed by the Ministry of Standards and Standards of the Ordnance Industry Consumer Cooperatives 5. The upper part of the invention description (9) is provided with a compression spring 1 9 a and a spring adjusting screw 19 b By this pressing means 18, the sliding member 17 h is pressed downward. A dog 18 is attached to the lower part of the sliding member 17 h through the connecting member 1 8 a, and the up and down position shift detector 2 composed of the limit switch is actuated by the stop 18. , And a positional shift in the vertical direction of the crystal pulling means 14 is detected. In addition, as shown in FIG. 5 and FIG. 6, a pair of cylindrical stoppers 2 1 and 2 2 are provided on the support base 12 side, and these stoppers 2 1 and 22 are fixed to each other. The swing position shift detectors 2 3 and 2 formed by the limit switches near the outer peripheral side of the swing radius of the pull chamber 5 on the bracket 1 d operate, and the swing position shift of the crystal pull means 14 is detected. Next, the operation of the single crystal pulling device configured as described above will be described. During the pulling operation of the single crystal, first, the turning motor 7 of the turning means 6 is rotated to pull the pulling chamber 5 located at the semiconductor block taking-out position B in FIG. 9 along the turning path C toward the pivot axis 6 a. The 4 sides of the vacuum chamber swivel. When the pulling chamber 5 reaches above the vacuum chamber 4, the lifting cylinder 8b of the lifting means 8 is contracted, and when the pulling chamber 5 is lowered, it passes through the support base 12 provided on the upper part of the pulling chamber 5. The reference roller 1 7 b is set on the pushing part 17 e of the reference guide 17 a of the fixed bracket 1 d, and is inserted from above on the reference surface 17 d, and the vacuum chamber 4 is accurately determined. The crystal pulling means 14 provided in the upper part of the pulling chamber 5. In the above operation, the cylindrical stoppers 2 1 and 2 2 provided on the support base 12 side are used for the pull chamber 5 provided on the fixed bracket 1 d (please read the note on the back first) Fill in this page again) Order! This paper uses China National Standards < CNS) A4 (210X297 mm) -12- 44283 0 A7 B7 V. Description of the invention (10) The outer radius of the radius of the Indian East circle of the Central Samples Bureau of the Ministry of Economic Affairs The rotation position deviation detectors 2 3, 2 4 near the side operate, so whether or not the crystal pulling means 14 is determined by the correct rotation position is detected by the signals from the rotation position deviation detectors 2 3 and 24. Since the stop 18 causes the vertical position shift detector 20 to operate, the signal from the vertical position shift detector 20 is used to detect whether the correct position is determined in the vertical direction. As described above When the connection to the drawing chamber 5 of the top chamber 4 b is completed, the inside of the vacuum chamber 4 and the drawing chamber 5 are decompressed, and the rope 14 suspended by the crystal pulling means 1 4 is rotated by the rotating means 13. While the seed crystals attached to the stub are rotated, they are immersed in the molten silicon melted in the vacuum chamber 4. The single crystal is drawn. When the single crystal is drawn, the position determining means 1 is used. 7 Make crystal pulling means 1 4 Always determined by crystal pulling position A For this reason, it is possible to pull single crystals with the same precision as the crystal pulling device in which the previous crystal pulling means was fixed. On the other hand, after the pulling of the single crystal is completed, the semiconductor block 1 is pulled up. After being stored in the pulling chamber 5, the vacuum chamber 4 and the pulling chamber 5 are first restored to atmospheric pressure * and then cut off between the lower end of the pulling chamber 5 and the top chamber 4b. Lift the oil cylinder 8b, and raise the reference roller 17b of the position determining means 17 until it protrudes more than the reference guide 17a. At this time, in order to avoid impact, the cable 15 and the semiconductor block 10 are connected. The neck portion is broken by 16 times. By using the servo valve 28, the impact caused by the surge pressure when switching the valve is suppressed (please read the precautions on the back before filling this page). -Taste! The paper size of the table applies to China's National Standards (CNS) Α4 is now (210X297 mm) 442830 A7 B7 Printed by the Central Consumers Bureau of Ministry of Economic Affairs Consumer Cooperatives V. Invention Description (n > to a minimum, so that The pull chamber 5 rises. And when the pull chamber 5 reaches the designated After the height, the turning motor 7 of the turning means 6 is rotated, and the pulling chamber 5 is rotated to the semiconductor block taking-out position B around the supporting shaft 6 a. At this time, in order to avoid the crystal neck 16 from being damaged due to the impact The semiconductor block 10 is dropped, and the acceleration and deceleration of the rotary motor 7 constituted by the servo motor is controlled in such a manner that no impact is generated at the beginning of the rotation and during the rotation (constant-speed rotation) and when the rotation is stopped. When the pulling chamber 5 reaches the semiconductor, At the block take-out position B, the stopper 25 provided on the side of the rotary cylinder 6 a causes the take-out position detector 2 6 composed of the limit switch to operate, the rotary motor 7 is stopped, and the pull chamber 5 is stopped at the semiconductor. Block removal position B. Since the stop position at this time does not require high accuracy, the take-out position detector 26 is provided near the support shaft 6a. As described above, after the pull-out chamber 5 is stopped at the semiconductor block take-out position B, it is crystallized by The pulling means 14 extends out of the rope 15 to lower the semiconductor block 10, and takes it out of the pulling chamber 5. At this time, since the semiconductor block 10 can be taken out at a lower position convenient for operation, the removal operation can also be easier and more convenient than the previous pulling device which previously took out the semiconductor block from a position higher than the vacuum chamber 4. Safely. When the semiconductor block 10 is taken out, the inside of the pulling chamber 5 is cleaned, and the like, a new seed crystal (not shown) is mounted on the cable 15 and the cable 15 is rolled up for the next pull. Preparing for the lead job. In this way, by repeating the above operation, the pulling of the single crystal can be performed continuously. In the above operation, the reference roller 1 7 b is not embedded in the reference guide 1 7 a -------- ^------- ΐτ ------ final (please read the note on the back first) Please fill in this page again for this matter) This paper size applies to Chinese national standards (CNS > Α4 size (210X297mm) -14- 44283 0 Printed by the Central Bureau of Prospecting Bureau, Ministry of Economic Affairs, Shellfish Consumer Cooperative, A7 B7_V. Description of the invention (12 ), Because the stop 18 will cause the vertical position shift detector 20 to operate, the signal from this vertical position shift detector 20 will cause the operation to stop urgently, which can prevent the device from malfunctioning or being damaged. Although the present invention is described with reference to the exemplified embodiments, the disclosed embodiments may be modified, omitted, or added to the design as long as they do not depart from the gist of the present invention. This should be familiar to them. It is understood by those skilled in the art. That is, the present invention is not limited to the above-mentioned embodiments, but also includes the range specified by the elements described in the scope of patent application and its equivalent range. With the following details The drawings and the drawings showing the embodiments of the present invention should be understood more clearly. Also, the embodiments shown in the drawings are not intended for specific users of the present invention. They are only provided for ease of explanation and understanding. The present invention is not limited to this. Fig. 1 is a side view of an embodiment of a single crystal pulling device according to the present invention. Fig. 2 is an enlarged view of the vicinity of a turning means of the single crystal pulling device of the above embodiment. Fig. 3 is an arrow view in the m direction in Fig. 2 "Fig. 4 is an enlarged view in the circle IV in Fig. 1. Fig. 5 is an arrow view in the V direction in Fig. 4. The arrow view in the VI direction. Figure 7 is the arrow view in the W direction in Figure 6. ---------! ------ ir ------ ^ < (Please first昶 Read the precautions on the reverse side and fill in this page.] This paper size applies to Chinese national standards (CNS > A4 size (2 丨 0X297mm) -15- 442830 A7 B7 V. Description of the invention (13) Figure 8 is the first Arrow view in the direction of vm in Fig. 6. Fig. 9 is an explanation printed by the staff consumer cooperative of the Central Bureau of the Ministry of Economic Affairs for explaining the function of the single crystal pulling device of the above embodiment. Fig. Symbol explanation FL floor surface, 1 unit body, la cylinder., 1 b bracket, 2 base, 3 stand, 4 vacuum chamber, '4 a main chamber, 4 b top chamber, 4 c opening * 5 pull Lead chamber, 5 b supporting member, 6 turning means, 6 a vertical support shaft 6 b turning drum, 6 c power transmission means, 6 d intermediate shaft, 6 e large gear, 6 f small gear, 7 rotating motor, 7 a Rotating shaft, 8 lifting means, 8 a lifting member, 8 b lifting cylinder, 8 c piston rod, 1 2 support table, 13 rotating means, 1 3 a rotating shaft, 13 b endless belt, 1 3 c rotary drive Source, 14 crystal pulling means, 1 4 a outer cover, 14 b casing, 1 4 c winder, 15 cable, 17 position determining means, 17 a reference guide, 1 7 b reference roller, paper The scale is applicable to China National Sample Standard (CNS) A4 specification (2 丨 0X297 mm) (Please read the note on the back before filling this page) Order! -16- A4283 0 A7 B7 V. Description of the invention (14) 1 7 c round hole, 1 7 d 1 7 e push part, 2 7 2 8 servo valve. Reference surface Oil pressure source, (please read the precautions on the back before filling out this page), 1 Γ J /. M I. Consumer Cooperatives, Central Government Bureau, Ministry of Economic Affairs, India
Iff -I I 本紙浪尺度適用中國國家標率（CNS ) A4*t格（210X297公釐） -17-Iff -I I The paper scale is applicable to China's national standard (CNS) A4 * t grid (210X297 mm) -17-