DE10102081A1 - Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber - Google Patents

Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber

Info

Publication number
DE10102081A1
DE10102081A1 DE2001102081 DE10102081A DE10102081A1 DE 10102081 A1 DE10102081 A1 DE 10102081A1 DE 2001102081 DE2001102081 DE 2001102081 DE 10102081 A DE10102081 A DE 10102081A DE 10102081 A1 DE10102081 A1 DE 10102081A1
Authority
DE
Germany
Prior art keywords
boiler
lock chamber
crystal pulling
characterized
system according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
DE2001102081
Other languages
German (de)
Inventor
Burkhard Altekrueger
Johann Scholler
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CRYSTAL GROWING SYSTEMS GMBH, 35614 ASSLAR, DE
Original Assignee
Crystal Growing Systems GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Crystal Growing Systems GmbH filed Critical Crystal Growing Systems GmbH
Priority to DE2001102081 priority Critical patent/DE10102081A1/en
Publication of DE10102081A1 publication Critical patent/DE10102081A1/en
Ceased legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30Mechanisms for rotating or moving either the melt or the crystal
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL-GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00Single-crystal growth by pulling from a melt, e.g. Czochralski method

Abstract

A crystal pulling system with a lifting device (20) is described which is required to disassemble the system for cleaning purposes. The lifting device (20) is constructed in such a way that all work on the boiler (3) or on the lock chamber (9) can be carried out with a single one of this type. The lifting device (20) is basically coupled to the lock chamber (9). With additionally pivotable arms (33) on the lifting device (20), a furnace boiler component (5) of the boiler (3) can also be lifted and pivoted outwards for cleaning purposes independently of the lock chamber (9).

Description

The invention relates to a crystal pulling system according to the preamble of claim 1. Like this again there is essentially a crystal pulling system an evacuable boiler and one arranged above it Lock chamber.

There is a heatable graphite in the process chamber of the boiler gel arranged in the silicon under a protective gas casing is melted. For pulling a kris talles becomes a vaccine through the lock chamber and down through an opening in the boiler's drawing pan driven and immersed in the melt. As soon as one has formed a sufficiently large initial crystal, it becomes slowly and with rotation back into the lock chamber drawn. The silicon atoms settle gradually to form a rod-shaped crystal, whereby this came into the locks according to its growth is always drawn.

The boiler is on a stable base, in which a lifting device for the crucible and others Utilities are arranged.

Part of the silicon oxidizes to silicon oxide, the is deposited on the inside walls of the boiler and that after two or three pulls must be removed so that no impurities arise in the crystal. After every Pulling process, the pulled crystal must be removed and if necessary a new batch of silicon is placed in the crucible the. In addition, parts of the heater for the  Crucibles may be replaced. For all these actions it is necessary to open the kettle and share. The boiler is therefore essentially out three components put together, one the floor of the boiler forming the bottom boiler, one on the bo Oven boiler component in the form of a Intermediate ring and a Ziehkes forming a cover sel.

Depending on the size of the boiler, several oven boilers can also be used components between the bottom boiler and the drawing boiler be provided.

A lifting device is located next to the boiler is coupled to the lock chamber. To open the Kessel first becomes the connection between the draw boiler and the furnace boiler component solved; then the lifting device is put into operation, whereby the Lock chamber with the drawing tank upwards is lifted and can be swung to the side. Now the opened boiler can be cleaned. Besides, can the pulled crystal through the opening in the drawing vessel drained down and the drawing boiler from below getting cleaned. Also the other hand mentioned above lungs can be performed.

With large boilers it is necessary to continue this to disassemble and in particular the boiler component from Remove floor cauldron to do the necessary work to be able to execute. The boiler is dismantled either with the help of two fitters or - if very heavy boilers - with the help of an additional lift direction. Both approaches are very cumbersome. Another lifting device makes access to the Kes difficult sel.  

The invention is therefore based on the task of a crisis to create a drawing machine in which the handling of the System when cleaning the boiler, when removing the ge pulled crystal, when introducing a new batch and ultimately ver also when cleaning the boiler is simple.

It is therefore proposed that the lifting device min at least one with one furnace boiler component each Has pelbaren gripper to the furnace boiler component to be able to lift with the lock chamber.

With the arrangement of grippers for the stove or stove sel components on the lifting device can also do this be used, the furnace boiler component from the floor boiler to remove the boiler as such to disassemble and bring it into a state in which the mentioned work can be carried out easily. It does not become a second separately constructed lifting device needed with a separate drive.

For the lifting device has the following structure endures. Next to the boiler is a column with an egg ner sliding sleeve, which can be moved with an drive is coupled. At least on the sliding sleeve two rotating sleeves rotatably, one upper rotating sleeve with the lock chamber and one or more un tere rotating sleeves with the or the boiler components can be coupled.

The rotating sleeves are rotatable in relation to the sliding sleeve but not slidably mounted in the axial direction, so that lifting the sliding sleeve is lifting at the same time the rotating sleeves and the parts coupled to them. An electrome has become the lifting drive for the sliding sleeve proven mechanical drive that consists of a snail and  at least one nut firmly connected to the sliding sleeve with internal thread. This drive requires little maintenance and can also be designed so that it can be easily and clean rooms can be used in which crystal drawing systems are often used.

The rotatability of the sleeves ensures that the Lock chamber and the furnace boiler components to the side one or the other side can be pivoted, as soon as they are separated from each other in the axial direction, and therefore easier to reach for the cleaning staff are.

So after lifting the lock chamber or so connected boiler parts and the furnace boiler component ge can be pivoted towards each other, they must be in separate from each other in the axial direction. This will be done before struck that the coupling with the lifting device ever Weil takes place over an empty path, the empty path for the lock chamber is smaller than the free travel for everyone Furnace boiler component. This means that when lifting the sliding sleeve and the associated rotating sleeves the next step is a coupling with the lock chamber and this is raised. The ovens then couple successively boiler components so that each has an axial distance between the raised parts. The coupling the lifting device with the lock chamber can to Er Achieving this purpose theoretically also with the idle path have the value 0: In principle, this could be also act as a rigid connection. One of 0 ver divergent free travel is provided to stretch the To be able to compensate the system when heating up.

The decisive factor, however, is an empty path different from 0 in the coupling between the grippers and the furnace boiler component. This has the consequence that the coupling  is only realized when the lock chamber has initially been raised a bit. Only after that will the furnace boiler component to form a distance tracked. When both parts have started up sufficiently, you can - as already mentioned above - from the side be pivoted.

If there are several boiler components, must the free travel downwards always get bigger, so that a successive coupling results and the parts in the attached state an axial distance from each other sen.

It is not always necessary for the boiler compo nente is also raised. This is e.g. B. then the Case when there is no cleaning process, but le only the pulled crystal from below from the sluice chamber should be removed. In this case the grippers are folded away to the side so that when Operating the lifting device no coupling between the Grippers and the furnace boiler component or the furnace boiler components.

The lifting device can also be used to to remove the crucible from the boiler and from the bottom boiler NEN. In this procedure, the connection between the Draw boiler and the furnace component solved while the drawing boiler is still attached to the lock chamber remains. To do this, the lock chamber is first up driven and then a lift to the edge of the drawing tank set dishes that are connected to the crucible. By lifting the lock chamber further, the The crucible was lifted out of the kettle and placed on the side become.  

The lifting gear preferably consists of at least two Hooks that can be releasably attached to the edge of the drawing boiler around an axis tangential to the edge of the drawing boiler are pivotable. In this case, the hooks ra dial into the boiler facing outwards and then be pivoted inwards so that their hooks heads an edge provided on the crucible fen.

Most systems are also with a lock vein til between the lock chamber and the drawing boiler seen. The lock valve enables the lock to lift the chamber completely separate from the boiler and to Swivel side to remove the pulled crystal without having to ventilate the boiler. Before the lock chamber is lifted, that is on Boiler remaining lock valve, which is usually called Plate valve is executed, closed.

In the following the invention is based on an embodiment example explained in more detail. Show this

Fig. 1 system is a longitudinal section through a crystal pulling,

Fig. 2 is a longitudinal section through a Aufnahmege shirr,

Fig. 3 is a plan view of the recording harness of Fig. 2,

Fig. 4 is a perspective view of a crystal pulling system with two Ofenkesselkom components.

First, reference is made to FIG. 1. The Kris tallziehanlage is designated as a whole with 1. It consists of a basic structure 2 on which the boiler 3 is placed on. In this example, this boiler 3 consists of a floor boiler 4 , a furnace boiler component 5 and a drawing boiler 6 . Other designs not shown here can also have multiple furnace boiler components.

The components of the boiler face each other the facing ends flanges with which they run can be tightly connected.

In the boiler 3 there is a crucible 48 shown in FIG. 4, into which silicon is introduced and melted.

The drawing boiler 6 has a central opening 7 , on which a plate valve 8 is attached. This is followed by the so-called lock chamber 9 . This is a tubular structure in the length of the crystal 10 to be drawn, which is indicated here by dash-dot lines.

Above the lock chamber 9 there is a cable pulling device 11 with which the crystal 10 is pulled out of the melt in accordance with its growth.

The melting and drawing process takes place in an argon atmosphere, ie an argon stream is sent as a flushing stream through the boiler 3 . The corresponding supply devices are arranged in the basic structure 2 . There is also a lifting device for the crucible, which ensures that the surface of the melt is always at a constant height during the drawing process.

Some crystal pulling systems are also equipped with a ring magnet. The lifting device for this lifting magnet is also arranged in the basic structure 2 .

The lifting device for the lock chamber 9 and the Kes sel 3 is designated as a whole by 20. It consists of a column 21 , which stands next to the boiler 3 and is anchored in the basic structure 2 . In the upper part of the column 21 , a sliding sleeve 22 is slidably mounted. On this sliding sleeve 22 , two rotating sleeves 23 , 24 are arranged one above the other. These can not move axially relative to the sliding sleeve 22 , but can be rotated on it.

On a bracket 25 extending parallel to the column 21 , an electric motor 26 is fastened, which drives a screw 27, which also extends parallel to the column 21 . On this screw 27 there is an upper and a lower nut 28 , 29 , each provided with an internal thread, which is firmly connected to the sliding sleeve 22 . Rotation of the screw 27 therefore causes the sliding sleeve 22 to move up and down on the column 21 . The upper rotating sleeve 23 is connected to an upward-extending traverse 30 , on the top of which the aforementioned cable pulling device 11 is arranged. Halfway up the traverse 30 there is a double arm 31 which engages around the lock chamber 9 on both sides and the ends of which are located below the small steps 32 on the lock chamber 9 . When the lock chamber 9 is lowered, there is a small free path between the arms 31 and shoulders 32 . This is necessary so that no squeezing occurs when the boiler heats up.

On the lower rotary sleeve 24 there are two arms 33 which can be swiveled away laterally as grippers, of which only one arm is shown. The other is not visible behind the boiler 3 in this position. The two arms 33 encompass the furnace boiler component 5 on both sides and lie in the lowered state of the boiler 3 while maintaining an empty path below the upper flange of the furnace boiler component 5 .

The illustration of the figure shows the lifting device 20 in its uppermost stop position, the double arm 31 resting on the shoulder 32 on the lock chamber 9 and the two inwardly pivoted arms 33 on the flange of the furnace boiler component 5 . Since these have each previously passed under a different idle path, the Ofenkes sel component 5 has been offset to the lock chamber 9 , so that, as shown, a distance is present between the drawing chamber 6 connected to the lock chamber 9 and the furnace boiler component 5 . The lock chamber 9 and the furnace boiler component 5 can be pivoted outwards from the position shown, ie pivoted outwards and backwards from the plane of the drawing. In this position there is easy access to both parts, so that they can be easily cleaned or the crystal 10 can be removed after opening the plat tenventils 8 .

The arms 33 are pivotally mounted on the rotating sleeve 24 so that they can be pivoted outwards. In such a case, the furnace boiler component 5 is not taken along when the sliding sleeve 22 is started up. It will remain much more sitting on the floor pan 4 . Such a mode can be selected when it is only a matter of removing the crystal 10 from the lock chamber 9 . For this purpose, the connection between the plate valve 8 and the lock chamber 9 can be disconnected beforehand.

To clean the valve, in particular for cleaning the underside of the valve plate, only the Verbin can connection between the disc valve 8 and dissolved the drawing boiler 6 and the arms are pivoted 33 outwards, so that by lifting the load lock chamber to gether 9 with the plate valve 8 is raised. The valve is now easily accessible from below and can be cleaned.

Another operating mode is to solve the connec tion between the plate valve 8 and the lock chamber 9 , so that only this is raised. Now the plate valve 8 can be cleaned from above or the crystal 10 can be removed.

The lifting device 20 can also be used to remove the crucible from the boiler 3 . For this purpose, on the drawing boiler flange 40 - as shown in FIG. 2 - a lifting harness is attached, which consists of two or more hooks 41 . The hooks 41 are pivotally held on a bracket 42 , which is fastened to the Ziehkes selflansch 40 via a latching device 43 . On the bracket 42 , the hook 41 is pivotally mounted about an axis 44 . A spring 45 in the hook 41 , which is supported on the clarifier 42 , ensures that the hook 41 is always pivoted outwards. The hook 41 aligned in this way can be inserted into the boiler 3 , the hook head 46 moving past an undercut on the outside of the crucible 48 . Now the hook head 46 can be pivoted inwards. For this purpose, a screw 47 , which is screwed into the upper part of the hook 41 , is tightened, as a result of which it is supported on the bracket 42 and the hook 41 pivots ver about the axis 44 against the force of the spring 45 , so that the hook head 46 inwards pivots and engages undercut on the crucible 48 .

By moving the sliding sleeve 22 , the crucible 48 is now pulled out of the boiler 3 and can optionally be set down laterally. In a corresponding manner, a new crucible can be inserted into the boiler 3 .

Fig. 4 shows a perspective view of a crystal pulling system with two furnace components 5 a, 5 b. It can be seen that the plate valve 8 and the drawing boiler 6 are attached to the lock chamber 9 and the unit thus formed is pivoted to one side. The upper boiler component 5 a is also raised by means of the arms 33 a but pivoted to the other side. The lower boiler component 5 b is pivoted with another pair of arms 33 b under the lock chamber 9 . The crucible 48 is exposed and can easily be reloaded with silicon. The other components of the boiler are easily accessible and can be cleaned easily.

LIST OF REFERENCE NUMBERS

1

Crystal puller

2

backbone

3

boiler

4

floor boilers

5

Furnace boiler component

5

a Furnace boiler component

5

b Furnace boiler component

6

drawing boiler

7

opening

8th

plate valve

9

lock chamber

10

crystal

11

cable equipment

20

lifting device

21

pillar

22

sliding sleeve

23

rotating sleeve

24

rotating sleeve

25

hanger

26

electric motor

27

slug

28

nut

29

nut

30

traverse

31

double arm

32

paragraph

33

poor

33

a arm

33

b arm

34

attack

40

Ziehkesselflansch

41

hook

42

clip

43

locking device

44

axis

45

feather

46

hook head

47

screw

48

crucible

Claims (10)

1.Crystal pulling system with an evacuable boiler, which consists of a drawing boiler with an opening, a boiler and at least one furnace boiler component and in which a crucible with a melt can be introduced, with a lock chamber that can be connected to the drawing boiler above the opening for receiving the drawn crystal and with a lifting device in order to be able to lift the lock chamber, characterized in that the lifting device ( 20 ) has at least one gripper ( 33 ) which can be coupled to a respective furnace boiler component ( 5 ), in order to connect it to the lock chamber ( 9 ) to be able to lift.
2. Crystal pulling system according to claim 1, characterized in that the lifting device ( 20 ) has a vertical ne ben the boiler ( 3 ) erected column ( 21 ) with a sliding sleeve up there displaceable ( 22 ) which is coupled to a drive.
3. crystal pulling system according to claim 2, characterized in that on the sliding sleeve ( 22 ) at least two rotating sleeves ( 23 , 24 ) are rotatably mounted, an upper rotating sleeve ( 23 ) with the lock chamber ( 9 ) and one or more lower rotating sleeves ( 24 ) can be coupled to the furnace boiler components ( 5 , 5 a, 5 b).
4. crystal pulling system according to claim 2 or 3, characterized in that the drive from a screw ( 27 ) and at least one with the sliding sleeve ( 22 ) verbun which nut ( 28 , 29 ) with internal thread.
5. crystal pulling system according to claim 3, characterized in that the coupling of the lifting device ( 20 ) with the lock chamber ( 9 ) and the one or the furnace components ( 5 , 5 a, 5 b) each take place over an idle path, the idle path for the lock chamber ( 9 ) is smaller than the free travel for each furnace boiler component ( 5 , 5 a, 5 b).
6. crystal pulling system according to claim 5, characterized in that at least two stacked boiler components ( 5 , 5 a, 5 b) are present, the free travel of each upper boiler component is smaller than the free travel of each furnace boiler component arranged below it.
7. crystal pulling system according to claim 5, characterized in that the one or more grippers ( 33 , 33 a, 33 b) of the furnace boiler component ( 5 ) are movable outwards.
8. crystal pulling system according to claim 5, characterized in that a plate valve ( 8 ) between the lock chamber ( 9 ) and the drawing boiler ( 6 ) is arranged and at least releasably connected to the lock chamber ( 9 ).
9. Crystal pulling system according to one of the preceding claims, characterized in that lifting gear ( 41 , 42 ) for receiving the crucible ( 48 ) can be fastened to the flange of the drawing vessel ( 6 ).
10. crystal pulling system according to claim 9, characterized in that the lifting gear ( 41 , 42 ) consists of at least two hooks ( 41 ) which are releasably attached to the edge of the drawing vessel ( 6 ) and around an axis tangential to the drawing edge ( 44 ) are pivotable.
DE2001102081 2001-01-18 2001-01-18 Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber Ceased DE10102081A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE2001102081 DE10102081A1 (en) 2001-01-18 2001-01-18 Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2001102081 DE10102081A1 (en) 2001-01-18 2001-01-18 Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber
FI20020074A FI120407B (en) 2001-01-18 2002-01-15 The crystal drawing plant
ITMI20020072 ITMI20020072A1 (en) 2001-01-18 2002-01-16 crystallization device

Publications (1)

Publication Number Publication Date
DE10102081A1 true DE10102081A1 (en) 2002-07-25

Family

ID=7670941

Family Applications (1)

Application Number Title Priority Date Filing Date
DE2001102081 Ceased DE10102081A1 (en) 2001-01-18 2001-01-18 Crystal pulling device comprises an evacuated boiler and a lifting unit having a gripper connected to an oven boiler component to lift it with a sluice chamber

Country Status (3)

Country Link
DE (1) DE10102081A1 (en)
FI (1) FI120407B (en)
IT (1) ITMI20020072A1 (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US3650701A (en) * 1970-07-22 1972-03-21 Commissariat Energie Atomique Apparatus for growing crystalline bodies
DE19857253A1 (en) * 1997-12-11 1999-06-17 Komatsu Machinery Corp Single crystal lifting equipment includes a winch positioning mechanism
US5944892A (en) * 1996-02-28 1999-08-31 General Signal Technology Corporation Multiple station crystal growing system and method of using same
US6019841A (en) * 1997-03-24 2000-02-01 G.T. Equuipment Technologies Inc. Method and apparatus for synthesis and growth of semiconductor crystals

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2975036A (en) * 1956-10-05 1961-03-14 Motorola Inc Crystal pulling apparatus
US3650701A (en) * 1970-07-22 1972-03-21 Commissariat Energie Atomique Apparatus for growing crystalline bodies
US5944892A (en) * 1996-02-28 1999-08-31 General Signal Technology Corporation Multiple station crystal growing system and method of using same
US6019841A (en) * 1997-03-24 2000-02-01 G.T. Equuipment Technologies Inc. Method and apparatus for synthesis and growth of semiconductor crystals
DE19857253A1 (en) * 1997-12-11 1999-06-17 Komatsu Machinery Corp Single crystal lifting equipment includes a winch positioning mechanism

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JP 11228284 A.,In: Patent Abstracts of Japan *

Also Published As

Publication number Publication date
FI20020074D0 (en)
FI120407B1 (en)
FI120407B (en) 2009-10-15
FI20020074A0 (en) 2002-01-15
ITMI20020072A1 (en) 2003-07-16
ITMI20020072D0 (en) 2002-01-16
FI20020074A (en) 2002-07-19

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
8127 New person/name/address of the applicant

Owner name: CRYSTAL GROWING SYSTEMS GMBH, 35614 ASSLAR, DE

8110 Request for examination paragraph 44
R016 Response to examination communication
R002 Refusal decision in examination/registration proceedings
R003 Refusal decision now final

Effective date: 20140207