TW386114B

TW386114B - Single crystal pulling up apparatus

Info

Publication number: TW386114B
Application number: TW86112595A
Authority: TW
Inventors: Kiyofumi Nishiura
Original assignee: Sumitomo Sitix Corp
Priority date: 1997-09-02
Filing date: 1997-09-02
Publication date: 2000-04-01

Description

經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（彳）【發明所屬之技術領域】本發明係關於利用切克勞斯基法（Czochralski method，以下’稱爲「C Z」法），_來製造單結晶之提拉裝置，更詳細言之，係關於在製造重量大之單結晶時，能夠防止單結晶落下而能將單結晶安全地提拉上來之單結晶提拉裝置。【習知技術】單結晶之製造方法有許多種，其中，關於矽單結晶之育辑，C Z法被作爲工業上之量產方式而被廣泛地使用。根據此方法之單結晶的製造，係藉由使種結晶接觸收容在坩堝內的結晶原料之溶融液的表面，使增堝旋轉，且一邊使此種結晶往相反方向旋轉—邊往上提拉之手段，則溶融液凝固在種結晶之下端’來育成單結晶。在藉由C Z法來製造單結晶之情況，必須完全除去由於種結晶接觸溶融液時之熱震盪所發生的轉位’而不要影響到單結晶的本體。通常’作爲此對策’爲了將轉位由結晶表面排除而使單結晶無轉位化’採用使直徑縮小變成細長之所謂的「縮徑處理（Dash’s neck)」°此時之無轉位化所必要的直徑約爲3mm ’其長度約爲3 0mm。以往，根據C Z法所製造的單結晶之重量，在2 0.〜 3 0公斤以內’然而’ 效—率化之要求，而有使單結晶大直徑化和長度化之傾向’因此單結晶之重量經常超過1 0 0 k g。單結晶之重量係由縮徑之本紙張纽適财關家標準(CNS ) A4· ( 210X297公釐） (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (彳) [Technical field to which the invention belongs] This invention relates to the use of the Czochralski method (hereinafter referred to as the "CZ" method) To produce a single crystal pulling device, in more detail, it relates to a single crystal pulling device that can prevent the single crystal from falling down and can safely pull up the single crystal when manufacturing a single crystal with a large weight. [Know-how] There are many methods for manufacturing single crystals. Among them, the CZ method is widely used as an industrial mass production method for the production of silicon single crystals. According to this method, the single crystal is manufactured by contacting the seed crystal with the surface of the melting solution of the crystalline raw material contained in the crucible, rotating the pot, and rotating the crystal in the opposite direction while pulling up the crystal. By means of this, the molten solution solidifies under the seed crystals to produce single crystals. In the case of producing a single crystal by the CZ method, it is necessary to completely remove the translocation caused by the thermal shock of the seed crystal when it contacts the molten solution, without affecting the body of the single crystal. In general, "as a countermeasure", a single crystal is not transposed in order to exclude the translocation from the crystal surface. The so-called "Dash's neck" is used to reduce the diameter and make it elongated. The necessary diameter is about 3mm 'and its length is about 30mm. In the past, the weight of single crystals produced according to the CZ method was within 20. to 30 kilograms. However, the requirement of efficiency-rate reduction has tended to increase the diameter and length of single crystals. The weight often exceeds 100 kg. The weight of the single crystal is reduced by the size of this paper New Zealand Financial Standard (CNS) A4 · (210X297mm) (Please read the precautions on the back before filling this page)

經濟部中央標準局員工消費合作社印裝 A7 B7___ 五、發明説明（2 ) 縮徑部所負擔，由上所述，製造的單結晶之重量增大，然而能夠負擔的重量卻有一定之限制。若單結晶過重，且加上扭轉或彎曲應力，則單結晶之縮徑部破損，單結晶落下至坩堝內之溶融液中，進而發生提拉裝置之損傷或溶融液之流出、水蒸氣爆發等事故，也有可能發生人員傷亡。因此，作爲爲了防止隨著單結晶之大直徑化而可能帶來之單結晶落下的事故，提出改善後之提拉裝置。（例如，日本特開平3 — 28 5 893號公報、日本特開平 3 — 2 9 5 8 9 3號公報）。亦即，在單結晶之上部形成卡合段部，藉由採用具有多數之爪、或是具有爪之多數個把持夾持具，來卡合.把持此卡合段部，防止提拉途中之單結晶落下。因此，若使甩上述提案之提拉裝置，即使在提拉大重量之單結晶之情況，也能夠確實且安全地進行單結晶之提拉。日本特開平3 - 2 8 5 8 9 3號公報以及日本特開平 3 _ 2 9 5 8 9 3號公報所揭示之提拉裝置，如前所述，以爪 '或是具有爪之把持夾持具，來卡合.把持形成在單結晶上之卡合段部；此時，爲了維持品質，必須使被提拉之單結晶之中心位置與提拉軸之偏移變無。因此，.上述提拉裝置，設置作爲此對策之多數爪或是多數個把持夾持具，藉由各個爪或是把持夾持具之微調整，來消除偏移，確實地卡合·把持在卡合段部上。然而，由於單結晶之提拉係在密閉之真空室內進行，通吊’爲了配.合持續上升及旋轉.之單結晶的卡合段部，由本紙張尺度適用中國國家摇準（CNS ) A4規格（210X297公釐） ' (請先間讀背面之注$項再填寫本頁) # 訂 -線J. -5- A7 ΒΊ________ 五、發明説明（3 ) 外部遙控操作來微調整爪或是把持夾持具之動作，是非常困難的。因此，容易發生卡合段部之卡合·把持位置之調整不良的情況，一旦位置發生偏移-，不但所提拉之單結晶之品質顯著地變差，而且提拉中的單結晶被施加扭力而使單結晶傾斜，有可能脫離爪或是把持夾持具之卡合，發生單結晶落下之情況。【發明之揭示】本發明係爲了解決上述以往的提拉裝置的問題點而發明出來，其目的爲提供一種單結晶提拉裝置，能夠確實地卡合·把持單結晶之卡合段部，即使在提拉大重量之單結晶的情況，也不會發生落下事故，能有效率且安全地製造單結晶。由此觀點而完成之本發明的單結晶提拉裝置，其要旨如以下之第1、第2及第3提拉裝置。 1 .第1提拉裝置經濟部中央標準局員工消費合作社印製 (諳先閱讀背面之注意事項再填寫本頁) 線如後述之第1圖及第6圖所述，針對具備：在一邊旋轉一邊被提拉之單結晶中，形成倒圓錐狀之卡合段部6之線式主提拉手段21;及經由卡合構件來把持此單結晶之卡合段部的保持機構；及使此保持機構升降之線式輔助提拉手段2 2的單結晶提拉裝置，其特徵爲：前述輔助提拉手段係經由保持機構之傾斜防止手段 1 6來使保持機構升降，且使前述保持機構與前述主提拉手段之提拉速度同一步調地上升。本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐) -6- A7 B7______ 五、發明説明（4 ) "一 ·. ——-------------· — - — _____________________________________ · / 在上述提拉裝置中，希望將主提拉手段2 1、輔助提拉手段2 2之一方的驅動馬達設成速度控制，而將另一方之驅動馬達設成張力控制。藉由採_用如此之控制方式，能夠一邊調整單結晶之提拉速度和主提拉手段及輔助提拉手段的荷重分擔，一邊實施單結晶之提拉。上述之保持機構的卡合構件，藉由連桿14或是夾持桿1 5之作用，使用可減少卡合段部之圓周方向形狀的不均一性之具有自動夾持機能的構件。藉由此手段，即使卡合段部之形狀不均一，也希望能以面接觸來保持單結晶之卡合段部，來防止單結晶之落下事故的發生。在此，所謂的「具有自動夾持機能的卡合構件」，如後述之第1圖、第3圖或是第6圖所示，，藉由連桿1 4或是夾持桿1 5之作用，若被往上方推壓則容易開放，若被往下壓則閉合，能夠充分地卡合·把持卡合部分之卡合.把持之卡合構件 (例如，夾板爪13、連桿14、銷34及長穴35，或是夾持桿1 5 )。經濟部中央標準局貝工消費合作社印製 (餚先閎讀背面之注意事頰再填寫本頁) 而且，在上述提拉裝置中，取代主提拉手段2 1以及輔助提拉手段2 2之線式，也可以藉由螺栓之旋轉作用來形成可以獨立地升降之構造（參照後述之第8圖藉由採用如此之構造，可以消除提拉軸之偏移，不需要藉由均衡裝置等所構成之保持檄構之傾斜防止手段。 2 .第2提拉裝置如後述之第9圖所示，係針對具備：在一邊旋轉一邊本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 B7______ 五、發明説明(5 ) 被提拉之單結晶中，形成倒圓錐狀之卡合段部6之主提拉手段2 1 ;及把持此單結晶之保持機構1 1 ;及使此保持機構與前述主提拉手段之提拉速度-一致地上升之輔助提拉手段的單結晶提拉裝置，其特徵爲：在前述保持機構中，設置隨著此升降而在規定之升降位置處，上下移動之推桿4 4 ;及藉由此推桿之上升動作而旋轉，來卡合·把持前述單結晶之卡合段部6的卡合構件4 1 〇在此，所謂設置在保持機構中的「卡合構件」，如後述之第9圖、第11圖所示，係由保持桿4 2和旋轉桿 4 3 —體地構成。而且，卡合構件之中的旋轉桿4 3之先端部，與推桿4 4抵接。 ’ 在第2提拉裝置中，主提拉手段2 1和輔助提拉手段經濟部中央標準局貝工消費合作社印製 (請先聞讀背面之注意事項再填寫本頁) 線、 2 2，藉由線之捲上、捲下而能獨立地升降；而且，輔助提拉手段2 2，經由保持機構之傾斜防止手段1 6，能夠使保持機構1 1升降。藉由如此之構成，能夠消除保持機構1 1之傾斜，能夠安定地進行提拉操作及提高單結晶之品質。而且，在第2提拉裝置中，主提拉手段2 1和輔助提拉手段2 2也可以藉由螺栓之旋轉作用來構成獨立地升降之構造。在此情況下，因爲能夠消除提拉軸之偏移，所以不需要保持機構之傾斜防止手段。 3 .第3提拉裝置本紙張尺度適用中國國家標隼（CNS > A4規格（210X297公釐) ~ -8- 經濟部中央標隼局員工消費合作杜印製 A7 __；__'__B7__________ 五、發明説明（6 ) 如後述之第1 2.圖所示，係針對具備：一邊使被支持在種結晶夾.持具1 0上的單結晶旋轉.一邊提拉，來形成倒圓錐狀之卡合段部的提拉手段5 2-;及經由卡合構件來把持此單結晶之卡合段部6的保持機構11;及收容這些機構之金屬室53的單結晶提拉裝置，其特徵爲：前述種結晶夾持具10，具有隨著單結晶之育成而延伸之構造，而且，前述保持機構1 1，以卡合構件來把持單結晶之卡合段部後，與種結晶夾持具同一步調地一邊旋轉一邊被提拉。在第3提拉裝置中，種結晶夾持具1 〇之上部夾持具和下部夾持具能夠互相滑動，且作成內藏彈簧之構造。又 ’在保持機構1 1之朝下的外周面上，配置磁石5 5，而在與此相對之金屬室之朝上的內周面上，也配置磁石5 5 ，希望形成保持機構爲磁力浮上之構造。【本發明之實施形態】將本發明之單結晶提拉裝置區分成以下之第1、第2 及第3提拉裝置，來具體地說明。 1 .第1提拉裝置在本發明之第1提拉裝置中，藉由主提拉手段使種結晶接觸溶融液面後，一邊旋轉一邊提拉來進行縮徑處理，接著’使單結晶形成倒圓錐狀之卡合段部後，進行軸肩部之形成及單結晶本體之提拉。另一方面，隨著提拉之進展 I紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁) 訂 -9 - 經濟部中央標隼局員工消費合作社印製 A7 B7 五、發明説明（7 ) ’單結晶之重量增加，在達到縮徑部所能負擔之重量的界限之前，轉移成藉由輔助提拉手段來支持單結晶。其具體的動作爲，當藉由輔犰提拉手段之下降操作，使在上方待機中的保持機構下降之時，設置在保持機構之卡合構件被單結晶之倒圓錐狀之卡合段部往上推壓而開放之狀態下，通過直徑擴大部7。然後，若單結晶之重量負荷在卡合構件上，則卡合構件藉由連桿或是夾持桿的作用而發揮自動夾持機能。此時，藉由均衡裝置等之保持機構之傾斜防止手段，來確實地把持單結晶之卡合段部，同時防止提拉中的單結晶位置偏移。若保持機構完成單結晶之卡合.把持，則主提拉手段和輔助提拉手段以同一步調地使保持機構上升。而且，將主提拉手段之主馬達設成速度控制，而將輔助提拉手段之輔助馬達設成張力控制，能夠控制單結晶之提拉速度和荷 _重分擔。以下，參照圖面來說明第1提拉裝置之具體構成例 (實施例1〜實施例3 )。 1 _ 1 .實施例1 第1圖係說明本發明之第1提拉裝置之實施例i之全體構成的縱剖面圖。如第1圖所示，增渦1配置在真空室 (未圖示）內之中心位置處，其內部收容作爲原料之多結晶矽之溶融液2。在堪堝1的上方，.配置種結晶夾持具 1 0、保持機構1 1 ;在更上方處，設置作爲一邊使矽單本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐)~~' ~ (诗先閲讀背面之注意事項再填寫本頁.)Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7___ V. Description of the invention (2) As mentioned above, the weight of the single crystal produced increases, but the weight that can be afforded is limited. If the single crystal is too heavy, and the torsional or bending stress is added, the reduced diameter portion of the single crystal will be damaged, and the single crystal will fall into the molten liquid in the crucible, which will cause damage to the pulling device, the outflow of the molten liquid, and water vapor explosion. Accidents may also result in casualties. Therefore, in order to prevent an accident that the single crystal may fall due to the increase in the diameter of the single crystal, an improved pulling device is proposed. (E.g., Japanese Patent Laid-Open No. 3-28 5 893, Japanese Patent Laid-Open No. 3-2 9 5 8 93). That is, the engaging section is formed on the upper part of the single crystal, and it is engaged by using a plurality of grippers having a plurality of claws or a plurality of claws. Holding the engaging section prevents the part from being pulled in the middle of lifting. Single crystals fell. Therefore, if the pulling device proposed above is thrown away, even in the case of pulling a single crystal with a large weight, the pulling of the single crystal can be performed reliably and safely. The lifting device disclosed in Japanese Patent Application Laid-Open No. 3-2 8 5 8 9 3 and Japanese Patent Application Laid-Open No. 3 _ 2 9 5 8 9 3, as described above, is held by a claw 'or a grip with a claw. At this time, in order to maintain the quality, it is necessary to make the center position of the single crystal being pulled and the offset of the pulling axis no longer in order to maintain the quality. Therefore, the above-mentioned lifting device is provided with a plurality of claws or a plurality of gripping clamps as a countermeasure, and the fine adjustment of each claw or the gripping clamps is used to eliminate the offset, and the clamps are reliably engaged and held. Engagement section. However, since the pulling of the single crystal is performed in a closed vacuum chamber, the lifting section of the single crystal is suspended for the purpose of matching, continuous rising and rotating, and the Chinese standard (CNS) A4 specification applies to this paper standard. (210X297 mm) '(please read the note on the back before filling this page) #)-线 J. -5- A7 ΒΊ ________ V. Description of the invention (3) External remote control to fine-adjust the claws or grips The movement of holding is very difficult. Therefore, it is easy to cause poor adjustment of the engagement and holding position of the engaging section. Once the position is shifted-not only the quality of the single crystal being pulled is significantly deteriorated, but also the single crystal during the pulling is applied. The torsional force tilts the single crystal, which may cause the single crystal to fall away from the claw or the grip of the gripper, and the single crystal may drop. [Disclosure of the invention] The present invention was invented in order to solve the problems of the conventional pulling device described above, and its purpose is to provide a single crystal pulling device that can reliably engage and hold the engaging section of the single crystal, even if When a single crystal with a large weight is lifted, a drop accident does not occur, and the single crystal can be efficiently and safely produced. The single crystal pulling device of the present invention completed from this viewpoint has the gist of the following first, second and third pulling devices. 1. Printed by the Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs of the 1st Pulling Device (谙 Please read the precautions on the back before filling this page) The line is described in Figures 1 and 6 below. In the single crystal being pulled on one side, a linear main pulling means 21 of an inverted conical engaging section 6 is formed; and a holding mechanism for holding the engaging section of the single crystal via an engaging member; and The single crystal pulling device of the linear auxiliary lifting means 22 for lifting and lowering the holding mechanism is characterized in that: the auxiliary lifting means is to raise and lower the holding mechanism via the tilt preventing means 16 of the holding mechanism, and the holding mechanism and The lifting speed of the aforementioned main lifting means increases at the same pace. This paper size applies to China National Standard (CNS) A4 specification (210X297 mm) -6- A7 B7______ V. Description of the invention (4) " I .. ----------------- · —-— _____________________________________ · / In the above-mentioned lifting device, it is desirable to set the driving motor of one of the main lifting means 21 and the auxiliary lifting means 2 2 to speed control, and set the drive motor of the other to tension control. By adopting such a control method, it is possible to carry out the pulling of the single crystal while adjusting the pulling speed of the single crystal and the load sharing of the main pulling means and the auxiliary pulling means. As the engaging member of the holding mechanism described above, a member having an automatic clamping function can be used to reduce unevenness in the circumferential shape of the engaging section by the action of the connecting rod 14 or the clamping rod 15. By this means, even if the shape of the engaging section is not uniform, it is desirable to keep the engaging section of the single crystal by surface contact to prevent the occurrence of the falling accident of the single crystal. Here, the so-called "engagement member having an automatic clamping function" is shown in Fig. 1, Fig. 3 or Fig. 6 described later. It is easy to open if it is pushed upward, and closed when it is pushed downward. It can fully engage and hold the engagement of the engagement part. The engagement engagement member (for example, the clamping jaw 13 and the connecting rod 14) , Pin 34 and long hole 35, or clamping rod 15). Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (read the notes on the back before filling this page), and in the above lifting device, replace the main lifting means 21 and the auxiliary lifting means 2 2 The linear type can also be used to form a structure that can be raised and lowered independently by the rotation of the bolt (refer to Figure 8 described below. By adopting such a structure, the offset of the lifting shaft can be eliminated, without the need for an equalizing device, etc. The structure prevents the structure from tilting. 2. The second lifting device is shown in Figure 9 below, which is designed to have the following: the paper size is applied to the Chinese National Standard (CNS) A4 specification (210X297 mm) while rotating ) A7 B7______ 5. Description of the invention (5) In the single crystal being pulled, the main pulling means 2 1 forming the inverted cone-shaped engaging section 6; and the holding mechanism 1 1 holding the single crystal; and The single-crystal pulling device of the holding mechanism and the pulling speed of the main pulling device-the auxiliary pulling device rising uniformly is characterized in that the holding mechanism is provided at a predetermined lifting position along with the lifting ,on The pusher 4 4 which moves downwards; and the engaging member 4 1 of the single crystal engaging section 6 is engaged and held by the pusher's upward movement, and it is referred to as being provided in the holding mechanism. The "engagement member", as shown in Figs. 9 and 11 to be described later, is integrally composed of the holding rod 4 2 and the rotating rod 4 3. In addition, the tip of the rotating rod 4 3 among the engaging members. Department, abutting with putter 4 4. 'In the second lifting device, the main lifting device 21 and the auxiliary lifting device 21 are printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back first) Fill in this page again) The thread and 2 2 can be raised and lowered independently by winding up and down the thread; and the auxiliary lifting means 2 2 and the tilting prevention means 16 of the holding mechanism can make the holding mechanism 1 1 With this structure, the tilt of the holding mechanism 11 can be eliminated, the pulling operation can be performed stably, and the quality of the single crystal can be improved. Furthermore, in the second pulling device, the main pulling means 21 and the auxiliary lifting means The pulling means 2 2 can also constitute an independent lifting structure by the rotation of the bolt. In this case, because the displacement of the lifting shaft can be eliminated, the means for preventing the tilt of the holding mechanism is not required. 3. The third lifting device This paper size applies the Chinese national standard (CNS > A4 specification (210X297) %) ~ -8- Consumption cooperation of employees of the Central Bureau of Standards of the Ministry of Economic Affairs, printed A7 __; __'__ B7__________ V. Description of the invention (6) As shown in the second figure below, it is aimed at having: The single crystal rotates on the crystal holder. The holder 10 is rotated. While pulling, the pulling means 5 2- to form an inverted cone-shaped engaging section portion; and the engaging of the single crystal through the engaging member The holding mechanism 11 of the section 6; and the single crystal pulling device of the metal chamber 53 that houses these mechanisms are characterized in that the aforementioned crystal holder 10 has a structure that extends as the single crystal is grown, and The holding mechanism 11 holds the engaging section of the single crystal with an engaging member, and then pulls it while rotating in the same step as the seed crystal holder. In the third pulling device, the seed crystal holder 10 and the upper holder and the lower holder can slide with each other, and a structure with a built-in spring is formed. Also, magnets 5 5 are arranged on the downwardly facing outer peripheral surface of the holding mechanism 11, and magnets 5 5 are also arranged on the inner peripheral surface of the metal chamber facing upward, and it is desirable to form the holding mechanism for magnetically floating. Of the structure. [Embodiment of the present invention] The single crystal pulling apparatus of the present invention is divided into the following first, second, and third pulling apparatuses, and specifically described. 1. The first pull-up device In the first pull-up device of the present invention, after the seed crystals are brought into contact with the molten liquid surface by the main pull-up means, they are pulled down while being rotated to perform a diameter reduction treatment, and then 'form a single crystal. After the inverted conical engaging section is formed, the shoulder portion is formed and the single crystal body is pulled up. On the other hand, as the lifting progresses, the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the precautions on the back before filling this page) Order-9-Central Bureau of Standards, Ministry of Economic Affairs Printed by employees 'consumer cooperative A7 B7 V. Description of the invention (7)' The weight of the single crystal increases, and before reaching the limit of the weight that can be afforded by the reduced diameter section, it is transferred to support the single crystal by means of auxiliary lifting. The specific action is that when the holding mechanism in the upper standby mode is lowered by the lowering operation of the auxiliary arm lifting means, the engaging member provided on the holding mechanism is formed by a single-crystal inverted cone-shaped engaging section. In the state of being pushed up and opened, the diameter-enlarging portion 7 is passed. Then, if the weight of the single crystal is loaded on the engaging member, the engaging member exerts an automatic clamping function by the action of a connecting rod or a clamping rod. At this time, the tilting prevention means of the holding mechanism such as an equalization device can surely hold the engaging section of the single crystal and prevent the position of the single crystal from being shifted during lifting. If the holding mechanism completes the engagement and control of the single crystal, the main lifting means and the auxiliary lifting means will raise the holding mechanism at the same pace. Moreover, setting the main motor of the main pulling means to speed control and the auxiliary motor of the auxiliary pulling means to tension control can control the pulling speed and load sharing of the single crystal. Hereinafter, a specific configuration example of the first lifting device (Embodiment 1 to Embodiment 3) will be described with reference to the drawings. 1 _ 1. Embodiment 1 FIG. 1 is a longitudinal sectional view illustrating the overall configuration of Embodiment i of the first lifting device of the present invention. As shown in Fig. 1, the vortex increaser 1 is disposed at a center position in a vacuum chamber (not shown), and the inside thereof contains a polycrystalline silicon melt solution 2 as a raw material. On the top of Can 1, there is a crystal seed holder 10 and a holding mechanism 1 1; on the upper side, it is set as a side so that the size of the silicon single paper can be applied to the Chinese National Standard (CNS) A4 specification (210X297 mm). ~~ '~ (Read the notes on the back of the poem before filling out this page.)

-10- A7 ___ _B7______ 五、發明説明（8 ) 結晶3旋轉一邊提拉之手段的主提拉手段21及作爲使保持機構1 1升降之手段的輔助提拉手段2 2，由這些機構、手段來構成提拉機構2 0。 - 在實施例1中，垂直地設置藉由主提拉手段2 1捲取之1根主線1 8、及藉由輔助提拉手段2 2捲取之2根輔助線19，分別獨立地進行升降。又，由主提拉手段21 及輔助提拉手段2 2所構成之提拉機構2 0，爲了在提拉過程中，以一定之速度使單結晶旋轉，藉由未圖示之構造而往規定之方向旋轉。種結晶夾持具1 0安裝在上述主線1 8之下端，另外，保持機構11經由均衡裝置16而配置在2根輔助線 1 Θ之先端。經濟部中央標準局貝工消費合作社印製 (請先聞讀背面之注意事項再填寫本頁) .丨線\ 第2圖係第1圖由A—A箭頭方向來看之保持機構以及均衡裝置之橫剖面圖。第1提拉裝置之保持機構之構造，如第2圖所示，均衡裝置1 6經由銷1 7而軸支在保持夾持具1 2中，且藉由2根輔助線1 9而能垂直地設置。由於採用如此之構造，2根輔助線1 9之捲取和送出發生差別不一之情況’雖然均衡裝置1 6產生傾斜，經由銷 1 7而軸支之保持夾持具1 2，藉由重力作用而能一直保持在垂直方向，所以能夠吸收傾斜。第3圖係說明設置在第1圖所示之保持機構中的卡合構件之構造圖；（a)爲全體構成圖，（b)和（c)爲全體構造之X部及.Y部之詳細圖。由圖_可知，.卡合構件設置在保持夾持具1 2之內面下端部，對於1個夾板爪丄3 本紙張尺度適用中國國家標準（CNS ) A4規格（210χ297公釐） ~~' -11 - 經濟部中央標準局貝工消費合作社印製 A7 _____^_ Β7______ 五、發明説明（9 ) ，以上下2根連桿14來構成。對於連桿1 4和保持夾持具1 2之間的安裝、及夾板爪1 3和連桿1 4之間的安裝，只要爲旋轉自如地軸支撐便可以-。此上下2根之連桿 1 4之接續的至少一處，如第3圖之（b )的X部詳細圖所示，若設置比銷3 4之直徑更大的長穴3 5，即使卡合段部之形狀不均一，由於夾板爪之卡合面可以完全地匹配卡合段部，即使是重量大的單結晶，也能夠確實地把持。進而，如第3圖之（c )的Y部詳細圖所示，夾板爪之卡合面若形成多數齒狀或是波狀的突起物，能夠更加確實地把持單結晶。再者，夾板爪之材質，希望爲耐高溫且不會成爲污染源之鉬等高熔點金屬。又，第3圖之（b )所示的波狀突起物和卡合段部之接觸角，希望爲9 0°以上。藉由採用第3圖所示之構造來作爲卡合構件，如前述，若單結晶之重量負荷在夾板爪1 3和連桿1 4上，則藉由連桿之作甩而發揮自動夾持機能，能.夠充分地把持單結晶之卡合段部。又，設置在保持夾持具1 2之內周面的卡合構件必須爲多數個，爲了防止位置偏移，必須設置3個以上。接著，具體地說明操作順序。在開始提拉單結晶時，輔助提拉手段2 2將保持機構1 1保持在上方之狀態下待機。另一方面，將種結晶9安裝在設置於主提拉手段2 1 之先端上之種結晶夾持具1 0上，使此種結晶9接觸矽溶融液2之液面的中心部。然後，使主提拉手段2 1動作，一邊使種結晶9旋轉一邊慢慢地使其上升，形成縮徑部（本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (諳先聞讀背面之注意事項—填寫本頁) ©_ -訂 -12- A7 B7 五、發明説明（10 ) . , 種拉伸部）8。接著，使單結晶之提拉速度變慢而使單結晶之直徑增大，來形成直徑擴大部7 ,然後再使單結晶之直徑慢慢地變小，直到中間變細部-5爲止，形成剖面形狀爲倒圓錐狀之卡合段部6。形成卡合段部6後，再使單結晶之直徑增大，形成軸肩部4，然後將提拉速度、旋轉速度調整至穩定條件，轉移至提拉規定直徑之單結晶體3。經濟部中央標準局員工消費合作社印製 (諳先閱讀背面之注意寧領再填寫本頁) 轉移至穩定之單結晶的提拉後，在所提拉之'單結晶的重量到達一定値時，例如，單結晶體3之長度到達1 m時，使在上方待機之保持機構1 1下降。在此下降階段，如前述，接觸單結晶之直徑擴大部7的夾板爪1 3，被往上推壓而開放，而能通過直徑擴大部7。然後，夾板爪1 3 根據連桿、銷及長穴之作用的自動夾持機能，確實地卡合 .把持卡合段部6。然後，輔助提拉手段2 2與主提拉手段21之提拉速度同一步調地使保持機構11上升。在此，以作爲卡合構件之夾板爪1 3來把持單結晶，使保持機構1 1上升之手段，係在單結晶之重量達到一定之重量以後，亦即至少在提拉過程之後半段。第4圖係說明本發明之線式提拉裝置的提拉驅動馬達之控制方式說明圖。在使主提拉手段2 1和輔助提拉手段 2 2同一步調地使保持機構11上升之時，希望將主提拉手段2 1之主馬達2 3設成速度控制，而將輔助提拉手段 22之輔助馬達24設成張力控制。藉由採用如此之提拉驅動馬達之控制方式，如第5圖本紙張尺度適用中國國家標準（CNS ) A4規格（210 X 297公嫠） -13- 經濟部中央標隼局員工消費合作杜印製 A7 B7 五、發明説明（11 ) 所示，能夠以輔助提拉手段之保持機構來分擔單結晶之重量。因此，可.以防止提拉驅動馬達之各控制系統之間的互相干擾，能夠沒有衝擊且安定地提-拉單結晶。 1 — 2 ·實施例2 第6圖係說明第1提拉裝置之實施例2的構成例之縱剖面圖。與上述實施例1比較，設置在保持機構1 1內之作爲卡合構件的夾持桿1 5的構造不同，其餘的構成與實施例1相同。第7圖係說明設置在實施例2之保持機構中的卡合構件之構造。卡合構件設置在保持夾持具12之內面下端部，多數個夾持桿1 5旋轉自如地軸支撐著。因此，夾持桿 1 5以設置在保持夾持具1 2側之支點爲中心，能夠往上旋轉成垂直狀，一但被施加往下之負荷，則藉由自動夾持機能，夾持桿1 5能夠充分地卡合.把持單結晶之卡合段 /部。因此，若使用實施例2之卡合構件，夾持機構簡單，且因爲以夾持桿之端部來夾持單結晶，所以單結晶之卡合段部之錐部長度能夠比較短。在單結晶之提拉過程中，其裝置之動作以及操作方法，例如，前述第4圖所示之提拉驅動馬達之控制方式，與實施例相同之部分可以同樣地應用。 ’ 1 — 3 ·實施例3 第8圖係說明第1提拉裝置之實施例3之構成例的說本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） (諳先聞讀背面之注意事項再填寫本頁)-10- A7 ___ _B7______ 5. Description of the invention (8) Crystal 3 The main lifting means 21 which is a means for lifting while rotating and the auxiliary lifting means 2 2 which is a means for lifting the holding mechanism 1 1 by these mechanisms, means To form the lifting mechanism 20. -In Example 1, one main line 18 wound up by the main lifting means 21 and two auxiliary lines 19 rolled up by the auxiliary lifting means 22 were vertically arranged, and were lifted independently. . In addition, the pulling mechanism 20, which is composed of the main pulling means 21 and the auxiliary pulling means 22, is required to rotate the single crystal at a certain speed during the pulling process, and is regulated by a structure not shown in the figure. Direction of rotation. A seed crystal holder 10 is mounted on the lower end of the main line 18, and the holding mechanism 11 is arranged at the front end of the two auxiliary lines 1 Θ through the equalization device 16. Printed by the Shellfish Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). 丨 Line \ Figure 2 is the holding mechanism and balancing device viewed from the direction of the A-A arrow in Figure 1 A cross-sectional view. The structure of the holding mechanism of the first lifting device, as shown in FIG. 2, the equalization device 16 is pivotally supported in the holding clamp 12 through the pin 17, and can be vertical by two auxiliary lines 19. Ground setting. Due to this structure, the winding and delivery of the two auxiliary wires 19 are different. Although the balance device 16 is tilted, the holding fixture 12 of the shaft is supported by the pin 17 and the gravity It can be maintained in the vertical direction at all times, so it can absorb tilt. Fig. 3 is a structural diagram illustrating an engaging member provided in the holding mechanism shown in Fig. 1; (a) is an overall configuration diagram, (b) and (c) are the X and .Y sections of the entire structure Detailed illustration. As can be seen from the figure, the engaging member is set at the lower end of the inner surface of the holding clamp 1 2. For 1 plywood claw 丄 3, this paper size applies the Chinese National Standard (CNS) A4 specification (210 × 297 mm) ~~ ' -11-A7 _____ ^ _ Β7 ______ printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (9), consisting of two links 14 above and below. For the installation between the connecting rod 14 and the holding clamp 12 and the installation between the clamping jaw 13 and the connecting rod 14, as long as the shaft is rotatably supported by the shaft, it may be-. At least one of the continuations of the two upper and lower connecting rods 1 4 is shown in the detailed view of part X in (b) of FIG. 3. If a hole 3 5 having a larger diameter than the pin 3 4 is provided, The shape of the joint section is not uniform. Since the engagement surface of the clamping jaw can completely match the joint section, even a heavy single crystal can be reliably held. Furthermore, as shown in the detailed view of part Y in FIG. 3 (c), if the engagement surfaces of the splint claws are formed with a large number of tooth-like or wave-like protrusions, the single crystal can be more reliably held. In addition, the material of the splint claw is preferably a high melting point metal such as molybdenum, which is resistant to high temperatures and does not become a source of pollution. In addition, the contact angle between the undulated protrusion and the engaging section shown in (b) of FIG. 3 is desirably 90 ° or more. By adopting the structure shown in FIG. 3 as the engaging member, as mentioned above, if the weight of the single crystal is loaded on the clamping jaw 13 and the connecting rod 14, the automatic clamping is exerted by the operation of the connecting rod. Function, can. Fully hold the engaging section of single crystal. In addition, the number of engaging members provided on the inner peripheral surface of the holding clamp 12 must be plural, and in order to prevent positional displacement, three or more engaging members must be provided. Next, the operation procedure will be specifically described. When pulling up the single crystal, the auxiliary pulling means 22 holds the holding mechanism 1 1 and waits. On the other hand, the seed crystal 9 is mounted on a seed crystal holder 10 provided on the tip of the main pulling means 21, and the crystal 9 is brought into contact with the center portion of the liquid surface of the silicon solution 2. Then, the main lifting device 21 is operated, and the seed crystal 9 is rotated while slowly raising it to form a reduced diameter portion. (This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). Notes on the back of the reading—fill out this page) © _-订 -12- A7 B7 V. Description of the invention (10). Next, the pulling speed of the single crystal is slowed to increase the diameter of the single crystal to form the enlarged diameter portion 7, and then the diameter of the single crystal is gradually reduced until the middle thinned portion -5 to form a cross section. The engaging section 6 is in the shape of an inverted cone. After the engaging section portion 6 is formed, the diameter of the single crystal is increased to form the shoulder portion 4, and then the pulling speed and rotation speed are adjusted to stable conditions, and the single crystal body 3 having a predetermined diameter is pulled. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs (谙 Please read the note on the back, and then fill in this page) After transferring to a stable single crystal pull, when the weight of the single crystal reached a certain amount, For example, when the length of the single crystal body 3 reaches 1 m, the holding mechanism 11 waiting on the upper side is lowered. In this lowering stage, as described above, the clamping jaws 13 of the single-crystal enlarged-diameter portion 7 are pushed upward to open, and can pass through the enlarged-diameter portion 7. Then, the clamping jaws 1 3 are reliably engaged by the automatic clamping function of the links, pins, and long holes. The clamping section 6 is gripped. Then, the auxiliary lifting means 22 raises the holding mechanism 11 at the same pace as the pulling speed of the main pulling section 21. Here, the means for holding the single crystal by using the clamping jaw 13 as the engaging member to raise the holding mechanism 11 is after the weight of the single crystal reaches a certain weight, that is, at least in the second half of the lifting process. Fig. 4 is an explanatory diagram illustrating a control method of a pulling drive motor of the wire pulling device of the present invention. When the main lifting device 21 and the auxiliary lifting device 2 2 are raised at the same pace, it is desirable to set the main motor 2 3 of the main lifting device 2 1 to speed control and the auxiliary lifting device The auxiliary motor 24 of 22 is set to tension control. By adopting such a control method of pulling the driving motor, as shown in Fig. 5, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 gigabytes). System A7 B7 5. As shown in the description of the invention (11), the weight of the single crystal can be shared by the holding mechanism which assists the pulling means. Therefore, it is possible to prevent mutual interference between the control systems of the pull drive motor, and to lift and pull the single crystal stably without impact. 1-2 · Embodiment 2 Fig. 6 is a longitudinal sectional view illustrating a configuration example of Embodiment 2 of the first lifting device. Compared with the first embodiment described above, the structure of the holding rod 15 as the engaging member provided in the holding mechanism 11 is different, and the remaining structure is the same as that of the first embodiment. Fig. 7 illustrates the structure of the engaging member provided in the holding mechanism of the second embodiment. The engaging member is provided at the lower end portion of the inner surface of the holding clamp 12, and a plurality of clamping rods 15 are rotatably supported by the shaft. Therefore, the clamping lever 15 can be rotated vertically upward with the fulcrum provided on the holding clamp 12 side as a center. Once a downward load is applied, the clamping lever can be clamped by an automatic clamping function. 1 5 Can be fully engaged. Hold the engaging section / part of single crystal. Therefore, if the engaging member of the second embodiment is used, the clamping mechanism is simple, and the single crystal is clamped by the end of the clamping rod, so that the length of the tapered portion of the engaging section of the single crystal can be relatively short. During the pulling process of the single crystal, the operation and operation method of the device, for example, the control method of the pulling drive motor shown in the aforementioned FIG. 4 can be applied in the same manner as the embodiment. '1 — 3 · Embodiment 3 Fig. 8 illustrates the constitution example of Embodiment 3 of the first lifting device. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). (Notes for filling in this page)

-14 - A7 B7______________ 五、發明説明（12 ) 明圖。此構成之特徵爲：主提拉手段2 1和輔助提拉手段 2 2，係藉由主螺栓3 0及輔助螺栓.3 1之旋轉作用，而能獨立地升降。 , 在實施例3之構成中，作爲提拉機構2 0之主提拉手段21使主升降台27升降，而輔助提拉手段22使輔助升降台2 8升降。設置在主提拉手段2 1之主升降台2 7 中’安裝橫跨整個框的主螺栓3 0，藉由主馬達2 3之動作而升降。進而，此主升降台2 7經由軸2 5來支持種結晶夾持具1 0，在提拉過程中，藉由結晶旋轉馬達3 2之旋轉來使被提拉之單結晶旋轉。經濟部中央操準局員工消費合作社印裝 (請先聞讀背面之注$項再填寫本買) 另一方面，設置在輔助提拉手段2 2中的輔助升降台 2 8，安裝著設置在主升降台2 7上的輔助螺栓3 1，藉由輔助馬達2 4之旋轉動作而旋轉。又，在輔助升降台 2 8中，經由軸承2 9而在旋轉自如地狀態下安裝中空軸 2 6，而保持機構1 1固定在中空軸2 6之先端上。又，在保持機構1 1之保持夾持具1 2之內面下端部，設置卡合構件，此卡合構件之構造可以爲實施例1或實施例2中所不之任一個。安裝在主升降台2 7之軸2 5 ,貫通安裝在輔助升降台2 8之中空軸2 6的內側，來構成第1提拉裝置之實施例3。藉由如此之構成，容易使主提拉手段2 1和輔助提拉手段2 2同一步調，而且以嵌合在一起的軸2 5和中空軸2 6來支持之種結晶夾持具1 〇及保持機構1 1的位置調整效果良好，能夠使提拉軸和單結晶之中心位置一致。本紙張尺度適用中國國家標準（CNS > A4規格（210X297公釐) -15- A7 B7 五、發明説明（13) 2 .第2提拉裝置在本發明之第2提拉裝置中，•與第1提拉裝置相同，係藉由主提拉手段進行縮徑處理，接著，使單結晶形成倒圓錐狀之卡合段部後，進行軸肩部之形成及單結晶本體之提拉。另一方面，隨著提拉之進展，單結晶之重量增加，在達到縮徑部所能負擔之重量的界限之前，轉移成藉由輔助提拉手段來支持單結晶。其具體的動作爲，藉由輔助提拉手段之下降操作，使在上方待機中的保持機構下降。在下降之時，設置在保持機構之下端的推桿，在一定之位置處，被單結晶之軸肩部往上推壓而上升。藉由此上升動作，與推桿抵接之卡合構件之旋轉桿被往上推壓，且保持桿旋轉而卡合在單結晶之 .卡合段部上。由於旋轉而閉合之保持桿的支承面形成沒有斷裂處之環狀，所以能夠確實地卡合.把持單結晶》經濟部中央標準局員工消費合作社印製 (諳先E讀背面之註意事項再稹寫本頁) 若保持機構之保持桿卡合.把持單結晶之動作完成，則使主提拉手段和輔助提拉手段以同一步調的提拉速度使保持機構上升。此時，爲了使保持機構不傾斜，希望設置均衡裝置等防止傾斜手段。以下，參照圖面來說明第2提拉裝置之具體構成例。第9圖係說明本發明之第2提拉裝置之全體構成例的縱剖面圖。如第9圖所示，坩堝1配置在真空室（未圖示 )內之中心位置處’其內部收容溶融液2。在坩堝1的上方，配置種結晶夾持具1 0、保持機構1 1 ;在更上方處本紙張尺度適用中國國家標準（CNS > A4規格（210 X 297公釐） 1 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（14 ) ’設置作爲一邊使矽單結晶3旋轉一邊提拉之手段的主提拉手段2 1、及作爲使保持機構1 1.升降之手段的輔助提拉手段2 2，由這些機構、手段來-構成提拉機構2 0。在第2提拉裝置中，垂直地設置藉由主提拉手段2 1 捲取之1根主線18、及藉由輔助提拉手段2 2捲取之2 根輔助線1 9，分別獨立地進行升降。又，由主提拉手段 2 1及輔助提拉手段2 2所構成之提拉機構2 0，爲了在提拉過程中，以一定之速度使單結晶旋轉，藉由.未圖示之構造而往規定之方向旋轉。種結晶夾持具1 0安裝在上述主線18之下端，另外，保持機構11經由均衡裝置16而配置在2根輔助線 1 9之先端。在此所使用之均衡裝置1 6，係作爲防止保持機構1 1傾斜之手段。如前述第2圖所示，均衡裝置1 6經由銷1 7而軸支在保持夾持具1 2中，且藉由2根輔助線1 9而能垂直地設置。因此，與第1提拉裝置相同，即使2根輔助線1 9 之捲取發生差別不一之情況，僅均衡裝置1 6產生傾斜，而不會影響到保持機構11。因此，保持機構11之中心軸和單結晶體3之中心軸不會偏移，能夠藉由保持機構 11來確實地保持單結晶。第10圖係說明第9圖之由B—B箭頭方向來看之設置在保持機構中的卡合構件之平面圖。由第9圖及第1 1 圖可知，卡合構件4 1係由保持桿4 2及旋轉桿4 3 —體地構成。卡合構件4 1係在旋轉自如地狀態下，安裝於保本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐〉 (許先聞讀背面之注意事項再填寫本頁)-14-A7 B7______________ V. Description of the invention (12) Bright drawing. The feature of this structure is that the main lifting means 21 and the auxiliary lifting means 22 can be independently raised and lowered by the rotation of the main bolt 30 and the auxiliary bolt .31. In the configuration of Embodiment 3, the main lifting section 21 as the lifting mechanism 20 lifts the main lifting platform 27, and the auxiliary lifting means 22 lifts the auxiliary lifting platform 28. The main lifting platform 2 7 provided in the main lifting means 21 is provided with a main bolt 30 that spans the entire frame, and is lifted by the operation of the main motor 23. Furthermore, the main lifting table 27 supports the seed crystal holder 10 via the shaft 25, and during the pulling process, the single crystal being pulled is rotated by the rotation of the crystal rotating motor 32. Printed by the Consumer Cooperatives of the Central Directorate of Bureau of the Ministry of Economic Affairs (please read the note “$” on the back before filling in this purchase) On the other hand, the auxiliary lifting platform 2 8 in the auxiliary lifting means 2 2 is installed at the The auxiliary bolt 3 1 on the main lifting platform 27 is rotated by the rotation of the auxiliary motor 24. In the auxiliary lifting platform 28, a hollow shaft 26 is mounted in a freely rotatable state via a bearing 29, and a holding mechanism 11 is fixed to a leading end of the hollow shaft 26. In addition, an engaging member is provided at the lower end portion of the inner surface of the holding clamp 12 of the holding mechanism 11, and the structure of the engaging member may be either of the first embodiment or the second embodiment. The shaft 2 5 mounted on the main lifting platform 27 is penetrated inside the hollow shaft 26 mounted on the auxiliary lifting platform 2 8 to constitute the third embodiment of the first lifting device. With such a structure, it is easy to make the main lifting means 21 and the auxiliary lifting means 2 2 in the same step, and to support the crystal holder 1 〇 with the shaft 25 and the hollow shaft 26 fitted together. The position adjustment effect of the holding mechanism 11 is good, and the center position of the pulling shaft and the single crystal can be aligned. This paper size applies to Chinese national standards (CNS > A4 size (210X297 mm) -15- A7 B7 V. Description of the invention (13) 2. The second lifting device in the second lifting device of the present invention, • and The first pull-up device is the same, and is reduced in diameter by the main pull-up means. Then, the single crystal is formed into an inverted cone-shaped engaging section, and then the shoulder portion is formed and the single-crystal body is pulled. On the one hand, as the pulling progresses, the weight of the single crystal increases, and before reaching the limit of the weight that the reduced diameter portion can bear, it shifts to supporting the single crystal by means of auxiliary lifting. The specific action is to borrow The auxiliary lifting mechanism lowers the holding mechanism in standby mode. When lowering, the push rod provided at the lower end of the holding mechanism is pushed upward by the shoulder of the single crystal shaft at a certain position Ascending. With this ascending action, the rotating rod of the engaging member that is in contact with the push rod is pushed upward, and the holding rod rotates to engage with the single crystal. The bearing surface of the holding rod is formed without breaking It is in a ring shape, so it can be securely engaged. Crystals of holding orders are printed. "Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (谙 Please read the precautions on the back of the E, and then write this page). When the operation of holding the single crystal is completed, the main pulling means and the auxiliary pulling means raise the holding mechanism at the same pulling speed. At this time, in order to prevent the holding mechanism from tilting, it is desirable to install a balance preventing device such as a tilting device. The following A specific configuration example of the second lifting device will be described with reference to the drawings. FIG. 9 is a longitudinal cross-sectional view illustrating an overall configuration example of the second lifting device of the present invention. As shown in FIG. 9, the crucible 1 is arranged in a vacuum At the center of the chamber (not shown), the inside thereof contains the molten liquid 2. Above the crucible 1, a seed crystal holder 10 and a holding mechanism 1 1 are arranged; above the paper size, the Chinese national standard applies (CNS > A4 size (210 X 297 mm) 1 Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs A7 B7 V. Description of the invention (14) 'Setting as a means to rotate the silicon single crystal 3 while pulling The lifting means 2 1 and the auxiliary lifting means 2 2 as a means for raising and lowering the holding mechanism 1 1. These mechanisms and means-constitute the lifting mechanism 20 0. In the second lifting device, it is provided vertically One main line 18 is wound up by the main lifting means 2 1 and two auxiliary lines 19 are wound up by the auxiliary lifting means 2 2, and the lifting is performed independently. The main lifting means 2 1 The pulling mechanism 20, which is composed of the auxiliary pulling means 22, is used to rotate the single crystal at a certain speed during the pulling process, and is rotated in a predetermined direction by a structure not shown in the figure. The holder 10 is installed at the lower end of the main line 18 described above, and the holding mechanism 11 is disposed at the front end of the two auxiliary lines 19 through the equalization device 16. The equalization device 16 used here serves as a means for preventing the holding mechanism 11 from tilting. As shown in the aforementioned second figure, the equalizing device 16 is pivotally supported in the holding fixture 12 through the pin 17 and can be vertically installed by two auxiliary wires 19. Therefore, similar to the first pull-up device, even if the winding of the two auxiliary lines 19 is different, only the equalization device 16 is inclined without affecting the holding mechanism 11. Therefore, the central axis of the holding mechanism 11 and the central axis of the single crystal body 3 do not shift, and the single crystal can be reliably held by the holding mechanism 11. Fig. 10 is a plan view illustrating the engaging member provided in the holding mechanism as viewed from the direction of arrows B to B in Fig. 9; As can be seen from Figs. 9 and 11, the engaging member 41 is integrally composed of the holding lever 4 2 and the rotating lever 4 3. The engaging member 4 1 is installed in a freely rotating state and is installed in a guaranteed paper size. The national paper standard (CNS) A4 specification (210X297 mm) (Xu Xianwen read the precautions on the back before filling this page)

A7 _____B7_____ 五、發明説明（15) 持夾持具1 2之內面下端部，以保持夾持具12側之支點爲中心，保持桿42能夠由垂直的打開狀態旋轉90°而變成水平關閉狀態。 - 經濟部中央標準扃貝工消費合作社印製第11圖，係說明在第2提拉裝置中，隨著保持機構的下降之卡合構件之旋轉動作。如前述，在到達主提拉手段能夠負擔之荷重限制之前，藉由輔助提拉手段之下降操作，使在上方待機中的保持機構1 1下降。下降之時，形成於單結晶之卡合段部的直徑擴大部7，通過保持機構 1 1之下端部後，設置在保持機構11之下端的推桿4 4 被單結晶軸肩部4推壓而上升。藉由此推桿4 4之上升動作，與推桿4 4抵接之旋轉桿4 3被往上推壓，使一體地構成之保持桿4 2旋轉，來卡合單結晶之卡合段部地閉合。閉合後之保持桿4 2由停止器4 5支持，如前述第1 0 圖所示，形成一定之開口直徑。此開口直徑比單結晶之直徑擴大部小，而且，因爲保持桿4 2之支承面形成沒有斷裂處之環狀，一但保持桿閉合，便不必擔心卡合會脫落，即使單結晶之卡合段部的尺寸有偏差，也能夠確實地卡合 .把持。在第2提拉裝置中，係藉由保持桿4 2和旋轉桿4 3 來構成卡合構件4 1，若藉由推桿4 4之推壓，使旋轉桿 4 3由水平狀態旋轉3 0 °左右，則卡合構件4 1之重心位置變化，然後，利用本身的重量持續地旋轉，使保持桿 4 2成爲閉合的狀態。在保持桿4 2閉合的狀態下，保持桿之支承面聚集在一起而形成環狀的保持面。 -18- (請先閲讀背面之汰意事項异填薄本jr) 本紙張尺度適用中國國家標準（CNS ) A4規格（210><297公釐〉經濟部中央標準局員工消費合作社印製 A7 B7____ 五、發明説明（16) 設置在保持夾持真1 2之內面圓周上的卡合構件之個數，在第1 0圖爲4個，然而，只要能夠形成環狀的保持面，並不僅限於4個之情況。 _ 接著，具體地說明操作順序。在開始提拉單結晶時，輔助提拉手段2 2將保持機構1 1保持在上方之狀態下待機。另一方面，將種結晶9安裝在設置於主提拉手段2 1 之先端上之種結晶夾持具1 0上，使此種結晶9接觸矽溶融液2之液面的中心部。然後，使主提拉手段2 1動作，一邊使種結晶9旋轉一邊慢慢地使其上升，形成縮徑部（種拉伸部）8。接著，使單結晶之提拉速度變慢而使單結晶之直徑增大，來形成直徑擴大部7，然後再使單結晶之直徑慢慢地變小，直到中間變細部5爲止，形成剖面形狀爲倒圓錐狀之卡合段部6。 - 形成卡合段部6後，再使單結晶之直徑增大，形成軸肩部4，然後將提拉速度、旋轉速度調整至穩定條件，轉移至提拉規定直徑之單結晶體3。 ..轉移至穩定之單結晶的提拉後，在所提拉之單結晶的重量到達一定値時，例如，單結晶體3之長度到達1 m時 ’使在上方待機之保持機構1 1下降》在此下降階段，如前述第1 1圖之說明，保持桿4 2在打開的狀態下，使單結晶之直徑擴大部7通過，然後，藉由利用單結晶之軸肩部4而被往上推壓之推桿的作用，使保持桿4 2變成閉合狀態。 ‘ · 以保持機構11之卡合構件41來卡合.把持單結晶本紙張尺度通用中國國家標準（CNS ) Λ4規格（210X297公釐) ~~ '^ (請先閎讀背面之注意事項再填寫本頁)A7 _____B7_____ V. Description of the invention (15) Holding the lower end of the inner surface of the gripper 1 2 with the fulcrum on the side of the holding gripper 12 as the center, the holding lever 42 can be rotated 90 ° from a vertical open state to a horizontal closed state. . -Printed by the Central Standard Department of the Ministry of Economic Affairs, Cooper Consumer Cooperative. Figure 11 illustrates the rotation of the engaging member as the holding mechanism is lowered in the second lifting device. As described above, before reaching the load limit that can be supported by the main lifting means, the holding mechanism 11 in the upper standby state is lowered by the lowering operation of the auxiliary lifting means. When descending, the enlarged diameter portion 7 formed in the engaging section of the single crystal passes through the lower end of the holding mechanism 11 and the pusher 4 4 provided at the lower end of the holding mechanism 11 is pushed by the single crystal shaft shoulder 4 rise. By the upward movement of the pusher 4 4, the rotating lever 4 3 abutting the pusher 4 4 is pushed upward, and the integrally formed holding lever 4 2 is rotated to engage the engaging section of the single crystal. To close. The closed holding lever 4 2 is supported by the stopper 45 and forms a certain opening diameter as shown in the aforementioned Fig. 10. The diameter of this opening is smaller than that of the enlarged portion of the single crystal, and because the supporting surface of the holding rod 42 is formed in a ring shape without breaking, once the holding rod is closed, there is no need to worry about the engagement falling off, even if the single crystal is engaged. There is a deviation in the size of the segment, and it can be reliably engaged. In the second lifting device, the engaging member 41 is constituted by the holding lever 4 2 and the rotating lever 4 3. If the push lever 4 4 is pressed, the rotating lever 4 3 is rotated from the horizontal state 3 0 When it is about °, the position of the center of gravity of the engaging member 41 is changed, and then it is continuously rotated by its own weight, so that the holding lever 42 is closed. In a state in which the holding rod 42 is closed, the supporting surfaces of the holding rod are gathered together to form an annular holding surface. -18- (Please read the jr on the back of the article on the opposite side of the jr) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 > < 297 mm) Printed by the Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs, A7 B7____ 5. Description of the invention (16) The number of engaging members provided on the circumference of the inner surface of the holding clamp 1 2 is 4 in Fig. 10, however, as long as a ring-shaped holding surface can be formed, and It is not limited to only four cases. _ Next, the operation sequence will be described in detail. At the beginning of pulling single crystal, the auxiliary pulling means 22 holds the holding mechanism 1 1 in a standby state on the other hand. On the other hand, the seed crystals are crystallized. 9 is mounted on a crystal holder 10 mounted on the tip of the main lifting means 2 1 so that this crystal 9 contacts the center of the liquid surface of the silicon melt solution 2. Then, the main lifting means 2 1 The operation is to slowly raise the seed crystal 9 while rotating it to form a reduced diameter portion (type stretched portion) 8. Next, the pulling speed of the single crystal is slowed down to increase the diameter of the single crystal to form Diameter enlarged part 7, and then the diameter of the single crystal is gradually reduced Until the middle tapered portion 5, an engaging section 6 having an inverted cone shape in cross section is formed.-After the engaging section 6 is formed, the diameter of the single crystal is increased to form the shoulder portion 4, and then the pulling speed is increased. 2. Adjust the rotation speed to a stable condition, and transfer to a single crystal with a specified diameter 3. After the single crystal is transferred to a stable single crystal, when the weight of the single crystal pulled reaches a certain threshold, for example, a single crystal When the length of 3 reaches 1 m, 'the holding mechanism 11 waiting on the upper side is lowered' In this lowering stage, as described in the above-mentioned FIG. 11, the holding rod 4 2 is opened, and the diameter of the single crystal is enlarged. 7 passes, and then, by using the action of the pusher which is pushed upward by the shoulder 4 of the single crystal, the holding lever 42 is closed. '· Engaging by the engaging member 41 of the holding mechanism 11 .Standard for holding single crystal paper. Common Chinese National Standard (CNS) Λ4 specification (210X297mm) ~~ '^ (Please read the precautions on the back before filling this page)

A7 ____^_B7_________ 五、發明説明（17 ). 之卡合段部6後，輔助提拉手段2 2與主提拉手段2 1之提拉速莨同一步調地使保持機構1 1上升。在此，以作爲卡合構件之保持桿4 2來把持單結晶，使保持機構11上升之手段，係在單結晶之重量達到一定之重量以後，亦即至少在提拉過程之後半段。在使主提拉手段2 1和輔助提拉手段2 2以同一步調地使保持機構1 1上升之時，希望將主提拉手段2 1之主馬達2 3設成速度控制，而將輔助提拉手段2 2之輔助馬達2 4設成轉矩控制。藉由採用如此之提拉驅動馬達之控制方式，能夠以輔助提拉手段之保持機構來分擔單結晶之重量。因此，可以防止提拉驅動馬達之各控制系統之間的互相干擾，能夠正確地控制提拉速度及主馬達和輔助馬達之間的負荷比例，可以沒有衝擊且安定地進行單結晶提拉。經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 上述之主提拉手段2 1和輔助提拉手段2 2，係根據線之捲上、捲下之升降方式來說明，然而，在第2提拉裝置中，如第1提拉裝置之實施例3所示，也可以採用藉由螺栓之旋轉作用來升降之方式。在此情況，能夠消除提拉軸之偏移，不需要藉由均衡裝置等來構成保持機構之傾斜防止手段。 A7 -_B7____^___ 五、發明説明（18 ) 著，使單結晶形成倒圓錐狀之.卡合段部後，進行軸肩部之形成及單結晶本體之提拉。另一方面，隨著提拉之進展，單結晶之重量增加，在達到縮徑部所能負擔之重量的界限之前，轉移成藉由在金屬室內待機中之保持機構來支持單結晶。接著，具體地說明操作順序。在開始提拉單結晶時，保持機構旋轉自如在金屬室之規定的高度處待機。例如，希望使保持機構磁力浮上地待機。又，作爲保持機構支卡合構件，使用利用夾持桿或是環桿之夾持機構。經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 隨著藉由提拉手段使單結晶被往上提拉，單結晶之卡合段部6上升，而與在上方待機中之保持機構11接觸。此時，因爲設置在保持機構之卡合構件，係使用夾持桿等，被單結晶之直徑擴大部7往上推壓而開放，通過直徑擴大部7。通過卡合段部之直徑擴大部後，保持機構1 1之卡合構件藉由本身的重量，沿著單結晶之卡合段部的形狀，成.爲閉合狀態。更進一步，若卡合構件爲上述之構造，若單結晶之重量負荷在卡合構件上，則藉由藉由環桿或是夾持桿的作用來發揮夾持機能。因此，藉由自動夾持機能，能夠確實地把持住單結晶之卡合段部，且即使單結晶之卡合段部的形狀不一致或是提拉位置稍有偏移，也不會成爲問題。種結晶夾持具隨著單結晶之育成，具有延伸之構造，隨著單結晶之提拉的進展，若到達一定重量，則開始延伸。因此，單結晶之重量負荷在卡合構件上，保持機構之卡本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 B7 五、發明説明（19 ) 合構件能夠確實地卡合·把持單結晶之卡合段部。如此，若保持機構以卡合構件來把持單結晶之卡合段部，由於保持機構旋轉自如地被支持在金屬室內，所以能與提拉手段以相同的速度旋轉。而且，如後述，由於保持機構係藉由設置在種結晶夾持具的外周之輪緣而被支持提拉，所以在卡合·把持卡合段部後，保持機構與提拉手段同一步調地 —邊旋轉一邊被提拉。以下，參照圖面來說明本發明之第 3提拉裝置之具體構成例。第12圖係說明第3提拉裝置之全體構成例的縱剖面圖。如此圖所示，坩堝1配置在金屬室5 3內之中心位置 .處，其內部收容作爲原料之多結晶矽之溶融液2。在坩堝 1的上方，配置種結晶夾持具1 0、保持機構1 1 ;在更上方處，設置作爲一邊使矽單結晶3旋轉一邊提拉之提拉手段5 2。經濟部中央標準局員工消費合作社印裝 (請先閲讀背面之注意事項再填寫本頁) 在提拉手段5 2中，垂直地設置線5 1，其下端安裝種結晶夾持具1 0。又，提拉手段5 2，爲了在提拉過程中使單結晶以一定之速度旋轉，藉由未圖示之構造而往規定之方向旋轉。因此，被種結晶夾持具1 0所支持，而藉由線5 1提拉之單結晶，能一邊旋轉一邊上升。且，種結晶夾持具10隨著單結晶之育成，設成延伸之構造。第1 3圖之（a )及（b )係說明種結晶夾持具之構造例的縱剖面圖；（a )係表示單結晶之重量在基準値以下之情況，（b )係表示單結晶之重量在基準値以上之情況。安裝在線5 1之先端上的種結晶夾持具1 0，係形成本紙張尺度適用中國國家標準（CNS〉A4規格（210X297公釐〉 A7 —B7 五、發明説明（2〇 ) 上部夾持具1 0 a和下部夾持具1 〇b能互相滑動之構造，兩者以預先壓縮之彈簧1 0 c來保持一定之長度。然而，若種結晶夾持具10所負擔之負荷超過基準値，則彈簧 1 0 c被壓縮，上部夾持具1 〇 a和下部夾持具1 0 b互相滑動，種結晶夾持具1 0立即延伸。又，設置在上部夾持具10 a上之輪緣1 〇 d的外徑，由於比設置在保持機構1 1之中心的提拉孔1 1 a的內徑大，所以種結晶夾持具之輪緣1 0 d有將保持機構1 1提拉上之作用。經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 保持機構1 1，藉由設在金屬室5 3之內周面上的待機位置支承器5 4，旋轉自如地被支持。亦即，在待機位置支承器54之朝上的內周面上，設置磁石55;經由與此相對之支承桿5 6，在保持機構之朝下外周面上，也配置環狀的磁石5 5，保持機構1 1經由支承桿5 6而形成磁力浮上之構造。卡合構件（夾持桿）15設在保持夾持具之內面下端部上。再者，如第1 2圖之參考圖所示，支承桿5 6爲旋轉式，藉由使桿旋轉，保持機構1 1 (在參考圖中，表示保持夾持具1 2來作爲保持機構）不會受到待機位置支承器5 4和環狀的磁石5 5之限制，而能夠升降。設置在第3提粒裝置之保持機構中的卡合構件之構造 ’能夠以前述第7圖來說明，卡合構件係設置在保持夾持具1 2之內面下端部，多數個夾持桿1 5旋轉自如地軸支撐著。因此，夾持桿1 5以設置在保持夾持具1 2側之支點爲中心，能夠往上旋轉成垂直狀，一但被施加往下之負 ϋ尺度適用中國國家標準（CNS〉A4規格ΪΥΐ 0 X 297公釐） ' -23 - 經濟部中央標準局員工消費合作杜印製 A7 ___ B7_____ 五、發明説明（21 ) 荷’則藉由自動夾持機能，夾持桿15能夠充分地卡合. 把持單結晶之卡合段部。特別是，第7圖所示之夾持機構簡單’且因爲以夾持桿之端面來夾持單結晶，所以單結晶之卡合段部之錐部長度能夠比較短。作爲設置在保持機構中之卡合構件，可以使用第3圖所示之構造的卡合構件。亦即，對於1個夾板爪1 3，以上下2根連桿1 4來構成。對於連桿1 4和保持夾持具 1 2之間的安裝、及夾板爪13和連桿1 4之間的安裝，只要爲旋轉自如地軸支撐便可以。再者，此上下2根之連桿1 4之接續部中的至少一處，若設置比銷3 4之直徑更大的長穴3 5，則夾板爪之卡合面可以完全地匹配卡合段部。作爲卡合構件而採用第7圖及第3圖所示構造之情況，則設置在保持夾持具12之內周面的卡合構件必須爲多數個，如前述，爲了消除單結晶之卡合段部形狀不一致且防止提拉位置偏移，希望設置3個以上。接著，具體地說明操作順序。在開始提拉單結晶時，保持機構1 1藉由設置在金屬室5 3之內周面的待機位置支承器5 4而磁力浮上，在旋轉自如地被支持之狀態下待機。另一方面，將種結晶9安裝線5 1之先端上之種結晶夾持具1 0上，此線5 1係藉由提拉手段5 2捲上，然後使種結晶9接觸矽溶融液2之液面的中心部。然後，使提拉手段5 2動作，一邊使種結晶9旋轉一邊慢慢地使其上升，形成縮徑部（種拉伸部）8。接著，使單結晶之提拉本紙張尺度適用中國國家標準（ CNS ) A4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)A7 ____ ^ _ B7_________ V. Description of the invention (17). After the engaging section 6 is engaged, the lifting speed of the auxiliary lifting means 22 and the lifting speed of the main lifting means 21 are increased at the same pace. Here, the means for holding the single crystal by the holding rod 42 as the engaging member to raise the holding mechanism 11 is after the weight of the single crystal reaches a certain weight, that is, at least in the second half of the lifting process. When the main lifting device 21 and the auxiliary lifting device 2 2 are raised at the same pace, it is desirable to set the main motor 2 3 of the main lifting device 2 1 to speed control and the auxiliary lifting device 2 1 The auxiliary motor 24 of the pulling means 22 is set to torque control. By adopting such a control method of the pulling driving motor, the weight of the single crystal can be shared by the holding mechanism assisting the pulling means. Therefore, it is possible to prevent mutual interference between the control systems of the pulling drive motor, to accurately control the pulling speed and the load ratio between the main motor and the auxiliary motor, and to perform single crystal pulling without impact and in a stable manner. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The above-mentioned main lifting means 2 1 and auxiliary lifting means 2 2 are based on the lifting of the line and the winding However, in the second lifting device, as shown in the third embodiment of the first lifting device, the method of lifting and lowering by the rotation of the bolt may be adopted. In this case, it is possible to eliminate the displacement of the lifting shaft, and it is not necessary to constitute a tilt prevention means of the holding mechanism by an equalizing device or the like. A7 -_B7 ____ ^ ___ V. Description of the invention (18) The single crystal is formed into an inverted cone. After the engaging section is formed, the shaft shoulder is formed and the single crystal body is pulled up. On the other hand, as the lifting progresses, the weight of the single crystal increases, and before reaching the limit of the weight that can be afforded by the reduced diameter portion, it shifts to supporting the single crystal by a holding mechanism in standby in the metal room. Next, the operation procedure will be specifically described. When pulling up the single crystal, the holding mechanism rotates freely and stands by at a predetermined height in the metal chamber. For example, it is desirable to wait for the holding mechanism to float magnetically. As the holding mechanism supporting and engaging member, a clamping mechanism using a clamping lever or a ring lever is used. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling in this page). As the single crystal is pulled upward by the pulling method, the engaging section 6 of the single crystal rises, and It is in contact with the holding mechanism 11 in the standby state. At this time, because the engaging member provided in the holding mechanism uses a clamping rod or the like, the diameter-enlarged portion 7 of the single crystal is pushed upward to be opened, and passes through the diameter-enlarged portion 7. After passing through the enlarged diameter portion of the engaging section, the engaging member of the holding mechanism 1 1 follows the shape of the engaging section of the single crystal into a closed state by its own weight. Furthermore, if the engaging member has the structure described above, if the weight of the single crystal is loaded on the engaging member, the clamping function is exerted by the action of the ring rod or the clamping rod. Therefore, with the automatic clamping function, the engaging section of the single crystal can be reliably held, and even if the shape of the engaging section of the single crystal is inconsistent or the pulling position is slightly shifted, it will not be a problem. With the growth of the single crystal, the seed crystal holder has an extended structure. As the pulling of the single crystal progresses, if it reaches a certain weight, it will start to extend. Therefore, the weight of the single crystal is loaded on the engaging member, and the paper size of the card holding mechanism is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) A7 B7 V. Description of the invention (19) The engaging member can be reliably engaged · Hold the engaging section of single crystal. In this way, if the holding mechanism holds the engaging portion of the single crystal with the engaging member, the holding mechanism can be rotatably supported in the metal chamber, so it can rotate at the same speed as the lifting means. Furthermore, as described later, the holding mechanism is supported by the rim provided on the outer periphery of the seed crystal holder. Therefore, after engaging and holding the engaging section, the holding mechanism and the lifting means are in the same step. Ground-Lifted while rotating. Hereinafter, a specific configuration example of the third lifting device of the present invention will be described with reference to the drawings. Fig. 12 is a vertical cross-sectional view illustrating an example of the entire configuration of a third lifting device. As shown in the figure, the crucible 1 is arranged at a center position inside the metal chamber 53, and the inside thereof contains a molten solution 2 of polycrystalline silicon as a raw material. Above the crucible 1, a seed crystal holder 10 and a holding mechanism 1 1 are arranged; further above, a pulling means 5 2 is provided as the silicon single crystal 3 is rotated while being pulled. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). In the lifting means 5 2, set the line 5 1 vertically, and install a crystal holder 10 at the lower end. The pulling means 5 2 rotates a single crystal at a constant speed during the pulling process, and rotates in a predetermined direction by a structure not shown. Therefore, supported by the seed crystal holder 10, the single crystal pulled by the wire 51 can be raised while rotating. In addition, the seed crystal holder 10 is provided with an extended structure as the single crystal is grown. (A) and (b) of FIG. 13 are longitudinal sectional views illustrating a configuration example of a crystal holder; (a) is a case where the weight of a single crystal is less than or equal to the reference 値, and (b) is a single crystal When the weight is above the reference level. The seed crystal holder 10 installed on the tip of the line 5 1 is formed to the size of this paper and is applicable to the Chinese national standard (CNS> A4 specification (210X297 mm> A7-B7) V. Description of the invention (2〇) Upper clamp The structure in which 10 a and the lower clamp 10 b can slide with each other, and both maintain a certain length by a pre-compressed spring 10 c. However, if the load of the crystal clamp 10 exceeds the reference 値, The spring 10c is compressed, the upper clamp 10a and the lower clamp 10b slide against each other, and the seed crystal clamp 10 immediately extends. Furthermore, the rim provided on the upper clamp 10a The outer diameter of 10 d is larger than the inner diameter of the lifting hole 1 1 a provided in the center of the holding mechanism 11, so the rim 1 0 d of the crystal holder has to pull up the holding mechanism 11 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page) Holding mechanism 1 1 with a standby position holder 5 located on the inner peripheral surface of the metal chamber 5 3 4. Supported to rotate freely. That is, in the standby position, the inner periphery of the support 54 faces upward. On the other hand, a magnet 55 is provided, and a ring-shaped magnet 5 5 is also arranged on the outer peripheral surface of the holding mechanism facing downward through the supporting rod 5 6, and the holding mechanism 11 forms a magnetic floating structure through the supporting rod 56. The engaging member (clamping lever) 15 is provided on the lower end portion of the inner surface of the holding clamp. Furthermore, as shown in the reference diagram of FIG. 12, the supporting lever 56 is of a rotary type, and the lever is rotated The holding mechanism 11 (in the reference figure, the holding clamp 12 is shown as the holding mechanism) can be raised and lowered without being restricted by the standby position supporter 54 and the ring-shaped magnet 55. It is provided in the third The structure of the engaging member in the holding mechanism of the pellet raising device can be described with reference to the aforementioned FIG. 7. The engaging member is provided at the lower end of the inner surface of the holding clamp 12, and most of the clamping rods 15 can rotate freely. The ground shaft is supported. Therefore, the holding lever 15 is centered on the fulcrum on the holding fixture 12 side, and can be rotated upward to a vertical shape. Once it is applied, the negative ϋ scale applies to the Chinese national standard (CNS 〉 A4 size ΪΥΐ 0 X 297 mm) '-23-Central Bureau of Standards, Ministry of Economic Affairs Consumption cooperation by employees Du printed A7 ___ B7_____ 5. Description of the invention (21) The load is fully engaged by the automatic clamping function. The clamping section of the single crystal is held. Especially, the seventh The clamping mechanism shown in the figure is simple, and because the single crystal is clamped by the end surface of the clamping rod, the length of the taper portion of the engaging section of the single crystal can be relatively short. As an engaging member provided in the holding mechanism, An engagement member having a structure as shown in Fig. 3 can be used. That is, for one clamp jaw 13 and two links 14 for the upper and lower links. Between the link 14 and the holding clamp 12 The installation of the bracket and the connection between the clamping jaw 13 and the connecting rod 14 can be supported by the shaft which can rotate freely. Furthermore, if at least one of the connecting portions of the two upper and lower connecting rods 14 is provided with a long hole 3 5 larger than the diameter of the pin 34, the engaging surface of the clamping jaw can completely match the engaging Section. When the structure shown in FIG. 7 and FIG. 3 is adopted as the engagement member, the number of engagement members provided on the inner peripheral surface of the holding clamp 12 must be plural. As described above, in order to eliminate the engagement of a single crystal The shape of the segment is inconsistent and prevents the lifting position from shifting. It is desirable to provide three or more. Next, the operation procedure will be specifically described. When pulling up the single crystal, the holding mechanism 11 is magnetically floated by the stand-by support 5 4 provided on the inner peripheral surface of the metal chamber 53, and stands by while being rotatably supported. On the other hand, the seed crystal 9 is mounted on the seed crystal holder 10 on the tip of the line 51, and the line 51 is rolled up by the pulling means 52, and then the seed crystal 9 is brought into contact with the silicon melt 2 The center of the liquid surface. Then, the pulling means 5 2 is operated, and the seed crystal 9 is rotated slowly while being raised to form a reduced diameter portion (seed stretched portion) 8. Next, make the single crystal pull up. The paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling this page)

-24- A7 _____ B7_ 五、發明説明（22 ) / 速度變慢而使單結晶之直徑增大，來形成直徑擴大部7，然後再使單結晶之直徑慢慢地變小，直到中間變細部5爲止’形成剖面形狀爲倒圓錐狀之卡合段部6。形成卡合段部6後，再使單結晶之直徑增大，形成軸肩部4，然後將提拉速度、旋轉速度調整至穩定條件，轉移至提拉規定直徑之單結晶體3。轉移至規定直徑之單結晶的提拉後，隨著提拉之進展，單結晶之卡合段部6上升，而與在上方待機中之保持機構1 1接觸。此時，如前述，接觸單結晶之直徑擴大部7 的夾持桿1 5，被往上推壓而開放，而能通過直徑擴大部 >。然後，保持機構1 1之夾持桿1 5藉由本身的重量，沿著單結晶之卡合段部的形狀，成爲閉合狀態。經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 更進一步，雖然隨著單結晶之提拉，縮徑部8所負擔的重量增加，然而，在到達強度界限之前，提拉中的單結晶之重量達到基準値之時，內藏在種結晶夾持具1 〇內之壓縮彈簧開始變形。彈簧1 0 c被基準値以上的重量之單結晶所壓縮，上部夾持具1 0 a和下部夾持具1 〇b相互滑動，則結晶夾持具1 0延伸。因此，單結晶之重量直接地負荷在夾持桿（卡合構件）1 5上，保持機構之卡合構件確實地卡合.把持單結晶之卡合段部。此時，由於保持機構旋轉自如地支持在金屬室內，在卡合.夾持卡合段部後，經由此單結晶之卡合段部而形成一體，與提拉手段之速度相同地旋轉。另一方面，在本發明之裝置中，設置在種結晶夾持具1 0上之輪緣1 0 d的本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -25- A7 _B7___一五、發明説明（23 ) 外徑，由於比設置在保持機構之中心的提拉孔1 1 a的內徑大，藉由種結晶夾持具更加地被提拉手段提拉而上升’ 或是壓縮彈簧更加地變形而延伸，-以設置在上部夾持具 10a上之輪緣10 d，來支持保持機構1 1 »因此，保持機構夾持·卡合單結晶之卡合段部，而且藉由上部夾持具1 0 a支持後，保持機構與提拉手段相同步調地一邊旋轉一邊被提拉。【發明之效‘果】本發明之單結晶提拉裝置，係由在單結晶上形成卡合段都之提拉手段、及把持此單結晶之卡合段部的保持機構所構成，隨著提拉之進展，單結晶之重量相對應地增加，在到達縮徑部所能負荷之界限之前，轉移至藉由保持機構來保持單結晶。因此，即使在提拉重量大之單結晶的情況，也能確實地卡合.把持單結晶，不會發生單結晶落下之事故，能夠安全地製造單結晶。經濟部中央標準局員工消費合作社印装 (請先閱讀背面之注意事項再填寫本頁) 因此，本發明之單結晶提拉裝置，係爲對應半導體製造之效率化所發明出來的提拉技術，可以應用在半導體用矽單結晶之製造領域中。【圖面之簡單說明】第1圖係說明第1提拉裝置之全體構成的一例之縱剖面圖。第2圖係第1圖及後述之第9圖之由A—A箭頭方向本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） '~~~一~ -26- 經濟部中央樣準局員工消費合作社印褽 A7 .__B7_____ 五、發明説明（24 ) 來看之保持機構以及均衡裝置之橫剖面圖。第3圖之（a )〜（c )，係說明設置在第1圖所示第1提拉裝置之保持機構中的卡合構件之構造圖；（a ) 爲全體構成圖，（b )和（c )爲部分詳細圖,。 .第4圖係說明本發明之提拉裝置的提拉驅動馬達之控制方式說明圖。第5圖係此提拉裝置之保持機構的負擔重量之變化圖〇第6圖係說明第1提拉裝置之其他構成例的縱剖面圖 0 第7圖係說明設置在第6圖及後述之第1 2圖所示之之設置在提拉裝置之保持機構中的卡合構件之說明圖。第8圖係說明第1提拉裝置之全體構成的另一例之說 r. 明圖。第9圖係說明第2提拉裝置之全體構成例的縱剖面圖〇第1 0圖係說明第9圖之由B- B箭頭方向來看之設眞在保持機構中的卡合構件之平面圖。第1 1圖，係說明在第2提拉裝置中，隨著保持機構的下降之卡合構件之旋轉動作。第1 2圖係說明第3提拉裝置之全體構成例的縱剖面圖。第1 3圖之（3)及（13)係說明種結晶夾持具之構造例的縱剖面圖；（a )係表示零結晶之重量，在基準値以 (請先閲讀背面之注意事項再填寫本頁)-24- A7 _____ B7_ 5. Explanation of the invention (22) / The speed becomes slower and the diameter of the single crystal is increased to form the diameter enlarged portion 7, and then the diameter of the single crystal is gradually reduced until the middle thinned portion 5 'to form an engaging section 6 having an inverted cone shape in cross section. After the engaging section portion 6 is formed, the diameter of the single crystal is increased to form the shoulder portion 4, and then the pulling speed and rotation speed are adjusted to stable conditions, and the single crystal body 3 having a predetermined diameter is pulled. After the pull-up of the single crystal having a predetermined diameter, as the pull-up progresses, the engaging section 6 of the single crystal rises and comes into contact with the holding mechanism 11 on standby. At this time, as described above, the clamping rod 15 that contacts the enlarged diameter portion 7 of the single crystal is pushed upward to be opened, and can pass through the enlarged diameter portion >. Then, the holding rod 15 of the holding mechanism 11 is brought into a closed state along the shape of the engaging section of the single crystal by its own weight. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). Furthermore, although the weight of the diameter reducing section 8 increases with the pulling of the single crystal, Before the limit, when the weight of the single crystal in the lifting reached the reference value, the compression spring contained in the seed crystal holder 10 began to deform. The spring 10 c is compressed by a single crystal having a weight of more than the reference frame, and the upper clamp 10 a and the lower clamp 10 b slide on each other, and the crystal clamp 10 extends. Therefore, the weight of the single crystal is directly loaded on the clamping rod (engaging member) 15 and the engaging member of the holding mechanism is surely engaged. The engaging section of the single crystal is held. At this time, since the holding mechanism is rotatably supported in the metal chamber, after the engagement and clamping of the engaging section, it is integrated through the engaging section of the single crystal and rotates at the same speed as the lifting means. On the other hand, in the device of the present invention, the paper size of the rim 10 d provided on the crystal holder 10 is adapted to the Chinese National Standard (CNS) A4 specification (210X297 mm) -25- A7 _B7__ _15. Description of the invention (23) Since the outer diameter is larger than the inner diameter of the pull hole 1 1 a provided in the center of the holding mechanism, it is raised by the pulling means by the crystal holding tool. Or the compression spring is more deformed and extended to support the retaining mechanism 1 1 with a rim 10 d provided on the upper clamp 10a »Therefore, the retaining mechanism clamps and engages the engaging section of the single crystal, After being supported by the upper gripper 10 a, the holding mechanism is pulled in synchronization with the lifting means while rotating. [Effect of the invention] The single crystal pulling device of the present invention is composed of a pulling means for forming an engaging section on the single crystal and a holding mechanism for holding the engaging section of the single crystal. As the pulling progresses, the weight of the single crystal increases correspondingly, and before reaching the limit of the load that can be reduced in the reduced diameter portion, it shifts to holding the single crystal by the holding mechanism. Therefore, even in the case of pulling a single crystal with a large weight, the single crystal can be reliably engaged. The single crystal can be held without causing the single crystal to fall, and the single crystal can be safely produced. Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling out this page). Therefore, the single crystal pulling device of the present invention is a pulling technology invented to respond to the efficiency of semiconductor manufacturing. It can be used in the field of manufacturing silicon single crystals for semiconductors. [Brief Description of Drawings] Fig. 1 is a longitudinal sectional view illustrating an example of the overall configuration of the first lifting device. Figure 2 is the direction from A to A arrow in Figure 1 and Figure 9 described later. The paper dimensions apply the Chinese National Standard (CNS) A4 specification (210X297 mm) '~~~~~ -26- Central sample of Ministry of Economic Affairs Quasi-station employee consumer cooperative seal A7 .__ B7_____ V. Cross-sectional view of the holding mechanism and equalization device as described in the description of the invention (24). (A) to (c) of FIG. 3 are structural diagrams illustrating the engaging members provided in the holding mechanism of the first lifting device shown in FIG. 1; (a) is the overall configuration diagram, (b) and (C) is a partial detailed diagram. Fig. 4 is an explanatory diagram illustrating a control method of a pulling driving motor of the pulling device of the present invention. Fig. 5 is a diagram showing the change in the weight of the holding mechanism of the lifting device. Fig. 6 is a longitudinal sectional view illustrating another example of the configuration of the first lifting device. Fig. 7 is a view illustrating the installation in Fig. 6 and later. An explanatory diagram of the engaging member provided in the holding mechanism of the lifting device shown in FIG. 12. Fig. 8 illustrates another example of the overall configuration of the first lifting device. R. Fig. 9 is a longitudinal sectional view illustrating an overall configuration example of the second lifting device. Fig. 10 is a plan view illustrating the engaging member provided in the holding mechanism as viewed from the direction of the arrow B-B in Fig. 9 . Fig. 11 is a diagram illustrating the rotation operation of the engaging member as the holding mechanism is lowered in the second lifting device. Fig. 12 is a longitudinal sectional view illustrating an example of the overall configuration of a third lifting device. (3) and (13) of Fig. 13 are vertical cross-sectional views illustrating a configuration example of a crystal holder; (a) is the weight of zero crystals, which is based on the standard (please read the precautions on the back first) (Fill in this page)

W張尺度適用中國國家標準（CNS ) A4規格（210X297公釐_)~ _ A7 B7_____ 五、發明説明（25 ) 下之情況，（b ；)係表示單結晶之重量在基準値以上之情況下，種結晶夾持具拉伸後之圖。【圖號之簡單說明】 1 :坩堝 2 :矽溶融液 3 :單結晶體 4 :軸肩部 5:中間變細部 6:卡合段部 7 ·’直徑擴大部 8 :縮徑部 .. 9 :種結晶經濟部中央標準局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 1 0 :種結晶夾持具 11:保持機構 12:保持夾持具 13:夾板爪 1 4 :連桿 1 6 :均衡裝置（傾斜防止手段） 1 8 :主線 19:輔助線 2 0 :提拉機構 21:主提拉手段 22:輔助提拉手段本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -28 - 經濟部中央標準局員工消費合作社印製W scales are applicable to Chinese National Standard (CNS) A4 specifications (210X297 mm_) ~ _ A7 B7_____ 5. In the case of (25), the description of the invention (b;) means that the weight of the single crystal is above the benchmark 値, Figure after drawing the crystal holder. [Simplified description of drawing number] 1: Crucible 2: Silicon melt solution 3: Single crystal 4: Shoulder portion 5: Intermediate tapered portion 6: Engagement section portion 7 '' Enlarged portion 8: Reduced portion. 9: Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Crystal Economy (please read the precautions on the back before filling out this page) 1 0: Crystal clamps 11: Holding mechanism 12: Holding clamps 13: Splint claws 1 4: Link 16: Equalization device (tilt prevention means) 1 8: Main line 19: Auxiliary line 2 0: Lifting mechanism 21: Main lifting means 22: Auxiliary lifting means This paper standard applies Chinese National Standard (CNS) A4 specifications (210X297 mm) -28-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

(請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）、τ -29-(Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210X297 mm), τ -29-

Claims

Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 1. A single crystal pulling device, which is directed to a linear main body which has an inverted cone-shaped engaging section in a single crystal that is pulled while rotating r ' Lifting means; and a holding mechanism for holding the engaging section of the single crystal through the engaging member; and a single crystal lifting device of a linear auxiliary lifting means for lifting and lowering the holding mechanism, which is characterized by: The aforesaid auxiliary lifting means is to raise and lower the holding mechanism through the tilt preventing means of the holding mechanism, and to increase the speed of the holding mechanism and the main lifting means (-Yizhi) at the same pace. The single crystal pulling device of the first item in the range, wherein the driving motor of one of the above-mentioned main pulling means and the auxiliary pulling means is set to the speed control mode, and the other drive motor is set to the tension control mode. Kind of single crystal pulling ;: device is for the main pull that is formed in the single crystal that rotates and is pulled while rotating, forming the inverted cone-shaped engaging section, and through the I Put The special mechanism of the engaging section of the single crystal; and the lifting mechanism for raising and lowering the holding mechanism at the same pace as the pulling speed of the main pulling means; t. The single crystal pulling device of the auxiliary pulling means is characterized by: The aforementioned holding mechanism is provided with an engaging member capable of matching the shape of the engaging section of the single crystal and having an automatic clamping function by the action of a connecting rod or a clamping rod. 4. As the third item in the scope of patent application A single crystal pulling device, in which the engagement surface of the above-mentioned engagement member 'forms a large number of tooth-like or wave-like protrusions. This paper is suitable for domestic use (CNS) A4 wire (21GX297 mm) ~ " — (Please read "Notes on the reverse side before filling out this page")

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 6. Application for a patent garden 5. If a single crystal lifting device of the third or fourth patent application scope is applied 2. Among the above-mentioned main lifting methods and supplementary Jr lifting methods, borrow It can be lifted and lowered independently by turning up and down the roll; moreover, the auxiliary lifting mechanism lifts and lowers the holding mechanism through the tilt preventing means of the holding mechanism. β. If the single-crystal pulling device of the third or fourth item of the patent application scope, wherein the main pulling means and the auxiliary pulling means are independently lifted by the rotation of the bolt if. '7 types of single crystal pulling device are mainly provided with: the main pulling means for forming an inverted cone-shaped engaging section in the single crystal being pulled while rotating, and a holding mechanism for holding the single crystal; And the single crystal pulling device of the auxiliary pulling means which raises the holding mechanism at the same speed as the pulling speed of the main pulling means, is characterized in that: the holding mechanism is provided with a predetermined At the lifting position, the pusher that moves up and down; and rotates by the lifting action of the pusher to engage and hold the engaging member of the aforementioned single crystal engaging section. 8. The single crystal pulling device according to item 7 of the patent application scope, wherein the main pulling device and the auxiliary pulling device can be lifted and lowered independently by winding up and down the line; The holding mechanism is prevented from tilting to raise and lower the holding mechanism. 9 · The single crystal pulling device according to item 7 of the patent application scope, wherein the above-mentioned main pulling means and auxiliary pulling means are independently lifted by the rotation of the bolt. The 10 types of single crystal pulling device are designed to have: pulling the single crystal supported on the seed crystal holder while pulling to form an inverted ---: I-.litII (please read the note on the back first) Please fill in this page for further information), tr This paper size is in accordance with China National Standard (CNS) A4 specification (210X297 mm) -31-A8 B8 C8 D8 Means; and a holding mechanism for holding the engaging section of the single crystal through an engaging member; and a metal chamber for accommodating these mechanisms " guang ----- ________-. For: ..- @IJ 述种结. 晶. .Clamp ... hold ... having '/ province. Pu. Structure with single crystal growth and difficult to stretch, and the holding mechanism holds the engaging section of the single crystal with an engaging member, and The crystal holder is rotated while being pulled in the same j-step. 1 1. The single crystal pulling device according to item 10 of the patent application scope, wherein the above. The upper and lower holders of the crystal holder have a structure in which t can slide each other. Inside, there is a built-in spring. 12. The single crystal pulling device according to item 10 of the patent application scope, wherein the outer surface of the facing tile of the holding mechanism is equipped with a magnet 5 5; A magnet is also arranged on the peripheral surface to form a structure in which the holding mechanism is magnetically floating. 13. The single crystal pulling device according to item 10 of the scope of patent application, wherein the holding mechanism is provided with an engaging member having an automatic clamping function by the action of a connecting rod or a clamping rod. (Please read the note $ on the back before filling this page) Order · -ο. Printed bags for employees' cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs This paper size applies to China National Standard (CNS) A4 (210X297 mm)