JPH11171688A - 単結晶引上げ装置 - Google Patents

単結晶引上げ装置

Info

Publication number
JPH11171688A
JPH11171688A JP34109597A JP34109597A JPH11171688A JP H11171688 A JPH11171688 A JP H11171688A JP 34109597 A JP34109597 A JP 34109597A JP 34109597 A JP34109597 A JP 34109597A JP H11171688 A JPH11171688 A JP H11171688A
Authority
JP
Japan
Prior art keywords
crystal pulling
single crystal
pull chamber
chamber
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34109597A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11171688A5 (enExample
Inventor
Makoto Yamagishi
良 山岸
Kenichi Yoshizawa
健一 吉沢
Ayumi Suda
歩 須田
Toshiaki Tsunoka
俊明 角鹿
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KOMATSU KOKI KK
Sumco Techxiv Corp
Original Assignee
KOMATSU KOKI KK
Komatsu Electronic Metals Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KOMATSU KOKI KK, Komatsu Electronic Metals Co Ltd filed Critical KOMATSU KOKI KK
Priority to JP34109597A priority Critical patent/JPH11171688A/ja
Priority to TW87120103A priority patent/TW442830B/zh
Priority to DE1998157253 priority patent/DE19857253C2/de
Publication of JPH11171688A publication Critical patent/JPH11171688A/ja
Publication of JPH11171688A5 publication Critical patent/JPH11171688A5/ja
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Control Of Position Or Direction (AREA)
JP34109597A 1997-12-11 1997-12-11 単結晶引上げ装置 Pending JPH11171688A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置
TW87120103A TW442830B (en) 1997-12-11 1998-12-03 Device for pulling up single crystal
DE1998157253 DE19857253C2 (de) 1997-12-11 1998-12-11 Einkristall-Hebevorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Publications (2)

Publication Number Publication Date
JPH11171688A true JPH11171688A (ja) 1999-06-29
JPH11171688A5 JPH11171688A5 (enExample) 2005-03-17

Family

ID=18343220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34109597A Pending JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Country Status (3)

Country Link
JP (1) JPH11171688A (enExample)
DE (1) DE19857253C2 (enExample)
TW (1) TW442830B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508713A (ja) * 2007-12-17 2011-03-17 イメリス セラミックハニカム構造
KR20210099403A (ko) * 2020-02-04 2021-08-12 (주)한국아이티에스 반도체 단결정 잉곳의 이송 장치

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10102081A1 (de) * 2001-01-18 2002-07-25 Crystal Growing Systems Gmbh Kristallziehanlage
JP5483591B2 (ja) * 2010-10-08 2014-05-07 日鉄住金ファインテック株式会社 単結晶引上装置および坩堝支持装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041038B2 (ja) * 1981-05-19 1985-09-13 フエロフルイデイクス・コ−ポレイシヨン 結晶成長炉からの結晶の処理装置及び処理方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011508713A (ja) * 2007-12-17 2011-03-17 イメリス セラミックハニカム構造
KR20210099403A (ko) * 2020-02-04 2021-08-12 (주)한국아이티에스 반도체 단결정 잉곳의 이송 장치

Also Published As

Publication number Publication date
DE19857253A1 (de) 1999-06-17
DE19857253C2 (de) 2003-11-20
TW442830B (en) 2001-06-23

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