JPH11171688A5 - - Google Patents

Info

Publication number
JPH11171688A5
JPH11171688A5 JP1997341095A JP34109597A JPH11171688A5 JP H11171688 A5 JPH11171688 A5 JP H11171688A5 JP 1997341095 A JP1997341095 A JP 1997341095A JP 34109597 A JP34109597 A JP 34109597A JP H11171688 A5 JPH11171688 A5 JP H11171688A5
Authority
JP
Japan
Prior art keywords
chamber
rotation
removal position
ingot
pull
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1997341095A
Other languages
English (en)
Japanese (ja)
Other versions
JPH11171688A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP34109597A priority Critical patent/JPH11171688A/ja
Priority claimed from JP34109597A external-priority patent/JPH11171688A/ja
Priority to TW87120103A priority patent/TW442830B/zh
Priority to DE1998157253 priority patent/DE19857253C2/de
Publication of JPH11171688A publication Critical patent/JPH11171688A/ja
Publication of JPH11171688A5 publication Critical patent/JPH11171688A5/ja
Pending legal-status Critical Current

Links

JP34109597A 1997-12-11 1997-12-11 単結晶引上げ装置 Pending JPH11171688A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置
TW87120103A TW442830B (en) 1997-12-11 1998-12-03 Device for pulling up single crystal
DE1998157253 DE19857253C2 (de) 1997-12-11 1998-12-11 Einkristall-Hebevorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34109597A JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Publications (2)

Publication Number Publication Date
JPH11171688A JPH11171688A (ja) 1999-06-29
JPH11171688A5 true JPH11171688A5 (enExample) 2005-03-17

Family

ID=18343220

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34109597A Pending JPH11171688A (ja) 1997-12-11 1997-12-11 単結晶引上げ装置

Country Status (3)

Country Link
JP (1) JPH11171688A (enExample)
DE (1) DE19857253C2 (enExample)
TW (1) TW442830B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10102081A1 (de) * 2001-01-18 2002-07-25 Crystal Growing Systems Gmbh Kristallziehanlage
US20100300053A1 (en) * 2007-12-17 2010-12-02 Alary Jean-Andre Ceramic honeycomb structures
JP5483591B2 (ja) * 2010-10-08 2014-05-07 日鉄住金ファインテック株式会社 単結晶引上装置および坩堝支持装置
KR102344844B1 (ko) * 2020-02-04 2021-12-30 (주)한국아이티에스 반도체 단결정 잉곳의 이송 장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6041038B2 (ja) * 1981-05-19 1985-09-13 フエロフルイデイクス・コ−ポレイシヨン 結晶成長炉からの結晶の処理装置及び処理方法

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