DE69612725T2 - Kristallhaltevorrichtung - Google Patents

Kristallhaltevorrichtung

Info

Publication number
DE69612725T2
DE69612725T2 DE69612725T DE69612725T DE69612725T2 DE 69612725 T2 DE69612725 T2 DE 69612725T2 DE 69612725 T DE69612725 T DE 69612725T DE 69612725 T DE69612725 T DE 69612725T DE 69612725 T2 DE69612725 T2 DE 69612725T2
Authority
DE
Germany
Prior art keywords
crystal holder
holder
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69612725T
Other languages
English (en)
Other versions
DE69612725D1 (de
Inventor
Masanori Kimura
Eiichi Iino
Hirotoshi Yamagishi
Kiyotaka Takano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Handotai Co Ltd
Original Assignee
Shin Etsu Handotai Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Handotai Co Ltd filed Critical Shin Etsu Handotai Co Ltd
Application granted granted Critical
Publication of DE69612725D1 publication Critical patent/DE69612725D1/de
Publication of DE69612725T2 publication Critical patent/DE69612725T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling
    • Y10T117/1072—Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
DE69612725T 1995-12-27 1996-12-20 Kristallhaltevorrichtung Expired - Fee Related DE69612725T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35127595A JP3402040B2 (ja) 1995-12-27 1995-12-27 単結晶保持装置

Publications (2)

Publication Number Publication Date
DE69612725D1 DE69612725D1 (de) 2001-06-13
DE69612725T2 true DE69612725T2 (de) 2002-02-07

Family

ID=18416216

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69612725T Expired - Fee Related DE69612725T2 (de) 1995-12-27 1996-12-20 Kristallhaltevorrichtung

Country Status (4)

Country Link
US (1) US5843229A (de)
EP (1) EP0781875B1 (de)
JP (1) JP3402040B2 (de)
DE (1) DE69612725T2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5932007A (en) * 1996-06-04 1999-08-03 General Signal Technology Corporation Method and apparatus for securely supporting a growing crystal in a czochralski crystal growth system
JP3528448B2 (ja) * 1996-07-23 2004-05-17 信越半導体株式会社 単結晶の引上げ方法及び装置
TW541365B (en) * 1996-08-30 2003-07-11 Sumitomo Sitix Corp Single crystal pulling method and single crystal pulling device
JP3478021B2 (ja) * 1996-09-18 2003-12-10 信越半導体株式会社 結晶保持装置
JP3596226B2 (ja) * 1997-03-17 2004-12-02 信越半導体株式会社 単結晶保持装置
KR19980079891A (ko) * 1997-03-27 1998-11-25 모리 레이자로 단결정 성장장치 및 단결정 성장방법
JPH10273390A (ja) * 1997-03-28 1998-10-13 Super Silicon Kenkyusho:Kk 半導体単結晶製造装置
TW370580B (en) * 1997-09-22 1999-09-21 Super Silicon Crystal Res Monocrystal pulling device
JPH11199374A (ja) * 1998-01-07 1999-07-27 Komatsu Ltd 単結晶の引き上げ装置および落下防止装置
DE19939715B4 (de) 1999-08-21 2008-07-24 Crystal Growing Systems Gmbh Auf einer Ziehwelle einer Kristallziehanlage angeordneter Greifer
DE102008047599B4 (de) * 2008-09-17 2012-12-20 Siltronic Ag Vorrichtung und Verfahren zum Ziehen eines Einkristalls
JP5483591B2 (ja) * 2010-10-08 2014-05-07 日鉄住金ファインテック株式会社 単結晶引上装置および坩堝支持装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4186123A (en) * 1974-10-02 1980-01-29 Johns-Manville Corporation Filled polymeric composition
US4190630A (en) * 1978-01-03 1980-02-26 Vsesojuzny Nauchno-Isslekovatelsky Institut Monokristallov Stsintillyatsionnykh Materialov I Osobo Chistykh Khimicheskikh Veschestv Apparatus for pulling single crystals from melt
DE3414290A1 (de) * 1984-04-14 1985-10-24 Leybold-Heraeus GmbH, 5000 Köln Kristallhalter
JPS62288191A (ja) * 1986-06-06 1987-12-15 Kyushu Denshi Kinzoku Kk 単結晶成長方法及びその装置
JPS63252991A (ja) * 1987-04-09 1988-10-20 Mitsubishi Metal Corp 落下防止保持部を有するｃｚ単結晶
US5173270A (en) * 1987-04-09 1992-12-22 Mitsubishi Materials Corporation Monocrystal rod pulled from a melt
JPH0631193B2 (ja) * 1988-10-27 1994-04-27 信越半導体株式会社 リチャージ装置
JPH07103000B2 (ja) * 1990-03-30 1995-11-08 信越半導体株式会社 結晶引上装置
EP0449260B1 (de) * 1990-03-30 1995-08-30 Shin-Etsu Handotai Company Limited Vorrichtung zur Herstellung von Monokristallen nach dem Czochralski-Verfahren
JPH07515B2 (ja) * 1990-04-11 1995-01-11 信越半導体株式会社 結晶引上装置
JPH05208893A (ja) * 1992-01-29 1993-08-20 Komatsu Denshi Kinzoku Kk 単結晶引上げ装置およびその制御方法
JP3085072B2 (ja) * 1993-12-28 2000-09-04 三菱マテリアル株式会社 単結晶引上装置

Also Published As

Publication number Publication date
JPH09183694A (ja) 1997-07-15
DE69612725D1 (de) 2001-06-13
EP0781875B1 (de) 2001-05-09
JP3402040B2 (ja) 2003-04-28
US5843229A (en) 1998-12-01
EP0781875A2 (de) 1997-07-02
EP0781875A3 (de) 1998-04-22

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee