DE112016002417A5 - Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements - Google Patents
Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements Download PDFInfo
- Publication number
- DE112016002417A5 DE112016002417A5 DE112016002417.7T DE112016002417T DE112016002417A5 DE 112016002417 A5 DE112016002417 A5 DE 112016002417A5 DE 112016002417 T DE112016002417 T DE 112016002417T DE 112016002417 A5 DE112016002417 A5 DE 112016002417A5
- Authority
- DE
- Germany
- Prior art keywords
- optoelectronic component
- producing
- optoelectronic
- component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005693 optoelectronics Effects 0.000 title 2
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/50—Multistep manufacturing processes of assemblies consisting of devices, each device being of a type provided for in group H01L27/00 or H01L29/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
- H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
- H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0093—Wafer bonding; Removal of the growth substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/08—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a plurality of light emitting regions, e.g. laterally discontinuous light emitting layer or photoluminescent region integrated within the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/20—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a particular shape, e.g. curved or truncated substrate
- H01L33/22—Roughened surfaces, e.g. at the interface between epitaxial layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/642—Heat extraction or cooling elements characterized by the shape
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/64—Heat extraction or cooling elements
- H01L33/647—Heat extraction or cooling elements the elements conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0066—Processes relating to semiconductor body packages relating to arrangements for conducting electric current to or from the semiconductor body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2933/00—Details relating to devices covered by the group H01L33/00 but not provided for in its subgroups
- H01L2933/0008—Processes
- H01L2933/0033—Processes relating to semiconductor body packages
- H01L2933/0075—Processes relating to semiconductor body packages relating to heat extraction or cooling elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Led Device Packages (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102015108545.3 | 2015-05-29 | ||
DE102015108545.3A DE102015108545A1 (de) | 2015-05-29 | 2015-05-29 | Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements |
PCT/EP2016/061709 WO2016193071A1 (de) | 2015-05-29 | 2016-05-24 | Optoelektronisches bauelement und verfahren zur herstellung eines optoelektronischen bauelements |
Publications (1)
Publication Number | Publication Date |
---|---|
DE112016002417A5 true DE112016002417A5 (de) | 2018-03-08 |
Family
ID=56072329
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102015108545.3A Withdrawn DE102015108545A1 (de) | 2015-05-29 | 2015-05-29 | Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements |
DE112016002417.7T Pending DE112016002417A5 (de) | 2015-05-29 | 2016-05-24 | Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102015108545.3A Withdrawn DE102015108545A1 (de) | 2015-05-29 | 2015-05-29 | Optoelektronisches Bauelement und Verfahren zur Herstellung eines optoelektronischen Bauelements |
Country Status (7)
Country | Link |
---|---|
US (1) | US10475778B2 (de) |
JP (1) | JP2018516460A (de) |
KR (2) | KR102575338B1 (de) |
CN (1) | CN107667436A (de) |
DE (2) | DE102015108545A1 (de) |
TW (1) | TWI601305B (de) |
WO (1) | WO2016193071A1 (de) |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102015112280A1 (de) * | 2015-07-28 | 2017-02-02 | Osram Opto Semiconductors Gmbh | Bauelement mit einem metallischen Träger und Verfahren zur Herstellung von Bauelementen |
DE102016100351B4 (de) | 2016-01-11 | 2023-07-06 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronisches Bauelement, Leuchtvorrichtung und Autoscheinwerfer |
DE102016106831A1 (de) | 2016-04-13 | 2017-10-19 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip |
DE102016113193A1 (de) | 2016-07-18 | 2018-01-18 | Osram Opto Semiconductors Gmbh | Bauteil mit geometrisch angepasster Kontaktstruktur und dessen Herstellungsverfahren |
WO2018117361A1 (ko) * | 2016-12-23 | 2018-06-28 | 주식회사 루멘스 | 마이크로 엘이디 모듈 및 그 제조방법 |
US10629577B2 (en) * | 2017-03-16 | 2020-04-21 | Invensas Corporation | Direct-bonded LED arrays and applications |
DE102017112866A1 (de) * | 2017-06-12 | 2018-12-13 | Osram Opto Semiconductors Gmbh | Verfahren zum Befestigen eines Halbleiterchips auf einem Substrat und elektronisches Bauelement |
DE102017119344A1 (de) | 2017-08-24 | 2019-02-28 | Osram Opto Semiconductors Gmbh | Träger und Bauteil mit Pufferschicht sowie Verfahren zur Herstellung eines Bauteils |
DE102017119346A1 (de) | 2017-08-24 | 2019-02-28 | Osram Opto Semiconductors Gmbh | Bauteil mit Pufferschicht und Verfahren zur Herstellung eines Bauteils |
CN109427819B (zh) * | 2017-08-31 | 2021-05-04 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法、显示装置 |
US10186549B1 (en) * | 2017-09-20 | 2019-01-22 | Asm Technology Singapore Pte Ltd | Gang bonding process for assembling a matrix of light-emitting elements |
US10892296B2 (en) * | 2017-11-27 | 2021-01-12 | Seoul Viosys Co., Ltd. | Light emitting device having commonly connected LED sub-units |
US11527519B2 (en) | 2017-11-27 | 2022-12-13 | Seoul Viosys Co., Ltd. | LED unit for display and display apparatus having the same |
US10892297B2 (en) | 2017-11-27 | 2021-01-12 | Seoul Viosys Co., Ltd. | Light emitting diode (LED) stack for a display |
US11282981B2 (en) | 2017-11-27 | 2022-03-22 | Seoul Viosys Co., Ltd. | Passivation covered light emitting unit stack |
US10748881B2 (en) | 2017-12-05 | 2020-08-18 | Seoul Viosys Co., Ltd. | Light emitting device with LED stack for display and display apparatus having the same |
US10886327B2 (en) | 2017-12-14 | 2021-01-05 | Seoul Viosys Co., Ltd. | Light emitting stacked structure and display device having the same |
US11552057B2 (en) | 2017-12-20 | 2023-01-10 | Seoul Viosys Co., Ltd. | LED unit for display and display apparatus having the same |
US11522006B2 (en) | 2017-12-21 | 2022-12-06 | Seoul Viosys Co., Ltd. | Light emitting stacked structure and display device having the same |
US11552061B2 (en) | 2017-12-22 | 2023-01-10 | Seoul Viosys Co., Ltd. | Light emitting device with LED stack for display and display apparatus having the same |
US11114499B2 (en) | 2018-01-02 | 2021-09-07 | Seoul Viosys Co., Ltd. | Display device having light emitting stacked structure |
US10784240B2 (en) | 2018-01-03 | 2020-09-22 | Seoul Viosys Co., Ltd. | Light emitting device with LED stack for display and display apparatus having the same |
US11169326B2 (en) | 2018-02-26 | 2021-11-09 | Invensas Bonding Technologies, Inc. | Integrated optical waveguides, direct-bonded waveguide interface joints, optical routing and interconnects |
DE102018112586A1 (de) | 2018-05-25 | 2019-11-28 | Osram Opto Semiconductors Gmbh | Verfahren zur herstellung einer verbindung zwischen bauteilen und bauelement |
FR3082663B1 (fr) * | 2018-06-14 | 2022-01-07 | Aledia | Dispositif optoelectronique |
US11502230B2 (en) * | 2018-11-02 | 2022-11-15 | Seoul Viosys Co., Ltd. | Light emitting device |
DE102019103761A1 (de) * | 2019-02-14 | 2020-08-20 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Verfahren zur herstellung eines bauelements und bauelement |
US11762200B2 (en) | 2019-12-17 | 2023-09-19 | Adeia Semiconductor Bonding Technologies Inc. | Bonded optical devices |
JP7485790B2 (ja) * | 2020-05-15 | 2024-05-16 | ルミレッズ リミテッド ライアビリティ カンパニー | 放射強度の空間分布を設定可能な発光装置 |
US11810907B2 (en) | 2021-01-27 | 2023-11-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Pixel structure for displays |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS526581A (en) * | 1975-07-04 | 1977-01-19 | Agency Of Ind Science & Technol | Color resoluting apparatus using recognization of light spectrum distr ibution |
JP2000174059A (ja) | 1998-12-09 | 2000-06-23 | Matsushita Electric Ind Co Ltd | 電子部品の実装方法 |
JP2005079298A (ja) | 2003-08-29 | 2005-03-24 | Shin Etsu Handotai Co Ltd | 発光素子及び発光素子の製造方法 |
DE102005029246B4 (de) | 2005-03-31 | 2023-06-22 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Halbleiterchip mit einer Lötschichtenfolge und Verfahren zum Löten eines Halbleiterchips |
US7736945B2 (en) * | 2005-06-09 | 2010-06-15 | Philips Lumileds Lighting Company, Llc | LED assembly having maximum metal support for laser lift-off of growth substrate |
DE102005047152A1 (de) | 2005-09-30 | 2007-04-12 | Osram Opto Semiconductors Gmbh | Epitaxiesubstrat, Verfahren zu seiner Herstellung und Verfahren zur Herstellung eines Halbleiterchips |
JP4985129B2 (ja) | 2007-06-12 | 2012-07-25 | 三菱電機株式会社 | 接合体および電子モジュールならびに接合方法 |
TWI419359B (zh) | 2008-08-07 | 2013-12-11 | Formosa Epitaxy Inc | Structure and fabrication method of AC type flip - chip light emitting diode |
JP4724222B2 (ja) | 2008-12-12 | 2011-07-13 | 株式会社東芝 | 発光装置の製造方法 |
US8202741B2 (en) * | 2009-03-04 | 2012-06-19 | Koninklijke Philips Electronics N.V. | Method of bonding a semiconductor device using a compliant bonding structure |
DE102009022966A1 (de) * | 2009-05-28 | 2010-12-02 | Osram Opto Semiconductors Gmbh | Oberflächenmontierbarer optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines oberflächenmontierbaren optoelektronischen Halbleiterchips |
KR101192181B1 (ko) * | 2010-03-31 | 2012-10-17 | (주)포인트엔지니어링 | 광 소자 디바이스 및 그 제조 방법 |
US9473714B2 (en) | 2010-07-01 | 2016-10-18 | Semiconductor Energy Laboratory Co., Ltd. | Solid-state imaging device and semiconductor display device |
KR101252032B1 (ko) | 2010-07-08 | 2013-04-10 | 삼성전자주식회사 | 반도체 발광소자 및 이의 제조방법 |
DE102010027679A1 (de) * | 2010-07-20 | 2012-01-26 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement |
JP4778107B1 (ja) * | 2010-10-19 | 2011-09-21 | 有限会社ナプラ | 発光デバイス、及び、その製造方法 |
DE102011056888A1 (de) * | 2011-12-22 | 2013-06-27 | Osram Opto Semiconductors Gmbh | Anzeigevorrichtung und Verfahren zur Herstellung einer Anzeigevorrichtung |
DE102012106982A1 (de) | 2012-07-31 | 2014-02-06 | Osram Opto Semiconductors Gmbh | Verfahren zur Herstellung eines Leuchtmittels |
TWI490837B (zh) | 2012-10-19 | 2015-07-01 | 啟耀光電股份有限公司 | 顯示裝置 |
DE102012110775A1 (de) * | 2012-11-09 | 2014-05-15 | Osram Opto Semiconductors Gmbh | Optoelektronischer Halbleiterchip und Verfahren zur Herstellung eines optoelektronischen Halbleiterchips |
DE102012112302A1 (de) * | 2012-12-14 | 2014-06-18 | Osram Opto Semiconductors Gmbh | Anzeigevorrichtung und Verfahren zur Herstellung einer Anzeigevorrichtung |
WO2014105403A1 (en) | 2012-12-31 | 2014-07-03 | Invensas Corporation | High performance light emitting diode |
DE102013102667A1 (de) | 2013-03-15 | 2014-10-02 | Osram Opto Semiconductors Gmbh | Anzeigevorrichtung |
TWM500993U (zh) | 2014-11-17 | 2015-05-11 | Turnray Energy Tech Ltd | 發光二極體照明裝置 |
DE102015105666A1 (de) | 2015-04-14 | 2016-10-20 | Osram Opto Semiconductors Gmbh | Verfahren zur Montage eines ersten Bauteils auf einem zweiten Bauteil und Verfahren zur Herstellung einer elektronischen Vorrichtung mit einem ersten Bauteil und einem zweiten Bauteil |
DE102015108532A1 (de) * | 2015-05-29 | 2016-12-01 | Osram Opto Semiconductors Gmbh | Anzeigevorrichtung mit einer Mehrzahl getrennt voneinander betreibbarer Bildpunkte |
-
2015
- 2015-05-29 DE DE102015108545.3A patent/DE102015108545A1/de not_active Withdrawn
-
2016
- 2016-05-24 JP JP2017559495A patent/JP2018516460A/ja active Pending
- 2016-05-24 KR KR1020177036387A patent/KR102575338B1/ko active IP Right Grant
- 2016-05-24 DE DE112016002417.7T patent/DE112016002417A5/de active Pending
- 2016-05-24 CN CN201680031107.XA patent/CN107667436A/zh active Pending
- 2016-05-24 WO PCT/EP2016/061709 patent/WO2016193071A1/de active Application Filing
- 2016-05-24 KR KR1020237029800A patent/KR20230130768A/ko not_active Application Discontinuation
- 2016-05-24 US US15/578,240 patent/US10475778B2/en active Active
- 2016-05-27 TW TW105116627A patent/TWI601305B/zh active
Also Published As
Publication number | Publication date |
---|---|
KR20230130768A (ko) | 2023-09-12 |
DE102015108545A1 (de) | 2016-12-01 |
KR20180013975A (ko) | 2018-02-07 |
TW201705517A (zh) | 2017-02-01 |
US10475778B2 (en) | 2019-11-12 |
KR102575338B1 (ko) | 2023-09-05 |
JP2018516460A (ja) | 2018-06-21 |
TWI601305B (zh) | 2017-10-01 |
WO2016193071A1 (de) | 2016-12-08 |
US20180151548A1 (en) | 2018-05-31 |
CN107667436A (zh) | 2018-02-06 |
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