DE102015122155B4 - Verwendung einer Ionisierungsvorrichtung - Google Patents
Verwendung einer Ionisierungsvorrichtung Download PDFInfo
- Publication number
- DE102015122155B4 DE102015122155B4 DE102015122155.1A DE102015122155A DE102015122155B4 DE 102015122155 B4 DE102015122155 B4 DE 102015122155B4 DE 102015122155 A DE102015122155 A DE 102015122155A DE 102015122155 B4 DE102015122155 B4 DE 102015122155B4
- Authority
- DE
- Germany
- Prior art keywords
- ionization device
- ionization
- electrode
- dielectric element
- discharge gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/0027—Methods for using particle spectrometers
- H01J49/0031—Step by step routines describing the use of the apparatus
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
- H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
- H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Fluid Mechanics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
- Plasma Technology (AREA)
Priority Applications (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015122155.1A DE102015122155B4 (de) | 2015-12-17 | 2015-12-17 | Verwendung einer Ionisierungsvorrichtung |
| CN201680082108.7A CN108701578B (zh) | 2015-12-17 | 2016-12-14 | 电离装置、方法和用途及分析样品物质的分析仪和方法 |
| US16/062,932 US10777401B2 (en) | 2015-12-17 | 2016-12-14 | Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance |
| JP2018531502A JP7014436B2 (ja) | 2015-12-17 | 2016-12-14 | ガス状物質のイオン化のためのイオン化装置の使用、装置及び方法、並びにガス状イオン化物質を分析するための装置及び方法 |
| CA3007449A CA3007449C (en) | 2015-12-17 | 2016-12-14 | Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance |
| PCT/IB2016/057626 WO2017103819A1 (de) | 2015-12-17 | 2016-12-14 | Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes |
| EP16826171.7A EP3391404B8 (de) | 2015-12-17 | 2016-12-14 | Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes |
| JP2021183159A JP2022020776A (ja) | 2015-12-17 | 2021-11-10 | ガス状物質のイオン化のためのイオン化装置の使用、装置及び方法、並びにガス状イオン化物質を分析するための装置及び方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102015122155.1A DE102015122155B4 (de) | 2015-12-17 | 2015-12-17 | Verwendung einer Ionisierungsvorrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE102015122155A1 DE102015122155A1 (de) | 2017-06-22 |
| DE102015122155B4 true DE102015122155B4 (de) | 2018-03-08 |
Family
ID=57796764
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102015122155.1A Active DE102015122155B4 (de) | 2015-12-17 | 2015-12-17 | Verwendung einer Ionisierungsvorrichtung |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US10777401B2 (enExample) |
| EP (1) | EP3391404B8 (enExample) |
| JP (2) | JP7014436B2 (enExample) |
| CN (1) | CN108701578B (enExample) |
| CA (1) | CA3007449C (enExample) |
| DE (1) | DE102015122155B4 (enExample) |
| WO (1) | WO2017103819A1 (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11201045B2 (en) | 2017-06-16 | 2021-12-14 | Plasmion Gmbh | Apparatus and method for ionizing an analyte, and apparatus and method for analysing an ionized analyte |
| CA2972600A1 (en) * | 2017-07-07 | 2019-01-07 | Teknoscan Systems Inc. | Polarization dielectric discharge source for ims instrument |
| KR101931324B1 (ko) * | 2017-09-14 | 2018-12-20 | (주)나노텍 | 셀프 플라즈마 챔버의 오염 억제 장치 |
| TW202534314A (zh) * | 2019-03-25 | 2025-09-01 | 日商亞多納富有限公司 | 製程系統及其控制方法 |
| CN111263503B (zh) * | 2019-12-11 | 2021-04-27 | 厦门大学 | 一种等离子体气动探针及其测量系统 |
| US11621155B2 (en) * | 2021-07-29 | 2023-04-04 | Bayspec, Inc. | Multi-modal ionization for mass spectrometry |
| CN114286486A (zh) * | 2021-12-31 | 2022-04-05 | 中国人民解放军战略支援部队航天工程大学 | 大气压介质阻挡放电等离子体活性产物测量装置和方法 |
| CN114664636B (zh) * | 2022-03-04 | 2023-03-24 | 苏州大学 | 基于介质阻挡放电的空气逆流式离子源 |
| CN116864370A (zh) | 2022-03-28 | 2023-10-10 | 株式会社岛津制作所 | 离子源及质谱仪 |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009102766A1 (en) | 2008-02-12 | 2009-08-20 | Purdue Research Foundation | Low temperature plasma probe and methods of use thereof |
| US20120292501A1 (en) | 2010-01-25 | 2012-11-22 | Masuyuki Sugiyama | Mass spectrometer |
| US20130161507A1 (en) | 2011-12-26 | 2013-06-27 | Hitachi High-Technologies Corporation | Mass spectrometer and mass spectrometry |
Family Cites Families (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4501965A (en) | 1983-01-14 | 1985-02-26 | Mds Health Group Limited | Method and apparatus for sampling a plasma into a vacuum chamber |
| JP2753265B2 (ja) | 1988-06-10 | 1998-05-18 | 株式会社日立製作所 | プラズマイオン化質量分析計 |
| JPH04110653A (ja) | 1990-08-31 | 1992-04-13 | Hitachi Ltd | プラズマを用いた気体試料の分析方法 |
| US5961772A (en) | 1997-01-23 | 1999-10-05 | The Regents Of The University Of California | Atmospheric-pressure plasma jet |
| US6410914B1 (en) | 1999-03-05 | 2002-06-25 | Bruker Daltonics Inc. | Ionization chamber for atmospheric pressure ionization mass spectrometry |
| US6407382B1 (en) | 1999-06-04 | 2002-06-18 | Technispan Llc | Discharge ionization source |
| US6320388B1 (en) * | 1999-06-11 | 2001-11-20 | Rae Systems, Inc. | Multiple channel photo-ionization detector for simultaneous and selective measurement of volatile organic compound |
| US7274015B2 (en) | 2001-08-08 | 2007-09-25 | Sionex Corporation | Capacitive discharge plasma ion source |
| US6646256B2 (en) | 2001-12-18 | 2003-11-11 | Agilent Technologies, Inc. | Atmospheric pressure photoionization source in mass spectrometry |
| EP1483775B1 (en) | 2002-03-08 | 2017-10-11 | Analytik Jena AG | A plasma mass spectrometer |
| US7095019B1 (en) | 2003-05-30 | 2006-08-22 | Chem-Space Associates, Inc. | Remote reagent chemical ionization source |
| US7005635B2 (en) | 2004-02-05 | 2006-02-28 | Metara, Inc. | Nebulizer with plasma source |
| US7256396B2 (en) | 2005-06-30 | 2007-08-14 | Ut-Battelle, Llc | Sensitive glow discharge ion source for aerosol and gas analysis |
| US7326926B2 (en) | 2005-07-06 | 2008-02-05 | Yang Wang | Corona discharge ionization sources for mass spectrometric and ion mobility spectrometric analysis of gas-phase chemical species |
| US7576322B2 (en) | 2005-11-08 | 2009-08-18 | Science Applications International Corporation | Non-contact detector system with plasma ion source |
| US7642510B2 (en) | 2006-08-22 | 2010-01-05 | E.I. Du Pont De Nemours And Company | Ion source for a mass spectrometer |
| TWI337748B (en) * | 2007-05-08 | 2011-02-21 | Univ Nat Sun Yat Sen | Mass analyzing apparatus |
| CN101470100B (zh) * | 2007-12-27 | 2012-06-20 | 同方威视技术股份有限公司 | 离子迁移谱仪及其方法 |
| JP5098079B2 (ja) | 2008-06-27 | 2012-12-12 | 国立大学法人山梨大学 | イオン化分析方法および装置 |
| US7910896B2 (en) | 2008-07-25 | 2011-03-22 | Honeywell International Inc. | Micro discharge device ionizer and method of fabricating the same |
| US20100032559A1 (en) | 2008-08-11 | 2010-02-11 | Agilent Technologies, Inc. | Variable energy photoionization device and method for mass spectrometry |
| WO2010037238A1 (en) | 2008-10-03 | 2010-04-08 | National Research Council Of Canada | Plasma-based direct sampling of molecules for mass spectrometric analysis |
| US8153964B2 (en) | 2009-05-29 | 2012-04-10 | Academia Sinica | Ultrasound ionization mass spectrometer |
| US8247784B2 (en) | 2009-07-29 | 2012-08-21 | California Institute Of Technology | Switched ferroelectric plasma ionizer |
| WO2011099642A1 (ja) | 2010-02-12 | 2011-08-18 | 国立大学法人山梨大学 | イオン化装置およびイオン化分析装置 |
| JP5596402B2 (ja) | 2010-04-19 | 2014-09-24 | 株式会社日立ハイテクノロジーズ | 分析装置、イオン化装置及び分析方法 |
| DE102010044252B4 (de) * | 2010-09-02 | 2014-03-27 | Reinhausen Plasma Gmbh | Vorrichtung und Verfahren zur Erzeugung einer Barriereentladung in einem Gasstrom |
| JP5497615B2 (ja) * | 2010-11-08 | 2014-05-21 | 株式会社日立ハイテクノロジーズ | 質量分析装置 |
| GB2498174B (en) | 2011-12-12 | 2016-06-29 | Thermo Fisher Scient (Bremen) Gmbh | Mass spectrometer vacuum interface method and apparatus |
| WO2013173813A1 (en) | 2012-05-17 | 2013-11-21 | Georgia Tech Research Corporation | Sample analyzing system |
| RU2676384C1 (ru) | 2013-11-26 | 2018-12-28 | Смитс Детекшен Монреаль Инк. | Источник ионизации на основе диэлектрического барьерного разряда для спектрометрии |
| CN104064429B (zh) * | 2014-07-16 | 2017-02-22 | 昆山禾信质谱技术有限公司 | 一种质谱电离源 |
-
2015
- 2015-12-17 DE DE102015122155.1A patent/DE102015122155B4/de active Active
-
2016
- 2016-12-14 US US16/062,932 patent/US10777401B2/en active Active
- 2016-12-14 JP JP2018531502A patent/JP7014436B2/ja active Active
- 2016-12-14 WO PCT/IB2016/057626 patent/WO2017103819A1/de not_active Ceased
- 2016-12-14 EP EP16826171.7A patent/EP3391404B8/de active Active
- 2016-12-14 CN CN201680082108.7A patent/CN108701578B/zh active Active
- 2016-12-14 CA CA3007449A patent/CA3007449C/en active Active
-
2021
- 2021-11-10 JP JP2021183159A patent/JP2022020776A/ja active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009102766A1 (en) | 2008-02-12 | 2009-08-20 | Purdue Research Foundation | Low temperature plasma probe and methods of use thereof |
| US20120292501A1 (en) | 2010-01-25 | 2012-11-22 | Masuyuki Sugiyama | Mass spectrometer |
| US20130161507A1 (en) | 2011-12-26 | 2013-06-27 | Hitachi High-Technologies Corporation | Mass spectrometer and mass spectrometry |
Also Published As
| Publication number | Publication date |
|---|---|
| EP3391404B1 (de) | 2025-08-13 |
| EP3391404A1 (de) | 2018-10-24 |
| DE102015122155A1 (de) | 2017-06-22 |
| CA3007449A1 (en) | 2017-06-22 |
| JP2019500728A (ja) | 2019-01-10 |
| US10777401B2 (en) | 2020-09-15 |
| CN108701578A (zh) | 2018-10-23 |
| US20180366310A1 (en) | 2018-12-20 |
| CA3007449C (en) | 2024-01-23 |
| EP3391404B8 (de) | 2025-10-08 |
| EP3391404C0 (de) | 2025-08-13 |
| JP2022020776A (ja) | 2022-02-01 |
| CN108701578B (zh) | 2020-11-03 |
| WO2017103819A1 (de) | 2017-06-22 |
| JP7014436B2 (ja) | 2022-02-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| R012 | Request for examination validly filed | ||
| R016 | Response to examination communication | ||
| R016 | Response to examination communication | ||
| R018 | Grant decision by examination section/examining division | ||
| R081 | Change of applicant/patentee |
Owner name: PLASMION GMBH, DE Free format text: FORMER OWNER: WOLF, JAN-CHRISTOPH, DR., 85049 INGOLSTADT, DE |
|
| R082 | Change of representative |
Representative=s name: LEONHARD & PARTNER PATENTANWAELTE, DE |
|
| R020 | Patent grant now final | ||
| R082 | Change of representative |
Representative=s name: LEONHARD, REIMUND, DIPL.-ING., DE |