EP3391404C0 - Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes - Google Patents

Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes

Info

Publication number
EP3391404C0
EP3391404C0 EP16826171.7A EP16826171A EP3391404C0 EP 3391404 C0 EP3391404 C0 EP 3391404C0 EP 16826171 A EP16826171 A EP 16826171A EP 3391404 C0 EP3391404 C0 EP 3391404C0
Authority
EP
European Patent Office
Prior art keywords
gaseous
substance
ionizing
analyzing
ionization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP16826171.7A
Other languages
English (en)
French (fr)
Other versions
EP3391404B1 (de
EP3391404A1 (de
EP3391404B8 (de
Inventor
Jan-Christoph Wolf
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plasmion GmbH
Original Assignee
Plasmion GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plasmion GmbH filed Critical Plasmion GmbH
Publication of EP3391404A1 publication Critical patent/EP3391404A1/de
Publication of EP3391404B1 publication Critical patent/EP3391404B1/de
Publication of EP3391404C0 publication Critical patent/EP3391404C0/de
Application granted granted Critical
Publication of EP3391404B8 publication Critical patent/EP3391404B8/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/0027—Methods for using particle spectrometers
    • H01J49/0031—Step by step routines describing the use of the apparatus
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/245—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Plasma Technology (AREA)
EP16826171.7A 2015-12-17 2016-12-14 Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes Active EP3391404B8 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015122155.1A DE102015122155B4 (de) 2015-12-17 2015-12-17 Verwendung einer Ionisierungsvorrichtung
PCT/IB2016/057626 WO2017103819A1 (de) 2015-12-17 2016-12-14 Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes

Publications (4)

Publication Number Publication Date
EP3391404A1 EP3391404A1 (de) 2018-10-24
EP3391404B1 EP3391404B1 (de) 2025-08-13
EP3391404C0 true EP3391404C0 (de) 2025-08-13
EP3391404B8 EP3391404B8 (de) 2025-10-08

Family

ID=57796764

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16826171.7A Active EP3391404B8 (de) 2015-12-17 2016-12-14 Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes

Country Status (7)

Country Link
US (1) US10777401B2 (de)
EP (1) EP3391404B8 (de)
JP (2) JP7014436B2 (de)
CN (1) CN108701578B (de)
CA (1) CA3007449C (de)
DE (1) DE102015122155B4 (de)
WO (1) WO2017103819A1 (de)

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TW202534314A (zh) * 2019-03-25 2025-09-01 日商亞多納富有限公司 製程系統及其控制方法
CN111263503B (zh) * 2019-12-11 2021-04-27 厦门大学 一种等离子体气动探针及其测量系统
US11621155B2 (en) * 2021-07-29 2023-04-04 Bayspec, Inc. Multi-modal ionization for mass spectrometry
CN114286486A (zh) * 2021-12-31 2022-04-05 中国人民解放军战略支援部队航天工程大学 大气压介质阻挡放电等离子体活性产物测量装置和方法
CN114664636B (zh) * 2022-03-04 2023-03-24 苏州大学 基于介质阻挡放电的空气逆流式离子源
CN116864370A (zh) 2022-03-28 2023-10-10 株式会社岛津制作所 离子源及质谱仪

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Also Published As

Publication number Publication date
DE102015122155B4 (de) 2018-03-08
EP3391404B1 (de) 2025-08-13
EP3391404A1 (de) 2018-10-24
DE102015122155A1 (de) 2017-06-22
CA3007449A1 (en) 2017-06-22
JP2019500728A (ja) 2019-01-10
US10777401B2 (en) 2020-09-15
CN108701578A (zh) 2018-10-23
US20180366310A1 (en) 2018-12-20
CA3007449C (en) 2024-01-23
EP3391404B8 (de) 2025-10-08
JP2022020776A (ja) 2022-02-01
CN108701578B (zh) 2020-11-03
WO2017103819A1 (de) 2017-06-22
JP7014436B2 (ja) 2022-02-01

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