CA3007449C - Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance - Google Patents

Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance Download PDF

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Publication number
CA3007449C
CA3007449C CA3007449A CA3007449A CA3007449C CA 3007449 C CA3007449 C CA 3007449C CA 3007449 A CA3007449 A CA 3007449A CA 3007449 A CA3007449 A CA 3007449A CA 3007449 C CA3007449 C CA 3007449C
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CA
Canada
Prior art keywords
electrode
flow
ionizing device
dielectric element
discharge gas
Prior art date
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Active
Application number
CA3007449A
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English (en)
French (fr)
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CA3007449A1 (en
Inventor
Jan-Christoph WOLF
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plas­mi­on GmbH
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Plas­mi­on GmbH
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Publication of CA3007449A1 publication Critical patent/CA3007449A1/en
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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/105Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/0027Methods for using particle spectrometers
    • H01J49/0031Step by step routines describing the use of the apparatus
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2443Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube
    • H05H1/245Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes the plasma fluid flowing through a dielectric tube the plasma being activated using internal electrodes
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
    • H05H1/2431Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes using cylindrical electrodes, e.g. rotary drums

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Fluid Mechanics (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
  • Plasma Technology (AREA)
CA3007449A 2015-12-17 2016-12-14 Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance Active CA3007449C (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102015122155.1A DE102015122155B4 (de) 2015-12-17 2015-12-17 Verwendung einer Ionisierungsvorrichtung
DE102015122155.1 2015-12-17
PCT/IB2016/057626 WO2017103819A1 (de) 2015-12-17 2016-12-14 Verwendung einer ionisierungsvorrichtung, vorrichtung und verfahren zur ionisation eines gasförmigen stoffes sowie vorrichtung und verfahren zur analyse eines gasförmigen ionisierten stoffes

Publications (2)

Publication Number Publication Date
CA3007449A1 CA3007449A1 (en) 2017-06-22
CA3007449C true CA3007449C (en) 2024-01-23

Family

ID=57796764

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3007449A Active CA3007449C (en) 2015-12-17 2016-12-14 Use of an ionizing device, device and method for ionizing a gaseous substance and device and method for analyzing a gaseous ionized substance

Country Status (7)

Country Link
US (1) US10777401B2 (enExample)
EP (1) EP3391404B8 (enExample)
JP (2) JP7014436B2 (enExample)
CN (1) CN108701578B (enExample)
CA (1) CA3007449C (enExample)
DE (1) DE102015122155B4 (enExample)
WO (1) WO2017103819A1 (enExample)

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CA2972600A1 (en) * 2017-07-07 2019-01-07 Teknoscan Systems Inc. Polarization dielectric discharge source for ims instrument
KR101931324B1 (ko) * 2017-09-14 2018-12-20 (주)나노텍 셀프 플라즈마 챔버의 오염 억제 장치
TWI838493B (zh) * 2019-03-25 2024-04-11 日商亞多納富有限公司 氣體分析裝置
CN111263503B (zh) * 2019-12-11 2021-04-27 厦门大学 一种等离子体气动探针及其测量系统
US11621155B2 (en) * 2021-07-29 2023-04-04 Bayspec, Inc. Multi-modal ionization for mass spectrometry
CN114286486A (zh) * 2021-12-31 2022-04-05 中国人民解放军战略支援部队航天工程大学 大气压介质阻挡放电等离子体活性产物测量装置和方法
CN114664636B (zh) * 2022-03-04 2023-03-24 苏州大学 基于介质阻挡放电的空气逆流式离子源
CN116864370A (zh) 2022-03-28 2023-10-10 株式会社岛津制作所 离子源及质谱仪

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Also Published As

Publication number Publication date
JP2022020776A (ja) 2022-02-01
CN108701578B (zh) 2020-11-03
WO2017103819A1 (de) 2017-06-22
CA3007449A1 (en) 2017-06-22
DE102015122155B4 (de) 2018-03-08
US10777401B2 (en) 2020-09-15
US20180366310A1 (en) 2018-12-20
EP3391404A1 (de) 2018-10-24
EP3391404B1 (de) 2025-08-13
CN108701578A (zh) 2018-10-23
DE102015122155A1 (de) 2017-06-22
JP2019500728A (ja) 2019-01-10
EP3391404C0 (de) 2025-08-13
JP7014436B2 (ja) 2022-02-01
EP3391404B8 (de) 2025-10-08

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