DE1007225T1 - Hochreines kompositmaterial zur verwendung als suszeptor - Google Patents

Hochreines kompositmaterial zur verwendung als suszeptor

Info

Publication number
DE1007225T1
DE1007225T1 DE1998920187 DE98920187T DE1007225T1 DE 1007225 T1 DE1007225 T1 DE 1007225T1 DE 1998920187 DE1998920187 DE 1998920187 DE 98920187 T DE98920187 T DE 98920187T DE 1007225 T1 DE1007225 T1 DE 1007225T1
Authority
DE
Germany
Prior art keywords
suspector
composite material
highly pure
pure composite
highly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE1998920187
Other languages
English (en)
Inventor
Howard Metter
David Hathcock
M Winzek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitco Carbon Composites Inc
Original Assignee
Hitco Carbon Composites Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitco Carbon Composites Inc filed Critical Hitco Carbon Composites Inc
Publication of DE1007225T1 publication Critical patent/DE1007225T1/de
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/71—Ceramic products containing macroscopic reinforcing agents
    • C04B35/78—Ceramic products containing macroscopic reinforcing agents containing non-metallic materials
    • C04B35/80—Fibres, filaments, whiskers, platelets, or the like
    • C04B35/83—Carbon fibres in a carbon matrix
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/10—Crucibles or containers for supporting the melt
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/14—Heating of the melt or the crystallised materials
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
    • C30B35/002—Crucibles or containers
    • D—TEXTILES; PAPER
    • D01—NATURAL OR MAN-MADE THREADS OR FIBRES; SPINNING
    • D01F—CHEMICAL FEATURES IN THE MANUFACTURE OF ARTIFICIAL FILAMENTS, THREADS, FIBRES, BRISTLES OR RIBBONS; APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OF CARBON FILAMENTS
    • D01F11/00—Chemical after-treatment of artificial filaments or the like during manufacture
    • D01F11/10—Chemical after-treatment of artificial filaments or the like during manufacture of carbon
    • D01F11/12—Chemical after-treatment of artificial filaments or the like during manufacture of carbon with inorganic substances ; Intercalation
    • D01F11/125—Carbon
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T442/00—Fabric [woven, knitted, or nonwoven textile or cloth, etc.]
    • Y10T442/20—Coated or impregnated woven, knit, or nonwoven fabric which is not [a] associated with another preformed layer or fiber layer or, [b] with respect to woven and knit, characterized, respectively, by a particular or differential weave or knit, wherein the coating or impregnation is neither a foamed material nor a free metal or alloy layer
    • Y10T442/2926—Coated or impregnated inorganic fiber fabric
    • Y10T442/2984—Coated or impregnated carbon or carbonaceous fiber fabric
DE1998920187 1997-06-03 1998-05-08 Hochreines kompositmaterial zur verwendung als suszeptor Pending DE1007225T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/868,211 US5858486A (en) 1995-02-27 1997-06-03 High purity carbon/carbon composite useful as a crucible susceptor
PCT/US1998/009015 WO1998055238A1 (en) 1997-06-03 1998-05-08 High purity composite useful as a susceptor

Publications (1)

Publication Number Publication Date
DE1007225T1 true DE1007225T1 (de) 2001-03-01

Family

ID=25351242

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1998920187 Pending DE1007225T1 (de) 1997-06-03 1998-05-08 Hochreines kompositmaterial zur verwendung als suszeptor

Country Status (9)

Country Link
US (1) US5858486A (de)
EP (1) EP1007225A4 (de)
JP (1) JP3454516B2 (de)
KR (1) KR100388835B1 (de)
DE (1) DE1007225T1 (de)
IL (1) IL132591A (de)
MY (1) MY116744A (de)
TW (1) TW495563B (de)
WO (1) WO1998055238A1 (de)

Families Citing this family (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4686509B2 (ja) * 1996-06-27 2011-05-25 東洋炭素株式会社 単結晶引き上げ用ルツボ
JP4634419B2 (ja) * 1996-06-27 2011-02-16 東洋炭素株式会社 単結晶引き上げ用ルツボ
JP4686508B2 (ja) * 1996-06-27 2011-05-25 東洋炭素株式会社 単結晶引き上げ用ルツボ
JP4634420B2 (ja) * 1996-06-27 2011-02-16 東洋炭素株式会社 単結晶引き上げ用ルツボの製造方法
KR100273054B1 (ko) * 1996-06-27 2000-12-01 곤도 데루히사 단결정 인상용 도가니 및 그 제조방법
JP2007314420A (ja) * 1996-06-27 2007-12-06 Toyo Tanso Kk 単結晶引き上げ用ルツボ
US6100587A (en) * 1999-08-26 2000-08-08 Lucent Technologies Inc. Silicon carbide barrier layers for porous low dielectric constant materials
FR2801304B1 (fr) * 1999-11-24 2002-02-15 Snecma Procede de fabrication d'un bol en materiau composite thermostructural, notamment pour une installation de production de silicium monocristallin
WO2001038625A2 (fr) * 1999-11-24 2001-05-31 Snecma Moteurs Procede de fabrication d'un bol en materiau composite thermostructural, bol tel qu'obtenu par le procede, et utilisation du bol comme support de creuset
FR2812889B1 (fr) * 2000-08-11 2002-11-15 Snecma Moteurs Procede de fabrication d'un bol monobloc en materiau composite thermostructural, notamment pour une installation de production de silicium, et bol tel qu'obtenu par ce procede
US6348870B1 (en) * 2000-12-28 2002-02-19 Seh America, Inc. Melt spill indicator device
FR2819803B1 (fr) * 2001-01-24 2003-04-25 Eads Launch Vehicles Procede de fabrication d'un porte-creuset et carbone/carbone et porte-creuset obtenu
US20020166503A1 (en) * 2001-03-08 2002-11-14 Hitco Carbon Composites, Inc. Hybrid crucible susceptor
US20040151981A1 (en) * 2001-10-08 2004-08-05 Spahr Michael E Electrochemical cell
WO2003031130A1 (en) * 2001-10-09 2003-04-17 Dean Jurik Textured masonry block mold and method
KR20030051302A (ko) * 2001-12-19 2003-06-25 와커 실트로닉 아게 용융반도체재를 수용하는 장치
US20030209326A1 (en) * 2002-05-07 2003-11-13 Mattson Technology, Inc. Process and system for heating semiconductor substrates in a processing chamber containing a susceptor
US6881680B2 (en) * 2002-06-14 2005-04-19 Toyo Tanso Co., Ltd. Low nitrogen concentration carbonaceous material and manufacturing method thereof
WO2004044275A2 (en) * 2002-11-12 2004-05-27 Memc Electronic Materials, Inc. Process for removing metallic impurities from silicon carbide coated components of a silicon single crystal pulling apparatus
US7691199B2 (en) * 2004-06-18 2010-04-06 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material
US7465351B2 (en) * 2004-06-18 2008-12-16 Memc Electronic Materials, Inc. Melter assembly and method for charging a crystal forming apparatus with molten source material
US7723262B2 (en) * 2005-11-21 2010-05-25 Energ2, Llc Activated carbon cryogels and related methods
WO2007063562A1 (en) * 2005-12-02 2007-06-07 Brembo Ceramic Brake Systems S.P.A. Induction furnace
WO2008061212A2 (en) 2006-11-15 2008-05-22 Energ2, Inc. Electric double layer capacitance device
US8303916B2 (en) * 2008-02-01 2012-11-06 Oscura, Inc. Gaseous transfer in multiple metal bath reactors
JP2009203091A (ja) * 2008-02-26 2009-09-10 Ibiden Co Ltd ルツボ保持部材
JP5286591B2 (ja) * 2008-05-21 2013-09-11 イビデン株式会社 ルツボ保持部材及びその製造方法
WO2010027504A1 (en) * 2008-09-08 2010-03-11 Materials And Electrochemical Research (Mer) Corporation Machinable metal/diamond metal matrix composite compound structure and method of making same
WO2011002536A2 (en) * 2009-04-08 2011-01-06 Energ2, Inc. Manufacturing methods for the production of carbon materials
CN102459728B (zh) * 2009-06-10 2013-09-18 三菱丽阳株式会社 机械性能表现优异的碳纤维束
WO2011003033A1 (en) 2009-07-01 2011-01-06 Energ2, Inc. Ultrapure synthetic carbon materials
CN102823037A (zh) * 2009-12-11 2012-12-12 艾纳G2技术公司 含电化学改性剂的碳材料
JP4815003B2 (ja) * 2010-03-09 2011-11-16 佑吉 堀岡 シリコン結晶成長用ルツボ、シリコン結晶成長用ルツボ製造方法、及びシリコン結晶成長方法
US8916296B2 (en) 2010-03-12 2014-12-23 Energ2 Technologies, Inc. Mesoporous carbon materials comprising bifunctional catalysts
CN103261090A (zh) 2010-09-30 2013-08-21 艾纳G2技术公司 储能颗粒的增强式装填
WO2012092210A1 (en) 2010-12-28 2012-07-05 Energ2 Technologies, Inc. Carbon materials comprising enhanced electrochemical properties
US20120262127A1 (en) 2011-04-15 2012-10-18 Energ2 Technologies, Inc. Flow ultracapacitor
CN103947017B (zh) 2011-06-03 2017-11-17 巴斯福股份公司 用于混合能量存储装置中的碳‑铅共混物
WO2013120011A1 (en) 2012-02-09 2013-08-15 Energ2 Technologies, Inc. Preparation of polymeric resins and carbon materials
KR101444525B1 (ko) 2012-07-19 2014-09-24 주식회사 엘지실트론 대구경 실리콘 단결정 성장용 도가니 및 그 제조방법
CN105190948B (zh) 2013-03-14 2019-04-26 14族科技公司 包含锂合金化的电化学改性剂的复合碳材料
US10195583B2 (en) 2013-11-05 2019-02-05 Group 14 Technologies, Inc. Carbon-based compositions with highly efficient volumetric gas sorption
US10590277B2 (en) 2014-03-14 2020-03-17 Group14 Technologies, Inc. Methods for sol-gel polymerization in absence of solvent and creation of tunable carbon structure from same
CN204455392U (zh) * 2015-02-12 2015-07-08 新永裕应用科技材料股份有限公司 气相成长石墨纤维组成物的生产系统
US10763501B2 (en) 2015-08-14 2020-09-01 Group14 Technologies, Inc. Nano-featured porous silicon materials
EP3836261A1 (de) 2015-08-28 2021-06-16 Group14 Technologies, Inc. Neuartige materialien mit extrem langlebiger einlagerung von lithium und herstellungsverfahren dafür
US10407769B2 (en) * 2016-03-18 2019-09-10 Goodrich Corporation Method and apparatus for decreasing the radial temperature gradient in CVI/CVD furnaces
JP2019520294A (ja) * 2016-05-18 2019-07-18 ビーエーエスエフ ソシエタス・ヨーロピアＢａｓｆ Ｓｅ 開放容器とその使用
US11611071B2 (en) 2017-03-09 2023-03-21 Group14 Technologies, Inc. Decomposition of silicon-containing precursors on porous scaffold materials
US11639292B2 (en) 2020-08-18 2023-05-02 Group14 Technologies, Inc. Particulate composite materials
US11174167B1 (en) 2020-08-18 2021-11-16 Group14 Technologies, Inc. Silicon carbon composites comprising ultra low Z
US11335903B2 (en) 2020-08-18 2022-05-17 Group14 Technologies, Inc. Highly efficient manufacturing of silicon-carbon composites materials comprising ultra low z
CN112457027B (zh) * 2020-11-26 2022-10-11 西安鑫垚陶瓷复合材料有限公司 大尺寸圆截面陶瓷基复合材料构件熔融渗硅工装及方法
CN114703466B (zh) * 2022-02-07 2024-04-09 常州第六元素半导体有限公司 连续式cvd薄膜制造设备及方法
TW202402711A (zh) * 2022-06-01 2024-01-16 環球晶圓股份有限公司 形成低碳汙染之單晶矽錠之方法及用於該方法之晶座
US20240076797A1 (en) * 2022-09-07 2024-03-07 Globalwafers Co., Ltd. Single crystal growth susceptor assembly with sacrifice ring

Family Cites Families (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3174895A (en) * 1960-09-07 1965-03-23 Union Carbide Corp Graphite cloth laminates
US3462289A (en) * 1965-08-05 1969-08-19 Carborundum Co Process for producing reinforced carbon and graphite bodies
US3672936A (en) * 1968-04-18 1972-06-27 Carborundum Co Reinforced carbon and graphite articles
DE2240884A1 (de) * 1972-08-19 1974-02-28 Sigri Elektrographit Gmbh Verfahren zum kuehlen der zustellung von schachtoefen
US4178413A (en) * 1977-10-03 1979-12-11 The Carborundum Company Fiber reinforced carbon and graphite articles and a method of producing said articles
US4397901A (en) * 1979-07-31 1983-08-09 Warren James W Composite article and method of making same
US4275095A (en) * 1979-07-31 1981-06-23 Warren Consultants, Inc. Composite article and method of making same
US4585675A (en) * 1981-04-07 1986-04-29 Ltv Aerospace And Defense Company Alumina silicon carbide, and silicon primary protective coatings for carbon-carbon substrates
US4465777A (en) * 1981-04-08 1984-08-14 Vought Corporation Composition and method for forming a protective coating on carbon-carbon substrates
US4500602A (en) * 1981-08-10 1985-02-19 Ltv Aerospace And Defense Co. Composite protective coating for carbon-carbon substrates
US4476178A (en) * 1982-06-24 1984-10-09 United Technologies Corporation Composite silicon carbide coatings for carbon-carbon materials
US4425407A (en) * 1982-06-24 1984-01-10 United Technologies Corporation CVD SiC pretreatment for carbon-carbon composites
US4476164A (en) * 1982-06-24 1984-10-09 United Technologies Corporation Deposition of improved SiC coatings on carbon-base materials
US4487799A (en) * 1982-06-24 1984-12-11 United Technologies Corporation Pyrolytic graphite pretreatment for carbon-carbon composites
US4472476A (en) * 1982-06-24 1984-09-18 United Technologies Corporation Composite silicon carbide/silicon nitride coatings for carbon-carbon materials
US4515860A (en) * 1982-09-10 1985-05-07 Dart Industries Inc. Self protecting carbon bodies and method for making same
US4599256A (en) * 1982-09-29 1986-07-08 Avco Corporation Self-healing oxidation-resistant carbon structure
US4507272A (en) * 1983-05-09 1985-03-26 Hitco Method of purifying partially carbonized pan material prior to carbonization
DE3327659A1 (de) * 1983-07-30 1985-02-14 MTU Motoren- und Turbinen-Union München GmbH, 8000 München Verfahren zur herstellung eines verbundkoerpers aus keramik oder faserverstaerkter keramik sowie ein nach diesem verfahren gefertigtes sandwich-gebilde
DE3328313A1 (de) * 1983-08-05 1985-02-14 Sigri Elektrographit Gmbh, 8901 Meitingen Wandelement fuer schmelzkammerfeuerung
US4833030A (en) * 1984-05-18 1989-05-23 Hitco Polymer impregnated and carbonized carbon/carbon composite
CA1287711C (en) * 1984-11-30 1991-08-20 Paul E. Gray Oxidation-inhibited carbon-carbon composites
US4671997A (en) * 1985-04-08 1987-06-09 United Technologies Corporation Gas turbine composite parts
US4684021A (en) * 1986-06-23 1987-08-04 Fluoroware, Inc. Bottom loading wafer carrier box
JPH0343250Y2 (de) * 1986-06-27 1991-09-10
JPS63112464A (ja) * 1986-10-31 1988-05-17 住友金属工業株式会社 炭素繊維強化炭素材の製造方法
GB8627819D0 (en) * 1986-11-20 1986-12-17 Dunlop Ltd Panels
US5207992A (en) * 1986-12-26 1993-05-04 Toshiba Ceramics Co., Ltd. Silicon single crystal pulling-up apparatus
FR2611198B1 (fr) * 1987-02-25 1991-12-06 Aerospatiale Materiau composite a matrice et fibres de renforcement carbonees et son procede de fabrication
FR2614321A1 (fr) * 1987-04-27 1988-10-28 Europ Propulsion Cartouche en materiaux composites pour dispositif d'elaboration de monocristaux.
US4868056A (en) * 1988-02-01 1989-09-19 Avco Corporation Oxygen protection system for carbon
JPH0678193B2 (ja) * 1988-03-18 1994-10-05 東洋炭素株式会社 耐熱衝撃性に優れた炭素繊維強化炭素複合材並びにその製造方法
US4998879A (en) * 1988-04-29 1991-03-12 Norton Company High purity diffusion furnace components
DE3820714A1 (de) * 1988-06-18 1989-12-21 Sigri Gmbh Tiegel fuer schmelzfluessiges silicium
US4894286A (en) * 1988-11-07 1990-01-16 Rohr Industries, Inc. Oxidation resistant refractory coated carbon-carbon composites
KR100194892B1 (ko) * 1990-05-18 1999-06-15 윌슨 더그 화학 증착 방법
DE4325522C1 (de) * 1993-07-30 1994-11-17 Schunk Kohlenstofftechnik Gmbh Tiegel, insbesondere Stütztiegel
JPH0789789A (ja) * 1993-09-20 1995-04-04 Fujitsu Ltd Ｓｉ結晶、結晶成長方法および結晶成長装置
US5616175A (en) * 1994-07-22 1997-04-01 Herecules Incorporated 3-D carbon-carbon composites for crystal pulling furnace hardware
US5683281A (en) * 1995-02-27 1997-11-04 Hitco Technologies, Inc High purity composite useful as furnace components
JPH10130067A (ja) * 1996-10-23 1998-05-19 Toyo Tanso Kk 単結晶引き上げ用ｃ／ｃルツボの製法
JP3101224B2 (ja) * 1997-02-06 2000-10-23 日本カーボン株式会社 シリコン単結晶引上げ用炭素繊維強化炭素ルツボ
JPH10273369A (ja) * 1997-03-28 1998-10-13 Nissan Motor Co Ltd 耐Ｓｉアタック性に優れたＣ／Ｃ複合材の製造方法およびＣ／Ｃ製るつぼ

Also Published As

Publication number Publication date
EP1007225A1 (de) 2000-06-14
KR100388835B1 (ko) 2003-06-25
EP1007225A4 (de) 2000-08-09
JP2000513702A (ja) 2000-10-17
TW495563B (en) 2002-07-21
WO1998055238A1 (en) 1998-12-10
IL132591A (en) 2003-02-12
IL132591A0 (en) 2001-03-19
MY116744A (en) 2004-03-31
JP3454516B2 (ja) 2003-10-06
KR20010020451A (ko) 2001-03-15
US5858486A (en) 1999-01-12

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