CN1961209A - 集成电子传感器 - Google Patents

集成电子传感器 Download PDF

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Publication number
CN1961209A
CN1961209A CNA2005800178446A CN200580017844A CN1961209A CN 1961209 A CN1961209 A CN 1961209A CN A2005800178446 A CNA2005800178446 A CN A2005800178446A CN 200580017844 A CN200580017844 A CN 200580017844A CN 1961209 A CN1961209 A CN 1961209A
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sensor device
integrated sensor
sensor
dielectric
electrode
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CNA2005800178446A
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Chinese (zh)
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蒂莫西·卡明斯
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Silicon Laboratories Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10B—ELECTRONIC MEMORY DEVICES
    • H10B69/00—Erasable-and-programmable ROM [EPROM] devices not provided for in groups H10B41/00 - H10B63/00, e.g. ultraviolet erasable-and-programmable ROM [UVEPROM] devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
    • H10D84/811—Combinations of field-effect devices and one or more diodes, capacitors or resistors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes
    • H10W20/41—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes characterised by their conductive parts
    • H10W20/43—Layouts of interconnections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/121—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid for determining moisture content, e.g. humidity, of the fluid
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
    • H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Electrochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Geometry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
CNA2005800178446A 2004-04-02 2005-03-30 集成电子传感器 Pending CN1961209A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US55856504P 2004-04-02 2004-04-02
US60/558,565 2004-04-02

Related Child Applications (1)

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CN2012102889459A Division CN102854229A (zh) 2004-04-02 2005-03-30 集成电子传感器

Publications (1)

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CN1961209A true CN1961209A (zh) 2007-05-09

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CN2012102889459A Pending CN102854229A (zh) 2004-04-02 2005-03-30 集成电子传感器

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Country Status (5)

Country Link
US (7) US7554134B2 (https=)
EP (1) EP1730506B1 (https=)
JP (1) JP2007535662A (https=)
CN (2) CN1961209A (https=)
WO (1) WO2005095936A1 (https=)

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CN103115569A (zh) * 2012-10-22 2013-05-22 深圳市嘉瀚科技有限公司 具有无线传输功能的整体集成式光电传感器
CN103512940A (zh) * 2012-06-21 2014-01-15 Nxp股份有限公司 具有传感器的集成电路和制造方法
CN104792829A (zh) * 2014-04-07 2015-07-22 英诺晶片科技股份有限公司 传感器装置
CN105675051A (zh) * 2016-01-12 2016-06-15 上海申矽凌微电子科技有限公司 制造传感器集成电路的方法及使用该方法制造的集成电路
CN105742247A (zh) * 2016-04-07 2016-07-06 上海申矽凌微电子科技有限公司 传感器集成电路的制造方法及使用该方法制造的集成电路
CN106082102A (zh) * 2016-07-12 2016-11-09 上海申矽凌微电子科技有限公司 集成温度湿度气体传感的传感器电路制造方法及传感器
CN106124576A (zh) * 2016-06-28 2016-11-16 上海申矽凌微电子科技有限公司 集成的湿度传感器和多单元气体传感器及其制造方法
CN107632044A (zh) * 2016-07-18 2018-01-26 意法半导体有限公司 小型气体分析器
CN108463718A (zh) * 2015-11-02 2018-08-28 阿尔法莫斯公司 气体传感器控制器
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US8497531B2 (en) 2013-07-30
US20090273009A1 (en) 2009-11-05
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