CN1610081A - 加热单元 - Google Patents

加热单元 Download PDF

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Publication number
CN1610081A
CN1610081A CNA2004100870364A CN200410087036A CN1610081A CN 1610081 A CN1610081 A CN 1610081A CN A2004100870364 A CNA2004100870364 A CN A2004100870364A CN 200410087036 A CN200410087036 A CN 200410087036A CN 1610081 A CN1610081 A CN 1610081A
Authority
CN
China
Prior art keywords
heat transfer
heating unit
transfer plate
heat
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CNA2004100870364A
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English (en)
Chinese (zh)
Inventor
水川洋一
宫宇地浩二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Original Assignee
Ushio Denki KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK filed Critical Ushio Denki KK
Publication of CN1610081A publication Critical patent/CN1610081A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0436—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H05B3/0047—Heating devices using lamps for industrial applications for semiconductor manufacture
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0431—Apparatus for thermal treatment
    • H10P72/0432—Apparatus for thermal treatment mainly by conduction

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Resistance Heating (AREA)
  • Heating, Cooling, Or Curing Plastics Or The Like In General (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
CNA2004100870364A 2003-10-24 2004-10-22 加热单元 Pending CN1610081A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003364398A JP4321213B2 (ja) 2003-10-24 2003-10-24 加熱ユニット
JP364398/2003 2003-10-24

Publications (1)

Publication Number Publication Date
CN1610081A true CN1610081A (zh) 2005-04-27

Family

ID=34510108

Family Applications (1)

Application Number Title Priority Date Filing Date
CNA2004100870364A Pending CN1610081A (zh) 2003-10-24 2004-10-22 加热单元

Country Status (5)

Country Link
US (1) US7218847B2 (https=)
JP (1) JP4321213B2 (https=)
KR (1) KR100811390B1 (https=)
CN (1) CN1610081A (https=)
TW (1) TW200515482A (https=)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016107B (zh) * 2008-04-11 2012-11-07 国立大学法人东北大学 均热装置和有机膜成膜装置
CN103088288A (zh) * 2011-11-03 2013-05-08 北京北方微电子基地设备工艺研究中心有限责任公司 基片处理设备及其腔室装置
CN103374698A (zh) * 2012-04-23 2013-10-30 北京北方微电子基地设备工艺研究中心有限责任公司 加热腔室以及等离子体加工设备
CN104333922A (zh) * 2014-11-21 2015-02-04 连云港市盛昌照明电器有限公司 一种石英玻璃加热管及其制备方法和热水器
CN106898567A (zh) * 2015-12-17 2017-06-27 北京北方微电子基地设备工艺研究中心有限责任公司 一种透明介质窗、基片处理腔室和基片处理系统

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7695564B1 (en) * 2005-02-03 2010-04-13 Hrl Laboratories, Llc Thermal management substrate
JP4852852B2 (ja) * 2005-02-17 2012-01-11 ウシオ電機株式会社 加熱ユニット
KR100684584B1 (ko) 2005-07-15 2007-02-22 주식회사 아트라스비엑스 합성수지체 접합용 융착기의 열판
JP2007115926A (ja) * 2005-10-20 2007-05-10 Tokyo Univ Of Agriculture & Technology サーマルヘッドおよび熱処理装置
US7804148B2 (en) * 2006-02-16 2010-09-28 International Business Machines Corporation Opto-thermal mask including aligned thermal dissipative layer, reflective layer and transparent capping layer
TWI290777B (en) * 2006-02-27 2007-12-01 Guei-Fang Chen Lighting device with light emitting diode
JP4840437B2 (ja) * 2008-12-03 2011-12-21 東京エレクトロン株式会社 基板加熱装置、基板加熱方法及び記憶媒体
US9842753B2 (en) * 2013-04-26 2017-12-12 Applied Materials, Inc. Absorbing lamphead face
US10495369B2 (en) * 2016-12-02 2019-12-03 Bsh Hausgeraete Gmbh Refrigeration device comprising a fan with an heat-conducting element
US20230338993A1 (en) * 2022-04-22 2023-10-26 Semes Co., Ltd. Apparatus for heating chemical liquid and system for treating substrate including the same
KR102906176B1 (ko) * 2023-11-20 2026-01-02 피에스케이홀딩스 (주) 레이저 기반 척 히팅 장치 및 척 히팅 방법
KR102827380B1 (ko) * 2024-04-25 2025-07-01 피에스케이홀딩스 (주) 레이저 기반 척 히팅 장치 및 이를 포함하는 기판 처리 장치

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE144656C (https=) *
US535321A (en) * 1895-03-05 delany
US2601011A (en) * 1948-09-21 1952-06-17 Westinghouse Electric Corp Heating apparatus
US3395631A (en) * 1965-06-24 1968-08-06 Gaf Corp Thermal developing apparatus
US3798415A (en) * 1972-08-25 1974-03-19 Graham Corp M Electrically heated cooking utensil
GB2137060A (en) * 1983-03-25 1984-09-26 Gen Electric Radiant-Energy Heating and/or Cooking Apparatus
JPS60145629A (ja) * 1984-01-10 1985-08-01 Nec Corp 熱処理法
JPS61219130A (ja) * 1985-03-25 1986-09-29 Toshiba Mach Co Ltd 気相成長装置
JPS6363773A (ja) * 1986-09-04 1988-03-22 Nippon Telegr & Teleph Corp <Ntt> 接着方法
DE3703768A1 (de) * 1987-02-07 1988-08-18 Fissler Gmbh Vorrichtung zum erfassen der temperatur einer mittels heizwicklungen oder halogenlampen aufgeheizten glaskeramikplatte
JPS63257221A (ja) * 1987-04-14 1988-10-25 Nec Corp ランプアニ−ル装置
FR2621772A1 (fr) * 1987-07-10 1989-04-14 Huber Kurt Dispositif de chauffage electrique transformant l'energie lumineuse en energie calorifique
JP2927877B2 (ja) * 1990-04-09 1999-07-28 エム・セテック株式会社 半導体製造装置の均一加熱構造
JPH0576699A (ja) * 1991-01-08 1993-03-30 Matsushita Electric Ind Co Ltd アイロン
JPH04275417A (ja) * 1991-03-04 1992-10-01 Nec Corp 熱処理装置
US5220155A (en) * 1992-03-12 1993-06-15 Emerson Electric Co. Heating and sensing apparatus for range top
JP3046446B2 (ja) 1992-03-17 2000-05-29 三菱電機株式会社 半導体製造装置
JPH06132233A (ja) 1992-10-20 1994-05-13 Nippon Sanso Kk 薄膜製造装置用加熱装置の均熱板
JPH06260422A (ja) 1993-03-08 1994-09-16 Kokusai Electric Co Ltd ガラス基板加熱方法及びその装置
US5410162A (en) 1993-10-15 1995-04-25 Texas Instruments Incorporated Apparatus for and method of rapid testing of semiconductor components at elevated temperature
JPH07172996A (ja) 1993-12-20 1995-07-11 Matsushita Electric Ind Co Ltd 誘電体薄膜の製造方法及びその製造装置
JP3578872B2 (ja) * 1995-10-26 2004-10-20 三菱電機株式会社 Ｘ線マスクの製造方法および加熱装置
JP3442935B2 (ja) 1996-08-27 2003-09-02 株式会社東芝 気相成長用基板及びその加熱方法
JPH10321547A (ja) 1997-05-22 1998-12-04 Kokusai Electric Co Ltd 熱処理装置
JP2000321907A (ja) * 1999-05-17 2000-11-24 Konica Corp 定着装置
US6345169B1 (en) * 1999-07-01 2002-02-05 Konica Corporation Fixing apparatus with heat ray generating device
JP2001027860A (ja) * 1999-07-13 2001-01-30 Konica Corp 定着装置
SE515785C2 (sv) * 2000-02-23 2001-10-08 Obducat Ab Anordning för homogen värmning av ett objekt och användning av anordningen
JP2001332607A (ja) 2000-05-25 2001-11-30 Canon Inc 基板加熱装置および均熱板

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102016107B (zh) * 2008-04-11 2012-11-07 国立大学法人东北大学 均热装置和有机膜成膜装置
CN103088288A (zh) * 2011-11-03 2013-05-08 北京北方微电子基地设备工艺研究中心有限责任公司 基片处理设备及其腔室装置
CN103374698A (zh) * 2012-04-23 2013-10-30 北京北方微电子基地设备工艺研究中心有限责任公司 加热腔室以及等离子体加工设备
CN104333922A (zh) * 2014-11-21 2015-02-04 连云港市盛昌照明电器有限公司 一种石英玻璃加热管及其制备方法和热水器
CN106898567A (zh) * 2015-12-17 2017-06-27 北京北方微电子基地设备工艺研究中心有限责任公司 一种透明介质窗、基片处理腔室和基片处理系统

Also Published As

Publication number Publication date
JP2005129385A (ja) 2005-05-19
KR100811390B1 (ko) 2008-03-10
US20050089317A1 (en) 2005-04-28
TWI313487B (https=) 2009-08-11
JP4321213B2 (ja) 2009-08-26
US7218847B2 (en) 2007-05-15
KR20050039545A (ko) 2005-04-29
TW200515482A (en) 2005-05-01

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Open date: 20050427