CN1555424B - 用于控制薄膜均匀性的工艺及由此制造的产品 - Google Patents

用于控制薄膜均匀性的工艺及由此制造的产品 Download PDF

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Publication number
CN1555424B
CN1555424B CN02818269.3A CN02818269A CN1555424B CN 1555424 B CN1555424 B CN 1555424B CN 02818269 A CN02818269 A CN 02818269A CN 1555424 B CN1555424 B CN 1555424B
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China
Prior art keywords
substrate
temperature
film
heating element
thermocouple
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Expired - Lifetime
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CN02818269.3A
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English (en)
Chinese (zh)
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CN1555424A (zh
Inventor
T·K·阮
T·竹原
W·R·哈什巴杰
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Applied Materials Inc
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Applied Materials Inc
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • C23C16/401—Oxides containing silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • C23C16/4586—Elements in the interior of the support, e.g. electrodes, heating or cooling devices
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

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  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Formation Of Insulating Films (AREA)
CN02818269.3A 2001-08-23 2002-08-19 用于控制薄膜均匀性的工艺及由此制造的产品 Expired - Lifetime CN1555424B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/938,435 US6962732B2 (en) 2001-08-23 2001-08-23 Process for controlling thin film uniformity and products produced thereby
US09/938,435 2001-08-23
PCT/US2002/026456 WO2003029517A1 (en) 2001-08-23 2002-08-19 Process for controlling thin film uniformity and products produced thereby

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CNA2005100871836A Division CN1733966A (zh) 2001-08-23 2002-08-19 用于加热基片的设备和控制加热基片的基座温度的方法

Publications (2)

Publication Number Publication Date
CN1555424A CN1555424A (zh) 2004-12-15
CN1555424B true CN1555424B (zh) 2015-12-02

Family

ID=25471441

Family Applications (2)

Application Number Title Priority Date Filing Date
CN02818269.3A Expired - Lifetime CN1555424B (zh) 2001-08-23 2002-08-19 用于控制薄膜均匀性的工艺及由此制造的产品
CNA2005100871836A Pending CN1733966A (zh) 2001-08-23 2002-08-19 用于加热基片的设备和控制加热基片的基座温度的方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
CNA2005100871836A Pending CN1733966A (zh) 2001-08-23 2002-08-19 用于加热基片的设备和控制加热基片的基座温度的方法

Country Status (7)

Country Link
US (2) US6962732B2 (enExample)
EP (1) EP1419287A1 (enExample)
JP (3) JP2005509279A (enExample)
KR (2) KR100803445B1 (enExample)
CN (2) CN1555424B (enExample)
TW (1) TWI223837B (enExample)
WO (1) WO2003029517A1 (enExample)

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US6962732B2 (en) 2001-08-23 2005-11-08 Applied Materials, Inc. Process for controlling thin film uniformity and products produced thereby
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US7127367B2 (en) 2003-10-27 2006-10-24 Applied Materials, Inc. Tailored temperature uniformity
US7611758B2 (en) * 2003-11-06 2009-11-03 Tokyo Electron Limited Method of improving post-develop photoresist profile on a deposited dielectric film
US20050100682A1 (en) * 2003-11-06 2005-05-12 Tokyo Electron Limited Method for depositing materials on a substrate
WO2005103874A2 (en) * 2004-04-16 2005-11-03 Cascade Basic Research Corp. Modelling relationships within an on-line connectivity universe
US7712434B2 (en) * 2004-04-30 2010-05-11 Lam Research Corporation Apparatus including showerhead electrode and heater for plasma processing
US7429718B2 (en) * 2005-08-02 2008-09-30 Applied Materials, Inc. Heating and cooling of substrate support
TWM292242U (en) * 2005-11-23 2006-06-11 Celetech Semiconductor Inc Radio frequency grounding rod
US8222574B2 (en) * 2007-01-15 2012-07-17 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
JP2011508436A (ja) * 2007-12-21 2011-03-10 アプライド マテリアルズ インコーポレイテッド 基板の温度を制御するための方法及び装置
US8097082B2 (en) * 2008-04-28 2012-01-17 Applied Materials, Inc. Nonplanar faceplate for a plasma processing chamber
US8111978B2 (en) * 2008-07-11 2012-02-07 Applied Materials, Inc. Rapid thermal processing chamber with shower head
JP2013538455A (ja) 2010-09-03 2013-10-10 テーエーエル・ソーラー・アーゲー 基板加熱装置
JP5254308B2 (ja) * 2010-12-27 2013-08-07 東京エレクトロン株式会社 液処理装置、液処理方法及びその液処理方法を実行させるためのプログラムを記録した記録媒体
TWI505400B (zh) * 2011-08-26 2015-10-21 Lg Siltron Inc 基座
US8734903B2 (en) 2011-09-19 2014-05-27 Pilkington Group Limited Process for forming a silica coating on a glass substrate
CN103094155A (zh) * 2011-11-07 2013-05-08 无锡华润上华科技有限公司 一种半导体器件加工设备
CN102443786A (zh) * 2011-11-08 2012-05-09 上海华力微电子有限公司 一种改进等离子体增强化学汽相沉积薄膜均匀度的方法
KR101376956B1 (ko) 2012-05-16 2014-03-21 주식회사 유니텍스 기상 증착용 반응로 및 유기 박막의 제조 방법
USD713200S1 (en) 2012-08-31 2014-09-16 Applied Materials, Inc. Susceptor with heater
US9157730B2 (en) * 2012-10-26 2015-10-13 Applied Materials, Inc. PECVD process
USD717113S1 (en) 2013-03-13 2014-11-11 Applied Materials, Inc. Susceptor with heater
US9543171B2 (en) * 2014-06-17 2017-01-10 Lam Research Corporation Auto-correction of malfunctioning thermal control element in a temperature control plate of a semiconductor substrate support assembly that includes deactivating the malfunctioning thermal control element and modifying a power level of at least one functioning thermal control element
US9869017B2 (en) * 2014-07-10 2018-01-16 Applied Materials, Inc. H2/O2 side inject to improve process uniformity for low temperature oxidation process
US10460932B2 (en) * 2017-03-31 2019-10-29 Asm Ip Holding B.V. Semiconductor device with amorphous silicon filled gaps and methods for forming
CN108728828A (zh) * 2017-04-20 2018-11-02 中微半导体设备(上海)有限公司 Cvd设备及其温度控制方法与发热体
CN110331386A (zh) * 2019-07-09 2019-10-15 长江存储科技有限责任公司 在半导体晶圆上形成薄膜的方法
CN113151785B (zh) * 2020-01-22 2022-02-08 中国工程物理研究院激光聚变研究中心 一种薄膜制备组件、薄膜制备方法及其应用
CN114517290A (zh) * 2022-01-21 2022-05-20 中环领先半导体材料有限公司 一种提高lto膜厚均匀性的apcvd成膜加工工艺

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US5763021A (en) * 1996-12-13 1998-06-09 Cypress Semiconductor Corporation Method of forming a dielectric film
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US6225601B1 (en) * 1998-07-13 2001-05-01 Applied Komatsu Technology, Inc. Heating a substrate support in a substrate handling chamber

Also Published As

Publication number Publication date
KR20070116186A (ko) 2007-12-06
KR100803445B1 (ko) 2008-02-13
EP1419287A1 (en) 2004-05-19
CN1555424A (zh) 2004-12-15
JP2014209641A (ja) 2014-11-06
CN1733966A (zh) 2006-02-15
US20030044621A1 (en) 2003-03-06
US6962732B2 (en) 2005-11-08
JP2011139068A (ja) 2011-07-14
JP2005509279A (ja) 2005-04-07
WO2003029517A1 (en) 2003-04-10
US20050233155A1 (en) 2005-10-20
KR20040032958A (ko) 2004-04-17
JP5917607B2 (ja) 2016-05-18
TWI223837B (en) 2004-11-11

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