CN1514960A - 调整和配置质量流量控制器的系统和方法 - Google Patents

调整和配置质量流量控制器的系统和方法 Download PDF

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Publication number
CN1514960A
CN1514960A CNA028105400A CN02810540A CN1514960A CN 1514960 A CN1514960 A CN 1514960A CN A028105400 A CNA028105400 A CN A028105400A CN 02810540 A CN02810540 A CN 02810540A CN 1514960 A CN1514960 A CN 1514960A
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CN
China
Prior art keywords
mass flow
flow controller
valve
gain
signal
Prior art date
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Pending
Application number
CNA028105400A
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English (en)
Chinese (zh)
Inventor
Լ����M��¬��
约翰·M·卢尔
S
王纯
A
威廉·S·华伦蒂尼
小约瑟夫·A·萨吉尔
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Celerity Group Inc
Celerity Inc
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Unit Instruments Inc
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Publication date
Application filed by Unit Instruments Inc filed Critical Unit Instruments Inc
Publication of CN1514960A publication Critical patent/CN1514960A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
    • G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
    • G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
    • G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B5/00—Anti-hunting arrangements
    • G05B5/01—Anti-hunting arrangements electric
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0368—By speed of fluid
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0971—Speed responsive valve control
    • Y10T137/1026—Speed change and excess speed valve control
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7761—Electrically actuated valve
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8225—Position or extent of motion indicator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8158—With indicator, register, recorder, alarm or inspection means
    • Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Medical Informatics (AREA)
  • Artificial Intelligence (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Evolutionary Computation (AREA)
  • Health & Medical Sciences (AREA)
  • Software Systems (AREA)
  • Fluid Mechanics (AREA)
  • Flow Control (AREA)
  • Feedback Control In General (AREA)
  • Measuring Volume Flow (AREA)
  • External Artificial Organs (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
CNA028105400A 2001-04-24 2002-04-24 调整和配置质量流量控制器的系统和方法 Pending CN1514960A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US28580101P 2001-04-24 2001-04-24
US60/285,801 2001-04-24

Publications (1)

Publication Number Publication Date
CN1514960A true CN1514960A (zh) 2004-07-21

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Country Status (9)

Country Link
US (4) US6962164B2 (enExample)
EP (1) EP1384121A2 (enExample)
JP (2) JP4864280B2 (enExample)
KR (1) KR20040024854A (enExample)
CN (1) CN1514960A (enExample)
AT (1) ATE310986T1 (enExample)
AU (1) AU2002307547A1 (enExample)
DE (1) DE60207609T2 (enExample)
WO (1) WO2002086632A2 (enExample)

Cited By (27)

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CN100483084C (zh) * 2004-08-24 2009-04-29 微动公司 用于校准流量计的方法和设备
CN101815932A (zh) * 2007-10-01 2010-08-25 西锁控制公司 基于知识的阀门控制方法
CN101937238A (zh) * 2010-08-09 2011-01-05 中国神华能源股份有限公司 自动给料控制方法
CN104089685A (zh) * 2014-07-14 2014-10-08 湖南威铭能源科技有限公司 提高时差式超声波热量表流量测量误差一致性的方法
CN104102237A (zh) * 2014-07-08 2014-10-15 北京七星华创电子股份有限公司 一种质量流量控制器的调节阀特性优化方法
CN104254812A (zh) * 2013-03-01 2014-12-31 日立金属株式会社 针对不同流体类型的改进性能的质量流量控制器和方法
CN105370670A (zh) * 2015-12-11 2016-03-02 哈尔滨商业大学 水锤瞬变发生器
CN106153157A (zh) * 2015-05-11 2016-11-23 克洛纳测量技术有限公司 用于运行通流测量仪器的方法和与此有关的通流测量仪器
CN107250939A (zh) * 2014-12-15 2017-10-13 流体处理有限责任公司 离散阀流率转换器
CN107765716A (zh) * 2016-08-17 2018-03-06 宝山钢铁股份有限公司 一种流量调节阀的双环控制方法
CN108027621A (zh) * 2015-09-28 2018-05-11 皇家飞利浦有限公司 用于使用比例流量阀控制气体流的方法和系统
CN108398962A (zh) * 2017-02-07 2018-08-14 阿自倍尔株式会社 维护时期预测装置、流量控制装置及维护时期预测方法
CN108475077A (zh) * 2015-12-29 2018-08-31 日立金属株式会社 气体不敏感的质量流量控制系统和方法
CN109240080A (zh) * 2017-07-11 2019-01-18 西门子瑞士有限公司 控制增益自动化
CN110307876A (zh) * 2018-03-27 2019-10-08 阿自倍尔株式会社 热式流量传感器装置以及流量校正方法
CN111426356A (zh) * 2019-01-09 2020-07-17 乔治费歇尔图章有限责任公司 具有独立线圈驱动和控制系统的磁性流量计组装件
CN111855179A (zh) * 2020-07-27 2020-10-30 北京七星华创流量计有限公司 流体质量流量控制器的标定方法及标定装置
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CN114121585A (zh) * 2020-08-26 2022-03-01 中微半导体设备(上海)股份有限公司 一种等离子体处理装置及气体供应方法
CN114436193A (zh) * 2020-11-05 2022-05-06 克罗内斯股份公司 用于用填充产品填充容器的设备和方法
CN114641748A (zh) * 2019-11-19 2022-06-17 林德有限责任公司 智能气体混合器
CN114811117A (zh) * 2022-02-24 2022-07-29 浙江工业大学 高频单向正弦流量控制阀
CN114846428A (zh) * 2019-12-19 2022-08-02 日立金属株式会社 多气体质量流量控制器和方法
CN117234245A (zh) * 2023-11-14 2023-12-15 合力（天津）能源科技股份有限公司 一种耐高温的高压流量控制方法及系统
CN118051075A (zh) * 2024-04-15 2024-05-17 上海海维工业控制有限公司 一种流体系统中压力控制阀的压力控制方法及系统
CN120742980A (zh) * 2025-09-02 2025-10-03 厚礼博精密仪器(北京)有限公司 用于质量流量控制器的二次流量校正方法、系统及设备

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CN118051075A (zh) * 2024-04-15 2024-05-17 上海海维工业控制有限公司 一种流体系统中压力控制阀的压力控制方法及系统
CN120742980A (zh) * 2025-09-02 2025-10-03 厚礼博精密仪器(北京)有限公司 用于质量流量控制器的二次流量校正方法、系统及设备

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US7114511B2 (en) 2006-10-03
US20070215206A1 (en) 2007-09-20
KR20040024854A (ko) 2004-03-22
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US7231931B2 (en) 2007-06-19
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US7380564B2 (en) 2008-06-03
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US6962164B2 (en) 2005-11-08
JP4864280B2 (ja) 2012-02-01
AU2002307547A1 (en) 2002-11-05
US20020198668A1 (en) 2002-12-26
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