DE60207609T2 - Verfahren zur Bestimmung einer Ventilöffnung für einen Massenflussregler - Google Patents
Verfahren zur Bestimmung einer Ventilöffnung für einen Massenflussregler Download PDFInfo
- Publication number
- DE60207609T2 DE60207609T2 DE60207609T DE60207609T DE60207609T2 DE 60207609 T2 DE60207609 T2 DE 60207609T2 DE 60207609 T DE60207609 T DE 60207609T DE 60207609 T DE60207609 T DE 60207609T DE 60207609 T2 DE60207609 T2 DE 60207609T2
- Authority
- DE
- Germany
- Prior art keywords
- mass flow
- valve
- fluid
- flow controller
- gain
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
- G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B13/00—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion
- G05B13/02—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric
- G05B13/04—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators
- G05B13/042—Adaptive control systems, i.e. systems automatically adjusting themselves to have a performance which is optimum according to some preassigned criterion electric involving the use of models or simulators in which a parameter or coefficient is automatically adjusted to optimise the performance
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B5/00—Anti-hunting arrangements
- G05B5/01—Anti-hunting arrangements electric
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0318—Processes
- Y10T137/0324—With control of flow by a condition or characteristic of a fluid
- Y10T137/0368—By speed of fluid
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/0971—Speed responsive valve control
- Y10T137/1026—Speed change and excess speed valve control
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7759—Responsive to change in rate of fluid flow
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/7722—Line condition change responsive valves
- Y10T137/7758—Pilot or servo controlled
- Y10T137/7761—Electrically actuated valve
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8225—Position or extent of motion indicator
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8158—With indicator, register, recorder, alarm or inspection means
- Y10T137/8326—Fluid pressure responsive indicator, recorder or alarm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Evolutionary Computation (AREA)
- Health & Medical Sciences (AREA)
- Artificial Intelligence (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Fluid Mechanics (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Flow Control (AREA)
- Feedback Control In General (AREA)
- Measuring Volume Flow (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
- External Artificial Organs (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US28580101P | 2001-04-24 | 2001-04-24 | |
| US285801P | 2001-04-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60207609D1 DE60207609D1 (de) | 2005-12-29 |
| DE60207609T2 true DE60207609T2 (de) | 2006-08-03 |
Family
ID=23095749
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60207609T Expired - Lifetime DE60207609T2 (de) | 2001-04-24 | 2002-04-24 | Verfahren zur Bestimmung einer Ventilöffnung für einen Massenflussregler |
Country Status (9)
| Country | Link |
|---|---|
| US (4) | US6962164B2 (enExample) |
| EP (1) | EP1384121A2 (enExample) |
| JP (2) | JP4864280B2 (enExample) |
| KR (1) | KR20040024854A (enExample) |
| CN (1) | CN1514960A (enExample) |
| AT (1) | ATE310986T1 (enExample) |
| AU (1) | AU2002307547A1 (enExample) |
| DE (1) | DE60207609T2 (enExample) |
| WO (1) | WO2002086632A2 (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8386083B2 (en) | 2008-06-16 | 2013-02-26 | Mks Instruments, Inc. | Systems and methods for updating valve cracking current in mass flow controllers |
| DE102012215353A1 (de) * | 2012-08-29 | 2014-03-06 | Continental Teves Ag & Co. Ohg | Schaltumkehrverfahren für ein analogisiert betriebenes Magnetventil, elektrohydraulische Bremsanlage und Verwendung der elektrohydraulischen Bremsanlage |
| DE102009057359B4 (de) | 2008-12-08 | 2019-01-31 | Ckd Corporation | Drucksteuervorrichtung sowie Durchflussmengenregelungsvorrichtung |
Families Citing this family (145)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4864280B2 (ja) * | 2001-04-24 | 2012-02-01 | ブルックス・インストルメント・エルエルシー | 質量流量コントローラのシステムおよび方法 |
| US7010464B2 (en) * | 2001-07-25 | 2006-03-07 | Schneider Automation Inc. | Mobile HVAC cavity test device, method, and computer product |
| US6627465B2 (en) * | 2001-08-30 | 2003-09-30 | Micron Technology, Inc. | System and method for detecting flow in a mass flow controller |
| CN100425955C (zh) * | 2002-05-24 | 2008-10-15 | 迅捷公司 | 用于物质流检测设备校准的系统和方法 |
| KR100714985B1 (ko) | 2002-07-19 | 2007-05-09 | 엔테그리스, 아이엔씨. | 액체 유동 제어기와 정밀 분배 장치 및 시스템 |
| KR20050031109A (ko) * | 2002-07-19 | 2005-04-01 | 셀레리티 그룹 아이엔씨 | 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치 |
| US20050000570A1 (en) | 2003-01-17 | 2005-01-06 | Mohammed Balarabe Nuhu | Combination manual/pneumatic shut-off valve |
| WO2004102130A1 (en) * | 2003-03-03 | 2004-11-25 | Flowray Inc. | Electronic gas flow measurement and recording device |
| US6843139B2 (en) * | 2003-03-12 | 2005-01-18 | Rosemount Inc. | Flow instrument with multisensors |
| US7043374B2 (en) * | 2003-03-26 | 2006-05-09 | Celerity, Inc. | Flow sensor signal conversion |
| US6997032B2 (en) | 2003-04-08 | 2006-02-14 | Invensys Systems, Inc. | Flowmeter zeroing techniques |
| US7437944B2 (en) * | 2003-12-04 | 2008-10-21 | Applied Materials, Inc. | Method and apparatus for pressure and mix ratio control |
| US20050120805A1 (en) * | 2003-12-04 | 2005-06-09 | John Lane | Method and apparatus for substrate temperature control |
| US7216019B2 (en) * | 2004-07-08 | 2007-05-08 | Celerity, Inc. | Method and system for a mass flow controller with reduced pressure sensitivity |
| JP4847454B2 (ja) | 2004-08-24 | 2011-12-28 | マイクロ・モーション・インコーポレーテッド | 流量計を検証する方法及び装置 |
| US7270141B2 (en) * | 2004-12-02 | 2007-09-18 | Halliburton Energy Services, Inc. | Methods and systems for controlling viscosity in real time |
| US7237535B2 (en) * | 2005-04-11 | 2007-07-03 | Honeywell International Inc. | Enhanced accuracy fuel metering system and method |
| US7334469B2 (en) * | 2005-07-29 | 2008-02-26 | Honeyweill International Inc. | Methods and systems using ratiometric characterizations to improve air data accuracy |
| US7467027B2 (en) * | 2006-01-26 | 2008-12-16 | Mks Instruments, Inc. | Compensation for thermal siphoning in mass flow controllers |
| JP4788920B2 (ja) * | 2006-03-20 | 2011-10-05 | 日立金属株式会社 | 質量流量制御装置、その検定方法及び半導体製造装置 |
| US8026113B2 (en) * | 2006-03-24 | 2011-09-27 | Tokyo Electron Limited | Method of monitoring a semiconductor processing system using a wireless sensor network |
| JP4858829B2 (ja) * | 2006-03-28 | 2012-01-18 | 横河電機株式会社 | マルチバリアブル質量流量伝送器システム |
| JP4765746B2 (ja) | 2006-04-17 | 2011-09-07 | 日立金属株式会社 | 遮断弁装置及びこれを組み込んだ質量流量制御装置 |
| US7603186B2 (en) * | 2006-04-28 | 2009-10-13 | Advanced Energy Industries, Inc. | Adaptive response time closed loop control algorithm |
| US7640078B2 (en) * | 2006-07-05 | 2009-12-29 | Advanced Energy Industries, Inc. | Multi-mode control algorithm |
| TW200834275A (en) | 2006-09-05 | 2008-08-16 | Celerity Inc | Multi-gas flow device |
| KR20160018824A (ko) * | 2006-10-03 | 2016-02-17 | 가부시키가이샤 호리바 에스텍 | 매스 플로우 컨트롤러 |
| KR101444964B1 (ko) * | 2006-12-05 | 2014-09-26 | 가부시키가이샤 호리바 에스텍 | 유량제어장치의 검정방법 |
| US8079383B2 (en) * | 2006-12-07 | 2011-12-20 | Mks Instruments, Inc. | Controller gain scheduling for mass flow controllers |
| US8025072B2 (en) * | 2006-12-21 | 2011-09-27 | Schlumberger Technology Corporation | Developing a flow control system for a well |
| US7846497B2 (en) | 2007-02-26 | 2010-12-07 | Applied Materials, Inc. | Method and apparatus for controlling gas flow to a processing chamber |
| US7775236B2 (en) | 2007-02-26 | 2010-08-17 | Applied Materials, Inc. | Method and apparatus for controlling gas flow to a processing chamber |
| US8074677B2 (en) | 2007-02-26 | 2011-12-13 | Applied Materials, Inc. | Method and apparatus for controlling gas flow to a processing chamber |
| US7651263B2 (en) * | 2007-03-01 | 2010-01-26 | Advanced Energy Industries, Inc. | Method and apparatus for measuring the temperature of a gas in a mass flow controller |
| US8056579B2 (en) * | 2007-06-04 | 2011-11-15 | Horiba Stec, Co., Ltd. | Mass flow controller |
| US20090035121A1 (en) * | 2007-07-31 | 2009-02-05 | Dresser, Inc. | Fluid Flow Modulation and Measurement |
| US8265794B2 (en) * | 2007-10-01 | 2012-09-11 | Westlock Controls Corporation | Knowledge based valve control method |
| DE102008006653A1 (de) * | 2008-01-30 | 2009-08-06 | Continental Teves Ag & Co. Ohg | Verfahren zur Konditionierung eines Regelventils |
| US8067917B2 (en) * | 2008-04-08 | 2011-11-29 | Liebert Corporation | Hysteresis mitigation and control method |
| US8105648B2 (en) * | 2008-05-13 | 2012-01-31 | United Microelectronics Corp. | Method for operating a chemical deposition chamber |
| US20090308269A1 (en) * | 2008-06-11 | 2009-12-17 | Niemiro Michael A | Spray dampening valves with associated drive signals in an offset printing process |
| US7748268B2 (en) * | 2008-07-13 | 2010-07-06 | Brooks Instrument, Llc | Thermal flow meter |
| US7905139B2 (en) * | 2008-08-25 | 2011-03-15 | Brooks Instrument, Llc | Mass flow controller with improved dynamic |
| JP2010169657A (ja) * | 2008-12-25 | 2010-08-05 | Horiba Stec Co Ltd | 質量流量計及びマスフローコントローラ |
| US20100229657A1 (en) * | 2009-03-12 | 2010-09-16 | Weinstein Jason P | Sinter-bonded metal flow restrictor for regulating volumetric gas flow through an aerosol sampler inlet |
| JP5337542B2 (ja) * | 2009-03-12 | 2013-11-06 | 株式会社堀場エステック | マスフローメータ、マスフローコントローラ、それらを含むマスフローメータシステムおよびマスフローコントローラシステム |
| US8091711B2 (en) * | 2009-06-24 | 2012-01-10 | Atomic Energy Council-Institute Of Nuclear Energy Research | Dynamically adaptive trommel screen system |
| US8195312B2 (en) * | 2009-08-27 | 2012-06-05 | Hitachi Metals, Ltd | Multi-mode control loop with improved performance for mass flow controller |
| EP2365411A1 (en) * | 2010-03-10 | 2011-09-14 | Sensirion AG | Flow control arrangement |
| US8321060B2 (en) * | 2010-04-27 | 2012-11-27 | Hitachi Metals, Ltd | Method and system of on-tool and on-site MFC optimization providing consistent response |
| EP2392898B1 (en) | 2010-06-04 | 2017-12-13 | Sensirion AG | Sensor system |
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| US6445980B1 (en) | 1999-07-10 | 2002-09-03 | Mykrolis Corporation | System and method for a variable gain proportional-integral (PI) controller |
| US6389364B1 (en) | 1999-07-10 | 2002-05-14 | Mykrolis Corporation | System and method for a digital mass flow controller |
| US6404612B1 (en) | 1999-07-10 | 2002-06-11 | Mykrolis Corporation | Method for system for driving a solenoid |
| US6138708A (en) * | 1999-07-28 | 2000-10-31 | Controls Corporation Of America | Mass flow controller having automatic pressure compensator |
| JP3554509B2 (ja) | 1999-08-10 | 2004-08-18 | 忠弘 大見 | 圧力式流量制御装置における流量異常検知方法 |
| US6564194B1 (en) * | 1999-09-10 | 2003-05-13 | John R. Koza | Method and apparatus for automatic synthesis controllers |
| US6155283A (en) | 1999-09-10 | 2000-12-05 | The Foxboro Company | Intelligent valve positioner tuning |
| AU2001277984A1 (en) | 2000-07-25 | 2002-02-05 | Fugasity Corporation | Small internal volume fluid mass flow control apparatus |
| US6631334B2 (en) | 2000-12-26 | 2003-10-07 | Mks Instruments, Inc. | Pressure-based mass flow controller system |
| JP4864280B2 (ja) | 2001-04-24 | 2012-02-01 | ブルックス・インストルメント・エルエルシー | 質量流量コントローラのシステムおよび方法 |
| KR20050031109A (ko) * | 2002-07-19 | 2005-04-01 | 셀레리티 그룹 아이엔씨 | 질량 유량 제어기 내의 압력 보상을 위한 방법 및 장치 |
| US7043374B2 (en) | 2003-03-26 | 2006-05-09 | Celerity, Inc. | Flow sensor signal conversion |
-
2002
- 2002-04-24 JP JP2002584094A patent/JP4864280B2/ja not_active Expired - Fee Related
- 2002-04-24 AT AT04002135T patent/ATE310986T1/de not_active IP Right Cessation
- 2002-04-24 US US10/131,603 patent/US6962164B2/en not_active Expired - Lifetime
- 2002-04-24 WO PCT/US2002/013010 patent/WO2002086632A2/en not_active Ceased
- 2002-04-24 KR KR10-2003-7014001A patent/KR20040024854A/ko not_active Ceased
- 2002-04-24 CN CNA028105400A patent/CN1514960A/zh active Pending
- 2002-04-24 DE DE60207609T patent/DE60207609T2/de not_active Expired - Lifetime
- 2002-04-24 AU AU2002307547A patent/AU2002307547A1/en not_active Abandoned
- 2002-04-24 EP EP02764338A patent/EP1384121A2/en not_active Withdrawn
-
2005
- 2005-03-28 US US11/091,824 patent/US7231931B2/en not_active Expired - Lifetime
- 2005-03-29 US US11/092,144 patent/US7114511B2/en not_active Expired - Lifetime
-
2007
- 2007-05-16 US US11/749,386 patent/US7380564B2/en not_active Expired - Lifetime
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2009
- 2009-08-07 JP JP2009184196A patent/JP5129793B2/ja not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8386083B2 (en) | 2008-06-16 | 2013-02-26 | Mks Instruments, Inc. | Systems and methods for updating valve cracking current in mass flow controllers |
| DE112009001473B4 (de) * | 2008-06-16 | 2016-09-08 | Mks Instruments Inc. | Systeme und Verfahren zum Aktualisieren eines Ventilauslösestroms in Massenströmungssteuerungen bzw. Regelungen |
| DE102009057359B4 (de) | 2008-12-08 | 2019-01-31 | Ckd Corporation | Drucksteuervorrichtung sowie Durchflussmengenregelungsvorrichtung |
| DE102012215353A1 (de) * | 2012-08-29 | 2014-03-06 | Continental Teves Ag & Co. Ohg | Schaltumkehrverfahren für ein analogisiert betriebenes Magnetventil, elektrohydraulische Bremsanlage und Verwendung der elektrohydraulischen Bremsanlage |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1384121A2 (en) | 2004-01-28 |
| US20050166968A1 (en) | 2005-08-04 |
| US7114511B2 (en) | 2006-10-03 |
| US20070215206A1 (en) | 2007-09-20 |
| KR20040024854A (ko) | 2004-03-22 |
| DE60207609D1 (de) | 2005-12-29 |
| US7231931B2 (en) | 2007-06-19 |
| WO2002086632A2 (en) | 2002-10-31 |
| ATE310986T1 (de) | 2005-12-15 |
| US7380564B2 (en) | 2008-06-03 |
| CN1514960A (zh) | 2004-07-21 |
| WO2002086632A3 (en) | 2003-04-10 |
| JP2010015580A (ja) | 2010-01-21 |
| JP2004533049A (ja) | 2004-10-28 |
| US6962164B2 (en) | 2005-11-08 |
| JP4864280B2 (ja) | 2012-02-01 |
| AU2002307547A1 (en) | 2002-11-05 |
| US20020198668A1 (en) | 2002-12-26 |
| JP5129793B2 (ja) | 2013-01-30 |
| US20050167627A1 (en) | 2005-08-04 |
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| 8364 | No opposition during term of opposition |