CN1319158C - 具有铟热偶的电子组件的构造方法 - Google Patents
具有铟热偶的电子组件的构造方法 Download PDFInfo
- Publication number
- CN1319158C CN1319158C CNB008126321A CN00812632A CN1319158C CN 1319158 C CN1319158 C CN 1319158C CN B008126321 A CNB008126321 A CN B008126321A CN 00812632 A CN00812632 A CN 00812632A CN 1319158 C CN1319158 C CN 1319158C
- Authority
- CN
- China
- Prior art keywords
- alloy
- sheet
- substance
- semiconductor chip
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3736—Metallic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07 e.g. sealing of a cap to a base of a container
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
- H01L23/433—Auxiliary members in containers characterised by their shape, e.g. pistons
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/394,860 US6461891B1 (en) | 1999-09-13 | 1999-09-13 | Method of constructing an electronic assembly having an indium thermal couple and an electronic assembly having an indium thermal couple |
| US09/394,860 | 1999-09-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1373903A CN1373903A (zh) | 2002-10-09 |
| CN1319158C true CN1319158C (zh) | 2007-05-30 |
Family
ID=23560692
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB008126321A Expired - Fee Related CN1319158C (zh) | 1999-09-13 | 2000-08-29 | 具有铟热偶的电子组件的构造方法 |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US6461891B1 (enExample) |
| JP (1) | JP5030352B2 (enExample) |
| KR (1) | KR20020035870A (enExample) |
| CN (1) | CN1319158C (enExample) |
| AU (1) | AU7088900A (enExample) |
| MX (1) | MXPA02002649A (enExample) |
| MY (1) | MY122678A (enExample) |
| WO (1) | WO2001020673A1 (enExample) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6461891B1 (en) | 1999-09-13 | 2002-10-08 | Intel Corporation | Method of constructing an electronic assembly having an indium thermal couple and an electronic assembly having an indium thermal couple |
| US6709898B1 (en) * | 2000-10-04 | 2004-03-23 | Intel Corporation | Die-in-heat spreader microelectronic package |
| CN100362655C (zh) * | 2002-01-30 | 2008-01-16 | 霍尼韦尔国际公司 | 热界面材料以及包括铟和锌的组合物 |
| US6882041B1 (en) * | 2002-02-05 | 2005-04-19 | Altera Corporation | Thermally enhanced metal capped BGA package |
| US7436058B2 (en) * | 2002-05-09 | 2008-10-14 | Intel Corporation | Reactive solder material |
| US20070164424A1 (en) * | 2003-04-02 | 2007-07-19 | Nancy Dean | Thermal interconnect and interface systems, methods of production and uses thereof |
| DE10335111B4 (de) * | 2003-07-31 | 2006-12-28 | Infineon Technologies Ag | Montageverfahren für ein Halbleiterbauteil |
| US7132746B2 (en) * | 2003-08-18 | 2006-11-07 | Delphi Technologies, Inc. | Electronic assembly with solder-bonded heat sink |
| JP4411123B2 (ja) * | 2004-03-31 | 2010-02-10 | 新光電気工業株式会社 | 放熱板の製造方法 |
| JP2007266150A (ja) * | 2006-03-28 | 2007-10-11 | Fujitsu Ltd | 熱伝導性接合材、半導体パッケージ、ヒートスプレッダ、半導体チップ、及び半導体チップとヒートスプレッダとを接合する接合方法 |
| JP5211457B2 (ja) * | 2006-09-19 | 2013-06-12 | 富士通セミコンダクター株式会社 | 半導体装置及びその製造方法 |
| US7633151B2 (en) * | 2007-03-16 | 2009-12-15 | Advanced Micro Devices, Inc. | Integrated circuit package lid with a wetting film |
| US7834442B2 (en) * | 2007-12-12 | 2010-11-16 | International Business Machines Corporation | Electronic package method and structure with cure-melt hierarchy |
| JP5153316B2 (ja) * | 2007-12-21 | 2013-02-27 | 新光電気工業株式会社 | 半導体パッケージ用放熱板およびそのめっき方法 |
| US8378480B2 (en) * | 2010-03-04 | 2013-02-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Dummy wafers in 3DIC package assemblies |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4034469A (en) * | 1976-09-03 | 1977-07-12 | Ibm Corporation | Method of making conduction-cooled circuit package |
| US4323914A (en) * | 1979-02-01 | 1982-04-06 | International Business Machines Corporation | Heat transfer structure for integrated circuit package |
| US5323265A (en) * | 1989-08-31 | 1994-06-21 | Aisin Seiki Kabushiki Kaisha | Outside mirror for vehicle including a vibrator fixed to a one-piece supporting member separate from a holder member |
| US5396403A (en) * | 1993-07-06 | 1995-03-07 | Hewlett-Packard Company | Heat sink assembly with thermally-conductive plate for a plurality of integrated circuits on a substrate |
| US5863814A (en) * | 1996-12-16 | 1999-01-26 | International Business Machines Corporation | Electronic package with compressible heatsink structure |
| US5923086A (en) * | 1997-05-14 | 1999-07-13 | Intel Corporation | Apparatus for cooling a semiconductor die |
Family Cites Families (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4034468A (en) * | 1976-09-03 | 1977-07-12 | Ibm Corporation | Method for making conduction-cooled circuit package |
| US4069498A (en) | 1976-11-03 | 1978-01-17 | International Business Machines Corporation | Studded heat exchanger for integrated circuit package |
| US4092697A (en) | 1976-12-06 | 1978-05-30 | International Business Machines Corporation | Heat transfer mechanism for integrated circuit package |
| US4607277A (en) | 1982-03-16 | 1986-08-19 | International Business Machines Corporation | Semiconductor assembly employing noneutectic alloy for heat dissipation |
| US4620215A (en) | 1982-04-16 | 1986-10-28 | Amdahl Corporation | Integrated circuit packaging systems with double surface heat dissipation |
| US4545840A (en) * | 1983-03-08 | 1985-10-08 | Monolithic Memories, Inc. | Process for controlling thickness of die attach adhesive |
| CA2002213C (en) | 1988-11-10 | 1999-03-30 | Iwona Turlik | High performance integrated circuit chip package and method of making same |
| JPH04192552A (ja) | 1990-11-27 | 1992-07-10 | Nec Corp | 半導体素子用パッケージ |
| JP3039584B2 (ja) * | 1992-07-03 | 2000-05-08 | 株式会社日立製作所 | 半導体集積回路モジュールの組立方法 |
| JP3258764B2 (ja) * | 1993-06-01 | 2002-02-18 | 三菱電機株式会社 | 樹脂封止型半導体装置の製造方法ならびに外部引出用電極およびその製造方法 |
| US5747874A (en) * | 1994-09-20 | 1998-05-05 | Fujitsu Limited | Semiconductor device, base member for semiconductor device and semiconductor device unit |
| KR0137826B1 (ko) * | 1994-11-15 | 1998-04-28 | 문정환 | 반도체 디바이스 패키지 방법 및 디바이스 패키지 |
| JP3318811B2 (ja) * | 1994-12-29 | 2002-08-26 | ソニー株式会社 | 半導体発光素子のパッケージ及びその製造方法 |
| US5616958A (en) * | 1995-01-25 | 1997-04-01 | International Business Machines Corporation | Electronic package |
| US5659203A (en) * | 1995-06-07 | 1997-08-19 | International Business Machines Corporation | Reworkable polymer chip encapsulant |
| US5837562A (en) * | 1995-07-07 | 1998-11-17 | The Charles Stark Draper Laboratory, Inc. | Process for bonding a shell to a substrate for packaging a semiconductor |
| AT1470U1 (de) * | 1995-08-01 | 1997-05-26 | Austria Card | Laminierte karte und verfahren zu ihrer herstellung |
| US5977629A (en) * | 1996-01-24 | 1999-11-02 | Micron Technology, Inc. | Condensed memory matrix |
| KR100443484B1 (ko) * | 1996-02-19 | 2004-09-18 | 마츠시타 덴끼 산교 가부시키가이샤 | 반도체장치및그제조방법 |
| JPH09306954A (ja) | 1996-05-20 | 1997-11-28 | Hitachi Ltd | 半導体装置及びその実装方法並びに実装構造体 |
| JP2891184B2 (ja) * | 1996-06-13 | 1999-05-17 | 日本電気株式会社 | 半導体装置及びその製造方法 |
| US6140144A (en) * | 1996-08-08 | 2000-10-31 | Integrated Sensing Systems, Inc. | Method for packaging microsensors |
| US6074898A (en) * | 1996-09-18 | 2000-06-13 | Sony Corporation | Lead frame and integrated circuit package |
| US6144101A (en) * | 1996-12-03 | 2000-11-07 | Micron Technology, Inc. | Flip chip down-bond: method and apparatus |
| US6130116A (en) * | 1996-12-13 | 2000-10-10 | Tessera, Inc. | Method of encapsulating a microelectronic assembly utilizing a barrier |
| US5783465A (en) * | 1997-04-03 | 1998-07-21 | Lucent Technologies Inc. | Compliant bump technology |
| JPH10303352A (ja) * | 1997-04-22 | 1998-11-13 | Toshiba Corp | 半導体装置および半導体装置の製造方法 |
| JPH10335383A (ja) * | 1997-05-28 | 1998-12-18 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| US5940687A (en) * | 1997-06-06 | 1999-08-17 | International Business Machines Corporation | Wire mesh insert for thermal adhesives |
| US5904495A (en) * | 1997-06-11 | 1999-05-18 | Massachusetts Institute Of Technology | Interconnection technique for hybrid integrated devices |
| JP3241639B2 (ja) | 1997-06-30 | 2001-12-25 | 日本電気株式会社 | マルチチップモジュールの冷却構造およびその製造方法 |
| US5950072A (en) * | 1997-07-25 | 1999-09-07 | Stmicroelectronics, Inc. | Low-profile removable ball-grid-array integrated circuit package |
| TW360935B (en) * | 1997-11-14 | 1999-06-11 | Amic Technology Inc | Variable package structure and process for producing the same |
| US6063647A (en) * | 1997-12-08 | 2000-05-16 | 3M Innovative Properties Company | Method for making circuit elements for a z-axis interconnect |
| JP3219043B2 (ja) * | 1998-01-07 | 2001-10-15 | 日本電気株式会社 | 半導体装置のパッケージ方法および半導体装置 |
| US6281573B1 (en) | 1998-03-31 | 2001-08-28 | International Business Machines Corporation | Thermal enhancement approach using solder compositions in the liquid state |
| US6326239B1 (en) * | 1998-04-07 | 2001-12-04 | Denso Corporation | Mounting structure of electronic parts and mounting method of electronic parts |
| US6181006B1 (en) * | 1998-05-28 | 2001-01-30 | Ericsson Inc. | Thermally conductive mounting arrangement for securing an integrated circuit package to a heat sink |
| JP3842447B2 (ja) * | 1998-08-17 | 2006-11-08 | シチズン時計株式会社 | Icの実装構造 |
| US6261870B1 (en) * | 1998-08-28 | 2001-07-17 | Lsi Logic Corporation | Backside failure analysis capable integrated circuit packaging |
| US6404048B2 (en) * | 1998-09-03 | 2002-06-11 | Micron Technology, Inc. | Heat dissipating microelectronic package |
| US6275381B1 (en) | 1998-12-10 | 2001-08-14 | International Business Machines Corporation | Thermal paste preforms as a heat transfer media between a chip and a heat sink and method thereof |
| JP4275806B2 (ja) * | 1999-06-01 | 2009-06-10 | 株式会社ルネサステクノロジ | 半導体素子の実装方法 |
| SG87046A1 (en) * | 1999-08-17 | 2002-03-19 | Micron Technology Inc | Multi-chip module with stacked dice |
| US6461891B1 (en) | 1999-09-13 | 2002-10-08 | Intel Corporation | Method of constructing an electronic assembly having an indium thermal couple and an electronic assembly having an indium thermal couple |
| US6258626B1 (en) * | 2000-07-06 | 2001-07-10 | Advanced Semiconductor Engineering, Inc. | Method of making stacked chip package |
-
1999
- 1999-09-13 US US09/394,860 patent/US6461891B1/en not_active Expired - Lifetime
-
2000
- 2000-08-29 CN CNB008126321A patent/CN1319158C/zh not_active Expired - Fee Related
- 2000-08-29 AU AU70889/00A patent/AU7088900A/en not_active Abandoned
- 2000-08-29 WO PCT/US2000/023778 patent/WO2001020673A1/en not_active Ceased
- 2000-08-29 KR KR1020027003268A patent/KR20020035870A/ko not_active Ceased
- 2000-08-29 MX MXPA02002649A patent/MXPA02002649A/es active IP Right Grant
- 2000-08-29 JP JP2001524152A patent/JP5030352B2/ja not_active Expired - Fee Related
- 2000-09-06 MY MYPI20004104A patent/MY122678A/en unknown
-
2002
- 2002-06-04 US US10/163,823 patent/US6882043B2/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4034469A (en) * | 1976-09-03 | 1977-07-12 | Ibm Corporation | Method of making conduction-cooled circuit package |
| US4323914A (en) * | 1979-02-01 | 1982-04-06 | International Business Machines Corporation | Heat transfer structure for integrated circuit package |
| US5323265A (en) * | 1989-08-31 | 1994-06-21 | Aisin Seiki Kabushiki Kaisha | Outside mirror for vehicle including a vibrator fixed to a one-piece supporting member separate from a holder member |
| US5396403A (en) * | 1993-07-06 | 1995-03-07 | Hewlett-Packard Company | Heat sink assembly with thermally-conductive plate for a plurality of integrated circuits on a substrate |
| US5863814A (en) * | 1996-12-16 | 1999-01-26 | International Business Machines Corporation | Electronic package with compressible heatsink structure |
| US5923086A (en) * | 1997-05-14 | 1999-07-13 | Intel Corporation | Apparatus for cooling a semiconductor die |
Also Published As
| Publication number | Publication date |
|---|---|
| US20020151110A1 (en) | 2002-10-17 |
| AU7088900A (en) | 2001-04-17 |
| KR20020035870A (ko) | 2002-05-15 |
| US20020020912A1 (en) | 2002-02-21 |
| JP2003509865A (ja) | 2003-03-11 |
| MY122678A (en) | 2006-04-29 |
| US6461891B1 (en) | 2002-10-08 |
| CN1373903A (zh) | 2002-10-09 |
| MXPA02002649A (es) | 2003-01-28 |
| JP5030352B2 (ja) | 2012-09-19 |
| US6882043B2 (en) | 2005-04-19 |
| WO2001020673A1 (en) | 2001-03-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070530 Termination date: 20150829 |
|
| EXPY | Termination of patent right or utility model |