JP5153316B2 - 半導体パッケージ用放熱板およびそのめっき方法 - Google Patents
半導体パッケージ用放熱板およびそのめっき方法 Download PDFInfo
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- JP5153316B2 JP5153316B2 JP2007330988A JP2007330988A JP5153316B2 JP 5153316 B2 JP5153316 B2 JP 5153316B2 JP 2007330988 A JP2007330988 A JP 2007330988A JP 2007330988 A JP2007330988 A JP 2007330988A JP 5153316 B2 JP5153316 B2 JP 5153316B2
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- H01L23/42—Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
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- H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
- H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
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- H01L2224/732—Location after the connecting process
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- H01L2924/01078—Platinum [Pt]
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- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
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- H—ELECTRICITY
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16152—Cap comprising a cavity for hosting the device, e.g. U-shaped cap
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- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/161—Cap
- H01L2924/1615—Shape
- H01L2924/16195—Flat cap [not enclosing an internal cavity]
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- Power Engineering (AREA)
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- Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
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Description
図3は、本発明の第1実施形態に係る放熱板1Aを示す図である。図3(A)は、放熱板1Aの断面図であり、図3(B)は、めっきをするにあたり、放熱板1Aの配置を説明するための断面図である。また、図3(C)は、放熱板1Aに金めっきを施す方法を説明するための断面図であり、図3(D)は、金めっきが施された放熱板1Aの断面図であり、図3(E)は、金めっきが施された放熱板1Aの底面平面図である。
図4は、本発明の第2実施形態に係る放熱板2Aを示す図である。図4(A)は、放熱板2Aの断面図であり、図4(B)は、めっきをするにあたり、放熱板2Aの配置を説明するための断面図である。また、図4(C)放熱板2Aに金めっきを施す方法を説明するための断面図であり、図4(D)は、金めっきが施された放熱板2Aの断面図であり、図4(E)は、金めっきが施された放熱板2Aの底面平面図である。
15、150 凹部
16、160 内底面部
17、170 フット部
18、180 内側壁部
18a 段差部
18b 傾斜部
19a マスクエリア
19b めっきエリア
60a、60c マスクゴム
62 マスク
64 マスクプレート
65 めっき液
50、500 金めっき
200 基板
300 半導体素子
400 熱伝導接合材
Claims (10)
- 平面矩形状の半導体パッケージ用放熱板であって、
前記半導体パッケージ用放熱板の表面全体にはニッケルめっきが施されており、
一面に設けた凹部、
前記凹部の内側壁部に設けた段差部、
を有し、
前記凹部の内側壁部は、前記凹部の内底面部と前記段差部との間のめっきエリアと、前記段差部よりも底面側のマスクエリアと、に区分され、
前記凹部の内底面部の全面及び前記凹部の内側壁部のめっきエリアのみに、さらに金めっきが施されている半導体パッケージ用放熱板。 - 前記段差部は、前記凹部の底面側開口面積が前記内底面部の面積よりも大きくなるよう形成されている請求項1に記載の半導体パッケージ用放熱板。
- 平面矩形状の半導体パッケージ用放熱板であって、
前記半導体パッケージ用放熱板の表面全体にはニッケルめっきが施されており、
一面に設けた凹部、
前記凹部の内側壁部に設けた傾斜部、
を有し、
前記凹部の内底面部の全面及び前記内底面部から前記傾斜部の一部にかけてのみに、さらに金めっきが施されている半導体パッケージ用放熱板。 - 前記傾斜部は、前記内底面部の面積が前記凹部の底面側開口面積に向かって大きくなるように形成されている請求項3に記載の半導体パッケージ用放熱板。
- 平面矩形状で、その表面全体にニッケルめっきが施され、一面に設けた凹部、前記凹部の内側壁部に設けた段差部を有し、
前記凹部の内側壁部は、前記凹部の内底面部と前記段差部との間のめっきエリアと、前記段差部と前記凹部の開口部との間のマスクエリアと、に区分される半導体パッケージ用放熱板に対し、
前記段差部にマスクゴムを密着させ、前記マスクエリアをマスクすることにより、
前記凹部の内底面部の全面及び前記めっきエリアのみに金めっきを施す、半導体パッケージ用放熱板のめっき方法。 - 前記段差部は、前記凹部の前記内側壁部に、前記凹部の底面側開口面積が前記内底面部の面積よりも大きくなるよう形成されている請求項5記載の半導体パッケージ用放熱板のめっき方法。
- 平面矩形状で、その表面全体にニッケルめっきが施され、一面に設けた凹部、前記凹部の内側壁部に設けた傾斜部を有する半導体パッケージ用放熱板に対し、
前記傾斜部にマスクゴムを密着させ、前記凹部の内底面部近傍を除く内側壁部をマスクエリアとしてマスクすることにより、
前記凹部の内底面部の全面及び前記内底面部から前記傾斜部の一部にかけてのみに、金めっきを施す、半導体パッケージ用放熱板のめっき方法。 - 前記マスクゴムは、その先端部が前記半導体パッケージ用放熱板の傾斜部と略同一角度の傾斜面を有する請求項7に記載の半導体パッケージ用放熱板のめっき方法。
- 前記傾斜部は、前記凹部の前記内側壁部に、前記内底面部の面積が前記凹部の底面側開口面積に向かって大きくなるように形成されている、請求項7または8に記載の半導体パッケージ用放熱板のめっき方法。
- 前記凹部を覆うようにマスクプレートを配置し、前記マスクプレートに設けられた孔を通って、めっき液を前記凹部に供給することにより、前記内底面部の全面に金めっきを施す請求項5乃至9いずれか一項に記載の半導体パッケージ用放熱板のめっき方法。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007330988A JP5153316B2 (ja) | 2007-12-21 | 2007-12-21 | 半導体パッケージ用放熱板およびそのめっき方法 |
KR1020080129029A KR20090068140A (ko) | 2007-12-21 | 2008-12-18 | 반도체 패키지용 방열판 및 그 도금 방법 |
US12/339,725 US20090183855A1 (en) | 2007-12-21 | 2008-12-19 | Heat radiating plate for semiconductor package and plating method thereof |
CN2008101864797A CN101465329B (zh) | 2007-12-21 | 2008-12-19 | 半导体封装用的散热板以及该散热板的电镀方法 |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007330988A JP5153316B2 (ja) | 2007-12-21 | 2007-12-21 | 半導体パッケージ用放熱板およびそのめっき方法 |
Publications (3)
Publication Number | Publication Date |
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JP2009152494A JP2009152494A (ja) | 2009-07-09 |
JP2009152494A5 JP2009152494A5 (ja) | 2011-01-13 |
JP5153316B2 true JP5153316B2 (ja) | 2013-02-27 |
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JP2007330988A Active JP5153316B2 (ja) | 2007-12-21 | 2007-12-21 | 半導体パッケージ用放熱板およびそのめっき方法 |
Country Status (4)
Country | Link |
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US (1) | US20090183855A1 (ja) |
JP (1) | JP5153316B2 (ja) |
KR (1) | KR20090068140A (ja) |
CN (1) | CN101465329B (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20130120939A1 (en) * | 2010-05-21 | 2013-05-16 | Nokia Siemens Networks Oy | Method and device for thermally coupling a heat sink to a component |
CN102299127B (zh) * | 2011-07-13 | 2013-12-11 | 台达电子企业管理(上海)有限公司 | 用于封装元件的双向散热器及其组装方法 |
CN108028238B (zh) * | 2015-10-05 | 2021-03-02 | 三菱电机株式会社 | 电子控制装置 |
CN110648987B (zh) * | 2019-10-11 | 2022-09-06 | 宁波施捷电子有限公司 | 一种界面导热材料层及其用途 |
CN114823573B (zh) * | 2022-06-24 | 2022-09-09 | 威海市泓淋电力技术股份有限公司 | 一种散热型封装结构及其形成方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH065699B2 (ja) * | 1987-09-16 | 1994-01-19 | 日本電気株式会社 | 半導体装置 |
US5482898A (en) * | 1993-04-12 | 1996-01-09 | Amkor Electronics, Inc. | Method for forming a semiconductor device having a thermal dissipator and electromagnetic shielding |
US6461891B1 (en) * | 1999-09-13 | 2002-10-08 | Intel Corporation | Method of constructing an electronic assembly having an indium thermal couple and an electronic assembly having an indium thermal couple |
US6624522B2 (en) * | 2000-04-04 | 2003-09-23 | International Rectifier Corporation | Chip scale surface mounted device and process of manufacture |
JP2001308215A (ja) * | 2000-04-24 | 2001-11-02 | Ngk Spark Plug Co Ltd | 半導体装置 |
US6282096B1 (en) * | 2000-04-28 | 2001-08-28 | Siliconware Precision Industries Co., Ltd. | Integration of heat conducting apparatus and chip carrier in IC package |
JP4421118B2 (ja) * | 2001-01-05 | 2010-02-24 | 富士通マイクロエレクトロニクス株式会社 | 半導体装置製造方法 |
JP3841768B2 (ja) * | 2003-05-22 | 2006-11-01 | 新光電気工業株式会社 | パッケージ部品及び半導体パッケージ |
JP3809168B2 (ja) * | 2004-02-03 | 2006-08-16 | 株式会社東芝 | 半導体モジュール |
EP1988574A4 (en) * | 2006-02-24 | 2011-10-05 | Fujitsu Ltd | SEMICONDUCTOR COMPONENT |
JP5113346B2 (ja) * | 2006-05-22 | 2013-01-09 | 日立電線株式会社 | 電子装置用基板およびその製造方法、ならびに電子装置およびその製造方法 |
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2007
- 2007-12-21 JP JP2007330988A patent/JP5153316B2/ja active Active
-
2008
- 2008-12-18 KR KR1020080129029A patent/KR20090068140A/ko not_active Application Discontinuation
- 2008-12-19 CN CN2008101864797A patent/CN101465329B/zh active Active
- 2008-12-19 US US12/339,725 patent/US20090183855A1/en not_active Abandoned
Also Published As
Publication number | Publication date |
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JP2009152494A (ja) | 2009-07-09 |
CN101465329B (zh) | 2013-05-22 |
KR20090068140A (ko) | 2009-06-25 |
US20090183855A1 (en) | 2009-07-23 |
CN101465329A (zh) | 2009-06-24 |
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