CN118786400A - 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法 - Google Patents

流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法 Download PDF

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Publication number
CN118786400A
CN118786400A CN202380024208.4A CN202380024208A CN118786400A CN 118786400 A CN118786400 A CN 118786400A CN 202380024208 A CN202380024208 A CN 202380024208A CN 118786400 A CN118786400 A CN 118786400A
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CN
China
Prior art keywords
valve
flow rate
control device
exhaust
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202380024208.4A
Other languages
English (en)
Chinese (zh)
Inventor
西野功二
平田薰
杉田胜幸
小川慎也
井手口圭佑
池田信一
泽地淳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Fujikin Inc
Original Assignee
Tokyo Electron Ltd
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd, Fujikin Inc filed Critical Tokyo Electron Ltd
Publication of CN118786400A publication Critical patent/CN118786400A/zh
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
CN202380024208.4A 2022-03-22 2023-03-15 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法 Pending CN118786400A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045363 2022-03-22
JP2022-045363 2022-03-22
PCT/JP2023/010113 WO2023182105A1 (ja) 2022-03-22 2023-03-15 流量制御装置の排気構造、排気方法及びそれを備えたガス供給システム及びガス供給方法

Publications (1)

Publication Number Publication Date
CN118786400A true CN118786400A (zh) 2024-10-15

Family

ID=88101498

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202380024208.4A Pending CN118786400A (zh) 2022-03-22 2023-03-15 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法

Country Status (6)

Country Link
US (1) US20250251745A1 (https=)
JP (1) JP7823843B2 (https=)
KR (1) KR20240137654A (https=)
CN (1) CN118786400A (https=)
TW (1) TWI864645B (https=)
WO (1) WO2023182105A1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4648098B2 (ja) * 2005-06-06 2011-03-09 シーケーディ株式会社 流量制御機器絶対流量検定システム
JP6012247B2 (ja) * 2012-04-27 2016-10-25 株式会社フジキン 流体制御装置
CN105659177B (zh) * 2013-10-31 2018-07-10 株式会社富士金 压力式流量控制装置
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6346849B2 (ja) * 2014-08-20 2018-06-20 東京エレクトロン株式会社 ガス供給系、プラズマ処理装置、及びプラズマ処理装置の運用方法
JP6047540B2 (ja) * 2014-11-05 2016-12-21 Ckd株式会社 流量検定ユニット
JP6512959B2 (ja) * 2015-06-19 2019-05-15 東京エレクトロン株式会社 ガス供給系、ガス供給制御方法、及びガス置換方法
JP7296699B2 (ja) * 2018-07-02 2023-06-23 東京エレクトロン株式会社 ガス供給システム、プラズマ処理装置およびガス供給システムの制御方法
JP2021082127A (ja) * 2019-11-21 2021-05-27 東京エレクトロン株式会社 ガス供給システム、プラズマ処理装置及びガス供給システムの制御方法

Also Published As

Publication number Publication date
WO2023182105A1 (ja) 2023-09-28
US20250251745A1 (en) 2025-08-07
TW202409772A (zh) 2024-03-01
TWI864645B (zh) 2024-12-01
JP7823843B2 (ja) 2026-03-04
JPWO2023182105A1 (https=) 2023-09-28
KR20240137654A (ko) 2024-09-20

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