KR20240137654A - 유량 제어 장치의 배기 구조, 배기 방법 및 그것을 구비한 가스 공급 시스템 및 가스 공급 방법 - Google Patents

유량 제어 장치의 배기 구조, 배기 방법 및 그것을 구비한 가스 공급 시스템 및 가스 공급 방법 Download PDF

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Publication number
KR20240137654A
KR20240137654A KR1020247028019A KR20247028019A KR20240137654A KR 20240137654 A KR20240137654 A KR 20240137654A KR 1020247028019 A KR1020247028019 A KR 1020247028019A KR 20247028019 A KR20247028019 A KR 20247028019A KR 20240137654 A KR20240137654 A KR 20240137654A
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KR
South Korea
Prior art keywords
valve
flow rate
exhaust
control
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
KR1020247028019A
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English (en)
Korean (ko)
Inventor
코우지 니시노
카오루 히라타
카츠유키 스기타
신야 오가와
케이스케 이데구치
노부카즈 이케다
아츠시 사와치
Original Assignee
가부시키가이샤 후지킨
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시키가이샤 후지킨, 도쿄엘렉트론가부시키가이샤 filed Critical 가부시키가이샤 후지킨
Publication of KR20240137654A publication Critical patent/KR20240137654A/ko
Pending legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04—Apparatus for manufacture or treatment
    • H10P72/0402—Apparatus for fluid treatment

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
KR1020247028019A 2022-03-22 2023-03-15 유량 제어 장치의 배기 구조, 배기 방법 및 그것을 구비한 가스 공급 시스템 및 가스 공급 방법 Pending KR20240137654A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2022045363 2022-03-22
JPJP-P-2022-045363 2022-03-22
PCT/JP2023/010113 WO2023182105A1 (ja) 2022-03-22 2023-03-15 流量制御装置の排気構造、排気方法及びそれを備えたガス供給システム及びガス供給方法

Publications (1)

Publication Number Publication Date
KR20240137654A true KR20240137654A (ko) 2024-09-20

Family

ID=88101498

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020247028019A Pending KR20240137654A (ko) 2022-03-22 2023-03-15 유량 제어 장치의 배기 구조, 배기 방법 및 그것을 구비한 가스 공급 시스템 및 가스 공급 방법

Country Status (6)

Country Link
US (1) US20250251745A1 (https=)
JP (1) JP7823843B2 (https=)
KR (1) KR20240137654A (https=)
CN (1) CN118786400A (https=)
TW (1) TWI864645B (https=)
WO (1) WO2023182105A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013231460A (ja) 2012-04-27 2013-11-14 Fujikin Inc 流体制御装置
WO2015064035A1 (ja) 2013-10-31 2015-05-07 株式会社フジキン 圧力式流量制御装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4648098B2 (ja) * 2005-06-06 2011-03-09 シーケーディ株式会社 流量制御機器絶対流量検定システム
JP6321972B2 (ja) * 2014-01-21 2018-05-09 株式会社フジキン 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP6346849B2 (ja) * 2014-08-20 2018-06-20 東京エレクトロン株式会社 ガス供給系、プラズマ処理装置、及びプラズマ処理装置の運用方法
JP6047540B2 (ja) * 2014-11-05 2016-12-21 Ckd株式会社 流量検定ユニット
JP6512959B2 (ja) * 2015-06-19 2019-05-15 東京エレクトロン株式会社 ガス供給系、ガス供給制御方法、及びガス置換方法
JP7296699B2 (ja) * 2018-07-02 2023-06-23 東京エレクトロン株式会社 ガス供給システム、プラズマ処理装置およびガス供給システムの制御方法
JP2021082127A (ja) * 2019-11-21 2021-05-27 東京エレクトロン株式会社 ガス供給システム、プラズマ処理装置及びガス供給システムの制御方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013231460A (ja) 2012-04-27 2013-11-14 Fujikin Inc 流体制御装置
WO2015064035A1 (ja) 2013-10-31 2015-05-07 株式会社フジキン 圧力式流量制御装置

Also Published As

Publication number Publication date
WO2023182105A1 (ja) 2023-09-28
US20250251745A1 (en) 2025-08-07
TW202409772A (zh) 2024-03-01
TWI864645B (zh) 2024-12-01
JP7823843B2 (ja) 2026-03-04
JPWO2023182105A1 (https=) 2023-09-28
CN118786400A (zh) 2024-10-15

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20240821

Patent event code: PA01051R01D

Comment text: International Patent Application

PA0201 Request for examination
PG1501 Laying open of application