JP2015138338A5 - - Google Patents
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- Publication number
- JP2015138338A5 JP2015138338A5 JP2014008831A JP2014008831A JP2015138338A5 JP 2015138338 A5 JP2015138338 A5 JP 2015138338A5 JP 2014008831 A JP2014008831 A JP 2014008831A JP 2014008831 A JP2014008831 A JP 2014008831A JP 2015138338 A5 JP2015138338 A5 JP 2015138338A5
- Authority
- JP
- Japan
- Prior art keywords
- valve
- pressure
- flow rate
- control
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 239000012530 fluid Substances 0.000 claims description 81
- 238000011144 upstream manufacturing Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 5
- 238000004891 communication Methods 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 29
- 238000010586 diagram Methods 0.000 description 10
- 239000002994 raw material Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 230000009897 systematic effect Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014008831A JP6321972B2 (ja) | 2014-01-21 | 2014-01-21 | 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法 |
| PCT/JP2015/000154 WO2015111391A1 (ja) | 2014-01-21 | 2015-01-15 | 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法 |
| KR1020167005843A KR101887364B1 (ko) | 2014-01-21 | 2015-01-15 | 압력식 유량 제어 장치 및 그 유량 제어 개시 시의 오버슈트 방지 방법 |
| US15/110,208 US9841770B2 (en) | 2014-01-21 | 2015-01-15 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device |
| CN201580002126.5A CN105940357B (zh) | 2014-01-21 | 2015-01-15 | 压力式流量控制装置及其流量控制开始时的超量防止方法 |
| TW104101810A TWI537696B (zh) | 2014-01-21 | 2015-01-20 | Pressure flow control device and its flow control at the beginning of the over-prevention method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014008831A JP6321972B2 (ja) | 2014-01-21 | 2014-01-21 | 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015138338A JP2015138338A (ja) | 2015-07-30 |
| JP2015138338A5 true JP2015138338A5 (https=) | 2016-12-15 |
| JP6321972B2 JP6321972B2 (ja) | 2018-05-09 |
Family
ID=53681205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014008831A Active JP6321972B2 (ja) | 2014-01-21 | 2014-01-21 | 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9841770B2 (https=) |
| JP (1) | JP6321972B2 (https=) |
| KR (1) | KR101887364B1 (https=) |
| CN (1) | CN105940357B (https=) |
| TW (1) | TWI537696B (https=) |
| WO (1) | WO2015111391A1 (https=) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6372998B2 (ja) * | 2013-12-05 | 2018-08-15 | 株式会社フジキン | 圧力式流量制御装置 |
| JP6539482B2 (ja) * | 2015-04-15 | 2019-07-03 | 株式会社フジキン | 遮断開放器 |
| US11137779B2 (en) | 2016-04-28 | 2021-10-05 | Fujikin Incorporated | Fluid control device, method for controlling fluid control device, and fluid control system |
| US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
| US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
| JP6748586B2 (ja) * | 2016-07-11 | 2020-09-02 | 東京エレクトロン株式会社 | ガス供給システム、基板処理システム及びガス供給方法 |
| US10665430B2 (en) * | 2016-07-11 | 2020-05-26 | Tokyo Electron Limited | Gas supply system, substrate processing system and gas supply method |
| JP6786096B2 (ja) * | 2016-07-28 | 2020-11-18 | 株式会社フジキン | 圧力式流量制御装置 |
| JP7245600B2 (ja) * | 2016-12-15 | 2023-03-24 | 株式会社堀場エステック | 流量制御装置、及び、流量制御装置用プログラム |
| GB2557670B (en) * | 2016-12-15 | 2020-04-15 | Thermo Fisher Scient Bremen Gmbh | Improved gas flow control |
| JP7107648B2 (ja) * | 2017-07-11 | 2022-07-27 | 株式会社堀場エステック | 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム |
| JP7157476B2 (ja) * | 2018-04-27 | 2022-10-20 | 株式会社フジキン | 流量制御方法および流量制御装置 |
| DE102018004341A1 (de) * | 2018-05-31 | 2019-12-05 | Drägerwerk AG & Co. KGaA | Beatmungsgerät und Verfahren zum Betrieb eines Beatmungsgeräts |
| KR102421587B1 (ko) | 2018-06-26 | 2022-07-15 | 가부시키가이샤 후지킨 | 유량 제어 방법 및 유량 제어 장치 |
| WO2020085033A1 (ja) * | 2018-10-26 | 2020-04-30 | 株式会社フジキン | 流体供給システム、流体制御装置、及び半導体製造装置 |
| US11859733B2 (en) * | 2019-07-31 | 2024-01-02 | Fujikin Incorporated | Valve device, fluid control device, and manufacturing method of valve device |
| US11537150B2 (en) * | 2020-04-09 | 2022-12-27 | Horiba Stec, Co., Ltd. | Fluid control apparatus |
| US12442455B2 (en) * | 2021-02-08 | 2025-10-14 | Hitachi High-Tech Corporation | Gas supply apparatus, vacuum processing apparatus, and gas supply method |
| JP7045738B1 (ja) * | 2021-03-23 | 2022-04-01 | 株式会社リンテック | 常時閉型流量制御バルブ |
| KR102676135B1 (ko) | 2021-03-29 | 2024-06-19 | 주식회사 히타치하이테크 | 가스 공급 제어 장치 |
| US12140241B2 (en) * | 2021-05-24 | 2024-11-12 | Festo Se & Co. Kg | Fluid control system |
| KR20230000975A (ko) * | 2021-06-25 | 2023-01-03 | 가부시키가이샤 호리바 에스텍 | 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법 |
| WO2023053724A1 (ja) * | 2021-09-30 | 2023-04-06 | 株式会社フジキン | オリフィス内蔵バルブおよび流量制御装置 |
| CN118786400A (zh) * | 2022-03-22 | 2024-10-15 | 株式会社富士金 | 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法 |
| CN115585272A (zh) * | 2022-09-27 | 2023-01-10 | 浙江金象科技有限公司 | 一种抗高压的阀门装置及控制系统 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4550747A (en) * | 1983-10-05 | 1985-11-05 | Digital Hydraulics, Inc. | Digital fluid pressure flow rate and position control system |
| JPS6328875A (ja) * | 1986-07-23 | 1988-02-06 | Anelva Corp | ガス導入方法 |
| JP3291161B2 (ja) * | 1995-06-12 | 2002-06-10 | 株式会社フジキン | 圧力式流量制御装置 |
| US5739429A (en) * | 1995-07-13 | 1998-04-14 | Nordson Corporation | Powder coating system incorporating improved method and apparatus for monitoring flow rate of entrained particulate flow |
| JPH109996A (ja) * | 1996-06-21 | 1998-01-16 | Mitsubishi Heavy Ind Ltd | 流量制御装置 |
| JP3580645B2 (ja) * | 1996-08-12 | 2004-10-27 | 忠弘 大見 | 圧力式流量制御装置 |
| US5865205A (en) * | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
| JP4137267B2 (ja) | 1999-01-28 | 2008-08-20 | 忠弘 大見 | オリフィス内蔵弁 |
| JP4102564B2 (ja) * | 2001-12-28 | 2008-06-18 | 忠弘 大見 | 改良型圧力式流量制御装置 |
| JP4572139B2 (ja) * | 2005-05-23 | 2010-10-27 | 株式会社フジキン | 改良型圧力式流量制御装置 |
| JP4648098B2 (ja) * | 2005-06-06 | 2011-03-09 | シーケーディ株式会社 | 流量制御機器絶対流量検定システム |
| US8183860B2 (en) | 2006-12-20 | 2012-05-22 | Koninklijke Philips Electronics N.V. | Arrangement and method for influencing and/or detecting magnetic particles in a region of action |
| CN102037423B (zh) * | 2008-05-21 | 2014-02-05 | 株式会社富士金 | 使用压力流量控制装置的流体非连续式流量切换控制方法 |
-
2014
- 2014-01-21 JP JP2014008831A patent/JP6321972B2/ja active Active
-
2015
- 2015-01-15 CN CN201580002126.5A patent/CN105940357B/zh not_active Expired - Fee Related
- 2015-01-15 US US15/110,208 patent/US9841770B2/en active Active
- 2015-01-15 WO PCT/JP2015/000154 patent/WO2015111391A1/ja not_active Ceased
- 2015-01-15 KR KR1020167005843A patent/KR101887364B1/ko active Active
- 2015-01-20 TW TW104101810A patent/TWI537696B/zh active
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