CN105940357B - 压力式流量控制装置及其流量控制开始时的超量防止方法 - Google Patents

压力式流量控制装置及其流量控制开始时的超量防止方法 Download PDF

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Publication number
CN105940357B
CN105940357B CN201580002126.5A CN201580002126A CN105940357B CN 105940357 B CN105940357 B CN 105940357B CN 201580002126 A CN201580002126 A CN 201580002126A CN 105940357 B CN105940357 B CN 105940357B
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CN
China
Prior art keywords
pressure
valve
control
flow
fluid passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201580002126.5A
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English (en)
Chinese (zh)
Other versions
CN105940357A (zh
Inventor
平田薰
池田信一
西野功二
土肥亮介
杉田胜幸
永濑正明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikin Inc
Original Assignee
Fujikin Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikin Inc filed Critical Fujikin Inc
Publication of CN105940357A publication Critical patent/CN105940357A/zh
Application granted granted Critical
Publication of CN105940357B publication Critical patent/CN105940357B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
CN201580002126.5A 2014-01-21 2015-01-15 压力式流量控制装置及其流量控制开始时的超量防止方法 Expired - Fee Related CN105940357B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014008831A JP6321972B2 (ja) 2014-01-21 2014-01-21 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JP2014-008831 2014-01-21
PCT/JP2015/000154 WO2015111391A1 (ja) 2014-01-21 2015-01-15 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法

Publications (2)

Publication Number Publication Date
CN105940357A CN105940357A (zh) 2016-09-14
CN105940357B true CN105940357B (zh) 2019-05-14

Family

ID=53681205

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201580002126.5A Expired - Fee Related CN105940357B (zh) 2014-01-21 2015-01-15 压力式流量控制装置及其流量控制开始时的超量防止方法

Country Status (6)

Country Link
US (1) US9841770B2 (https=)
JP (1) JP6321972B2 (https=)
KR (1) KR101887364B1 (https=)
CN (1) CN105940357B (https=)
TW (1) TWI537696B (https=)
WO (1) WO2015111391A1 (https=)

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JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6539482B2 (ja) * 2015-04-15 2019-07-03 株式会社フジキン 遮断開放器
US11137779B2 (en) 2016-04-28 2021-10-05 Fujikin Incorporated Fluid control device, method for controlling fluid control device, and fluid control system
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
JP6748586B2 (ja) * 2016-07-11 2020-09-02 東京エレクトロン株式会社 ガス供給システム、基板処理システム及びガス供給方法
US10665430B2 (en) * 2016-07-11 2020-05-26 Tokyo Electron Limited Gas supply system, substrate processing system and gas supply method
JP6786096B2 (ja) * 2016-07-28 2020-11-18 株式会社フジキン 圧力式流量制御装置
JP7245600B2 (ja) * 2016-12-15 2023-03-24 株式会社堀場エステック 流量制御装置、及び、流量制御装置用プログラム
GB2557670B (en) * 2016-12-15 2020-04-15 Thermo Fisher Scient Bremen Gmbh Improved gas flow control
JP7107648B2 (ja) * 2017-07-11 2022-07-27 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
JP7157476B2 (ja) * 2018-04-27 2022-10-20 株式会社フジキン 流量制御方法および流量制御装置
DE102018004341A1 (de) * 2018-05-31 2019-12-05 Drägerwerk AG & Co. KGaA Beatmungsgerät und Verfahren zum Betrieb eines Beatmungsgeräts
KR102421587B1 (ko) 2018-06-26 2022-07-15 가부시키가이샤 후지킨 유량 제어 방법 및 유량 제어 장치
WO2020085033A1 (ja) * 2018-10-26 2020-04-30 株式会社フジキン 流体供給システム、流体制御装置、及び半導体製造装置
US11859733B2 (en) * 2019-07-31 2024-01-02 Fujikin Incorporated Valve device, fluid control device, and manufacturing method of valve device
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus
US12442455B2 (en) * 2021-02-08 2025-10-14 Hitachi High-Tech Corporation Gas supply apparatus, vacuum processing apparatus, and gas supply method
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
KR102676135B1 (ko) 2021-03-29 2024-06-19 주식회사 히타치하이테크 가스 공급 제어 장치
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system
KR20230000975A (ko) * 2021-06-25 2023-01-03 가부시키가이샤 호리바 에스텍 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법
WO2023053724A1 (ja) * 2021-09-30 2023-04-06 株式会社フジキン オリフィス内蔵バルブおよび流量制御装置
CN118786400A (zh) * 2022-03-22 2024-10-15 株式会社富士金 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法
CN115585272A (zh) * 2022-09-27 2023-01-10 浙江金象科技有限公司 一种抗高压的阀门装置及控制系统

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EP0149010A2 (en) * 1983-10-05 1985-07-24 Digital Hydraulics, Inc. Digital fluid pressure flow rate and position control system
JPS6328875A (ja) * 1986-07-23 1988-02-06 Anelva Corp ガス導入方法
JPH08338546A (ja) * 1995-06-12 1996-12-24 Fujikin:Kk 圧力式流量制御装置
US5739429A (en) * 1995-07-13 1998-04-14 Nordson Corporation Powder coating system incorporating improved method and apparatus for monitoring flow rate of entrained particulate flow
CN102037423A (zh) * 2008-05-21 2011-04-27 株式会社富士金 使用压力式流量控制装置的流体非连续式流量切换控制方法

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JPH109996A (ja) * 1996-06-21 1998-01-16 Mitsubishi Heavy Ind Ltd 流量制御装置
JP3580645B2 (ja) * 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
US5865205A (en) * 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
JP4137267B2 (ja) 1999-01-28 2008-08-20 忠弘 大見 オリフィス内蔵弁
JP4102564B2 (ja) * 2001-12-28 2008-06-18 忠弘 大見 改良型圧力式流量制御装置
JP4572139B2 (ja) * 2005-05-23 2010-10-27 株式会社フジキン 改良型圧力式流量制御装置
JP4648098B2 (ja) * 2005-06-06 2011-03-09 シーケーディ株式会社 流量制御機器絶対流量検定システム
US8183860B2 (en) 2006-12-20 2012-05-22 Koninklijke Philips Electronics N.V. Arrangement and method for influencing and/or detecting magnetic particles in a region of action

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
EP0149010A2 (en) * 1983-10-05 1985-07-24 Digital Hydraulics, Inc. Digital fluid pressure flow rate and position control system
JPS6328875A (ja) * 1986-07-23 1988-02-06 Anelva Corp ガス導入方法
JPH08338546A (ja) * 1995-06-12 1996-12-24 Fujikin:Kk 圧力式流量制御装置
US5739429A (en) * 1995-07-13 1998-04-14 Nordson Corporation Powder coating system incorporating improved method and apparatus for monitoring flow rate of entrained particulate flow
CN102037423A (zh) * 2008-05-21 2011-04-27 株式会社富士金 使用压力式流量控制装置的流体非连续式流量切换控制方法

Also Published As

Publication number Publication date
KR101887364B1 (ko) 2018-08-10
JP2015138338A (ja) 2015-07-30
US9841770B2 (en) 2017-12-12
US20160327963A1 (en) 2016-11-10
KR20160040285A (ko) 2016-04-12
TWI537696B (zh) 2016-06-11
CN105940357A (zh) 2016-09-14
WO2015111391A1 (ja) 2015-07-30
TW201541214A (zh) 2015-11-01
JP6321972B2 (ja) 2018-05-09

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Granted publication date: 20190514