KR101887364B1 - 압력식 유량 제어 장치 및 그 유량 제어 개시 시의 오버슈트 방지 방법 - Google Patents

압력식 유량 제어 장치 및 그 유량 제어 개시 시의 오버슈트 방지 방법 Download PDF

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KR101887364B1
KR101887364B1 KR1020167005843A KR20167005843A KR101887364B1 KR 101887364 B1 KR101887364 B1 KR 101887364B1 KR 1020167005843 A KR1020167005843 A KR 1020167005843A KR 20167005843 A KR20167005843 A KR 20167005843A KR 101887364 B1 KR101887364 B1 KR 101887364B1
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South Korea
Prior art keywords
valve
fluid passage
exhaust
pressure
orifice
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Korean (ko)
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KR20160040285A (ko
Inventor
카오루 히라타
노부카즈 이케다
코우지 니시노
료우스케 도히
카츠유키 스기타
마사아키 나가세
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가부시키가이샤 후지킨
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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/06—Apparatus for monitoring, sorting, marking, testing or measuring
    • H10P72/0604—Process monitoring, e.g. flow or thickness monitoring

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
  • Control Of Fluid Pressure (AREA)
KR1020167005843A 2014-01-21 2015-01-15 압력식 유량 제어 장치 및 그 유량 제어 개시 시의 오버슈트 방지 방법 Active KR101887364B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2014008831A JP6321972B2 (ja) 2014-01-21 2014-01-21 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法
JPJP-P-2014-008831 2014-01-21
PCT/JP2015/000154 WO2015111391A1 (ja) 2014-01-21 2015-01-15 圧力式流量制御装置及びその流量制御開始時のオーバーシュート防止方法

Publications (2)

Publication Number Publication Date
KR20160040285A KR20160040285A (ko) 2016-04-12
KR101887364B1 true KR101887364B1 (ko) 2018-08-10

Family

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KR1020167005843A Active KR101887364B1 (ko) 2014-01-21 2015-01-15 압력식 유량 제어 장치 및 그 유량 제어 개시 시의 오버슈트 방지 방법

Country Status (6)

Country Link
US (1) US9841770B2 (https=)
JP (1) JP6321972B2 (https=)
KR (1) KR101887364B1 (https=)
CN (1) CN105940357B (https=)
TW (1) TWI537696B (https=)
WO (1) WO2015111391A1 (https=)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6372998B2 (ja) * 2013-12-05 2018-08-15 株式会社フジキン 圧力式流量制御装置
JP6539482B2 (ja) * 2015-04-15 2019-07-03 株式会社フジキン 遮断開放器
US11137779B2 (en) 2016-04-28 2021-10-05 Fujikin Incorporated Fluid control device, method for controlling fluid control device, and fluid control system
US11144075B2 (en) 2016-06-30 2021-10-12 Ichor Systems, Inc. Flow control system, method, and apparatus
US10679880B2 (en) 2016-09-27 2020-06-09 Ichor Systems, Inc. Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same
JP6748586B2 (ja) * 2016-07-11 2020-09-02 東京エレクトロン株式会社 ガス供給システム、基板処理システム及びガス供給方法
US10665430B2 (en) * 2016-07-11 2020-05-26 Tokyo Electron Limited Gas supply system, substrate processing system and gas supply method
JP6786096B2 (ja) * 2016-07-28 2020-11-18 株式会社フジキン 圧力式流量制御装置
JP7245600B2 (ja) * 2016-12-15 2023-03-24 株式会社堀場エステック 流量制御装置、及び、流量制御装置用プログラム
GB2557670B (en) * 2016-12-15 2020-04-15 Thermo Fisher Scient Bremen Gmbh Improved gas flow control
JP7107648B2 (ja) * 2017-07-11 2022-07-27 株式会社堀場エステック 流体制御装置、流体制御システム、流体制御方法、及び、流体制御装置用プログラム
JP7157476B2 (ja) * 2018-04-27 2022-10-20 株式会社フジキン 流量制御方法および流量制御装置
DE102018004341A1 (de) * 2018-05-31 2019-12-05 Drägerwerk AG & Co. KGaA Beatmungsgerät und Verfahren zum Betrieb eines Beatmungsgeräts
KR102421587B1 (ko) 2018-06-26 2022-07-15 가부시키가이샤 후지킨 유량 제어 방법 및 유량 제어 장치
WO2020085033A1 (ja) * 2018-10-26 2020-04-30 株式会社フジキン 流体供給システム、流体制御装置、及び半導体製造装置
US11859733B2 (en) * 2019-07-31 2024-01-02 Fujikin Incorporated Valve device, fluid control device, and manufacturing method of valve device
US11537150B2 (en) * 2020-04-09 2022-12-27 Horiba Stec, Co., Ltd. Fluid control apparatus
US12442455B2 (en) * 2021-02-08 2025-10-14 Hitachi High-Tech Corporation Gas supply apparatus, vacuum processing apparatus, and gas supply method
JP7045738B1 (ja) * 2021-03-23 2022-04-01 株式会社リンテック 常時閉型流量制御バルブ
KR102676135B1 (ko) 2021-03-29 2024-06-19 주식회사 히타치하이테크 가스 공급 제어 장치
US12140241B2 (en) * 2021-05-24 2024-11-12 Festo Se & Co. Kg Fluid control system
KR20230000975A (ko) * 2021-06-25 2023-01-03 가부시키가이샤 호리바 에스텍 유체 제어 장치, 유체 제어 시스템, 유체 제어 장치용 프로그램 및 유체 제어 방법
WO2023053724A1 (ja) * 2021-09-30 2023-04-06 株式会社フジキン オリフィス内蔵バルブおよび流量制御装置
CN118786400A (zh) * 2022-03-22 2024-10-15 株式会社富士金 流量控制装置的排气结构、排气方法以及具备其的气体供给系统和气体供给方法
CN115585272A (zh) * 2022-09-27 2023-01-10 浙江金象科技有限公司 一种抗高压的阀门装置及控制系统

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4550747A (en) * 1983-10-05 1985-11-05 Digital Hydraulics, Inc. Digital fluid pressure flow rate and position control system
JPS6328875A (ja) * 1986-07-23 1988-02-06 Anelva Corp ガス導入方法
JP3291161B2 (ja) * 1995-06-12 2002-06-10 株式会社フジキン 圧力式流量制御装置
US5739429A (en) * 1995-07-13 1998-04-14 Nordson Corporation Powder coating system incorporating improved method and apparatus for monitoring flow rate of entrained particulate flow
JPH109996A (ja) * 1996-06-21 1998-01-16 Mitsubishi Heavy Ind Ltd 流量制御装置
JP3580645B2 (ja) * 1996-08-12 2004-10-27 忠弘 大見 圧力式流量制御装置
US5865205A (en) * 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
JP4137267B2 (ja) 1999-01-28 2008-08-20 忠弘 大見 オリフィス内蔵弁
JP4102564B2 (ja) * 2001-12-28 2008-06-18 忠弘 大見 改良型圧力式流量制御装置
JP4572139B2 (ja) * 2005-05-23 2010-10-27 株式会社フジキン 改良型圧力式流量制御装置
JP4648098B2 (ja) * 2005-06-06 2011-03-09 シーケーディ株式会社 流量制御機器絶対流量検定システム
US8183860B2 (en) 2006-12-20 2012-05-22 Koninklijke Philips Electronics N.V. Arrangement and method for influencing and/or detecting magnetic particles in a region of action
CN102037423B (zh) * 2008-05-21 2014-02-05 株式会社富士金 使用压力流量控制装置的流体非连续式流量切换控制方法

Also Published As

Publication number Publication date
JP2015138338A (ja) 2015-07-30
US9841770B2 (en) 2017-12-12
US20160327963A1 (en) 2016-11-10
CN105940357B (zh) 2019-05-14
KR20160040285A (ko) 2016-04-12
TWI537696B (zh) 2016-06-11
CN105940357A (zh) 2016-09-14
WO2015111391A1 (ja) 2015-07-30
TW201541214A (zh) 2015-11-01
JP6321972B2 (ja) 2018-05-09

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