CN116917690A - 测量装置 - Google Patents

测量装置 Download PDF

Info

Publication number
CN116917690A
CN116917690A CN202280013719.1A CN202280013719A CN116917690A CN 116917690 A CN116917690 A CN 116917690A CN 202280013719 A CN202280013719 A CN 202280013719A CN 116917690 A CN116917690 A CN 116917690A
Authority
CN
China
Prior art keywords
measuring
disk
measurement
conveying
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202280013719.1A
Other languages
English (en)
Chinese (zh)
Inventor
中泽信夫
木村和则
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Kohan Co Ltd
Original Assignee
Toyo Kohan Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Kohan Co Ltd filed Critical Toyo Kohan Co Ltd
Publication of CN116917690A publication Critical patent/CN116917690A/zh
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/30—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring roughness or irregularity of surfaces

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
CN202280013719.1A 2021-02-18 2022-02-16 测量装置 Pending CN116917690A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021-024594 2021-02-18
JP2021024594A JP7689430B2 (ja) 2021-02-18 2021-02-18 測定装置
PCT/JP2022/006272 WO2022176931A1 (ja) 2021-02-18 2022-02-16 測定装置

Publications (1)

Publication Number Publication Date
CN116917690A true CN116917690A (zh) 2023-10-20

Family

ID=82932258

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202280013719.1A Pending CN116917690A (zh) 2021-02-18 2022-02-16 测量装置

Country Status (4)

Country Link
JP (1) JP7689430B2 (https=)
CN (1) CN116917690A (https=)
TW (1) TWI904335B (https=)
WO (1) WO2022176931A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119334305B (zh) * 2024-12-20 2025-03-11 临沂龙成塑业有限公司 一种聚氯乙烯塑膜表面平整度检测装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0540018A (ja) * 1991-08-06 1993-02-19 Idemitsu Petrochem Co Ltd 円盤厚み測定器
US5511005A (en) * 1994-02-16 1996-04-23 Ade Corporation Wafer handling and processing system
JP2001108426A (ja) 1999-10-12 2001-04-20 Toovan Kogyo Kk 非接触式歪検査装置
WO2006078025A1 (ja) * 2005-01-24 2006-07-27 Nikon Corporation 計測方法、計測システム、検査方法、検査システム、露光方法及び露光システム
JP2007057502A (ja) 2005-08-26 2007-03-08 Toshiba Mach Co Ltd 基板の両面形状測定システム
JP4885154B2 (ja) * 2007-01-31 2012-02-29 国立大学法人東京工業大学 複数波長による表面形状の測定方法およびこれを用いた装置
JP6301815B2 (ja) 2014-11-17 2018-03-28 株式会社神戸製鋼所 形状測定装置
TWI840811B (zh) * 2015-02-23 2024-05-01 日商尼康股份有限公司 基板處理系統及基板處理方法、以及元件製造方法
KR102735767B1 (ko) 2018-08-02 2024-11-28 코닝 인코포레이티드 중력으로 인한 에러가 감소된 포토마스크의 평탄도를 측정하는 시스템 및 방법

Also Published As

Publication number Publication date
WO2022176931A1 (ja) 2022-08-25
TWI904335B (zh) 2025-11-11
JP7689430B2 (ja) 2025-06-06
JP2022126489A (ja) 2022-08-30
TW202242338A (zh) 2022-11-01

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