CN114729800B - 表面检查装置及形状矫正装置以及表面检查方法及形状矫正方法 - Google Patents

表面检查装置及形状矫正装置以及表面检查方法及形状矫正方法 Download PDF

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CN114729800B
CN114729800B CN202080077780.3A CN202080077780A CN114729800B CN 114729800 B CN114729800 B CN 114729800B CN 202080077780 A CN202080077780 A CN 202080077780A CN 114729800 B CN114729800 B CN 114729800B
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shape
predetermined
surface inspection
deformation amount
point
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Chinese (zh)
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CN114729800A (zh
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川上达彦
定冈纪行
立川目千春
田中秀一
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Astemo Ltd
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Hitachi Astemo Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/30—Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202080077780.3A 2019-11-29 2020-11-20 表面检查装置及形状矫正装置以及表面检查方法及形状矫正方法 Active CN114729800B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019-216161 2019-11-29
JP2019216161A JP7257942B2 (ja) 2019-11-29 2019-11-29 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法
PCT/JP2020/043332 WO2021106767A1 (ja) 2019-11-29 2020-11-20 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法

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CN114729800A CN114729800A (zh) 2022-07-08
CN114729800B true CN114729800B (zh) 2024-01-09

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US (1) US12215971B2 (https=)
JP (1) JP7257942B2 (https=)
CN (1) CN114729800B (https=)
WO (1) WO2021106767A1 (https=)

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JP7618472B2 (ja) * 2020-03-31 2025-01-21 株式会社ユーシン精機 金型及びアタッチメントの法線ベクトルの推定方法及びシステム
WO2023050395A1 (zh) * 2021-09-30 2023-04-06 富鼎电子科技(嘉善)有限公司 金属产品整形方法及电子装置
JP7849275B2 (ja) * 2022-11-09 2026-04-21 株式会社日立製作所 生産計画ロジック分析方法および生産計画ロジック分析装置
CN119687766B (zh) * 2024-12-31 2026-02-10 江西飞尚科技有限公司 一种测量光电挠度仪的测试工装及其测量方法

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JPH0914931A (ja) * 1995-06-27 1997-01-17 Matsushita Electric Works Ltd 光学式変位測定装置
JP2000008946A (ja) * 1998-06-23 2000-01-11 Toyota Motor Corp 内燃機関のピストン
CN1609552A (zh) * 2003-10-20 2005-04-27 株式会社三丰 工件曲面的测量方法及其程序和介质
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CN104024793A (zh) * 2011-10-24 2014-09-03 株式会社日立制作所 形状检查方法及其装置

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JP7257942B2 (ja) 2023-04-14
US20220390222A1 (en) 2022-12-08
WO2021106767A1 (ja) 2021-06-03
CN114729800A (zh) 2022-07-08
US12215971B2 (en) 2025-02-04
JP2021085807A (ja) 2021-06-03

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