JP7257942B2 - 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法 - Google Patents

表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法 Download PDF

Info

Publication number
JP7257942B2
JP7257942B2 JP2019216161A JP2019216161A JP7257942B2 JP 7257942 B2 JP7257942 B2 JP 7257942B2 JP 2019216161 A JP2019216161 A JP 2019216161A JP 2019216161 A JP2019216161 A JP 2019216161A JP 7257942 B2 JP7257942 B2 JP 7257942B2
Authority
JP
Japan
Prior art keywords
inspected
surface inspection
shape
deformation
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2019216161A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021085807A5 (https=
JP2021085807A (ja
Inventor
達彦 川上
紀行 定岡
千春 立川目
秀一 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Astemo Ltd
Original Assignee
Hitachi Astemo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Astemo Ltd filed Critical Hitachi Astemo Ltd
Priority to JP2019216161A priority Critical patent/JP7257942B2/ja
Priority to US17/778,331 priority patent/US12215971B2/en
Priority to PCT/JP2020/043332 priority patent/WO2021106767A1/ja
Priority to CN202080077780.3A priority patent/CN114729800B/zh
Publication of JP2021085807A publication Critical patent/JP2021085807A/ja
Publication of JP2021085807A5 publication Critical patent/JP2021085807A5/ja
Application granted granted Critical
Publication of JP7257942B2 publication Critical patent/JP7257942B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/30—Measuring arrangements characterised by the use of mechanical techniques for measuring the deformation in a solid, e.g. mechanical strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2019216161A 2019-11-29 2019-11-29 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法 Active JP7257942B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019216161A JP7257942B2 (ja) 2019-11-29 2019-11-29 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法
US17/778,331 US12215971B2 (en) 2019-11-29 2020-11-20 Shape correction device and shape correction method based on amount of deformation measured by point measurement sensor and surface measurement sensor
PCT/JP2020/043332 WO2021106767A1 (ja) 2019-11-29 2020-11-20 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法
CN202080077780.3A CN114729800B (zh) 2019-11-29 2020-11-20 表面检查装置及形状矫正装置以及表面检查方法及形状矫正方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019216161A JP7257942B2 (ja) 2019-11-29 2019-11-29 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法

Publications (3)

Publication Number Publication Date
JP2021085807A JP2021085807A (ja) 2021-06-03
JP2021085807A5 JP2021085807A5 (https=) 2022-04-14
JP7257942B2 true JP7257942B2 (ja) 2023-04-14

Family

ID=76088751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019216161A Active JP7257942B2 (ja) 2019-11-29 2019-11-29 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法

Country Status (4)

Country Link
US (1) US12215971B2 (https=)
JP (1) JP7257942B2 (https=)
CN (1) CN114729800B (https=)
WO (1) WO2021106767A1 (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7618472B2 (ja) * 2020-03-31 2025-01-21 株式会社ユーシン精機 金型及びアタッチメントの法線ベクトルの推定方法及びシステム
WO2023050395A1 (zh) * 2021-09-30 2023-04-06 富鼎电子科技(嘉善)有限公司 金属产品整形方法及电子装置
JP7849275B2 (ja) * 2022-11-09 2026-04-21 株式会社日立製作所 生産計画ロジック分析方法および生産計画ロジック分析装置
CN119687766B (zh) * 2024-12-31 2026-02-10 江西飞尚科技有限公司 一种测量光电挠度仪的测试工装及其测量方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014126381A (ja) 2012-12-25 2014-07-07 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、及び形状測定プログラム

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5046852A (en) * 1988-09-16 1991-09-10 The Boeing Company Method and apparatus for bending an elongate workpiece
US4995716A (en) * 1989-03-09 1991-02-26 Par Technology Corporation Method and apparatus for obtaining the topography of an object
JPH04176543A (ja) 1990-11-08 1992-06-24 Fanuc Ltd デジタイジング制御装置
JPH0914931A (ja) * 1995-06-27 1997-01-17 Matsushita Electric Works Ltd 光学式変位測定装置
JP2000008946A (ja) * 1998-06-23 2000-01-11 Toyota Motor Corp 内燃機関のピストン
JP3344649B2 (ja) * 1998-08-19 2002-11-11 理化学研究所 自由曲面の形状誤差評価方法
WO2001088471A1 (de) * 2000-05-16 2001-11-22 Steinbichler Optotechnik Gmbh Verfahren und vorrichtung zum bestimmen der 3d-form eines objektes
US7251580B2 (en) * 2003-10-20 2007-07-31 Mitutoyo Corporation Method for measuring curved surface of workpiece, program and medium thereof
EP2192380A3 (de) * 2004-05-26 2010-06-23 Werth Messtechnik GmbH Verfahren zum Messen eines Objektes mit einem Koordinatenmessgerät sowie Koordinatenmessgerät
JP4776197B2 (ja) * 2004-09-21 2011-09-21 日本特殊陶業株式会社 配線基板の検査装置
JP4615951B2 (ja) * 2004-09-30 2011-01-19 株式会社日立製作所 形状モデル作成方法、および構造最適化システム
DE102007021809A1 (de) * 2007-04-20 2008-10-23 Werth Messtechnik Gmbh Verfahren und Vorrichtung zum dimensionellen Messen mit Koordinatenmessgeräten
WO2009130169A1 (de) * 2008-04-22 2009-10-29 Leica Geosystems Ag Messverfahren für eine gliederarm-koordinatenmessmaschine
JP4968600B1 (ja) * 2011-01-13 2012-07-04 株式会社東京精密 真円度測定装置及びその心ずれ量補正方法
WO2013061976A1 (ja) * 2011-10-24 2013-05-02 株式会社日立製作所 形状検査方法およびその装置
ES2769304T3 (es) * 2012-04-05 2020-06-25 Fidia Spa Dispositivo para corrección de errores para máquinas CNC
JP6124570B2 (ja) * 2012-11-30 2017-05-10 株式会社ミツトヨ Ｘｙｚ直交測定装置
JP5747180B2 (ja) 2012-12-06 2015-07-08 パナソニックＩｐマネジメント株式会社 形状測定方法および形状測定装置
JP2014169947A (ja) * 2013-03-05 2014-09-18 Hitachi Ltd 形状検査方法およびその装置
JP5923054B2 (ja) * 2013-04-08 2016-05-24 株式会社神戸製鋼所 形状検査装置
CN106030237A (zh) * 2013-12-06 2016-10-12 沃思测量技术股份有限公司 用于测量工件的装置和方法
JP2015141139A (ja) * 2014-01-29 2015-08-03 株式会社ミツトヨ 手動測定装置
EP2916099B1 (en) * 2014-03-07 2020-09-30 Hexagon Technology Center GmbH Articulated arm coordinate measuring machine
EP2930462B1 (en) * 2014-04-08 2017-09-13 Hexagon Technology Center GmbH Method for generating information about a sensor chain of a coordinate measuring machine (CMM)
JP6316663B2 (ja) * 2014-05-30 2018-04-25 株式会社キーエンス 座標測定装置
DE102015205738A1 (de) * 2015-03-30 2016-10-06 Carl Zeiss Industrielle Messtechnik Gmbh Bewegungsmesssystem einer Maschine und Verfahren zum Betreiben des Bewegungsmesssystems
EP3104118B1 (en) * 2015-06-12 2019-02-27 Hexagon Technology Center GmbH Method to control a drive mechanism of an automated machine having a camera
EP3315896B1 (en) * 2015-08-27 2020-03-04 Tokyo Seimitsu Co., Ltd. Surface shape measuring device and method
DE102016100308A1 (de) * 2016-01-11 2017-07-13 Datron Ag Verfahren zur Bestimmung von einer Referenzkoordinate eines Werkstücks und Bearbeitungsmaschine
EP3203179B1 (en) * 2016-02-05 2019-04-03 Hexagon Technology Center GmbH Measuring machine based on a delta robot assembly
JP6691837B2 (ja) * 2016-06-27 2020-05-13 株式会社キーエンス 測定装置
JP7183790B2 (ja) * 2016-09-14 2022-12-06 日本電気株式会社 システムの分析支援装置、システムの分析支援方法及びプログラム
JP2018072202A (ja) * 2016-10-31 2018-05-10 株式会社東京精密 形状測定装置及び形状測定方法
DE102016124549B4 (de) * 2016-12-15 2019-11-07 Carl Zeiss Industrielle Messtechnik Gmbh Messsystem
WO2019075165A1 (en) * 2017-10-11 2019-04-18 Board Of Regents, The University Of Texas System METHOD AND SYSTEM FOR OPTICALLY DETECTING AND CHARACTERIZING DEFECTS IN SEMICONDUCTORS
JP2019113329A (ja) * 2017-12-21 2019-07-11 株式会社ニューフレアテクノロジー 変位計測装置及び電子ビーム検査装置
JP7143567B2 (ja) * 2018-09-14 2022-09-29 株式会社島津テクノリサーチ 材料試験機および放射線ｃｔ装置
WO2020157973A1 (ja) * 2019-02-01 2020-08-06 日本電気株式会社 画像処理装置
US11150189B1 (en) * 2019-09-03 2021-10-19 Innolux Corporation Methods of manufacturing a light source carrier and an electronic device, and a light source qualification method
DE102020111509B4 (de) * 2020-04-28 2023-04-20 Carl Zeiss Industrielle Messtechnik Gmbh Koordinatenmessgerät sowie Verfahren zum Messen von Koordinaten eines Werkstücks

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014126381A (ja) 2012-12-25 2014-07-07 Nikon Corp 形状測定装置、構造物製造システム、形状測定方法、構造物製造方法、及び形状測定プログラム

Also Published As

Publication number Publication date
US20220390222A1 (en) 2022-12-08
WO2021106767A1 (ja) 2021-06-03
CN114729800B (zh) 2024-01-09
CN114729800A (zh) 2022-07-08
US12215971B2 (en) 2025-02-04
JP2021085807A (ja) 2021-06-03

Similar Documents

Publication Publication Date Title
JP7257942B2 (ja) 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法
US9746303B2 (en) Coordinate measuring machine and method for calculating correction matrix by coordinate measuring machine
JP5823306B2 (ja) 表面性状測定機の校正方法
US20120078418A1 (en) Robot calibration apparatus and method for same
JP7685536B2 (ja) ビデオ伸び計システム及び方法のための厚さ補正
US6701267B2 (en) Method for calibrating probe and computer-readable medium
CN104976950A (zh) 物件空间信息量测装置与方法及取像路径的计算方法
JP4531685B2 (ja) 形状測定装置、形状測定方法
JP6884077B2 (ja) 表面検査装置及び表面検査方法
US11433551B2 (en) Measurement system and method for positioning accuracy of a robotic arm
JP2000081329A (ja) 形状測定方法及び装置
CN114459310B (zh) 重复定位精度检测方法、装置、终端设备及存储介质
JP2007303838A (ja) 補正方法、及び測定装置
JPH11230729A (ja) 真直線の曲り測定装置
KR101823052B1 (ko) 자동 선반 가공 후 자동 보정을 위한 가공물 측정 방법
JP2885422B2 (ja) 形状評価装置および形状評価方法
JP2005205450A (ja) 成形型の型面形状修正方法およびそのプログラム
JP7434045B2 (ja) 識別装置および識別方法
JP2024011030A (ja) 測定システム、検査方法およびプログラム
US20220003580A1 (en) Method for correcting values detected by linear scales
JP4951270B2 (ja) 測定方法、及び測定装置
NL2027376B1 (en) Positioning system and method
JP2007333442A (ja) 形状測定方法
CN120581365A (zh) 一种高精度定位的半导体磁芯加工方法及系统
JP2026034380A (ja) 位置特定方法と装置、記憶媒体及びコンピュータプログラム

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220406

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220406

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20230328

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20230404

R150 Certificate of patent or registration of utility model

Ref document number: 7257942

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250