CN113340290B - 传感器单元、电子设备以及移动体 - Google Patents
传感器单元、电子设备以及移动体 Download PDFInfo
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- CN113340290B CN113340290B CN202110641918.4A CN202110641918A CN113340290B CN 113340290 B CN113340290 B CN 113340290B CN 202110641918 A CN202110641918 A CN 202110641918A CN 113340290 B CN113340290 B CN 113340290B
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P1/00—Details of instruments
- G01P1/02—Housings
- G01P1/023—Housings for acceleration measuring devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110641918.4A CN113340290B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015-172605 | 2015-09-02 | ||
| JP2015172605A JP6597069B2 (ja) | 2015-09-02 | 2015-09-02 | センサーユニット、電子機器、および移動体 |
| CN201610792313.4A CN106482720B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
| CN202110641918.4A CN113340290B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610792313.4A Division CN106482720B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN113340290A CN113340290A (zh) | 2021-09-03 |
| CN113340290B true CN113340290B (zh) | 2024-01-05 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110641918.4A Active CN113340290B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
| CN201610792313.4A Active CN106482720B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610792313.4A Active CN106482720B (zh) | 2015-09-02 | 2016-08-31 | 传感器单元、电子设备以及移动体 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US10228269B2 (enExample) |
| JP (1) | JP6597069B2 (enExample) |
| CN (2) | CN113340290B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101980888B1 (ko) * | 2018-01-24 | 2019-05-22 | 최운선 | 유량계 |
| WO2020012647A1 (ja) * | 2018-07-13 | 2020-01-16 | 株式会社日立ハイテクファインシステムズ | 交通路設備の検測装置のセンサーユニット冷却装置及びセンサーユニット冷却方法 |
| JP2020101484A (ja) * | 2018-12-25 | 2020-07-02 | セイコーエプソン株式会社 | 慣性センサー、電子機器および移動体 |
| CN112880667B (zh) * | 2019-11-29 | 2023-12-08 | 精工爱普生株式会社 | 传感器单元、电子设备以及移动体 |
| CN112880668A (zh) * | 2019-11-29 | 2021-06-01 | 精工爱普生株式会社 | 传感器单元、电子设备以及移动体 |
| JP7343048B2 (ja) * | 2020-05-12 | 2023-09-12 | 株式会社村田製作所 | 加速度検出装置 |
| JPWO2022239347A1 (enExample) * | 2021-05-12 | 2022-11-17 | ||
| JP7632680B2 (ja) * | 2021-11-04 | 2025-02-19 | 株式会社村田製作所 | 加速度検出装置 |
| JP7779093B2 (ja) | 2021-11-10 | 2025-12-03 | セイコーエプソン株式会社 | 慣性計測装置 |
| JP2024017550A (ja) * | 2022-07-28 | 2024-02-08 | セイコーエプソン株式会社 | 慣性計測装置、慣性計測装置の製造方法 |
| JP2024042245A (ja) * | 2022-09-15 | 2024-03-28 | セイコーエプソン株式会社 | 慣性計測装置 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1574148A (zh) * | 2003-06-05 | 2005-02-02 | 欧姆龙株式会社 | 端子的密封结构及其密封材料 |
| JP2007043196A (ja) * | 2006-10-10 | 2007-02-15 | Hitachi Ltd | 電子回路装置 |
| JP2008028017A (ja) * | 2006-07-19 | 2008-02-07 | Sharp Corp | 樹脂封止型半導体装置 |
| CN102878990A (zh) * | 2011-07-13 | 2013-01-16 | 精工爱普生株式会社 | 传感器装置以及电子设备 |
| JP2015072232A (ja) * | 2013-10-04 | 2015-04-16 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
| JP2015094645A (ja) * | 2013-11-12 | 2015-05-18 | 日立オートモティブシステムズ株式会社 | 慣性力センサ装置 |
| JP2015108558A (ja) * | 2013-12-05 | 2015-06-11 | 日立オートモティブシステムズ株式会社 | 樹脂封止型センサ装置 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0572227A (ja) * | 1991-09-12 | 1993-03-23 | Sumitomo Electric Ind Ltd | 加速度検出器 |
| JPH09318652A (ja) * | 1996-05-28 | 1997-12-12 | Mitsubishi Electric Corp | 加速度センサ装置 |
| JP2001227902A (ja) * | 2000-02-16 | 2001-08-24 | Mitsubishi Electric Corp | 半導体装置 |
| JP2002181550A (ja) * | 2000-10-02 | 2002-06-26 | Ngk Insulators Ltd | 角速度測定装置 |
| JP2006153799A (ja) * | 2004-12-01 | 2006-06-15 | Denso Corp | 角速度センサ装置およびその製造方法 |
| JP2008170295A (ja) | 2007-01-12 | 2008-07-24 | Matsushita Electric Ind Co Ltd | 角速度センサ |
| CN102137906A (zh) * | 2008-08-27 | 2011-07-27 | 日立化成工业株式会社 | 两面粘接膜和使用了该两面粘接膜的电子部件模块 |
| US20110110792A1 (en) * | 2009-11-12 | 2011-05-12 | Joseph Kendall Mauro | Sensors and methods and apparatus relating to same |
| JP5463173B2 (ja) * | 2010-03-12 | 2014-04-09 | 日立オートモティブシステムズ株式会社 | 角速度検出装置 |
| JP2012117933A (ja) | 2010-12-01 | 2012-06-21 | Denso Corp | 接着構造体の製造方法 |
| JP2013030850A (ja) * | 2011-07-26 | 2013-02-07 | Seiko Epson Corp | 振動デバイスおよび電子機器 |
| US20130073248A1 (en) * | 2011-09-20 | 2013-03-21 | Noel Perkins | Apparatus and method for employing miniature inertial measurement units for deducing forces and moments on bodies |
| US9632105B2 (en) * | 2011-09-30 | 2017-04-25 | Panasonic Intellectual Property Management Co., Ltd. | Angular velocity sensor for suppressing fluctuation of detection sensitivity |
| JP6016228B2 (ja) * | 2012-07-03 | 2016-10-26 | ソニーセミコンダクタソリューションズ株式会社 | センサデバイス |
| JP2015034755A (ja) * | 2013-08-09 | 2015-02-19 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
| CN106662446B (zh) * | 2014-07-16 | 2019-10-25 | 精工爱普生株式会社 | 传感器单元、电子设备以及移动体 |
-
2015
- 2015-09-02 JP JP2015172605A patent/JP6597069B2/ja active Active
-
2016
- 2016-08-25 US US15/246,879 patent/US10228269B2/en active Active
- 2016-08-31 CN CN202110641918.4A patent/CN113340290B/zh active Active
- 2016-08-31 CN CN201610792313.4A patent/CN106482720B/zh active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1574148A (zh) * | 2003-06-05 | 2005-02-02 | 欧姆龙株式会社 | 端子的密封结构及其密封材料 |
| JP2008028017A (ja) * | 2006-07-19 | 2008-02-07 | Sharp Corp | 樹脂封止型半導体装置 |
| JP2007043196A (ja) * | 2006-10-10 | 2007-02-15 | Hitachi Ltd | 電子回路装置 |
| CN102878990A (zh) * | 2011-07-13 | 2013-01-16 | 精工爱普生株式会社 | 传感器装置以及电子设备 |
| JP2015072232A (ja) * | 2013-10-04 | 2015-04-16 | セイコーエプソン株式会社 | センサーユニット、電子機器、および移動体 |
| JP2015094645A (ja) * | 2013-11-12 | 2015-05-18 | 日立オートモティブシステムズ株式会社 | 慣性力センサ装置 |
| JP2015108558A (ja) * | 2013-12-05 | 2015-06-11 | 日立オートモティブシステムズ株式会社 | 樹脂封止型センサ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN113340290A (zh) | 2021-09-03 |
| CN106482720B (zh) | 2021-10-29 |
| CN106482720A (zh) | 2017-03-08 |
| US10228269B2 (en) | 2019-03-12 |
| JP2017049122A (ja) | 2017-03-09 |
| US20170059605A1 (en) | 2017-03-02 |
| JP6597069B2 (ja) | 2019-10-30 |
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