CN1119341A - 用于多层晶片的吸收层和生产该吸收层的方法 - Google Patents
用于多层晶片的吸收层和生产该吸收层的方法 Download PDFInfo
- Publication number
- CN1119341A CN1119341A CN95107181A CN95107181A CN1119341A CN 1119341 A CN1119341 A CN 1119341A CN 95107181 A CN95107181 A CN 95107181A CN 95107181 A CN95107181 A CN 95107181A CN 1119341 A CN1119341 A CN 1119341A
- Authority
- CN
- China
- Prior art keywords
- layer
- polysilicon
- wafer
- absorber
- working
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H10P36/00—
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- H10P36/07—
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- H10P90/1914—
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- H10W10/181—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S257/00—Active solid-state devices, e.g. transistors, solid-state diodes
- Y10S257/912—Charge transfer device using both electron and hole signal carriers
Landscapes
- Element Separation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US253657 | 1988-10-05 | ||
| US25365794A | 1994-06-03 | 1994-06-03 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1119341A true CN1119341A (zh) | 1996-03-27 |
Family
ID=22961174
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN95107181A Pending CN1119341A (zh) | 1994-06-03 | 1995-06-02 | 用于多层晶片的吸收层和生产该吸收层的方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5892292A (cg-RX-API-DMAC10.html) |
| JP (2) | JPH07335654A (cg-RX-API-DMAC10.html) |
| KR (1) | KR960002685A (cg-RX-API-DMAC10.html) |
| CN (1) | CN1119341A (cg-RX-API-DMAC10.html) |
| DE (1) | DE19519533B4 (cg-RX-API-DMAC10.html) |
| TW (1) | TW274628B (cg-RX-API-DMAC10.html) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6008082A (en) | 1995-09-14 | 1999-12-28 | Micron Technology, Inc. | Method of making a resistor, method of making a diode, and SRAM circuitry and other integrated circuitry |
| US5567644A (en) | 1995-09-14 | 1996-10-22 | Micron Technology, Inc. | Method of making a resistor |
| US6093624A (en) * | 1997-12-23 | 2000-07-25 | Philips Electronics North America Corporation | Method of providing a gettering scheme in the manufacture of silicon-on-insulator (SOI) integrated circuits |
| JP2000323484A (ja) * | 1999-05-07 | 2000-11-24 | Mitsubishi Electric Corp | 半導体装置及び半導体記憶装置 |
| US6508363B1 (en) | 2000-03-31 | 2003-01-21 | Lucent Technologies | Slurry container |
| US20020140030A1 (en) * | 2001-03-30 | 2002-10-03 | Mandelman Jack A. | SOI devices with integrated gettering structure |
| US6958264B1 (en) * | 2001-04-03 | 2005-10-25 | Advanced Micro Devices, Inc. | Scribe lane for gettering of contaminants on SOI wafers and gettering method |
| US7045885B1 (en) | 2004-12-09 | 2006-05-16 | Hewlett-Packard Development Company, L.P. | Placement of absorbing material in a semiconductor device |
Family Cites Families (39)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3875657A (en) * | 1973-09-04 | 1975-04-08 | Trw Inc | Dielectrically isolated semiconductor devices |
| US4113512A (en) * | 1976-10-28 | 1978-09-12 | International Business Machines Corporation | Technique for preventing forward biased epi-isolation degradation |
| JPS542657A (en) * | 1977-06-08 | 1979-01-10 | Mitsubishi Electric Corp | Manufacture for semiconductor device |
| US4178191A (en) * | 1978-08-10 | 1979-12-11 | Rca Corp. | Process of making a planar MOS silicon-on-insulating substrate device |
| JPS574163A (en) * | 1980-06-09 | 1982-01-09 | Nec Corp | Manufacture of sos/mos transistor |
| JPS57162444A (en) * | 1981-03-31 | 1982-10-06 | Fujitsu Ltd | Manufacture of semiconductor device |
| US4574209A (en) * | 1982-06-21 | 1986-03-04 | Eaton Corporation | Split gate EFET and circuitry |
| US4498227A (en) * | 1983-07-05 | 1985-02-12 | Fairchild Camera & Instrument Corporation | Wafer fabrication by implanting through protective layer |
| US4661202A (en) * | 1984-02-14 | 1987-04-28 | Kabushiki Kaisha Toshiba | Method of manufacturing semiconductor device |
| US4583282A (en) * | 1984-09-14 | 1986-04-22 | Motorola, Inc. | Process for self-aligned buried layer, field guard, and isolation |
| US4631804A (en) * | 1984-12-10 | 1986-12-30 | At&T Bell Laboratories | Technique for reducing substrate warpage springback using a polysilicon subsurface strained layer |
| JPS61256740A (ja) * | 1985-05-10 | 1986-11-14 | Matsushita Electric Ind Co Ltd | 半導体装置の製造方法 |
| JPS6224854A (ja) * | 1985-07-24 | 1987-02-02 | Nippon Kokan Kk <Nkk> | 真空ア−ク再溶解装置 |
| JPS6276646A (ja) * | 1985-09-30 | 1987-04-08 | Toshiba Corp | 半導体装置の製造方法 |
| DD258681A1 (de) * | 1986-04-02 | 1988-07-27 | Erfurt Mikroelektronik | Verfahren zum herstellen getterfaehiger und formstabiler halbleiterscheiben |
| JPS632370A (ja) * | 1986-06-23 | 1988-01-07 | Nissan Motor Co Ltd | 半導体装置 |
| US4732865A (en) * | 1986-10-03 | 1988-03-22 | Tektronix, Inc. | Self-aligned internal mobile ion getter for multi-layer metallization on integrated circuits |
| JPS63237574A (ja) * | 1987-03-26 | 1988-10-04 | Nec Corp | Mis型半導体装置の製造方法 |
| JPS63310123A (ja) * | 1987-06-12 | 1988-12-19 | Kyushu Denshi Kinzoku Kk | シリコン半導体基板 |
| US4820653A (en) * | 1988-02-12 | 1989-04-11 | American Telephone And Telegraph Company | Technique for fabricating complementary dielectrically isolated wafer |
| US5059550A (en) * | 1988-10-25 | 1991-10-22 | Sharp Kabushiki Kaisha | Method of forming an element isolating portion in a semiconductor device |
| JPH02148855A (ja) * | 1988-11-30 | 1990-06-07 | Fujitsu Ltd | 半導体装置及びその製造方法 |
| US4883215A (en) * | 1988-12-19 | 1989-11-28 | Duke University | Method for bubble-free bonding of silicon wafers |
| JPH02237120A (ja) * | 1989-03-10 | 1990-09-19 | Fujitsu Ltd | 半導体装置とその製造方法 |
| US5001075A (en) * | 1989-04-03 | 1991-03-19 | Motorola | Fabrication of dielectrically isolated semiconductor device |
| US5164218A (en) * | 1989-05-12 | 1992-11-17 | Nippon Soken, Inc. | Semiconductor device and a method for producing the same |
| JP2597022B2 (ja) * | 1990-02-23 | 1997-04-02 | シャープ株式会社 | 素子分離領域の形成方法 |
| US5318919A (en) * | 1990-07-31 | 1994-06-07 | Sanyo Electric Co., Ltd. | Manufacturing method of thin film transistor |
| JPH04363025A (ja) * | 1991-01-28 | 1992-12-15 | Mitsubishi Electric Corp | 半導体装置及びその製造方法 |
| US5218213A (en) * | 1991-02-22 | 1993-06-08 | Harris Corporation | SOI wafer with sige |
| EP0537889A2 (en) * | 1991-10-14 | 1993-04-21 | Fujitsu Limited | Quantum interference effect semiconductor device and method of producing the same |
| JPH05136153A (ja) * | 1991-11-14 | 1993-06-01 | Toshiba Corp | 半導体装置及びその製造方法 |
| JPH05291265A (ja) * | 1992-04-13 | 1993-11-05 | Sony Corp | ウエハ裏面ゲッター層の形成方法 |
| JP3297937B2 (ja) * | 1992-10-16 | 2002-07-02 | ソニー株式会社 | 半導体装置及びその製造方法 |
| JPH06252153A (ja) * | 1993-03-01 | 1994-09-09 | Toshiba Corp | 半導体装置の製造方法 |
| US5272104A (en) * | 1993-03-11 | 1993-12-21 | Harris Corporation | Bonded wafer process incorporating diamond insulator |
| JPH0722517A (ja) * | 1993-06-22 | 1995-01-24 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
| US5294562A (en) * | 1993-09-27 | 1994-03-15 | United Microelectronics Corporation | Trench isolation with global planarization using flood exposure |
| JPH07106413A (ja) * | 1993-10-08 | 1995-04-21 | Nippondenso Co Ltd | 溝分離半導体装置及びその製造方法 |
-
1994
- 1994-11-30 TW TW083111160A patent/TW274628B/zh not_active IP Right Cessation
-
1995
- 1995-05-27 DE DE19519533A patent/DE19519533B4/de not_active Expired - Lifetime
- 1995-06-02 CN CN95107181A patent/CN1119341A/zh active Pending
- 1995-06-02 KR KR1019950014549A patent/KR960002685A/ko not_active Ceased
- 1995-06-02 JP JP7135526A patent/JPH07335654A/ja active Pending
-
1996
- 1996-03-29 US US08/624,050 patent/US5892292A/en not_active Expired - Lifetime
-
2006
- 2006-08-04 JP JP2006212961A patent/JP2006324688A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JP2006324688A (ja) | 2006-11-30 |
| DE19519533A1 (de) | 1995-12-07 |
| US5892292A (en) | 1999-04-06 |
| DE19519533B4 (de) | 2009-05-28 |
| KR960002685A (ko) | 1996-01-26 |
| TW274628B (cg-RX-API-DMAC10.html) | 1996-04-21 |
| JPH07335654A (ja) | 1995-12-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication |