CN1106716A - 对板件或圆盘进行涂漆或涂膜的装置 - Google Patents
对板件或圆盘进行涂漆或涂膜的装置 Download PDFInfo
- Publication number
- CN1106716A CN1106716A CN94102023A CN94102023A CN1106716A CN 1106716 A CN1106716 A CN 1106716A CN 94102023 A CN94102023 A CN 94102023A CN 94102023 A CN94102023 A CN 94102023A CN 1106716 A CN1106716 A CN 1106716A
- Authority
- CN
- China
- Prior art keywords
- gap
- plate
- coating
- capillarity
- described device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004922 lacquer Substances 0.000 title description 17
- 238000000576 coating method Methods 0.000 claims abstract description 31
- 239000011248 coating agent Substances 0.000 claims abstract description 23
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000012530 fluid Substances 0.000 claims description 10
- 239000000853 adhesive Substances 0.000 claims description 6
- 230000001070 adhesive effect Effects 0.000 claims description 6
- 239000003973 paint Substances 0.000 claims description 6
- 238000013459 approach Methods 0.000 claims 1
- 238000007591 painting process Methods 0.000 claims 1
- 230000033001 locomotion Effects 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 230000002349 favourable effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 210000001364 upper extremity Anatomy 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 230000005499 meniscus Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
- B05C11/105—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material by capillary action, e.g. using wicks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/02—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C9/00—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
- B05C9/08—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
- B05C9/12—Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D1/00—Processes for applying liquids or other fluent materials
- B05D1/26—Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/003—Apparatus
- C23C2/0034—Details related to elements immersed in bath
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/003—Apparatus
- C23C2/0035—Means for continuously moving substrate through, into or out of the bath
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C2/00—Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
- C23C2/006—Pattern or selective deposits
- C23C2/0062—Pattern or selective deposits without pre-treatment of the material to be coated, e.g. using masking elements such as casings, shields, fixtures or blocking elements
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Metallurgy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Coating Apparatus (AREA)
- Finishing Walls (AREA)
- Road Signs Or Road Markings (AREA)
Abstract
Description
Claims (7)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE93/00392 | 1993-05-05 | ||
DE9300392 | 1993-05-05 | ||
PCT/DE1993/000777 WO1994025177A1 (de) | 1993-05-05 | 1993-08-26 | Vorrichtung zur belackung oder beschichtung von platten oder scheiben |
DE93/00777 | 1993-08-26 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1106716A true CN1106716A (zh) | 1995-08-16 |
CN1078108C CN1078108C (zh) | 2002-01-23 |
Family
ID=6888099
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN94102023A Expired - Lifetime CN1078108C (zh) | 1993-05-05 | 1994-03-02 | 对板件或圆盘进行涂漆或涂膜的装置 |
Country Status (11)
Country | Link |
---|---|
EP (1) | EP0701487B1 (zh) |
JP (1) | JP2777057B2 (zh) |
KR (1) | KR0153355B1 (zh) |
CN (1) | CN1078108C (zh) |
AT (1) | ATE173657T1 (zh) |
CA (1) | CA2157033C (zh) |
DE (2) | DE4397349D2 (zh) |
FI (1) | FI108522B (zh) |
MY (1) | MY108987A (zh) |
SG (1) | SG52700A1 (zh) |
WO (1) | WO1994025177A1 (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101834069A (zh) * | 2010-04-07 | 2010-09-15 | 燕山大学 | 染料敏化半导体双膜片方法 |
CN103567109A (zh) * | 2012-07-26 | 2014-02-12 | 耐落螺丝(昆山)有限公司 | 螺丝上胶装置及上胶方法 |
CN103847229A (zh) * | 2012-11-29 | 2014-06-11 | 三星显示有限公司 | 基板印刷装置和基板印刷方法 |
CN106935534A (zh) * | 2017-04-28 | 2017-07-07 | 京东方科技集团股份有限公司 | 封装装置及显示面板封装方法 |
CN108367307A (zh) * | 2016-01-22 | 2018-08-03 | 庄田德古透隆股份有限公司 | 端面涂布装置 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4445985A1 (de) * | 1994-12-22 | 1996-06-27 | Steag Micro Tech Gmbh | Verfahren und Vorrichtung zur Belackung oder Beschichtung eines Substrats |
DK0972575T3 (da) * | 1994-12-22 | 2003-03-24 | Steag Hamatech Ag | Indretning til lakering eller belægning af et substrat |
ES2274611T3 (es) | 1998-12-17 | 2007-05-16 | Guardian Industries Corp. | Dispositivo y procedimiento para el revestimiento de un substrato plano. |
JP4481688B2 (ja) * | 2003-04-10 | 2010-06-16 | Hoya株式会社 | 基板処理装置,塗布装置、塗布方法、及び、フォトマスクの製造方法 |
JP2005051220A (ja) * | 2003-07-17 | 2005-02-24 | Hoya Corp | レジスト膜付基板の製造方法 |
US7332034B2 (en) | 2003-11-21 | 2008-02-19 | Seiko Epson Corporation | Coating apparatus and coating method using the same |
DE102004044576B4 (de) * | 2004-09-13 | 2007-09-27 | Schott Ag | Verfahren und Vorrichtung zur Flüssigbeschichtung und deren Verwendung |
JP5086714B2 (ja) * | 2007-07-13 | 2012-11-28 | Hoya株式会社 | マスクブランクの製造方法及びフォトマスクの製造方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2046596A (en) * | 1932-01-13 | 1936-07-07 | Patent Button Co | Apparatus for uniformly coating flat surfaces |
US4370356A (en) * | 1981-05-20 | 1983-01-25 | Integrated Technologies, Inc. | Method of meniscus coating |
DE3231326A1 (de) * | 1982-08-23 | 1984-02-23 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum herstellen von grossflaechigen, bandfoermigen siliziumkoerpern fuer solarzellen |
SU1736626A1 (ru) * | 1990-02-14 | 1992-05-30 | Казанский Научно-Исследовательский Технологический И Проектный Институт Химико-Фотографической Промышленности | Экструзионное поливное устройство |
-
1993
- 1993-08-26 EP EP93918918A patent/EP0701487B1/de not_active Expired - Lifetime
- 1993-08-26 DE DE4397349T patent/DE4397349D2/de not_active Expired - Fee Related
- 1993-08-26 DE DE59309164T patent/DE59309164D1/de not_active Expired - Lifetime
- 1993-08-26 WO PCT/DE1993/000777 patent/WO1994025177A1/de active IP Right Grant
- 1993-08-26 KR KR1019950704862A patent/KR0153355B1/ko not_active IP Right Cessation
- 1993-08-26 CA CA002157033A patent/CA2157033C/en not_active Expired - Lifetime
- 1993-08-26 SG SG1996008058A patent/SG52700A1/en unknown
- 1993-08-26 AT AT93918918T patent/ATE173657T1/de not_active IP Right Cessation
- 1993-11-02 MY MYPI93002286A patent/MY108987A/en unknown
-
1994
- 1994-03-02 CN CN94102023A patent/CN1078108C/zh not_active Expired - Lifetime
- 1994-05-02 JP JP6093563A patent/JP2777057B2/ja not_active Expired - Fee Related
-
1995
- 1995-11-01 FI FI955214A patent/FI108522B/fi not_active IP Right Cessation
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101834069A (zh) * | 2010-04-07 | 2010-09-15 | 燕山大学 | 染料敏化半导体双膜片方法 |
CN103567109A (zh) * | 2012-07-26 | 2014-02-12 | 耐落螺丝(昆山)有限公司 | 螺丝上胶装置及上胶方法 |
CN103567109B (zh) * | 2012-07-26 | 2015-12-16 | 耐落螺丝(昆山)有限公司 | 螺丝上胶装置及上胶方法 |
CN103847229A (zh) * | 2012-11-29 | 2014-06-11 | 三星显示有限公司 | 基板印刷装置和基板印刷方法 |
CN103847229B (zh) * | 2012-11-29 | 2019-10-22 | 三星显示有限公司 | 基板印刷装置和基板印刷方法 |
CN108367307A (zh) * | 2016-01-22 | 2018-08-03 | 庄田德古透隆股份有限公司 | 端面涂布装置 |
CN108367307B (zh) * | 2016-01-22 | 2021-03-23 | 庄田德古透隆股份有限公司 | 端面涂布装置 |
CN106935534A (zh) * | 2017-04-28 | 2017-07-07 | 京东方科技集团股份有限公司 | 封装装置及显示面板封装方法 |
CN106935534B (zh) * | 2017-04-28 | 2019-11-05 | 京东方科技集团股份有限公司 | 封装装置及显示面板封装方法 |
Also Published As
Publication number | Publication date |
---|---|
FI955214A0 (fi) | 1995-11-01 |
WO1994025177A1 (de) | 1994-11-10 |
KR960701706A (ko) | 1996-03-28 |
JP2777057B2 (ja) | 1998-07-16 |
FI955214A (fi) | 1995-11-01 |
EP0701487A1 (de) | 1996-03-20 |
SG52700A1 (en) | 1998-09-28 |
KR0153355B1 (ko) | 1998-11-16 |
EP0701487B1 (de) | 1998-11-25 |
DE4397349D2 (de) | 1996-11-14 |
CA2157033C (en) | 2003-06-17 |
JPH06343908A (ja) | 1994-12-20 |
FI108522B (fi) | 2002-02-15 |
CA2157033A1 (en) | 1994-11-10 |
MY108987A (en) | 1996-11-30 |
DE59309164D1 (de) | 1999-01-07 |
ATE173657T1 (de) | 1998-12-15 |
CN1078108C (zh) | 2002-01-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1078108C (zh) | 对板件或圆盘进行涂漆或涂膜的装置 | |
US5000988A (en) | Method of applying a coating of viscous materials | |
US5505995A (en) | Method and apparatus for coating substrates using an air knife | |
CN102688830A (zh) | 涂布装置和涂布方法 | |
KR0128813B1 (ko) | 액도포 방법 및 도포장치 | |
US7416608B2 (en) | Process and related apparatus for block coating | |
KR19980701875A (ko) | 다층 코팅 방법 | |
US5455062A (en) | Capillary device for lacquering or coating plates or disks | |
CN1090541C (zh) | 张力上升刮板涂敷方法 | |
US4709846A (en) | Apparatus for the continuous hot tinning of printed circuit boards | |
WO1989005567A1 (en) | A method of producing an electronic circuit part and an apparatus for producing an electronic circuit part | |
EP0487195B1 (en) | Apparatus and process for producing sheets of material | |
JP2001070858A (ja) | 塗料の塗工装置および塗工方法 | |
US6277442B1 (en) | Closed chamber method and apparatus for the coating of liquid films | |
JPH08229497A (ja) | 枚葉塗工方法およびカラーフィルタの製造方法 | |
JP3267822B2 (ja) | 基板への塗布液塗布装置 | |
JP2549967B2 (ja) | コーティング方法及び装置 | |
JPH1066911A (ja) | 液体塗布方法及びその装置 | |
RU2015741C1 (ru) | Устройство для непрерывного нанесения покрытий из пленкообразующих материалов на подложки | |
JPH0641869U (ja) | 液体塗布用ノズル | |
SE454270B (sv) | Sett och anordning for att bilda en beleggning av stelnat lod pa en metalliserad kant av en glasskiva | |
JP4314790B2 (ja) | 塗布方法 | |
JP3699526B2 (ja) | 基板保持部材および塗布装置 | |
JP2709971B2 (ja) | 高速樹脂部分コーティング方法 | |
JPH05565A (ja) | 皮膜形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C53 | Correction of patent of invention or patent application | ||
CB02 | Change of applicant information |
Applicant after: STEAG MICROTECH GmbH Applicant before: STEAG MICRO-TECH GMBH STERNENFELS |
|
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: ROEHM + HAAS GMBH TO: STEAG MICRO/TECH GMBH STERNENFELS |
|
C53 | Correction of patent of invention or patent application | ||
COR | Change of bibliographic data |
Free format text: CORRECT: APPLICANT; FROM: STEAG MICRO/TECH GMBH STERNENFELS TO: STEGGE HAAM TECHNOLOGY STOCK CO., LTD. |
|
CP03 | Change of name, title or address |
Address after: Don Fels, Germany Applicant after: STEAG HAMATECH AG Address before: German prietz Schoenberg Applicant before: STEAG MICROTECH GmbH |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: HAMATECH APE GMBH + CO. KG Free format text: FORMER OWNER: SINGULUS TECHNOLOGIES AG Effective date: 20120828 Owner name: SINGULUS TECHNOLOGIES AG Free format text: FORMER OWNER: HAMATECH AG Effective date: 20120828 |
|
C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee |
Owner name: HAMATECH AG Free format text: FORMER NAME: STEAG HAMATECH GMBH MACHINES |
|
CP01 | Change in the name or title of a patent holder |
Address after: Don Fels, Germany Patentee after: HAMA Technologies AG Address before: Don Fels, Germany Patentee before: STEAG HAMATECH AG |
|
TR01 | Transfer of patent right |
Effective date of registration: 20120828 Address after: Don Fels, Germany Patentee after: Hama Technology APE Lianghe Address before: German Messe Carle Patentee before: Singulus Technologies AG Effective date of registration: 20120828 Address after: German Messe Carle Patentee after: SINGULUS TECHNOLOGIES AG Address before: Don Fels, Germany Patentee before: HAMA Technologies AG |
|
C17 | Cessation of patent right | ||
CX01 | Expiry of patent term |
Expiration termination date: 20140302 Granted publication date: 20020123 |