MY108987A - Device for lacquering or coating of plates or disks - Google Patents

Device for lacquering or coating of plates or disks

Info

Publication number
MY108987A
MY108987A MYPI93002286A MYPI19932286A MY108987A MY 108987 A MY108987 A MY 108987A MY PI93002286 A MYPI93002286 A MY PI93002286A MY PI19932286 A MYPI19932286 A MY PI19932286A MY 108987 A MY108987 A MY 108987A
Authority
MY
Malaysia
Prior art keywords
lacquering
disks
plates
coating
plate
Prior art date
Application number
MYPI93002286A
Inventor
Armin Kubelbeck
Jacob Szekerersch
Martin Kallis
Eberhard Muhlfriedel
Torsten Gerisch
Karl Appach
Original Assignee
Steag Hamatech Gmbh Machines
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Steag Hamatech Gmbh Machines filed Critical Steag Hamatech Gmbh Machines
Publication of MY108987A publication Critical patent/MY108987A/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • B05C11/10Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
    • B05C11/105Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material by capillary action, e.g. using wicks
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254Coating heads with slot-shaped outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/02Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material to surfaces by single means not covered by groups B05C1/00 - B05C7/00, whether or not also using other means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00Processes for applying liquids or other fluent materials
    • B05D1/26Processes for applying liquids or other fluent materials performed by applying the liquid or other fluent material from an outlet device in contact with, or almost in contact with, the surface
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/003Apparatus
    • C23C2/0034Details related to elements immersed in bath
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/003Apparatus
    • C23C2/0035Means for continuously moving substrate through, into or out of the bath
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C2/00Hot-dipping or immersion processes for applying the coating material in the molten state without affecting the shape; Apparatus therefor
    • C23C2/006Pattern or selective deposits
    • C23C2/0062Pattern or selective deposits without pre-treatment of the material to be coated, e.g. using masking elements such as casings, shields, fixtures or blocking elements

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Coating Apparatus (AREA)
  • Finishing Walls (AREA)
  • Road Signs Or Road Markings (AREA)

Abstract

A DEVICE FOR LACQUERING OR COATING PLATES OR DISKS HAS A CAPILLARY SLOT (24) THAT IS FILLED WITH A LIQUID COATING MEDIUM. THE PLATE TO BE COATED IS ADVANCED ACROSS THE CAPILLLARY SLOT (24) WITH THE SURFACE TO BE COATED FACING DOWNWARDLY SO THAT DUE TO THE CAPILLARY EFFECT A THIN LAYER IS DEPOSITED ON THE SURFACE OF THE PLATE. (FIG.2)
MYPI93002286A 1993-05-05 1993-11-02 Device for lacquering or coating of plates or disks MY108987A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE9300392 1993-05-05
PCT/DE1993/000777 WO1994025177A1 (en) 1993-05-05 1993-08-26 Device for lacquering or coating plates or panels

Publications (1)

Publication Number Publication Date
MY108987A true MY108987A (en) 1996-11-30

Family

ID=6888099

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI93002286A MY108987A (en) 1993-05-05 1993-11-02 Device for lacquering or coating of plates or disks

Country Status (11)

Country Link
EP (1) EP0701487B1 (en)
JP (1) JP2777057B2 (en)
KR (1) KR0153355B1 (en)
CN (1) CN1078108C (en)
AT (1) ATE173657T1 (en)
CA (1) CA2157033C (en)
DE (2) DE59309164D1 (en)
FI (1) FI108522B (en)
MY (1) MY108987A (en)
SG (1) SG52700A1 (en)
WO (1) WO1994025177A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DK0799096T3 (en) * 1994-12-22 2001-11-05 Steag Hamatech Ag Method and apparatus for varnishing or coating a substrate
DE4445985A1 (en) * 1994-12-22 1996-06-27 Steag Micro Tech Gmbh Method and device for coating or coating a substrate
ES2274611T3 (en) 1998-12-17 2007-05-16 Guardian Industries Corp. DEVICE AND PROCEDURE FOR COATING A FLAT SUBSTRATE.
JP4481688B2 (en) * 2003-04-10 2010-06-16 Hoya株式会社 Substrate processing apparatus, coating apparatus, coating method, and photomask manufacturing method
JP2005051220A (en) * 2003-07-17 2005-02-24 Hoya Corp Method for manufacturing substrate with resist film
US7332034B2 (en) 2003-11-21 2008-02-19 Seiko Epson Corporation Coating apparatus and coating method using the same
DE102004044576B4 (en) * 2004-09-13 2007-09-27 Schott Ag Process and apparatus for liquid coating and their use
JP5086714B2 (en) * 2007-07-13 2012-11-28 Hoya株式会社 Mask blank manufacturing method and photomask manufacturing method
CN101834069B (en) * 2010-04-07 2012-06-27 燕山大学 Method for sensitizing semi-conductor double membrane by dye
CN103567109B (en) * 2012-07-26 2015-12-16 耐落螺丝(昆山)有限公司 Screw sizer and coating method
KR20140069677A (en) * 2012-11-29 2014-06-10 삼성디스플레이 주식회사 Device for printing to substrate and method for printing to substrate
DE112017000475T5 (en) * 2016-01-22 2018-10-04 Shoda Techtron Corp. End faces coater
CN106935534B (en) * 2017-04-28 2019-11-05 京东方科技集团股份有限公司 Packaging system and display panel packaging method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2046596A (en) * 1932-01-13 1936-07-07 Patent Button Co Apparatus for uniformly coating flat surfaces
US4370356A (en) * 1981-05-20 1983-01-25 Integrated Technologies, Inc. Method of meniscus coating
DE3231326A1 (en) * 1982-08-23 1984-02-23 Siemens AG, 1000 Berlin und 8000 München DEVICE FOR PRODUCING LARGE-SCALE, BAND-SHAPED SILICON BODIES FOR SOLAR CELLS
SU1736626A1 (en) * 1990-02-14 1992-05-30 Казанский Научно-Исследовательский Технологический И Проектный Институт Химико-Фотографической Промышленности Extrusion-type spraying arrangement

Also Published As

Publication number Publication date
CN1106716A (en) 1995-08-16
ATE173657T1 (en) 1998-12-15
FI955214A0 (en) 1995-11-01
FI955214A (en) 1995-11-01
KR0153355B1 (en) 1998-11-16
DE59309164D1 (en) 1999-01-07
KR960701706A (en) 1996-03-28
SG52700A1 (en) 1998-09-28
CA2157033C (en) 2003-06-17
CN1078108C (en) 2002-01-23
EP0701487B1 (en) 1998-11-25
JP2777057B2 (en) 1998-07-16
JPH06343908A (en) 1994-12-20
EP0701487A1 (en) 1996-03-20
CA2157033A1 (en) 1994-11-10
DE4397349D2 (en) 1996-11-14
WO1994025177A1 (en) 1994-11-10
FI108522B (en) 2002-02-15

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