CN110577047A - 物品载置部件、具备该部件的储存库及搬运车系统 - Google Patents
物品载置部件、具备该部件的储存库及搬运车系统 Download PDFInfo
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Abstract
本发明提供即使在设置了从载置部沿竖直方向立起的直立部的情形下也能够抑制载置物品时物品破损的物品载置部件、具备该部件的储存库、以及搬运车系统。物品载置部件(50)具备:载置储藏容器(90)的载置部(51),以及从载置部(51)沿竖直方向立起、并且沿移载储藏容器(90)的方向延伸的部件,即限制载置在载置部(51)上的储藏容器(90)在水平方向上向与移载方向正交的宽度方向移动的侧面直立部(53)。在侧面直立部(53)上设置有,当由堆垛起重机(7)移载的储藏容器(90)接触了时从前侧朝向后侧向斜上方引导储藏容器(90)的引导部(55)。
Description
技术领域
本发明涉及物品载置部件、具备该部件的储存库及搬运车系统。
背景技术
我们知道在利用间壁等主体部分隔的内部空间中具备载置储藏半导体晶圆和玻璃基板等被储藏物的储藏容器的搁物架,以及能够将被保管物移载到该搁物架上的堆垛起重机等移载装置的储存库(例如专利文献1)。并且,还知道作为对上述那样的储存库或规定的处理装置进行储藏容器移交的接口部分的装载口(例如专利文献2)。这样的储存库的搁物架或装载口的物品载置部件利用移载装置从水平方向上的一个方向载置储藏容器等物品。
【专利文献1】日本特开2015-214407号公报
【专利文献2】日本特开2017-186115号公报
如图8所示,为了例如安装到支柱构件241上、或者为了与相邻的物品载置部件250隔开,有时在这样的物品载置部件250(250A、250B)上设置从载置储藏容器(物品)290的载置部251沿竖直方向立起、限制储藏容器290向与上述一个方向(Y方向)正交的宽度方向(X方向)移动的直立部253。但是,如果移载装置(未图示)在沿宽度方向(X方向)偏离应该停止的位置的状态下停止,在这样的状态下要将储藏容器290移载到这样的物品载置部件250上,则储藏容器290会撞击到上述直立部253。结果,储藏容器290有可能被夹在移载装置与直立部253之间而破损。
发明内容
因此,本发明的目的就是要提供即使在设置了从载置部沿竖直方向立起的直立部的情形下,也能够抑制载置物品时的破损的物品载置部件、具备该部件的储存库以及搬运车系统。
本发明的物品载置部件为利用移载装置进行物品移载的物品载置部件,具备载置物品的载置部以及直立部,该直立部为从载置部沿竖直方向立起、并且沿移载物品的方向延伸的部件,限制载置在载置部上的物品在水平方向上向与移载方向正交的宽度方向移动;在直立部设置有引导部,该引导部当从物品载置部件看将配置移载装置的一侧作为移载方向的前侧、将其相反的一侧作为移载方向的后侧时,当由移载装置移载的物品接触到了直立部时从前侧朝向后侧向斜上方引导物品。
通过该结构的物品载置部件,即使在移载装置相对于物品载置部件沿宽度方向偏离应该停止的位置的状态停止、在该状态下移载了物品的情形下,物品被引导部从前侧朝向后侧向斜上方引导。因此,物品不会被夹在移载装置与直立部之间而破损。其结果是,即使设置了从载置部沿竖直方向立起的直立部的情况下,也能够抑制载置物品时的破损。
本发明的物品载置部件中,引导部的上端可以从前侧朝向后侧向斜上方延伸。通过该结构,在移载时能够顺畅地向斜上方引导移载时撞击直立部的物品。
本发明的物品载置部件中,可以在直立部的竖直方向上端的至少一部分上设置有伸出部,该伸出部从上端沿水平方向延伸、限制物品的一部分沿竖直方向移动。通过该结构,由于能够抑制载置在载置部上的物品向竖直上方移动,因此能够防止物品从物品载置部件落下。
本发明的物品载置部件中,引导部上端的后侧端部可以设置在竖直方向上比伸出部高的位置上。通过该结构,能够防止被引导部引导的储藏容器撞击伸出部。
本发明的储存库具备以规定间隔沿宽度方向配置、沿竖直方向延伸的支柱构件和上述物品载置部件,物品载置部件的直立部可以固定在支柱构件上。通过该结构,即使在储存库的物品载置部件上设置了直立部的情形下,也能够抑制载置物品时的破损。
本发明的搬运车系统具备上述物品载置部件、将物品移载到物品载置部件上的移载装置、控制移载装置的控制部、以及检测物品从前侧朝向后侧向斜上方移动了的检测部,当检测部检测到物品向斜上方的移动时,可以停止移载装置移载物品。通过该结构,当由检测部检测到物品向斜上方移动时、即物品与直立部接触了时,移载装置停止向移载方向推出物品。由此,能够防止物品破损于未然。
本发明的搬运车系统的检测部可以由设置在移载时支承物品的支承部上、检测有无物品存在的传感器构成。通过该结构,能够容易地构成能够检测向斜上方移动的检测部。
发明的效果:根据本发明,即使在设置了从载置部沿竖直方向立起的直立部的情形下,也能够抑制载置物品时物品的破损。
附图说明
图1为表示一个实施形态所涉及的储存库的从X方向看的剖视图;
图2为放大表示图1的储存库中包含的部分物品载置部件的立体图;
图3为放大表示图2的物品载置部件的局部的立体图;
图4为放大表示图1的仓储起重机的臂部和容器支承部附近的立体图;
图5为表示图1的搬运车系统的功能结构的功能框图;
图6为表示与侧面直立部接触了的储藏容器的侧视图;
图7为表示与侧面直立部接触了的储藏容器的侧视图;
图8为放大表示以往的储存库中包含的部分物品载置部件的立体图。
附图标记的说明:1-储存库;4-搁物架;7-堆垛起重机(移载装置);41-支柱构件;50、50A、50B-物品载置部件;51-载置部;53-侧面直立部(直立部);55-引导部;55a-上端(引导面);55b-后侧端部;57-伸出部;61-前方直立部;75-容器支承部;77A、77B、77C-容器检测部(检测部);79-臂驱动部;80-控制器(控制部);90-储藏容器(物品);100-搬运车系统。
具体实施方式
下面参照附图对本发明优选的一个实施形态详细地进行说明。另外,在附图的说明中,对相同的要素添加相同的标记,省略重复的说明。
对一个实施形态所涉及的物品载置部件50、具备物品载置部件50的储存库1、搬运车系统100进行说明。首先,对储存库1进行说明。储存库1具有作为保管储藏半导体晶圆和玻璃基板等被储藏物的FOUP(Front Opening Unified Pod,前开口标准传输盒)等储藏容器(物品)90的仓库的功能。储存库1例如设置在洁净室内。
如图1所示,储存库1主要具备主体部3、搁物架4、堆垛起重机(移载装置)7、OHT端口21和控制器(控制部)80。
主体部3为分隔储存库1的内部空间A的部分,由多个间壁形成。搁物架4为载置储藏容器90的部分,通常设置1~2列(这里为2列)。各搁物架4沿X方向(宽度方向)延伸,使相邻的2个搁物架4、4相向地大致平行配置。
如图2和图3所示,各搁物架4具有支柱构件41、梁构件43和物品载置部件50。另外,图2和图3中将从物品载置部件50看配置堆垛起重机(移载装置)7的一侧作为前侧、将其相反的一侧作为移载方向的后侧进行说明。支柱构件41以规定间隔沿X方向配置,沿竖直方向延伸。梁构件43将相邻的支柱构件41、41彼此连接。物品载置部件50沿X方向和Z方向(竖直方向)排列。物品载置部件50载置并保管储藏容器90。
物品载置部件50由左右一对物品载置部件50A、50B构成。即,利用左右一对物品载置部件50A、50B载置一个储藏容器90。物品载置部件50具有载置部51、侧面直立部(直立部)53和前方直立部61。
载置部51为载置储藏容器90的部分。在载置部51的上表面设置有容器定位部67。容器定位部67为确定储藏容器90的位置的部件。容器定位部67通过嵌入储藏容器90的底面上形成的凹陷部来确定储藏容器90的位置。侧面直立部53为从载置部51沿竖直方向立起、并且沿移载储藏容器90的方向(Y方向)延伸的部件,限制载置在载置部51上的储藏容器90在水平方向上向与移载方向正交的宽度方向(X方向)移动。在侧面直立部53上设置有引导部55和伸出部57。
引导部55为当被堆垛起重机7移载的储藏容器90接触了时将该储藏容器90在Y方向上从前侧朝向后侧向斜上方引导的部分。引导部55的上端(引导面)55a从前侧朝向后侧而向斜上方延伸。伸出部57为从侧面直立部53的竖直方向的上端53a沿水平方向延伸、限制载置在载置部51上的储藏容器90的一部分即侧面突出部91沿竖直方向移动的部分。引导部55的上端55a的后侧端部55b设置在Z方向上比伸出部57高的位置上。
前方直立部61为从载置部51沿Z方向立起、并且沿X方向延伸的部件。前方直立部61限制被载置在载置部51上的储藏容器90在水平方向上向Y方向前方移动。
具有载置部51、侧面直立部53、引导部55、伸出部57和前方直立部61的物品载置部件50通过例如冲压加工板状部件等而一体成型。
如图1和图4所示,堆垛起重机7为使储藏容器90进出物品载置部件50、并且在物品载置部件50之间移动的机构。堆垛起重机7配置在相对置的搁物架4、4夹着的区域内。堆垛起重机7通过沿着搁物架4的延伸方向(X方向)在配置于地面的轨道(未图示)上行进,从而能够沿着搁物架4在X方向上移动。
堆垛起重机7具备行进部71、支承柱72、货架73、臂部74和容器支承部75。行进部71能够由电动机等行进驱动部71A(参照图5)驱动而在轨道上沿X方向行进地设置。支承柱72为设置在行进部71的上部、沿竖直方向延伸的部件。货架73能够由电动机等升降驱动部73A(参照图5)驱动而沿着支承柱72升降地设置。臂部74设置在货架73上,具有多个臂体74A、74B。容器支承部75固定在多个臂体74A、74B中的最上部的臂体74B上。多个臂体74A、74B借助电动机等臂驱动部79(参照图5)能够使容器支承部75沿水平方向自由移动。
容器支承部75为保持储藏容器90的机构,固定在臂体74B的上面。容器支承部75具有第一主体部75A、第二主体部75B、容器保持部75C、容器定位部76A、76B、76C和容器检测部(检测部)77A、77B、77C。第一主体部75A为板状部件,固定在臂体74B上并且支承储藏容器90。第二主体部75B为从第一主体部75A向竖直方向上方延伸的部件,支承容器保持部75C。容器保持部75C保持储藏容器90的侧面。
容器定位部76A、76B、76C形成在第一主体部75A的上面,为确定储藏容器90的位置的部件。容器定位部76A、76B、76C通过嵌入储藏容器90的底面上形成的凹陷部来确定储藏容器90的位置。容器定位部76A、76B、76C在第一主体部75A的上面配置有3个。容器定位部76A、76B、76C配置在靠近第一主体部75A的外周边缘的位置。
容器检测部77A、77B、77C为例如接触式传感器,检测储藏容器90是否接触。容器检测部77A、77B、77C将有关储藏容器90有无接触的信息输出给控制器80。容器检测部77A、77B、77C在第一主体部75A的上面配置有3个。容器检测部77A、77B、77C配置在靠近第一主体部75A的外周边缘并且容器定位部76A、76B、76C附近的位置上。
储藏容器90出入储存库1从OHT(Overhead Hoist Transfer,高架提升输送装置)端口21来进行。OHT端口21为在铺设于顶棚的轨道25上行进的桥式吊车27与储存库1之间移交储藏容器90的部分,具有搬送储藏容器90的输送机21A。
下面对搬运车系统100进行说明。搬运车系统100主要包含上述储存库1和控制器80而构成。
控制器80(参照图1)控制堆垛起重机7中的各个部分。控制器80例如配置在主体部3的内部。控制器80具有CPU(Central Processing Unit,中央处理器)、RAM(Random AccessMemory,随机存储器)和ROM(Read Only Memory,只读存储器)等。控制器80通过CPU、RAM和ROM等硬件与程序等软件一起工作执行各种控制。
如图4所示,本实施形态的控制器80当由容器检测部77A、77B、77C检测到储藏容器90向斜上方的移动时,使堆垛起重机7停止移载储藏容器90。具体为,控制器80当容器检测部77A、77B、77C中的至少一个检测到储藏容器90不存在时,容器检测部77A、77B、77C判定为储藏容器90向斜上方移动了,使堆垛起重机7停止移载储藏容器90。
下面对堆垛起重机7将储藏容器90载置到物品载置部件50上时的动作进行说明。控制器80控制行进驱动部71A,使行进部71在X方向上停止在载置储藏容器90的预定的物品载置部件50跟前。与此同时,控制器80控制升降驱动部73A,使容器支承部75移动到载置储藏容器90的预定的物品载置部件50的高度。更详细为,使容器支承部75移动到储藏容器90的底面90a能够通过载置储藏容器90的预定的物品载置部件50的前方直立部61上方的高度。
接着,控制器80控制臂驱动部79,使臂部74伸展到Y方向的后侧,使由第一主体部75A从下方支承的储藏容器90前进。并且,当储藏容器90的前进方向上的后端部90b(参照图5和图6)越过了前方直立部61时,使臂驱动部79停止。接着,控制器80控制升降驱动部73A,使容器支承部75下降。由此,储藏容器90被载置到物品载置部件50上。
下面对由于某种原因停止在沿X方向偏离载置储藏容器90的预定的物品载置部件50的位置上的情形进行说明。在这种情形下,控制器80也控制升降驱动部73A,使容器支承部75移动到载置储藏容器90的预定的物品载置部件50的高度。
然后,控制器80控制臂驱动部79,使臂部74伸展到Y方向的后侧,使由第一主体部75A从下方支承的储藏容器90前进。此时如图6所示,储藏容器90与侧面直立部53的引导部55接触。储藏容器90与上端55a接触,从前侧朝向后侧向斜上方引导储藏容器90的底面90a。
储藏容器90像图7所示的那样被以其底面90a在引导面上滑动的方式从前侧朝向后侧向斜上方引导,离开容器支承部75。此时,配置在容器支承部75前进方向上的最前端的容器检测部77A检测到储藏容器90处于非接触状态。当由容器检测部77A检测到储藏容器90处于非接触状态时,控制器80使臂驱动部79的驱动停止,使堆垛起重机7停止移载储藏容器90。
上述实施形态的物品载置部件50中,堆垛起重机7在沿X方向偏离了相对于物品载置部件50的应该停止位置的状态下停止,在这样的状态下移载储藏容器90,在这种情形下,储藏容器90被引导部55从前侧朝向后侧向斜上方引导(参照图6)。由此,储藏容器90不会被夹在容器支承部75与侧面直立部53之间而破损。结果,即使在设置了从载置部51沿竖直方向立起的侧面直立部53的情形下,也能够抑制载置储藏容器90时的破损。
在上述实施形态的物品载置部件50中,引导部55的上端55a从前侧朝向后侧而向斜上方延伸。由此,移载储藏容器90时能够顺畅地向斜上方引导与侧面直立部53接触了的储藏容器90。
由于在上述实施形态的物品载置部件50的侧面直立部53上设置有从上端53a沿水平方向延伸的伸出部57,因此能够抑制储藏容器90向竖直上方移动。由此,能够防止储藏容器90从物品载置部件50落下。
如图3所示,设置在上述实施形态的物品载置部件50的侧面直立部53上的引导部55的上端55a的后侧端部55b设置在竖直方向上比伸出部57高的位置上。由此,能够抑制由引导部55引导的储藏容器90撞击伸出部57。
上述实施形态的储存库1即使在储存库1的物品载置部件50上设置了侧面直立部53的情形下,也能够抑制载置储藏容器90时的破损。
上述实施形态的搬运车系统100的控制器80,当由容器检测部77A、77B、77C检测到储藏容器90向斜上方移动时,使堆垛起重机7停止移载储藏容器90。由此,当由容器检测部77A、77B、77C检测到储藏容器90向斜上方移动时,即检测到储藏容器90与侧面直立部53接触了时,堆垛起重机7停止沿Y方向推出储藏容器90。由此,能够防止储藏容器90破损于未然。
上述实施形态的搬运车系统100的容器检测部77A、77B、77C由设置在移载时支承储藏容器90的第一主体部75A上、检测有无储藏容器90存在的传感器构成。由此,能够容易地构成能够检测储藏容器90向斜上方的移动的容器检测部77A、77B、77C。
虽然以上对一个实施形态进行了说明,但本发明并不局限于上述实施形态,在不超出发明宗旨的范围内能够进行种种变更。
虽然上述实施形态中举了本专利申请的物品载置部件50(50A、50B)设置在构成储存库1的搁物架4中的例子进行了说明,但也可以设置在作为与上述那样的储存库1或规定的处理装置进行储藏容器移交的接口部分的装载口。即使在这种情形下,也能够抑制载置储藏容器90时储藏容器90的破损。
虽然上述实施形态和变形例的物品载置部件50举了由左右一对物品载置部件50A、50B构成的例子进行了说明,但也可以采用例如将直立部设置在能够载置储藏容器90的平板状部件上的结构。
上述实施形态及变形例的物品载置部件50的引导部55举其上端沿移载方向从前侧朝向后侧向斜上方延伸的形状为例进行了说明,但也可以例如形成为与水平面的夹角逐渐变平缓的圆弧形状。在这样的情形下,能够向斜上方引导与侧面直立部53接触的储藏容器90。
虽然举在上述实施形态及变形例的物品载置部件50的引导部55上设置了伸出部57和前方直立部61的例子进行了说明,但在侧面直立部53上也可以不设置伸出部57和前方直立部61中的两个或者一个。
虽然举在上述实施形态及变形例的物品载置部件50的容器支承部75上设置了3个容器检测部77A、77B、77C的例子进行了说明,但容器检测部77A、77B、77C的数量可以是1个、2个或4个以上。
并且,本发明还适用于结构与上述堆垛起重机不同的移载装置。即,本发明还可以适用于使移载部仅能够沿水平方向或上下方向中的某个方向移动的搬送装置,或者使移载部能够沿不是铺设在地面上而是铺设在顶棚附近的轨道沿水平方向移动的搬送装置等。
上述实施形态及变形例举FOUP这样的储藏容器作为物品的例子进行了说明,但也可以是储藏掩膜版的掩膜版放置盒。并且,也可以是纸板、周转箱(日文:通函;英文:Returnable Box)等物品。
Claims (7)
1.一种利用移载装置进行物品移载的物品载置部件,具备:
载置所述物品的载置部,以及
直立部,该直立部为从所述载置部沿竖直方向立起、并且沿所述物品的移载方向延伸的部件,限制载置在所述载置部上的所述物品在水平方向上向与所述移载方向正交的宽度方向移动;
在所述直立部设置有引导部,该引导部当从所述物品载置部件看将配置所述移载装置的一侧作为所述移载方向的前侧、将其相反的一侧作为所述移载方向的后侧时,当由所述移载装置移载的所述物品接触到了所述直立部时,从所述前侧朝向所述后侧向斜上方引导所述物品。
2.如权利要求1所述的物品载置部件,所述引导部的上端从所述前侧朝向所述后侧而向斜上方延伸。
3.如权利要求1所述的物品载置部件,在所述直立部的竖直方向上端的至少一部上设置有伸出部,该伸出部从所述上端沿水平方向延伸、限制所述物品的一部分沿竖直方向移动。
4.如权利要求3所述的物品载置部件,所述引导部上端的所述后侧的端部设置在竖直方向上比所述伸出部高的位置上。
5.一种储存库,具备:
以规定间隔沿宽度方向配置、沿竖直方向延伸的支柱构件,以及
权利要求1~4中的任一项所述的物品载置部件;
所述物品载置部件的所述直立部被固定在所述支柱构件上。
6.一种搬运车系统,具备:
权利要求1~4中的任一项所述的物品载置部件,
将所述物品移载到所述物品载置部件上的移载装置,
控制所述移载装置的控制部,以及
检测所述物品从所述前侧朝向所述后侧向斜上方移动了的检测部;
所述控制部当由所述检测部检测到所述物品向所述斜上方的移动时,使所述移载装置停止移载所述物品。
7.如权利要求6所述的搬运车系统,所述检测部由设置在移载时支承所述物品的支承部上、检测有无所述物品存在的传感器构成。
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