CN110158044A - 一种多元复合梯度涂层刀具及其制备方法 - Google Patents
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- 238000000576 coating method Methods 0.000 title claims abstract description 84
- 239000011248 coating agent Substances 0.000 title claims abstract description 83
- 238000002360 preparation method Methods 0.000 title claims abstract description 17
- 239000011159 matrix material Substances 0.000 claims abstract description 22
- 230000007704 transition Effects 0.000 claims abstract description 21
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 15
- 238000001755 magnetron sputter deposition Methods 0.000 claims abstract description 11
- 238000003475 lamination Methods 0.000 claims abstract description 10
- 239000000919 ceramic Substances 0.000 claims abstract description 4
- 229910000997 High-speed steel Inorganic materials 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims abstract description 3
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims description 30
- 238000004140 cleaning Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 11
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- 238000010891 electric arc Methods 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 239000003344 environmental pollutant Substances 0.000 claims description 4
- 239000007888 film coating Substances 0.000 claims description 4
- 238000009501 film coating Methods 0.000 claims description 4
- 239000004519 grease Substances 0.000 claims description 4
- 238000000227 grinding Methods 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 238000007747 plating Methods 0.000 claims description 4
- 238000005498 polishing Methods 0.000 claims description 4
- 231100000719 pollutant Toxicity 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 4
- 238000002791 soaking Methods 0.000 claims description 4
- 230000005611 electricity Effects 0.000 claims description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 1
- 229910052796 boron Inorganic materials 0.000 claims 1
- 238000010422 painting Methods 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 238000005520 cutting process Methods 0.000 abstract description 19
- 239000010410 layer Substances 0.000 abstract description 8
- 239000000463 material Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000003754 machining Methods 0.000 abstract description 3
- 229910052582 BN Inorganic materials 0.000 abstract description 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract description 2
- 239000011229 interlayer Substances 0.000 abstract description 2
- 238000005299 abrasion Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000008021 deposition Effects 0.000 description 3
- 229910052961 molybdenite Inorganic materials 0.000 description 3
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 2
- 239000008199 coating composition Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000035772 mutation Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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Abstract
本发明公开了一种多元复合梯度涂层刀具及其制备方法，该刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，刀具基体材料表面具有多元复合梯度涂层，该涂层的制备方法采用多弧离子镀+中频磁控溅射方式。其中最外层为MoBSeC软涂层，向内为AlHfVC与CrZrHfC交替分布叠层硬涂层，硬涂层与基体间依次有TiZrCN和TiN过渡层。该刀具表面MoBSeC软涂层具有自润滑功效，AlHfVC与CrZrHfC叠层硬涂层能够显著提高刀具硬度，TiZrCN和TiN过渡层提高了涂层与基体的结合强度。因此，本发明的涂层刀具既具有高的硬度，又具有良好的润滑性、热稳定性、抗氧化性和抗磨损性等，且涂层间应力梯度较小、涂层与基体结合强度较高，切削过程该刀具能够有效减小摩擦磨损，提高刀具寿命。该刀具可广泛应用于干切削及难加工材料的切削加工。
Description
技术领域
本发明属于机械切削刀具制造技术领域，特别涉及了一种MoBSeC+AlHfVC/CrZrHfC多元复合梯度涂层刀具及其制备方法。
背景技术
对刀具进行涂层处理是提高刀具性能的重要途径之一，根据涂层材料的性质不同，涂层可分为以提高刀具表面硬度和耐磨性能的“硬涂层”和以减小刀具表面摩擦且具有自润滑功效的“软涂层”。近年来，为进一步提高刀具性能，涂层刀具已由单层向多元化和复合化发展；同时，将软涂层与硬涂层结合应用于切削刀具，使得刀具表面既具有较高的硬度又具有良好的自润滑功效，从而显著提高涂层刀具性能。
中国专利“申请号：CN200910256536.9”报道了一种软硬复合涂层刀具及其制备方法，该刀具采用中频磁控沉积和多弧离子镀膜方法制备MoS2/ZrN复合涂层刀具，该刀具既具有较低的摩擦系数，又具有较高的硬度。中国专利“申请号：201610427737.0”报道了一种TiAlCrN+MoS2/Ti/Al/Cr组合润滑涂层刀具及其制备工艺，该刀具兼顾TiAlCrN多元硬涂层和MoS2/Ti/Al/Cr软涂层特性，可广泛应用于材料的干切削加工。以上报道的软硬涂层在硬度、热稳定性等方面有待于进一步提高。目前，国内外未见MoBSeC+AlHfVC/CrZrHfC多元复合梯度涂层刀具的报道。
发明内容
发明目的：本发明提供一种多元复合梯度涂层刀具及其制备方法。该刀具结合硬涂层及软涂层的特点，既具有高的硬度又具有良好的自润滑性能，且刀具涂层具有良好的耐热性及抗氧化性等。干切削时，该刀具能够减小摩擦，抑制粘结、降低切削力和切削温度，减小刀具磨损，提高加工表面质量。
技术方案：本发明的一种多元复合梯度涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，其特征在于：所述刀具基体材料表面具有多元复合梯度涂层，其中最外层为MoBSeC软涂层，向内为AlHfVC与CrZrHfC交替分布叠层硬涂层，硬涂层与基体间依次有TiZrCN和TiN过渡层。
本发明的多元复合梯度涂层刀具的制备方法，其特征在于采用多弧离子镀+中频磁控溅射共沉积的方法在刀具表面依次制备TiN+TiZrCN过渡层、AlHfVC与CrZrHfC交替分布叠层硬涂层、MoBSeC软涂层。
所述的一种多元复合梯度涂层刀具的制备方法，包括以下步骤：
(1)前处理：将刀具基体材料研磨抛光，依次放入酒精和丙酮中超声清洗各20-30min，去除表面油渍污染物，采用真空干燥箱充分干燥后迅速放入镀膜机真空室，真空室本底真空为7.0×10-3-8.0×10-3Pa，加热至200-300℃，保温时间30-40min；
(2)离子清洗：通入Ar2，其压力为0.5-2.0Pa，开启偏压电源，电压700-1200V，占空比0.3，辉光放电清洗20-30min；偏压降低至300-800V，开启离子源离子清洗20-30min，开启电弧源Ti靶，偏压400-600V，靶电流40-80A，离子轰击Ti靶1-2min；
(3)沉积TiN过渡层：调整工作气压为0.5-0.8Pa，偏压80-150V，Ti靶电流90-120A；开启N2，调整N2流量为150-300sccm，沉积温度为200-250℃，沉积2-10min；
(4)沉积TiZrCN过渡层：开启Zr靶电弧电源，Zr靶电流调至60-90A，开启C靶电弧电源，电流调至20-50A，沉积TiZrCN 5-10min；
(5)沉积CrZrHfC硬涂层：关闭Ti靶，关闭N2，调整工作气压为0.8-2.0Pa，偏压100-200V；开启Cr靶电弧电源，Cr靶电流调至80-100A，开启Hf靶电弧电源，电流调至30-50A，沉积CrZrHfC涂层20-40min；
(6)沉积AlHfVC硬涂层：关闭Cr靶，关闭Zr靶，调整工作气压为0.8-2.0Pa，偏压100-200V；开启Al靶电弧电源，Al靶电流调至80-100A，开启V靶电弧电源，电流调至30-50A，沉积AlHfVC涂层20-40min；
(7)沉积CrZrHfC+AlHfVC交替叠层硬涂层：重复以上步骤(5)和(6)，交替沉积CrZrHfC+AlHfVC叠层涂层；CrZrHfC+AlHfVC叠层涂层总层数为2-8层；
(8)沉积MoBSeC软涂层：关闭Cr靶、Zr靶、Al靶、V靶、Hf靶，调整工作气压为1.0-3.0Pa，偏压150-250V；开启中频磁控溅射MoBSe靶电源，电流调至50-60A，电弧镀+中频磁控溅射沉积MoBSeC涂层20-30min；
(9)后处理：关闭MoBSe靶和C靶，关闭偏压电源及气体源，保温30-60min，涂层结束。
有益效果：1.本发明的涂层刀具既具有较高的硬度、良好的热稳定性、抗氧化性等，又具有良好的润滑性能，可显著提高提出刀具的切削性能。干切削时，硬涂层承受载荷，软涂层能够在摩擦表面形成润滑膜，从而减小刀具表面摩擦磨损；2.该涂层刀具从过渡层到软硬涂层均含有过渡元素，能够减缓由于涂层成分突变造成的层间应力，且能够显著提高涂层与基体间及涂层与涂层间结合力；3.CrZrHfC+AlHfVC叠层涂层提高了单一涂层的性能，增加了涂层刀具适用范围，MoBSeC相比普通MoS2等软涂层不仅具有自润滑性能，同时具有高的硬度和良好的抗氧化性；4.该刀具可广泛应用于干切削及难加工材料的切削加工。
附图说明
图1为本发明的多元复合梯度涂层刀具结构示意图，其中：1为刀具基体材料，2为TiN过渡层，3为TiZrCN过渡层，4为CrZrHfC硬涂层，5为AlHfVC硬涂层，6为CrZrHfC+AlHfVC交替叠层硬涂层，7为MoBSeC软涂层。
具体实施方式
实例1：一种多元复合梯度涂层刀具，刀具基体材料为硬质合金，刀具基体表面具有多元复合梯度涂层，其中最外层为MoBSeC软涂层，向内为AlHfVC与CrZrHfC交替分布叠层硬涂层，硬涂层与基体间依次有TiZrCN和TiN过渡层。
该多元复合梯度涂层刀具的制备方法，采用多弧离子镀+中频磁控溅射共沉积的方法在刀具表面依次制备TiN+TiZrCN过渡层、AlHfVC与CrZrHfC交替分布叠层硬涂层、MoBSeC软涂层。其具体制备方法包括以下步骤：
(1)前处理：将刀具基体材料研磨抛光，依次放入酒精和丙酮中超声清洗各20-30min，去除表面油渍污染物，采用真空干燥箱充分干燥后迅速放入镀膜机真空室，真空室本底真空为7.0×10-3Pa，加热至200℃，保温时间30min；
(2)离子清洗：通入Ar2，其压力为0.5Pa，开启偏压电源，电压700V，占空比0.3，辉光放电清洗20min；偏压降低至300V，开启离子源离子清洗20min，开启电弧源Ti靶，偏压400V，靶电流40A，离子轰击Ti靶2min；
(3)沉积TiN过渡层：调整工作气压为0.6Pa，偏压100V，Ti靶电流90A；开启N2，调整N2流量为150sccm，沉积温度为200℃，沉积5min；
(4)沉积TiZrCN过渡层：开启Zr靶电弧电源，Zr靶电流调至60A，开启C靶电弧电源，电流调至30A，沉积TiZrCN 5min；
(5)沉积CrZrHfC硬涂层：关闭Ti靶，关闭N2，调整工作气压为1.0Pa，偏压120V；开启Cr靶电弧电源，Cr靶电流调至80A，开启Hf靶电弧电源，电流调至40A，沉积CrZrHfC涂层20min；
(6)沉积AlHfVC硬涂层：关闭Cr靶，关闭Zr靶，调整工作气压为1.2Pa，偏压150V；开启Al靶电弧电源，Al靶电流调至80A，开启V靶电弧电源，电流调至40A，沉积AlHfVC涂层20min；
(7)沉积CrZrHfC+AlHfVC交替叠层硬涂层：重复以上步骤(5)和(6)，交替沉积CrZrHfC+AlHfVC叠层涂层；CrZrHfC+AlHfVC叠层涂层总层数为4层；
(8)沉积MoBSeC软涂层：关闭Cr靶、Zr靶、Al靶、V靶、Hf靶，调整工作气压为2.0Pa，偏压150V；开启中频磁控溅射MoBSe靶电源，电流调至50A，电弧镀+中频磁控溅射沉积MoBSeC涂层30min；
(9)后处理：关闭MoBSe靶和C靶，关闭偏压电源及气体源，保温40min，涂层结束。
实例2：一种多元复合梯度涂层刀具，刀具基体材料为陶瓷，刀具基体表面具有多元复合梯度涂层，其中最外层为MoBSeC软涂层，向内为AlHfVC与CrZrHfC交替分布叠层硬涂层，硬涂层与基体间依次有TiZrCN和TiN过渡层。
该多元复合梯度涂层刀具的制备方法，采用多弧离子镀+中频磁控溅射共沉积的方法在刀具表面依次制备TiN+TiZrCN过渡层、AlHfVC与CrZrHfC交替分布叠层硬涂层、MoBSeC软涂层。其具体制备方法包括以下步骤：
(1)前处理：将刀具基体材料研磨抛光，依次放入酒精和丙酮中超声清洗各20-30min，去除表面油渍污染物，采用真空干燥箱充分干燥后迅速放入镀膜机真空室，真空室本底真空为8.0×10-3Pa，加热至300℃，保温时间40min；
(2)离子清洗：通入Ar2，其压力为2.0Pa，开启偏压电源，电压1000V，占空比0.3，辉光放电清洗30min；偏压降低至600V，开启离子源离子清洗30min，开启电弧源Ti靶，偏压600V，靶电流60A，离子轰击Ti靶1min；
(3)沉积TiN过渡层：调整工作气压为0.7Pa，偏压100V，Ti靶电流120A；开启N2，调整N2流量为250sccm，沉积温度为230℃，沉积8min；
(4)沉积TiZrCN过渡层：开启Zr靶电弧电源，Zr靶电流调至90A，开启C靶电弧电源，电流调至45A，沉积TiZrCN 10min；
(5)沉积CrZrHfC硬涂层：关闭Ti靶，关闭N2，调整工作气压为1.8Pa，偏压180V；开启Cr靶电弧电源，Cr靶电流调至100A，开启Hf靶电弧电源，电流调至50A，沉积CrZrHfC涂层30min；
(6)沉积AlHfVC硬涂层：关闭Cr靶，关闭Zr靶，调整工作气压为2.0Pa，偏压200V；开启Al靶电弧电源，Al靶电流调至100A，开启V靶电弧电源，电流调至50A，沉积AlHfVC涂层30min；
(7)沉积CrZrHfC+AlHfVC交替叠层硬涂层：重复以上步骤(5)和(6)，交替沉积CrZrHfC+AlHfVC叠层涂层；CrZrHfC+AlHfVC叠层涂层总层数为8层；
(8)沉积MoBSeC软涂层：关闭Cr靶、Zr靶、Al靶、V靶、Hf靶，调整工作气压为2.0Pa，偏压200V；开启中频磁控溅射MoBSe靶电源，电流调至60A，电弧镀+中频磁控溅射沉积MoBSeC涂层20min；
(9)后处理：关闭MoBSe靶和C靶，关闭偏压电源及气体源，保温60min，涂层结束。
Claims (4)
1.一种多元复合梯度涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，其特征在于：所述刀具基体材料表面具有多元复合梯度涂层，其中最外层为MoBSeC软涂层，向内为AlHfVC与CrZrHfC交替分布叠层硬涂层，硬涂层与基体间依次有TiZrCN和TiN过渡层。
2.一种多元复合梯度涂层刀具的制备方法，其特征在于：采用多弧离子镀+中频磁控溅射共沉积的方法在刀具表面依次制备TiN+TiZrCN过渡层、AlHfVC与CrZrHfC交替分布叠层硬涂层、MoBSeC软涂层。
3.根据权利要求2所述的多元复合梯度涂层刀具的制备方法，其特征在于，包括以下步骤：
(1)前处理：将刀具基体材料研磨抛光，依次放入酒精和丙酮中超声清洗各20-30min，去除表面油渍污染物，采用真空干燥箱充分干燥后迅速放入镀膜机真空室，真空室本底真空为7.0×10-3-8.0×10-3Pa，加热至200-300℃，保温时间30-40min；
(2)离子清洗：通入Ar2，其压力为0.5-2.0Pa，开启偏压电源，电压700-1200V，占空比0.3，辉光放电清洗20-30min；偏压降低至300-800V，开启离子源离子清洗20-30min，开启电弧源Ti靶，偏压400-600V，靶电流40-80A，离子轰击Ti靶1-2min；
(3)沉积TiN过渡层：调整工作气压为0.5-0.8Pa，偏压80-150V，Ti靶电流90-120A；开启N2，调整N2流量为150-300sccm，沉积温度为200-250℃，沉积2-10min；
(4)沉积TiZrCN过渡层：开启Zr靶电弧电源，Zr靶电流调至60-90A，开启C靶电弧电源，电流调至20-50A，沉积TiZrCN 5-10min；
(5)沉积CrZrHfC硬涂层：关闭Ti靶，关闭N2，调整工作气压为0.8-2.0Pa，偏压100-200V；开启Cr靶电弧电源，Cr靶电流调至80-100A，开启Hf靶电弧电源，电流调至30-50A，沉积CrZrHfC涂层20-40min；
(6)沉积AlHfVC硬涂层：关闭Cr靶，关闭Zr靶，调整工作气压为0.8-2.0Pa，偏压100-200V；开启Al靶电弧电源，Al靶电流调至80-100A，开启V靶电弧电源，电流调至30-50A，沉积AlHfVC涂层20-40min；
(7)沉积CrZrHfC+AlHfVC交替叠层硬涂层：重复以上步骤(5)和(6)，交替沉积CrZrHfC+AlHfVC叠层涂层；
(8)沉积MoBSeC软涂层：关闭Cr靶、Zr靶、Al靶、V靶、Hf靶，调整工作气压为1.0-3.0Pa，偏压150-250V；开启中频磁控溅射MoBSe靶电源，电流调至50-60A，电弧镀+中频磁控溅射沉积MoBSeC涂层20-30min；
(9)后处理：关闭MoBSe靶和C靶，关闭偏压电源及气体源，保温30-60min，涂层结束。
4.根据权利要求3所述的一种多元复合梯度涂层刀具的制备方法，其特征在于：步骤(7)中，CrZrHfC+AlHfVC交替叠层硬涂层总层数为2-8层。
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