CN107385401A - SiNbCN多元梯度复合涂层刀具及其制备方法 - Google Patents

SiNbCN多元梯度复合涂层刀具及其制备方法 Download PDF

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CN107385401A
CN107385401A CN201710533176.7A CN201710533176A CN107385401A CN 107385401 A CN107385401 A CN 107385401A CN 201710533176 A CN201710533176 A CN 201710533176A CN 107385401 A CN107385401 A CN 107385401A
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宋文龙
崔祥府
王首军
张璇
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Abstract

本发明属于机械加工切削刀具领域，特别是涉及一种SiNbCN多元梯度复合涂层刀具及其制备方法，涂层刀具由内至外依次为刀具基体、Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积SiNbC过渡层和氮含量梯度渐变的SiNbCN多元梯度复合涂层。该SiNbCN超硬碳氮化合物涂层由于在涂层中同时增加了Si、Nb等两种元素，且涂层结构成分氮含量梯度渐变，可显著提高刀具的切削加工性能。该SiNbCN多元梯度复合涂层刀具具有很高的硬度和韧性，良好的抗扩散磨损性能、抵抗塑性变形能力和优异的摩擦磨损特性。

Description

SiNbCN多元梯度复合涂层刀具及其制备方法
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种SiNbCN多元梯度复合涂层刀具及其制备方法。
背景技术
涂层刀具能够将刀具基体材料与涂层的优良性能相结合，既保持了基体良好的韧性和强度，又具有涂层高硬度和良好减摩耐磨性，改善基体材料的性能，拓宽其应用范围和寿命。随着高速切削的发展，切削加工中所产生的切削热对刀具的磨损比常规切削高得多，因此对刀具材料的硬度、强度、耐磨性、韧性和抗冲击能力以及高的红硬性和化学稳定性有更高的要求。传统单一涂层材料很难全部达到上述技术要求，涂层技术已由单层向多元、多层、梯度发展。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,MingxiLi.Influence of the C2H2 flow rate on gradient TiCN films deposited by multi-arc ion plating[J].Applied Surface Science,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种SiNbCN多元梯度复合涂层刀具及其制备方法。该刀具采用非平衡磁控溅射+电弧镀的复合镀膜方法，直接采用SiNbC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具、工具及模具基体上制备。该涂层结构由基体到涂层表面依次为：Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层。
涂层刀具表面为氮含量梯度渐变的SiNbCN多元梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和SiNbC过渡层。该多元梯度复合涂层刀具中的Si元素改善了涂层硬度和抗化学扩散性能，Nb元素提高了涂层的硬度、强度和抗压、耐磨、耐蚀性能，C元素可降低涂层表面的摩擦系数，同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能，故可显著提高刀具的使用寿命和加工效率。
为了实现上述发明目的，本发明采用的技术方案如下：
本发明SiNbCN多元梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层。
本发明所述的SiNbCN多元梯度复合涂层刀具的制备方法，沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射SiNbC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积SiNbC过渡层和氮含量梯度渐变的SiNbCN多元梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各35min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至280℃，保温35～40min；
(2)离子清洗：通Ar气，其压力为1.0Pa，开启偏压电源，电压500V，占空比0.3，辉光放电清洗40min；降低偏压至400V，占空比0.3，开启离子源离子清洗25min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压400V，占空比0.3，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.7～0.8Pa，偏压降至250V，Ti靶电流60A，沉积温度230℃，电弧镀Ti过渡层6～7min；
(4)沉积SiNbC过渡层：Ar气压0.8～0.9Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度220℃，开启非平衡磁控溅射SiNbC靶电流35A，沉积SiNbC过渡层7～8min；
(5)沉积SiNbCN多元梯度复合层：开启N2，N2气压为0.7Pa，Ar气压0.7～0.9Pa，偏压150V，SiNbC靶电流35A，沉积温度210℃，沉积SiNbCN复合层7～8min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积SiNbCN复合层7～8min，直至N2气压升至1.6Pa，再沉积SiNbCN复合层7～8min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
通过上述工艺制备的SiNbCN多元梯度复合涂层刀具，刀具表面为氮含量梯度渐变的SiNbCN多元梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和SiNbC过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该多元梯度复合涂层刀具中的Si元素改善了涂层硬度和抗化学扩散性能，Nb元素提高了涂层的硬度、强度和抗压、耐磨、耐蚀性能，C元素可降低涂层表面的摩擦系数，同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能，并能阻止涂层裂纹的扩展，可改善传统碳氮化合物涂层刀具的物理机械性能。
该SiNbCN多元梯度复合涂层刀具具有很高的硬度和韧性，良好的抗扩散磨损性能、抵抗塑性变形能力和优异的摩擦磨损特性。该多元梯度复合涂层刀具可有效防止切削刃崩刃及热裂纹的产生，保证工件加工表面质量，提高涂层刀具热稳定性50％以上，延长刀具使用寿命和耐用度60％以上。该SiNbCN多元梯度复合涂层刀具可广泛应用于淬硬钢、铝合金等难加工材料的高速、高精密连续或断续切削加工。
附图说明
图1为本发明的SiNbCN多元梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Ti过渡层、3为SiNbC过渡层、4为SiNbCN多元梯度复合涂层。
具体实施方式：
下面给出本发明的二个最佳实施例：
实施例一：
本发明SiNbCN多元梯度复合涂层刀具及其制备方法，该刀具为普通的机夹车刀片，其基体材料为：硬质合金P10，涂层刀具由内至外依次为刀具基体、Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层。沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射SiNbC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积SiNbC过渡层和氮含量梯度渐变的SiNbCN多元梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各35min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至280℃，保温35min；
(2)离子清洗：通Ar气，其压力为1.0Pa，开启偏压电源，电压500V，占空比0.3，辉光放电清洗40min；降低偏压至400V，占空比0.3，开启离子源离子清洗25min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压400V，占空比0.3，离子轰击2min；
(3)沉积Ti过渡层：Ar气压0.7Pa，偏压降至250V，Ti靶电流60A，沉积温度230℃，电弧镀Ti过渡层6min；
(4)沉积SiNbC过渡层：Ar气压0.8Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度220℃，开启非平衡磁控溅射SiNbC靶电流35A，沉积SiNbC过渡层7min；
(5)沉积SiNbCN多元梯度复合层：开启N2，N2气压为0.7Pa，Ar气压0.7Pa，偏压150V，SiNbC靶电流35A，沉积温度210℃，沉积SiNbCN复合层7min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积SiNbCN复合层7min，直至N2气压升至1.6Pa，再沉积SiNbCN复合层7min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二：
本发明SiNbCN多元梯度复合涂层刀具及其制备方法，该刀具为普通铰刀，其刀具基体材料为：M2高速钢，涂层刀具由内至外依次为刀具基体、Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层。沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射SiNbC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积SiNbC过渡层和氮含量梯度渐变的SiNbCN多元梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各35min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至280℃，保温40min；
(2)离子清洗：通Ar气，其压力为1.0Pa，开启偏压电源，电压500V，占空比0.3，辉光放电清洗40min；降低偏压至400V，占空比0.3，开启离子源离子清洗25min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压400V，占空比0.3，离子轰击3min；
(3)沉积Ti过渡层：Ar气压0.8Pa，偏压降至250V，Ti靶电流60A，沉积温度230℃，电弧镀Ti过渡层7min；
(4)沉积SiNbC过渡层：Ar气压0.9Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度220℃，开启非平衡磁控溅射SiNbC靶电流35A，沉积SiNbC过渡层8min；
(5)沉积SiNbCN多元梯度复合层：开启N2，N2气压为0.7Pa，Ar气压0.9Pa，偏压150V，SiNbC靶电流35A，沉积温度210℃，沉积SiNbCN复合层8min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积SiNbCN复合层8min，直至N2气压升至1.6Pa，再沉积SiNbCN复合层8min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (2)

1.一种SiNbCN多元梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，其特征在于，涂层刀具由内至外依次为刀具基体、Ti过渡层、SiNbC过渡层以及氮含量梯度渐变的SiNbCN多元梯度复合涂层。
2.一种根据权利要求1所述的SiNbCN多元梯度复合涂层刀具的制备方法，其特征在于，沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射SiNbC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积SiNbC过渡层和氮含量梯度渐变的SiNbCN多元梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各35min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至280℃，保温35～40min；
(2)离子清洗：通Ar气，其压力为1.0Pa，开启偏压电源，电压500V，占空比0.3，辉光放电清洗40min；降低偏压至400V，占空比0.3，开启离子源离子清洗25min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压400V，占空比0.3，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.7～0.8Pa，偏压降至250V，Ti靶电流60A，沉积温度230℃，电弧镀Ti过渡层6～7min；
(4)沉积SiNbC过渡层：Ar气压0.8～0.9Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度220℃，开启非平衡磁控溅射SiNbC靶电流35A，沉积SiNbC过渡层7～8min；
(5)沉积SiNbCN多元梯度复合层：开启N2，N2气压为0.7Pa，Ar气压0.7～0.9Pa，偏压150V，SiNbC靶电流35A，沉积温度210℃，沉积SiNbCN复合层7～8min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积SiNbCN复合层7～8min，直至N2气压升至1.6Pa，再沉积SiNbCN复合层7～8min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
CN201710533176.7A 2017-07-03 2017-07-03 SiNbCN多元梯度复合涂层刀具及其制备方法 Pending CN107385401A (zh)

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