CN107338417B - AlMoCN梯度复合涂层刀具及其制备方法 - Google Patents

AlMoCN梯度复合涂层刀具及其制备方法 Download PDF

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CN107338417B
CN107338417B CN201710532645.3A CN201710532645A CN107338417B CN 107338417 B CN107338417 B CN 107338417B CN 201710532645 A CN201710532645 A CN 201710532645A CN 107338417 B CN107338417 B CN 107338417B
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宋文龙
郭宗新
王首军
张璇
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Abstract

本发明属于机械制造切削刀具领域，特别是涉及一种AlMoCN梯度复合涂层刀具及其制备方法，该涂层采用非平衡磁控溅射和电弧镀的复合镀膜方法制备的AlMoCN梯度涂层刀具，涂层刀具由内至外依次为刀具基体、Ti过渡层、AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层。该AlMoCN超硬碳氮化合物涂层由于在涂层中同时增加了Al、Mo等两种元素，且涂层结构成分氮含量梯度渐变，可提高刀具的综合使用性能。该涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗扩散磨损性能和优异的摩擦磨损特性。切削过程中该刀具可减小干切削过程中的摩擦和切屑粘结，降低切削力和切削温度35％以上，提高涂层刀具热稳定性50％以上，提高刀具使用寿命和耐用度70％以上。

Description

AlMoCN梯度复合涂层刀具及其制备方法
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种AlMoCN梯度复合涂层刀具及其制备方法。
背景技术
随着现代工业的发展，越来越多耐磨、耐热、高硬度的工程材料被开发出来，工件材料水平的提高，必然导致加工过程中刀具加速磨损。从高速钢刀具到硬质合金刀具，到超硬材料刀具，再到涂层硬质合金刀具、多元复合涂层刀具，刀具技术的发展十分迅速。刀具水平发展至今，拥有优越的性价比和综合性能的多元复合涂层硬质合金刀具成为首选。目前工业发达国家的涂层刀具使用量已占刀具总数的80％以上，数控机床上所用的刀具90％以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,Mingxi Li.Influence of the C2H2flow rate on gradient TiCN films deposited bymulti-arc ion plating[J].Applied Surface Science,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种AlMoCN梯度复合涂层刀具及其制备方法。该刀具采用非平衡磁控溅射+电弧镀的复合镀膜方法，直接采用AlMoC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具或工具基体上制备。该涂层结构由基体到涂层表面依次为：Ti过渡层、AlMoC过渡层以及氮含量梯度渐变的AlMoCN梯度复合涂层。
涂层刀具表面为氮含量梯度渐变的AlMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和AlMoC过渡层。该梯度复合涂层刀具中的Al元素对涂层起到固溶强化作用，还能跟氧结合形成致密的Al2O3保护膜，改善涂层的高温氧化性能，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，可显著提高刀具的切削寿命和加工效率。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
为了实现上述发明目的，本发明采用的技术方案为：
本发明AlMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Ti过渡层、AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层。
本发明所述的AlMoCN梯度复合涂层刀具的制备方法，沉积方式为采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射AlMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至250℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.8～0.9Pa，偏压降至250V，Ti靶电流75A，沉积温度240℃，电弧镀Ti过渡层4～5min；
(4)沉积AlMoC过渡层：Ar气压0.6～0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度230℃，开启非平衡磁控溅射AlMoC靶电流40A，沉积AlMoC过渡层4～5min；
(5)沉积AlMoCN梯度复合层：开启N2，N2气压为0.5Pa，Ar气压0.7～0.8Pa，偏压200V，AlMoC靶电流40A，沉积温度220℃，沉积AlMoCN复合层4～5min，其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积AlMoCN复合层4～5min，直至N2气压升至1.9Pa，再沉积AlMoCN复合层4～5min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明的优点在于：
通过上述工艺制备的AlMoCN梯度复合涂层刀具，刀具表面为氮含量梯度渐变的AlMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和AlMoC过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该梯度复合涂层刀具中的Al元素对涂层起到固溶强化作用，还能跟氧结合形成致密的Al2O3保护膜，改善涂层的高温氧化性能，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，并能阻止涂层裂纹的扩展，可改善传统碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
该AlMoCN梯度复合涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗高温氧化性能和优异的摩擦磨损特性。该涂层刀具切削过程中可减小切屑的摩擦和粘结，降低切削力和切削温度35％以上，提高涂层刀具热稳定性50％以上，延长刀具使用寿命和耐用度70％以上，该AlMoCN梯度复合涂层刀具可广泛应用于淬硬钢、钛合金等难加工材料的高速、高精密连续或断续切削加工。
附图说明
图1为本发明的AlMoCN梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Ti过渡层、3为AlMoC过渡层、4为AlMoCN梯度复合涂层。
具体实施方式：
下面给出本发明的二个最佳实施例：
实施例一：
本发明AlMoCN梯度复合涂层刀具及其制备方法，该刀具为普通的铣刀片，其基体材料为：硬质合金M05，沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射AlMoC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层。具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至250℃，保温20min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2min；
(3)沉积Ti过渡层：Ar气压0.8Pa，偏压降至250V，Ti靶电流75A，沉积温度240℃，电弧镀Ti过渡层4min；
(4)沉积AlMoC过渡层：Ar气压0.6Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度230℃，开启非平衡磁控溅射AlMoC靶电流40A，沉积AlMoC过渡层4min；
(5)沉积AlMoCN梯度复合层：开启N2，N2气压为0.5Pa，Ar气压0.7Pa，偏压200V，AlMoC靶电流40A，沉积温度220℃，沉积AlMoCN复合层4min，其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积AlMoCN复合层4min，直至N2气压升至1.9Pa，再沉积AlMoCN复合层4min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二：
本发明AlMoCN梯度复合涂层刀具及其制备方法，该刀具为普通麻花钻头，其刀具基体材料为：高速钢W18Cr4V，沉积方式为采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射AlMoC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层。其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至250℃，保温25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击3min；
(3)沉积Ti过渡层：Ar气压0.9Pa，偏压降至250V，Ti靶电流75A，沉积温度240℃，电弧镀Ti过渡层4～5min；
(4)沉积AlMoC过渡层：Ar气压0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度230℃，开启非平衡磁控溅射AlMoC靶电流40A，沉积AlMoC过渡层5min；
(5)沉积AlMoCN梯度复合层：开启N2，N2气压为0.5Pa，Ar气压0.7～0.8Pa，偏压200V，AlMoC靶电流40A，沉积温度220℃，沉积AlMoCN复合层5min，其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积AlMoCN复合层5min，直至N2气压升至1.9Pa，再沉积AlMoCN复合层5min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (1)

1.一种AlMoCN梯度复合涂层刀具的制备方法，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Ti过渡层、AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层，其特征在于，沉积方式为采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射AlMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积AlMoC过渡层和氮含量梯度渐变的AlMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至250℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗25min；降低偏压至400V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流50A，偏压300V，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.8～0.9Pa，偏压降至250V，Ti靶电流75A，沉积温度240℃，电弧镀Ti过渡层4～5min；
(4)沉积AlMoC过渡层：Ar气压0.6～0.7Pa，偏压调至200V，关闭电弧镀Ti靶电源，沉积温度230℃，开启非平衡磁控溅射AlMoC靶电流40A，沉积AlMoC过渡层4～5min；
(5)沉积AlMoCN梯度复合层：开启N2，N2气压为0.5Pa，Ar气压0.7～0.8Pa，偏压200V，AlMoC靶电流40A，沉积温度220℃，沉积AlMoCN复合层4～5min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积AlMoCN复合层4～5min，直至N2气压升至1.9Pa，再沉积AlMoCN复合层4～5min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
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