CN106048538B - AlZrN多元复合硬质涂层刀具及其制备工艺 - Google Patents

AlZrN多元复合硬质涂层刀具及其制备工艺 Download PDF

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CN106048538B
CN106048538B CN201610416789.8A CN201610416789A CN106048538B CN 106048538 B CN106048538 B CN 106048538B CN 201610416789 A CN201610416789 A CN 201610416789A CN 106048538 B CN106048538 B CN 106048538B
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宋文龙
邓建新
李小冬
张璇
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Changzhou Kenda Tools Co., Ltd.
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Abstract

本发明属于机械制造金属切削刀具领域，特别是涉及一种AlZrN多元复合硬质涂层刀具及其制备工艺。AlZrN多元复合硬质涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，刀具表面为氮含量梯度渐变的AlZrN多元硬质涂层，刀具基体与表面涂层之间依次为Zr过渡层、Zr/Al梯度过渡层。该AlZrN多元复合硬质涂层由于在涂层中同时增加了Zr、Al等两种金属，且涂层结构成分氮含量梯度渐变，可改善涂层刀具的物理机械性能，增加涂层之间的结合力10％，提高涂层的强度和韧性15％，热稳定性和耐冲击性能提高15‑20％，提高刀具的使用寿命及切削性能20％以上。

Description

AlZrN多元复合硬质涂层刀具及其制备工艺
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种AlZrN多元复合硬质涂层刀具及其制备工艺。
背景技术
对刀具进行涂层处理是提高刀具性能的重要途径之一。涂层刀具将刀具基体与硬质涂层相结合，使刀具性能大大提高。TiN、ZrN、AlN等氮化物单涂层刀具自上世纪70年代成功应用于切削刀具后，成为目前应用最为广泛的涂层刀具。然而，随着切削加工技术的发展以及高速切削技术的推广，二元氮化物硬质涂层相对较弱的韧性和耐磨性限制了其应用。文献(Acta Materials.2011,59(1):68-74)报道了TiN硬涂层刀具切削加工时的作用机理及使用性能，但是这种硬涂层由于相对较高的摩擦系数，使用受到了限制。通过制备多元复合结构的涂层可以显著提高硬质涂层的韧性、强度及耐冲击性等综合性能，涂层的多元复合结构已经成为涂层刀具的重要发展方向。但目前多元复合涂层主要是通过增加金属过渡层改善不同涂层成分间物理性能差异，实际效果有待提高。
发明内容
本发明的目的在于克服目前现有二元刀具技术的不足，结合多元复合涂层结构的优点提供一种AlZrN多元复合硬质涂层刀具及其制备工艺。
本发明是通过以下方式实现的：
AlZrN多元复合硬质涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，刀具表面为氮含量梯度渐变的AlZrN多元硬质涂层，刀具基体与表面涂层之间依次为Zr过渡层、Zr/Al梯度过渡层。
AlZrN多元复合硬质涂层刀具的制备工艺，沉积方式为采用多弧离子镀沉积方法，使用1个Zr多弧靶和1个Al多弧靶，在刀具基体表面依次沉积Zr过渡层、Zr/Al梯度过渡层及AlZrN多元硬质涂层。
具体包括以下步骤：
1)前处理：将刀具基体表面打磨、抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Zr靶的电弧源，靶电流70A，偏压500V，离子轰击Zr靶2min；
3)沉积Zr过渡层：调整Ar气压0.5～0.6Pa，偏压降至300V，沉积温度260～280℃，Zr靶电流80A，电弧镀Zr过渡层2～3min；Zr靶电流100A，电弧镀Zr过渡层3～5min；
4)沉积Zr/Al梯度过渡层：Ar气压0.5～0.6Pa，偏压250V，Zr靶电流100A，打开Al靶电流为60A，沉积温度250～280℃，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为80A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为100A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为120A，沉积Zr/Al过渡层2～3min；
5)沉积AlZrN多元硬质层：保持其它参数不变，开启N2，N2气压为0.8Pa，占空比为0.4，复合沉积AlZrN多元硬质层15min；其它参数不变，N2气压调为1.0Pa，复合沉积AlZrN多元硬质层15min；N2气压调为1.2Pa，复合沉积AlZrN多元硬质层15min；N2气压调为1.5Pa，复合沉积AlZrN多元硬质层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明具有如下技术效果：
本发明通过多弧离子镀方法制备了AlZrN多元复合硬质涂层刀具，其表面涂层为AlZrN多元硬质涂层，刀具基体与涂层间有Zr过渡层，Zr过渡层与表面AlZrN涂层间有Zr/Al过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该AlZrN多元复合硬质涂层由于在涂层中同时增加了Zr、Al等两种金属，且涂层结构成分氮含量梯度渐变，可改善涂层刀具的物理机械性能，增加涂层之间的结合力10％，提高涂层的强度和韧性15％，热稳定性和耐冲击性能提高15-20％，提高刀具的使用寿命及切削性能20％以上。该AlZrN多元复合硬质涂层刀具是一种新型的耐磨、耐高温的涂层刀具，可广泛应用于各种淬硬合金钢的高速干切削加工。
附图说明
图1为本发明AlZrN多元复合硬质涂层刀具的涂层结构示意图。
图中：1为刀具基体、2为Zr过渡层、3为Zr/Al梯度过渡层、4为AlZrN多元硬质涂层。
具体实施方式
下面给出本发明的最佳实施例：
实施例1
如图1所示，一种AlZrN多元复合硬质涂层刀具，该刀具为普通的铣刀片，其基体材料为：硬质合金YT15；涂层材料为：Zr、Zr/Al和AlZrN；沉积方式为：采用多弧离子镀沉积方法，使用1个Zr多弧靶和1个Al多弧靶，在刀具基体表面依次沉积Zr过渡层、Zr/Al梯度过渡层及AlZrN多元硬质涂层，其制备工艺为：
1)前处理：将刀具基体表面打磨、抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Zr靶的电弧源，靶电流70A，偏压500V，离子轰击Zr靶2min；
3)沉积Zr过渡层：调整Ar气压0.5～0.6Pa，偏压降至300V，沉积温度260～280℃，Zr靶电流80A，电弧镀Zr过渡层2～3min；Zr靶电流100A，电弧镀Zr过渡层3～5min；
4)沉积Zr/Al梯度过渡层：Ar气压0.5～0.6Pa，偏压250V，Zr靶电流100A，打开Al靶电流为60A，沉积温度250～280℃，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为80A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为100A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为120A，沉积Zr/Al过渡层2～3min；
5)沉积AlZrN多元硬质涂层：保持其它参数不变，开启N2，N2气压为0.8Pa，占空比为0.4，复合沉积AlZrN层15min；其它参数不变，N2气压调为1.0Pa，复合沉积AlZrN层15min；N2气压调为1.2Pa，复合沉积AlZrN层15min；N2气压调为1.5Pa，复合沉积AlZrN层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例2
如图1所示，一种AlZrN多元复合硬质涂层刀具，该刀具为普通麻花钻，其基体材料为：高速钢W18Cr4V；涂层材料为：Zr、Zr/Al和AlZrN；沉积方式为：采用多弧离子镀沉积方法，使用1个Zr多弧靶和1个Al多弧靶，在刀具基体表面依次沉积Zr过渡层、Zr/Al梯度过渡层及AlZrN多元硬质涂层，其制备工艺为：
1)前处理：将刀具基体表面打磨、抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Zr靶的电弧源，靶电流70A，偏压500V，离子轰击Zr靶2min；
3)沉积Zr过渡层：调整Ar气压0.5～0.6Pa，偏压降至300V，沉积温度260～280℃，Zr靶电流80A，电弧镀Zr过渡层2～3min；Zr靶电流100A，电弧镀Zr过渡层3～5min；
4)沉积Zr/Al梯度过渡层：Ar气压0.5～0.6Pa，偏压250V，Zr靶电流100A，打开Al靶电流为60A，沉积温度250～280℃，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为80A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为100A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为120A，沉积Zr/Al过渡层2～3min；
5)沉积AlZrN多元硬质涂层：保持其它参数不变，开启N2，N2气压为0.8Pa，占空比为0.4，复合沉积AlZrN层15min；其它参数不变，N2气压调为1.0Pa，复合沉积AlZrN层15min；N2气压调为1.2Pa，复合沉积AlZrN层15min；N2气压调为1.5Pa，复合沉积AlZrN层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (3)

1.AlZrN多元复合硬质涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷或立方氮化硼，其特征在于，刀具表面为氮含量梯度递增的AlZrN多元硬质涂层，刀具基体与表面涂层之间依次为Zr过渡层、Zr/Al梯度过渡层。
2.如权利要求1所述AlZrN多元复合硬质涂层刀具的制备工艺，其特征在于，沉积方式为采用多弧离子镀沉积方法，使用1个Zr多弧靶和1个Al多弧靶，在刀具基体表面依次沉积Zr过渡层、Zr/Al梯度过渡层及AlZrN多元硬质涂层。
3.根据权利要求2所述AlZrN多元复合硬质涂层刀具的制备工艺，其特征在于，具体包括以下步骤：
1)前处理：将刀具基体表面打磨、抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至300℃，保温30～40min；
2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压1000V，占空比0.5，辉光放电清洗15min；降低偏压至800V，开启离子源离子清洗25min，开启Zr靶的电弧源，靶电流70A，偏压500V，离子轰击Zr靶2min；
3)沉积Zr过渡层：调整Ar气压0.5～0.6Pa，偏压降至300V，沉积温度260～280℃，Zr靶电流80A，电弧镀Zr过渡层2～3min；Zr靶电流100A，电弧镀Zr过渡层3～5min；
4)沉积Zr/Al梯度过渡层：Ar气压0.5～0.6Pa，偏压250V，Zr靶电流100A，打开Al靶电流为60A，沉积温度250～280℃，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为80A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为100A，沉积Zr/Al过渡层2～3min；Zr靶电流调为80A，Al靶电流调为120A，沉积Zr/Al过渡层2～3min；
5)沉积AlZrN多元硬质层：保持其它参数不变，开启N2，N2气压为0.8Pa，占空比为0.4，复合沉积AlZrN多元硬质层15min；其它参数不变，N2气压调为1.0Pa，复合沉积AlZrN多元硬质层15min；N2气压调为1.2Pa，复合沉积AlZrN多元硬质层15min；N2气压调为1.5Pa，复合沉积AlZrN多元硬质层10min；
6)后处理：关闭各电源、离子源及气体源，涂层结束。
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