CN107400865A - ZrAlCN梯度复合涂层刀具及其制备方法 - Google Patents
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Abstract
本发明属于机械制造切削刀具领域,涉及一种ZrAlCN梯度复合涂层刀具及其制备方法,涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层,首先采用非平衡磁控溅射沉积Ti过渡层,然后采用中频磁控溅射方法依次沉积ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层。该ZrAlCN超硬碳氮化合物涂层由于在涂层中同时增加了Zr、Al等两种金属,且涂层结构成分氮含量梯度渐变,可改善涂层刀具的物理机械性能。该涂层具有极高的强度和硬度,较低的摩擦系数,良好的抗磨损及热冲击性。切削过程中该刀具可有效防止切削刃崩刃及热裂纹的产生,减小刀具表面的摩擦和粘结,降低刀具磨损30‑40%,提高涂层刀具使用寿命50%以上。
Description
技术领域
本发明属于机械制造金属切削刀具技术领域,具体涉及一种ZrAlCN梯度复合涂层刀具及其制备方法。
背景技术
涂层刀具能够将刀具基体材料与涂层的优良性能相结合,既保持了基体良好的韧性和强度,又具有涂层高硬度和良好减摩耐磨性,改善基体材料的性能,拓宽其应用范围和寿命。目前工业发达国家的涂层刀具使用量已占刀具总数的80%以上,数控机床上所用的刀具90%以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层,TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性,显著提高了其摩擦磨损性能(Jinlong Li,ShihongZhang,Mingxi Li.Influence of the C2H2flow rate on gradient TiCN filmsdeposited by multi-arc ion plating[J].Applied Surface Science,2013(283):134-144.),已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工,在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备方法”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀,解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点,但同时因其热稳定性和红硬性较差,仅适合应用于低速切削或具有良好冷却条件的场合,需要对传统TiCN涂层结构和制备方法进行改进。目前,多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径,通过制备多元复合涂层,既可提高涂层与基体的结合强度,又兼顾多种单涂层的综合性能,显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备,即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成,沉积温度通常超过400-500℃,对基体产生不利影响,同时气体碳源容易对涂层设备造成污染,制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足,结合多元复合涂层结构的优点提供一种ZrAlCN梯度复合涂层刀具及其制备方法。该刀具采用中频磁控溅射+非平衡磁控溅射的复合镀膜方法,直接采用ZrAlC复合靶提供碳源,且沉积温度控制在300℃以下,可在更为广泛的刀具或工具基体上制备。该涂层结构为涂层刀具表面为氮含量梯度渐变的ZrAlCN梯度复合涂层,刀具基体与涂层间依次为Ti过渡层和ZrAlC过渡层。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用,提高了涂层的硬度、强度和抗磨损特性,Al元素改善了涂层的抗高温氧化性能,使涂层刀具具有更优异的化学稳定性和红硬性,可显著改善涂层刀具的摩擦磨损性能,提高刀具的切削寿命和加工效率。该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异,改善结构和性能上的匹配性,增大涂层与基体的结合力和涂层的耐冲击性能。
为了实现上述发明目的,本发明采用的技术方案为:
本发明所述的ZrAlCN梯度复合涂层刀具,刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种,涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层。
本发明所述的ZrAlCN梯度复合涂层刀具的制备方法,沉积方式采用中频磁控溅射和非平衡磁控溅射的复合镀膜方法,沉积时使用2个中频磁控溅射ZrAlC复合靶,2个非平衡磁控溅射Ti靶,首先采用非平衡磁控溅射沉积Ti过渡层,然后采用中频磁控溅射方法依次沉积ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层,其制备具体步骤如下:
(1)前处理:将刀具基体表面抛光,去除表面油污、锈迹等杂质,然后依次放入酒精和丙酮中,超声清洗各30min,去除刀具表面油污和其它附着物,电吹风干燥充分后迅速放入镀膜机,抽真空至7.0×10-3Pa,加热至250℃,保温30~35min;
(2)离子清洗:通Ar气,其压力为1.3Pa,开启偏压电源,电压600V,占空比0.2,辉光放电清洗30min;降低偏压至400V,占空比0.2,开启离子源离子清洗20min,开启非平衡磁控溅射Ti靶电源,Ti靶电流30A,偏压300V,离子轰击1~2min;
(3)沉积Ti过渡层:调整Ar气气压0.6~0.7Pa,偏压降至250V,Ti靶电流35A,沉积温度250℃,非平衡磁控溅射Ti过渡层4~5min;
(4)沉积ZrAlC过渡层:调整Ar气Ar气压0.5~0.6Pa,偏压调至200V,关闭非平衡磁控溅射Ti靶电源,开启中频磁控溅射,ZrAlC靶电流30A,沉积ZrAlC过渡层4~5min;
(5)沉积ZrAlCN梯度复合层:开启N2,N2气压为0.8Pa,Ar气压0.6~0.7Pa,偏压220V,ZrAlC靶电流35A,沉积温度220℃,沉积ZrAlCN复合层9~10min,其它参数不变,升高N2气压,N2气压每次升高0.1Pa,沉积ZrAlCN复合层9~10min,直至N2气压升至1.6Pa,再沉积ZrAlCN复合层9~10min;
(6)后处理:关闭各电源、离子源及气体源,涂层结束。
与现有技术相比,本发明的有益效果为:
该ZrAlCN梯度复合涂层刀具在切削过程中可有效防止切削刃崩刃及热裂纹的产生,减小刀具表面的摩擦和粘结,降低刀具磨损30-40%,提高涂层刀具使用寿命40%以上,该ZrAlCN梯度复合涂层刀具可广泛应用于淬硬钢、钛合金等难加工材料的高速、高精密连续或断续切削加工。
通过上述工艺制备的ZrAlCN梯度复合涂层刀具,刀具表面为氮含量梯度渐变的ZrAlCN梯度复合涂层,刀具基体与涂层间依次为Ti过渡层和ZrAlC过渡层。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用,提高了涂层的硬度、强度和抗磨损特性,Al元素改善了涂层的抗高温氧化性能,使涂层刀具具有更优异的化学稳定性和红硬性,且涂层结构成分氮含量梯度渐变,可改善传统三元碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异,改善结构和性能上的匹配性,增大涂层与基体的结合力和涂层的耐冲击性能。
附图说明
图1为本发明的ZrAlCN梯度复合涂层刀具的截面图;
图中:1为刀具基体、2为Ti过渡层、3为ZrAlC过渡层、4为ZrAlCN梯度复合涂层。
具体实施方式
下面结合具体实施例对本发明作更进一步的说明,以便本领域专业人员做进一步了解,但并不因此限制本发明。
实施例1
本发明ZrAlCN梯度复合涂层刀具及其制备方法,该刀具为普通的铣刀片,其基体材料为:硬质合金YG8,沉积方式为采用中频磁控溅射+非平衡磁控溅射的复合镀膜方法,沉积时使用2个中频磁控溅射ZrAlC复合靶,2个非平衡磁控溅射Ti靶,首先采用非平衡磁控溅射沉积Ti过渡层,然后采用中频磁控溅射方法沉积ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层,其制备方法为:
(1)前处理:将刀具基体表面抛光,去除表面油污、锈迹等杂质,然后依次放入酒精和丙酮中,超声清洗各30min,去除刀具表面油污和其它附着物,电吹风干燥充分后迅速放入镀膜机,抽真空至7.0×10-3Pa,加热至250℃,保温30min;
(2)离子清洗:通Ar气,其压力为1.3Pa,开启偏压电源,电压600V,占空比0.2,辉光放电清洗30min;降低偏压至400V,占空比0.2,开启离子源离子清洗20min,开启非平衡磁控溅射Ti靶电源,Ti靶电流30A,偏压300V,离子轰击2min;
(3)沉积Ti过渡层:Ar气压0.7Pa,偏压降至250V,Ti靶电流35A,沉积温度250℃,非平衡磁控溅射Ti过渡层5min;
(4)沉积ZrAlC过渡层:Ar气压0.6Pa,偏压调至200V,关闭非平衡磁控溅射Ti靶电源,开启中频磁控溅射ZrAlC靶电流30A,沉积ZrAlC过渡层5min;
(5)沉积ZrAlCN梯度复合层:开启N2,N2气压为0.8Pa,Ar气压0.6Pa,偏压220V,ZrAlC靶电流35A,沉积温度220℃,沉积ZrAlCN复合层10min;其它参数不变,升高N2气压,N2气压每次升高0.1Pa,沉积ZrAlCN复合层10min,直至N2气压升至1.6Pa,再沉积ZrAlCN复合层10min;
(6)后处理:关闭各电源、离子源及气体源,涂层结束。
实施例2
本发明ZrAlCN梯度复合涂层刀具及其制备方法,该刀具为普通麻花钻,其刀具基体材料为:高速钢W18Cr4V,沉积方式为采用中频磁控溅射+非平衡磁控溅射的复合镀膜方法,沉积时使用2个中频磁控溅射ZrAlC复合靶,2个非平衡磁控溅射Ti靶,首先采用非平衡磁控溅射沉积Ti过渡层,然后采用中频磁控溅射方法沉积ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层,其制备方法为:
(1)前处理:将刀具基体表面抛光,去除表面油污、锈迹等杂质,然后依次放入酒精和丙酮中,超声清洗各30min,去除刀具表面油污和其它附着物,电吹风干燥充分后迅速放入镀膜机,抽真空至7.0×10-3Pa,加热至250℃,保温30min;
(2)离子清洗:通Ar气,其压力为1.3Pa,开启偏压电源,电压600V,占空比0.2,辉光放电清洗30min;降低偏压至400V,占空比0.2,开启离子源离子清洗20min,开启非平衡磁控溅射Ti靶电源,Ti靶电流30A,偏压300V,离子轰击1min;
(3)沉积Ti过渡层:Ar气压0.6Pa,偏压降至250V,Ti靶电流35A,沉积温度250℃,非平衡磁控溅射Ti过渡层4min;
(4)沉积ZrAlC过渡层:Ar气压0.5Pa,偏压调至200V,关闭非平衡磁控溅射Ti靶电源,开启中频磁控溅射ZrAlC靶电流30A,沉积ZrAlC过渡层4min;
(5)沉积ZrAlCN梯度复合层:开启N2,N2气压为0.8Pa,Ar气压0.7Pa,偏压220V,ZrAlC靶电流35A,沉积温度220℃,沉积ZrAlCN复合层9min;其它参数不变,升高N2气压,N2气压每次升高0.1Pa,沉积ZrAlCN复合层9min,直至N2气压升至1.6Pa,再沉积ZrAlCN复合层9min;
(6)后处理:关闭各电源、离子源及气体源,涂层结束。
Claims (2)
1.一种ZrAlCN梯度复合涂层刀具,刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种,其特征在于,涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层。
2.一种如权利要求1所述的ZrAlCN梯度复合涂层刀具的制备方法,其特征在于,沉积方式采用中频磁控溅射和非平衡磁控溅射的复合镀膜方法,沉积时使用2个中频磁控溅射ZrAlC复合靶,2个非平衡磁控溅射Ti靶,首先采用非平衡磁控溅射沉积Ti过渡层,然后采用中频磁控溅射方法依次沉积ZrAlC过渡层和氮含量梯度渐变的ZrAlCN梯度复合涂层,其制备具体步骤如下:
(1)前处理:将刀具基体表面抛光,去除表面油污、锈迹等杂质,然后依次放入酒精和丙酮中,超声清洗各30min,去除刀具表面油污和其它附着物,电吹风干燥充分后迅速放入镀膜机,抽真空至7.0×10-3Pa,加热至250℃,保温30~35min;
(2)离子清洗:通Ar气,其压力为1.3Pa,开启偏压电源,电压600V,占空比0.2,辉光放电清洗30min;降低偏压至400V,占空比0.2,开启离子源离子清洗20min,开启非平衡磁控溅射Ti靶电源,Ti靶电流30A,偏压300V,离子轰击1~2min;
(3)沉积Ti过渡层:调整Ar气气压0.6~0.7Pa,偏压降至250V,Ti靶电流35A,沉积温度250℃,非平衡磁控溅射Ti过渡层4~5min;
(4)沉积ZrAlC过渡层:调整Ar气Ar气压0.5~0.6Pa,偏压调至200V,关闭非平衡磁控溅射Ti靶电源,开启中频磁控溅射,ZrAlC靶电流30A,沉积ZrAlC过渡层层4~5min;
(5)沉积ZrAlCN梯度复合层:开启N2,N2气压为0.8Pa,Ar气压0.6~0.7Pa,偏压220V,ZrAlC靶电流35A,沉积温度220℃,沉积ZrAlCN复合层9~10min,其它参数不变,升高N2气压,N2气压每次升高0.1Pa,沉积ZrAlCN复合层9~10min,直至N2气压升至1.6Pa,再沉积ZrAlCN复合层9~10min;
(6)后处理:关闭各电源、离子源及气体源,涂层结束。
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