CN107400867A - CrMoCN梯度复合涂层刀具及其制备方法 - Google Patents

CrMoCN梯度复合涂层刀具及其制备方法 Download PDF

Info

Publication number
CN107400867A
CN107400867A CN201710533177.1A CN201710533177A CN107400867A CN 107400867 A CN107400867 A CN 107400867A CN 201710533177 A CN201710533177 A CN 201710533177A CN 107400867 A CN107400867 A CN 107400867A
Authority
CN
China
Prior art keywords
crmocn
transition zones
coating
gradient
tool
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710533177.1A
Other languages
English (en)
Inventor
宋文龙
郭宗新
王首军
张璇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jining University
Original Assignee
Jining University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jining University filed Critical Jining University
Priority to CN201710533177.1A priority Critical patent/CN107400867A/zh
Publication of CN107400867A publication Critical patent/CN107400867A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/021—Cleaning or etching treatments
    • C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

本发明属于机械制造切削刀具领域，涉及一种CrMoCN梯度复合涂层刀具及其制备方法，涂层刀具由内至外依次为刀具基体、Cr过渡层、CrMoC过渡层以及氮含量梯度渐变的CrMoCN梯度复合涂层，该涂层为采用非平衡磁控溅射和电弧镀的复合镀膜方法。该CrMoCN超硬碳氮化合物涂层由于在涂层中同时增加了Cr、Mo等两种元素，且涂层结构成分氮含量梯度渐变，可提高刀具的综合使用性能。该涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗氧化性能，并能阻止涂层裂纹的扩展。切削过程中该刀具可减小干切削过程中刀‑工和刀‑屑的摩擦和粘结，降低切削力和切削温度40％以上，提高涂层刀具高温抗氧化性能60％以上，延长刀具使用寿命和耐用度50％以上。

Description

CrMoCN梯度复合涂层刀具及其制备方法
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种CrMoCN梯度复合涂层刀具及其制备方法。
背景技术
高速切削和干切削技术的发展，对刀具材料和刀具切削性能提出更高的要求，而对切削刀具进行涂层是提高其性能的重要途径。涂层刀具是在韧性较好的刀体上涂覆一层或多层耐磨性好的难熔化合物，它结合了基体高强度高韧性和涂层高硬度高耐磨性的优点，既可实现刀具的高速切割和耐磨性的改善，又可提高工件的加工精度和加工质量，是切削刀具研制的重要方向。目前工业发达国家的涂层刀具使用量已占刀具总数的80％以上，数控机床上所用的刀具90％以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,Mingxi Li.Influence of the C2H2flow rate on gradientTiCN films deposited by multi-arc ion plating[J].Applied Surface Science,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Cr靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种CrMoCN梯度复合涂层刀具及其制备方法。该刀具采用非平衡磁控溅射+电弧镀的复合镀膜方法，直接采用CrMoC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具或工具基体上制备。该涂层结构由基体到涂层表面依次为：Cr过渡层、CrMoC过渡层以及氮含量梯度渐变的CrMoCN梯度复合涂层。
涂层刀具表面为氮含量梯度渐变的CrMoCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和CrMoC过渡层。该梯度复合涂层刀具中的Cr元素对涂层起到固溶强化作用，改善涂层的抗氧化性能，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，可显著提高刀具的切削寿命和加工效率。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
为了实现上述发明目的，本发明采用的技术方案为：
本发明CrMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Cr过渡层、CrMoC过渡层以及氮含量梯度渐变的CrMoCN梯度复合涂层。
本发明所述的CrMoCN梯度复合涂层刀具的制备方法，沉积方式采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射CrMoC复合靶，2个电弧镀Cr靶，首先采用电弧镀沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积CrMoC过渡层和氮含量梯度渐变的CrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各25min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至250℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.4，辉光放电清洗25min；降低偏压至400V，占空比0.3，开启离子源离子清洗30min，开启电弧镀Cr靶电源，Cr靶电流60A，偏压300V，离子轰击2～3min；
(3)沉积Cr过渡层：Ar气压0.8～0.9Pa，偏压降至250V，Cr靶电流80A，沉积温度240℃，电弧镀Cr过渡层5～6min；
(4)沉积CrMoC过渡层：Ar气压0.7～0.8Pa，偏压调至230V，关闭电弧镀Cr靶电源，沉积温度220℃，开启非平衡磁控溅射CrMoC靶电流35A，沉积CrMoC过渡层5～6min；
(5)沉积CrMoCN梯度复合层：开启N2，N2气压为0.4Pa，Ar气压0.7～0.8Pa，偏压180V，CrMoC靶电流40A，沉积温度200℃，沉积CrMoCN复合层5～6min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积CrMoCN复合层5～6min，直至N2气压升至1.9Pa，再沉积CrMoCN复合层5～6min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
通过上述工艺制备的CrMoCN梯度复合涂层刀具，刀具表面为氮含量梯度渐变的CrMoCN梯度复合涂层，刀具基体与涂层间依次为Cr过渡层和CrMoC过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该梯度复合涂层刀具中的Cr元素对涂层起到固溶强化作用，改善涂层的抗氧化性能，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，并能阻止涂层裂纹的扩展，可改善传统碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
该CrMoCN梯度复合涂层刀具具有很高的硬度和强度，较低的表面摩擦系数，良好的抗氧化性能性能，并能阻止涂层裂纹的扩展。切削过程中该刀具可减小干切削过程中刀-工和刀-屑的摩擦和粘结，降低切削力和切削温度40％以上，提高涂层刀具高温抗氧化性能60％以上，延长刀具使用寿命和耐用度50％以上，该CrMoCN梯度复合涂层刀具可广泛应用于各种淬硬钢、钛合金等难加工材料的高速、高精密连续或断续切削加工。
附图说明
图1为本发明的CrMoCN梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Cr过渡层、3为CrMoC过渡层、4为CrMoCN梯度复合涂层。
具体实施方式：
下面给出本发明的二个最佳实施例：
实施例一：
本发明CrMoCN梯度复合涂层刀具及其制备方法，该刀具为普通的机夹车刀片，其基体材料为：硬质合金YT14，沉积方式采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射CrMoC复合靶，2个电弧镀Cr靶。首先采用电弧镀沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积CrMoC过渡层和氮含量梯度渐变的CrMoCN梯度复合涂层，其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各25min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至250℃，保温20min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.4，辉光放电清洗25min；降低偏压至400V，占空比0.3，开启离子源离子清洗30min，开启电弧镀Cr靶电源，Cr靶电流60A，偏压300V，离子轰击2min；
(3)沉积Cr过渡层：Ar气压0.8Pa，偏压降至250V，Cr靶电流80A，沉积温度240℃，电弧镀Cr过渡层5min；
(4)沉积CrMoC过渡层：Ar气压0.7Pa，偏压调至230V，关闭电弧镀Cr靶电源，沉积温度220℃，开启非平衡磁控溅射CrMoC靶电流35A，沉积CrMoC过渡层5min；
(5)沉积CrMoCN梯度复合层：开启N2，N2气压为0.4Pa，Ar气压0.7Pa，偏压180V，CrMoC靶电流40A，沉积温度200℃，沉积CrMoCN复合层5min；；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积CrMoCN复合层5min，直至N2气压升至1.9Pa，再沉积CrMoCN复合层5min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二：
本发明CrMoCN梯度复合涂层刀具及其制备方法，该刀具为普通麻花钻头，其刀具基体材料为：高速钢W18Cr4V，沉积方式采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射CrMoC复合靶，2个电弧镀Cr靶。首先采用电弧镀沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积CrMoC过渡层和氮含量梯度渐变的CrMoCN梯度复合涂层，其制备方法为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各25min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至250℃，保温25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.4，辉光放电清洗25min；降低偏压至400V，占空比0.3，开启离子源离子清洗30min，开启电弧镀Cr靶电源，Cr靶电流60A，偏压300V，离子轰击3min；
(3)沉积Cr过渡层：Ar气压0.9Pa，偏压降至250V，Cr靶电流80A，沉积温度240℃，电弧镀Cr过渡层6min；
(4)沉积CrMoC过渡层：Ar气压0.8Pa，偏压调至230V，关闭电弧镀Cr靶电源，沉积温度220℃，开启非平衡磁控溅射CrMoC靶电流35A，沉积CrMoC过渡层6min；
(5)沉积CrMoCN梯度复合层：开启N2，N2气压为0.4Pa，Ar气压0.7～0.8Pa，偏压180V，CrMoC靶电流40A，沉积温度200℃，沉积CrMoCN复合层6min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积CrMoCN复合层6min，直至N2气压升至1.9Pa，再沉积CrMoCN复合层6min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (2)

1.一种CrMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，其特征在于，涂层刀具由内至外依次为刀具基体、Cr过渡层、CrMoC过渡层以及氮含量梯度渐变的CrMoCN梯度复合涂层。
2.一种如权利要求1所述的CrMoCN梯度复合涂层刀具的制备方法，其特征在于，沉积方式采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射CrMoC复合靶，2个电弧镀Cr靶，首先采用电弧镀沉积Cr过渡层，然后采用非平衡磁控溅射方法沉积CrMoC过渡层和氮含量梯度渐变的CrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各25min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至7.0×10-3Pa，加热至250℃，保温20～25min；
(2)离子清洗：通Ar气，其压力为1.3Pa，开启偏压电源，电压600V，占空比0.4，辉光放电清洗25min；降低偏压至400V，占空比0.3，开启离子源离子清洗30min，开启电弧镀Cr靶电源，Cr靶电流60A，偏压300V，离子轰击2～3min；
(3)沉积Cr过渡层：Ar气压0.8～0.9Pa，偏压降至250V，Cr靶电流80A，沉积温度240℃，电弧镀Cr过渡层5～6min；
(4)沉积CrMoC过渡层：Ar气压0.7～0.8Pa，偏压调至230V，关闭电弧镀Cr靶电源，沉积温度220℃，开启非平衡磁控溅射CrMoC靶电流35A，沉积CrMoC过渡层5～6min；
(5)沉积CrMoCN梯度复合层：开启N2，N2气压为0.4Pa，Ar气压0.7～0.8Pa，偏压180V，CrMoC靶电流40A，沉积温度200℃，沉积CrMoCN复合层5～6min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积CrMoCN复合层5～6min，直至N2气压升至1.9Pa，再沉积CrMoCN复合层5～6min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
CN201710533177.1A 2017-07-03 2017-07-03 CrMoCN梯度复合涂层刀具及其制备方法 Pending CN107400867A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710533177.1A CN107400867A (zh) 2017-07-03 2017-07-03 CrMoCN梯度复合涂层刀具及其制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710533177.1A CN107400867A (zh) 2017-07-03 2017-07-03 CrMoCN梯度复合涂层刀具及其制备方法

Publications (1)

Publication Number Publication Date
CN107400867A true CN107400867A (zh) 2017-11-28

Family

ID=60404721

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710533177.1A Pending CN107400867A (zh) 2017-07-03 2017-07-03 CrMoCN梯度复合涂层刀具及其制备方法

Country Status (1)

Country Link
CN (1) CN107400867A (zh)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Similar Documents

Publication Publication Date Title
CN105112858B (zh) 一种多层结构的纳米复合刀具涂层
CN107747092B (zh) 一种耐高温硬质复合涂层及其制备方法和涂层刀具
CN107338411B (zh) AlNbCN多元梯度复合涂层刀具及其制备方法
CN105887024B (zh) TiCrN＆MoS2/Cr/Ti叠层涂层刀具及其制备工艺
CN110158044A (zh) 一种多元复合梯度涂层刀具及其制备方法
CN105584148A (zh) 硬质耐高温自润滑涂层制品及其制备方法
CN101831608A (zh) 一种纳米复合钛铝硅氮化物刀具涂层及其制备方法
CN107177828B (zh) SiZrCN梯度复合涂层刀具及其制备方法
CN107354431A (zh) TiMoCN梯度复合涂层刀具及其制备方法
CN105861997B (zh) TiCrN/MoS2多元减摩润滑涂层刀具及其制备工艺
CN107177827B (zh) SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺
CN106893975B (zh) AlC/AlCN叠层涂层刀具及其制备工艺
CN107354432A (zh) ZrCrCN梯度复合涂层刀具及其制备方法
CN107177825B (zh) ZrNbC/ZrNbCN叠层涂层刀具及其制备工艺
CN107400865A (zh) ZrAlCN梯度复合涂层刀具及其制备方法
CN107400863A (zh) ZrNbCN梯度复合涂层刀具及其制备方法
CN107400867A (zh) CrMoCN梯度复合涂层刀具及其制备方法
CN107338412A (zh) CrNbC/CrNbCN叠层复合涂层刀具及其制备工艺
CN107338417B (zh) AlMoCN梯度复合涂层刀具及其制备方法
CN107385401A (zh) SiNbCN多元梯度复合涂层刀具及其制备方法
CN107177826B (zh) MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺
CN105861996B (zh) Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺
CN107338416A (zh) ZrMoCN梯度复合涂层刀具及其制备方法
CN106835032B (zh) 一种B-Cr/ta-C涂层刀具及其制备方法
CN107354433A (zh) CrNbCN多元梯度复合涂层刀具及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20171128

RJ01 Rejection of invention patent application after publication