CN107338416A - ZrMoCN梯度复合涂层刀具及其制备方法 - Google Patents

ZrMoCN梯度复合涂层刀具及其制备方法 Download PDF

Info

Publication number
CN107338416A
CN107338416A CN201710532625.6A CN201710532625A CN107338416A CN 107338416 A CN107338416 A CN 107338416A CN 201710532625 A CN201710532625 A CN 201710532625A CN 107338416 A CN107338416 A CN 107338416A
Authority
CN
China
Prior art keywords
zrmocn
coating
gradient
zrmoc
transition zones
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710532625.6A
Other languages
English (en)
Inventor
宋文龙
李小冬
王首军
张璇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jining University
Original Assignee
Jining University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jining University filed Critical Jining University
Priority to CN201710532625.6A priority Critical patent/CN107338416A/zh
Publication of CN107338416A publication Critical patent/CN107338416A/zh
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0084—Producing gradient compositions
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)

Abstract

本发明属于机械加工切削刀具领域，特别是涉及一种ZrMoCN梯度复合涂层刀具及其制备方法，该涂层采用非平衡磁控溅射和电弧镀的复合镀膜方法制备的ZrMoCN梯度涂层刀具，涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrMoC过渡层以及氮含量梯度渐变的ZrMoCN梯度复合涂层。该ZrMoCN超硬碳氮化合物涂层由于在涂层中同时增加了Zr、Mo等两种元素，且涂层结构成分氮含量梯度渐变，可提高刀具的综合使用性能。该涂层刀具具有很高的硬度和韧性，良好的抗氧化性能和摩擦磨损特性，并能阻止涂层裂纹的扩展。切削过程中该刀具可减小干切削过程中刀具与工件之间的摩擦和粘结，降低切削力和切削温度30％以上，提高涂层刀具抗氧化性能45％以上，延长刀具使用寿命和耐用度40％以上。

Description

ZrMoCN梯度复合涂层刀具及其制备方法
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种ZrMoCN梯度复合涂层刀具及其制备方法。
背景技术
高速切削和干切削技术的发展，对刀具材料和刀具切削性能提出更高的要求，而对切削刀具进行涂层是提高其性能的重要途径。涂层刀具是在韧性较好的刀体上涂覆一层或多层耐磨性好的难熔化合物，它结合了基体高强度高韧性和涂层高硬度高耐磨性的优点，既可实现刀具的高速切割和耐磨性的改善，又可提高工件的加工精度和加工质量，是切削刀具研制的重要方向。目前工业发达国家的涂层刀具使用量已占刀具总数的80％以上，数控机床上所用的刀具90％以上是涂层刀具。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,Mingxi Li.Influence of the C2H2 flow rate ongradient TiCN films deposited by multi-arc ion plating[J].Applied SurfaceScience,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备方法进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400-500℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合多元复合涂层结构的优点提供一种ZrMoCN梯度复合涂层刀具及其制备方法。该刀具采用非平衡磁控溅射+电弧镀的复合镀膜方法，直接采用ZrMoC复合靶提供碳源，且沉积温度控制在300℃以下，可在更为广泛的刀具或工具基体上制备。该涂层结构由基体到涂层表面依次为：Ti过渡层、ZrMoC过渡层以及氮含量梯度渐变的ZrMoCN梯度复合涂层。
涂层刀具表面为氮含量梯度渐变的ZrMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和ZrMoC过渡层。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用，提高了涂层的强度和抗磨损特性，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，可显著提高刀具的切削寿命和加工效率。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
本发明是通过以下方式实现的：
本发明ZrMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrMoC过渡层以及氮含量梯度渐变的ZrMoCN梯度复合涂层。
本发明所述的ZrMoCN梯度复合涂层刀具的制备方法，沉积方式采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积ZrMoC过渡层和氮含量梯度渐变的ZrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至260℃，保温30～35min；
(2)离子清洗：通Ar气，其压力为1.2Pa，开启偏压电源，电压700V，占空比0.3，辉光放电清洗30min；降低偏压至500V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流60A，偏压300V，占空比0.2，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.7～0.8Pa，偏压降至200V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层5～6min；
(4)沉积ZrMoC过渡层：Ar气压0.7～0.8Pa，偏压调至170V，关闭电弧镀Ti靶电源，沉积温度200℃，开启非平衡磁控溅射ZrMoC靶电流25A，沉积ZrMoC过渡层5～6min；
(5)沉积ZrMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7～0.8Pa，偏压160V，ZrMoC靶电流30A，沉积温度210℃，沉积ZrMoCN复合层9～10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrMoCN复合层9～10min，直至N2气压升至1.4Pa，再沉积ZrMoCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
通过上述工艺制备的ZrMoCN梯度复合涂层刀具，刀具表面为氮含量梯度渐变的ZrMoCN梯度复合涂层，刀具基体与涂层间依次为Ti过渡层和ZrMoC过渡层，以减小残余应力，增加涂层与刀具基体间的结合强度。该梯度复合涂层刀具中的Zr元素对涂层起到固溶强化作用，提高了涂层的强度和抗磨损特性，Mo元素提高了涂层的硬度和强度，提高了涂层的红硬性，降低了涂层的摩擦系数，并能阻止涂层裂纹的扩展，可改善传统碳氮化合物涂层刀具的物理机械性能。同时该多层梯度结构能够减缓涂层与基体之间的热膨胀系数和弹性模量差异，改善结构和性能上的匹配性，增大涂层与基体的结合力和涂层的耐冲击性能。
该ZrMoCN梯度复合涂层刀具具有很高的硬度和韧性，良好的抗氧化性能和摩擦磨损特性，并能阻止涂层裂纹的扩展。切削过程中该刀具可减小干切削过程中刀具与工件之间的摩擦和粘结，降低切削力和切削温度30％以上，提高涂层刀具抗氧化性能45％以上，延长刀具使用寿命和耐用度40％以上，该ZrMoCN梯度复合涂层刀具可广泛应用于淬硬钢、铝合金等难加工材料的高速、高精密连续或断续切削加工。
附图说明
图1为本发明的ZrMoCN梯度复合涂层刀具的截面示意图；
图中：1为刀具基体、2为Ti过渡层、3为ZrMoC过渡层、4为ZrMoCN梯度复合涂层。
具体实施方式：
下面给出本发明的二个最佳实施例：
实施例一：
本发明ZrMoCN梯度复合涂层刀具及其制备方法，该刀具为普通的机夹车刀片，其基体材料为：硬质合金YW2，沉积方式采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrMoC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积ZrMoC过渡层和氮含量梯度渐变的ZrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至260℃，保温30min；
(2)离子清洗：通Ar气，其压力为1.2Pa，开启偏压电源，电压700V，占空比0.3，辉光放电清洗30min；降低偏压至500V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流60A，偏压300V，占空比0.2，离子轰击2min；
(3)沉积Ti过渡层：Ar气压0.7Pa，偏压降至200V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层5min；
(4)沉积ZrMoC过渡层：Ar气压0.7Pa，偏压调至170V，关闭电弧镀Ti靶电源，沉积温度200℃，开启非平衡磁控溅射ZrMoC靶电流25A，沉积ZrMoC过渡层5min；
(5)沉积ZrMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7Pa，偏压160V，ZrMoC靶电流30A，沉积温度210℃，沉积ZrMoCN复合层9min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrMoCN复合层9min，直至N2气压升至1.4Pa，再沉积ZrMoCN复合层9min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二：
本发明ZrMoCN梯度复合涂层刀具及其制备方法，该刀具为普通麻花钻头，其刀具基体材料为：高速钢W18Cr4V，沉积方式采用非平衡磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrMoC复合靶，2个电弧镀Ti靶。首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积ZrMoC过渡层和氮含量梯度渐变的ZrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至260℃，保温35min；
(2)离子清洗：通Ar气，其压力为1.2Pa，开启偏压电源，电压700V，占空比0.3，辉光放电清洗30min；降低偏压至500V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流60A，偏压300V，占空比0.2，离子轰击3min；
(3)沉积Ti过渡层：Ar气压0.8Pa，偏压降至200V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层6min；
(4)沉积ZrMoC过渡层：Ar气压0.8Pa，偏压调至170V，关闭电弧镀Ti靶电源，沉积温度200℃，开启非平衡磁控溅射ZrMoC靶电流25A，沉积ZrMoC过渡层6min；
(5)沉积ZrMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7～0.8Pa，偏压160V，ZrMoC靶电流30A，沉积温度210℃，沉积ZrMoCN复合层10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrMoCN复合层10min，直至N2气压升至1.4Pa，再沉积ZrMoCN复合层10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (2)

1.一种ZrMoCN梯度复合涂层刀具，刀具基体材料为高速钢、工具钢、模具钢、硬质合金、陶瓷或立方氮化硼中的一种，其特征在于，涂层刀具由内至外依次为刀具基体、Ti过渡层、ZrMoC过渡层以及氮含量梯度渐变的ZrMoCN梯度复合涂层。
2.一种根据权利要求1所述的ZrMoCN梯度复合涂层刀具的制备方法，其特征在于，沉积方式采用非平衡磁控溅射和电弧镀的复合镀膜方法，沉积时使用2个非平衡磁控溅射ZrMoC复合靶，2个电弧镀Ti靶，首先采用电弧镀沉积Ti过渡层，然后采用非平衡磁控溅射方法沉积ZrMoC过渡层和氮含量梯度渐变的ZrMoCN梯度复合涂层，具体步骤如下：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各30min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至8.0×10-3Pa，加热至260℃，保温30～35min；
(2)离子清洗：通Ar气，其压力为1.2Pa，开启偏压电源，电压700V，占空比0.3，辉光放电清洗30min；降低偏压至500V，占空比0.2，开启离子源离子清洗30min，开启电弧镀Ti靶电源，Ti靶电流60A，偏压300V，占空比0.2，离子轰击2～3min；
(3)沉积Ti过渡层：Ar气压0.7～0.8Pa，偏压降至200V，Ti靶电流70A，沉积温度230℃，电弧镀Ti过渡层5～6min；
(4)沉积ZrMoC过渡层：Ar气压0.7～0.8Pa，偏压调至170V，关闭电弧镀Ti靶电源，沉积温度200℃，开启非平衡磁控溅射ZrMoC靶电流25A，沉积ZrMoC过渡层5～6min；
(5)沉积ZrMoCN梯度复合层：开启N2，N2气压为0.8Pa，Ar气压0.7～0.8Pa，偏压160V，ZrMoC靶电流30A，沉积温度210℃，沉积ZrMoCN复合层9～10min；其它参数不变，升高N2气压，N2气压每次升高0.1Pa，沉积ZrMoCN复合层9～10min，直至N2气压升至1.4Pa，再沉积ZrMoCN复合层9～10min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
CN201710532625.6A 2017-07-03 2017-07-03 ZrMoCN梯度复合涂层刀具及其制备方法 Pending CN107338416A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710532625.6A CN107338416A (zh) 2017-07-03 2017-07-03 ZrMoCN梯度复合涂层刀具及其制备方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710532625.6A CN107338416A (zh) 2017-07-03 2017-07-03 ZrMoCN梯度复合涂层刀具及其制备方法

Publications (1)

Publication Number Publication Date
CN107338416A true CN107338416A (zh) 2017-11-10

Family

ID=60218868

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710532625.6A Pending CN107338416A (zh) 2017-07-03 2017-07-03 ZrMoCN梯度复合涂层刀具及其制备方法

Country Status (1)

Country Link
CN (1) CN107338416A (zh)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1898406A (zh) * 2004-09-10 2007-01-17 山特维克知识产权股份有限公司 具有耐磨涂层的刀具及其制造方法
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN104220634A (zh) * 2012-03-19 2014-12-17 西铁城控股株式会社 有色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1898406A (zh) * 2004-09-10 2007-01-17 山特维克知识产权股份有限公司 具有耐磨涂层的刀具及其制造方法
CN103097579A (zh) * 2010-09-21 2013-05-08 西铁城控股株式会社 白色硬质装饰构件
CN104220634A (zh) * 2012-03-19 2014-12-17 西铁城控股株式会社 有色硬质装饰构件
CN105063554A (zh) * 2015-07-31 2015-11-18 山东大学 ZrSiCN纳米复合梯度涂层刀具及其制备工艺

Similar Documents

Publication Publication Date Title
CN107747092B (zh) 一种耐高温硬质复合涂层及其制备方法和涂层刀具
CN105887024B (zh) TiCrN＆MoS2/Cr/Ti叠层涂层刀具及其制备工艺
CN107338411B (zh) AlNbCN多元梯度复合涂层刀具及其制备方法
CN110158044A (zh) 一种多元复合梯度涂层刀具及其制备方法
CN103273687A (zh) TiSiN+ZrSiN复合纳米涂层刀具及其制备方法
CN101831608A (zh) 一种纳米复合钛铝硅氮化物刀具涂层及其制备方法
CN107177828B (zh) SiZrCN梯度复合涂层刀具及其制备方法
CN107354431A (zh) TiMoCN梯度复合涂层刀具及其制备方法
CN105861997B (zh) TiCrN/MoS2多元减摩润滑涂层刀具及其制备工艺
CN105925941A (zh) TiAlCrN+MoS2/Ti/Al/Cr组合润滑涂层刀具及其制备工艺
CN107177827B (zh) SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺
CN106893975B (zh) AlC/AlCN叠层涂层刀具及其制备工艺
CN107354432A (zh) ZrCrCN梯度复合涂层刀具及其制备方法
CN107177825B (zh) ZrNbC/ZrNbCN叠层涂层刀具及其制备工艺
CN107400865A (zh) ZrAlCN梯度复合涂层刀具及其制备方法
CN107400863A (zh) ZrNbCN梯度复合涂层刀具及其制备方法
CN107338416A (zh) ZrMoCN梯度复合涂层刀具及其制备方法
CN107385401A (zh) SiNbCN多元梯度复合涂层刀具及其制备方法
CN107338412A (zh) CrNbC/CrNbCN叠层复合涂层刀具及其制备工艺
CN107177826B (zh) MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺
CN107400867A (zh) CrMoCN梯度复合涂层刀具及其制备方法
CN105861996B (zh) Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺
CN107338417B (zh) AlMoCN梯度复合涂层刀具及其制备方法
CN107354430A (zh) MoNbCN多元梯度复合涂层刀具及其制备方法
CN107354433A (zh) CrNbCN多元梯度复合涂层刀具及其制备方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20171110