CN105861996B - Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺 - Google Patents

Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺 Download PDF

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CN105861996B
CN105861996B CN201610427706.5A CN201610427706A CN105861996B CN 105861996 B CN105861996 B CN 105861996B CN 201610427706 A CN201610427706 A CN 201610427706A CN 105861996 B CN105861996 B CN 105861996B
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宋文龙
邓建新
张璇
崔祥府
王首军
李小冬
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Changzhou Kano Precision Tools Co., Ltd.
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Abstract

本发明属于机械制造金属切削刀具领域，特别是涉及一种Ti‑Al‑Cr‑N‑Mo‑S多元复合增强涂层刀具及其制备工艺。该刀具基体材料为高速钢、硬质合金、陶瓷、金刚石或立方氮化硼，表面为Ti‑Al‑Cr‑N‑Mo‑S多元复合增强涂层，刀具基体和Ti‑Al‑Cr‑N‑Mo‑S多元复合增强涂层之间依次为Ti过渡层和Ti/Al/Cr过渡层。所述多元复合增强涂层刀具可提高现有二元、三元及复合润滑涂层刀具的物理与机械性能，兼具多元硬质涂层极高的硬度、耐磨性和MoS2固体润滑剂良好的减摩润滑性能，并使涂层刀具在涂层使用寿命周期中始终保持良好的减摩润滑性和耐磨性，显著提高现有涂层刀具的综合使用性能。

Description

Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺
技术领域
本发明属于机械制造金属切削刀具领域，特别是涉及一种Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺。
背景技术
根据涂层材料的性质，涂层刀具可分为两大类，即：“高硬度”涂层刀具和“润滑”涂层刀具。“高硬度”涂层刀具其主要优点是硬度高、耐磨性能好，典型的“高硬度”涂层材料有TiN、 TiCN、TiAlN和类金刚石等。“润滑”涂层刀具追求的目标是低摩擦系数，典型的“润滑”涂层材料为具有低摩擦系数的固体润滑材料(如：MoS2、WS2、TaS2等硫化物)。当前刀具涂层的发展趋势是：涂层成分趋于多元化和复合化。复合涂层可综合单涂层的优点，复合多涂层及其相关技术的出现，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，使涂层刀具的性能显著提高。
中国专利(专利号ZL 2006 1 0068975.3)报道了“自润滑复合软涂层刀具及其制备方法”，它是采用中频磁控+多弧法镀膜方法制备的MoS2/Cr复合涂层刀具，刀具表面为MoS2层， MoS2层与刀具基体之间具有Ti过渡层。该刀具在无切削液冷却、润滑的切削过程中，能够在刀具表面能形成具有润滑作用的润滑膜，从而实现刀具自身的润滑功能，但是这种润滑涂层硬度较低而导致刀具涂层尤其是后刀面涂层的使用寿命不长。文献(ActaMaterials.2011,59 (1):68-74)报道了TiN硬涂层刀具切削加工时的作用机理及使用性能，但是这种硬涂层由于相对较高的摩擦系数，限制了其广泛使用。中国专利梯度叠层涂层刀具及其制备方法(专利号201110214393.2)制备的ZrTiN复合涂层刀具有较高的硬度和强度、优异的抗磨损和抗腐蚀性能，但是在切削有色金属材料时其摩擦系数较高，刀具使用寿命有待进一步提高。中国专利TiN+MoS2/Zr组合涂层刀具(专利号ZL 201110081977.7)采用中频磁控溅射与电弧镀复合镀膜方法制备的TiN+MoS2/Zr组合涂层刀具，但该组合涂层在干切削超硬材料时刀具使用寿命仍无法满足实际使用需要。
发明内容
本发明的目的在于改善现有二元、三元及复合润滑涂层刀具的综合性能，结合多元复合涂层和润滑涂层的优点，提供一种Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具及其制备工艺。
本发明是通过以下方式实现的：
Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷、金刚石或立方氮化硼，表面为Ti-Al-Cr-N-Mo-S多元复合增强涂层，刀具基体和Ti-Al-Cr-N-Mo-S 多元复合增强涂层之间依次为Ti过渡层和Ti/Al/Cr过渡层。
所述Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具的制备工艺，沉积方式为采用电弧镀+中频磁控溅射+非平衡磁控溅射复合镀膜方法，沉积时使用两个电弧靶：1个Ti靶，1个Al靶，1 个中频磁控溅射Cr靶，2个非平衡磁控溅射MoS2。
首先电弧离子镀沉积Ti过渡层，然后电弧离子镀+中频磁控溅射复合沉积Ti/Al/Cr过渡层，最后采用非平衡磁控溅射MoS2、电弧离子镀Ti、Al及中频磁控溅射Cr复合沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层。
具体包括以下步骤：
(1)前处理：将刀具基体表面抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至6.0×10-3Pa，加热至350℃，保温45～50min；
(2)离子清洗：通Ar气，其压力为1.8Pa，开启偏压电源，电压800V，占空比0.25，辉光放电清洗20min；降低偏压至650V，开启离子源离子清洗20min，开启Ti靶的电弧源靶电流60A，偏压450V，离子轰击Ti靶1～2min；
(3)沉积Ti过渡层：Ar气压0.6～0.8Pa，偏压降至300V，Ti靶电流70A，沉积温度250℃，电弧镀Ti过渡层3～4min；
(4)沉积Ti/Al/Cr过渡层：Ar气压0.6～0.7Pa，偏压260V，电弧Ti靶电流80A，电弧Al靶电流70A，中频磁控溅射Cr靶电流为35A，复合沉积Ti/Al/Cr过渡层7～8min；
(5)沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层：Ar气压0.5～0.6Pa，偏压220V，沉积温度230～250℃；电弧Ti靶电流100A，电弧Al靶电流85A；中频磁控溅射Cr靶电流45A；开启非平衡磁控溅射MoS2靶电源，电流1.6～1.8A；开启N2，N2气压为1.2～1.3Pa；复合沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层80min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
与现有技术相比，本发明具有如下优异技术效果：
本发明采用电弧镀+中频磁控溅射+非平衡磁控溅射复合镀膜方法制备了 Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具。基体上的Ti过渡层和Ti/Al/Cr过渡层够减缓因涂层成分突变造成的层间应力，提高多元复合增强涂层与刀具基体间的结合性能。所述多元复合增强涂层刀具可提高现有二元、三元及复合润滑涂层刀具的物理与机械性能，通过合理的工艺调控，在Ti-Al-Cr-N多元硬质涂层中增加适量的MoS2元素，使Ti-Al-Cr-N-Mo-S多元复合涂层兼具多元硬质涂层极高的硬度、耐磨性和MoS2固体润滑剂良好的减摩润滑性能，并使涂层刀具在涂层使用寿命周期中始终保持良好的减摩润滑性和耐磨性，显著提高现有涂层刀具的综合使用性能。与TiN+MoS2/Zr涂层刀具(专利号ZL 201110081977.7)相比，耐磨性提高了30-35％，涂层刀具使用寿命提高了35％以上；与ZrTiN复合涂层刀具(专利号201110214393.2)相比，表面摩擦系数降低30-40％，减摩耐磨性提高35-40％，切削力和切削温度降低20-30％，涂层刀具使用寿命提高35-40％，且提高了涂层刀具的使用范围，可更广泛应用于包括有色金属在内的各种难加工材料的切削加工。
附图说明
图1为本发明的多元复合增强涂层刀具的涂层结构示意图。
图中：1为刀具基体、2为Ti过渡层、3为Ti/Al/Cr过渡层、4为Ti-Al-Cr-N-Mo-S多元复合增强涂层。
具体实施方式
下面给出本发明的最佳实施例：
实施例一
一种Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具，该刀具为普通的铣刀片，其基体材料为：硬质合金YT15；沉积方式为采用电弧镀+中频磁控溅射+非平衡磁控溅射复合镀膜方法，沉积时使用两个电弧靶：1个Ti靶，1个Al靶，1个中频磁控溅射Cr靶，2个非平衡磁控溅射MoS2。首先电弧离子镀沉积Ti过渡层，然后电弧离子镀+中频磁控溅射复合沉积Ti/Al/Cr过渡层，最后采用非平衡磁控溅射MoS2、电弧离子镀Ti、Al及中频磁控溅射Cr复合沉积 Ti-Al-Cr-N-Mo-S多元复合增强涂层，其制备工艺为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至6.0×10-3Pa，加热至350℃，保温45～50min；
(2)离子清洗：通Ar气，其压力为1.8Pa，开启偏压电源，电压800V，占空比0.25，辉光放电清洗20min；降低偏压至650V，开启离子源离子清洗20min，开启Ti靶的电弧源靶电流60A，偏压450V，离子轰击Ti靶1～2min；
(3)沉积Ti过渡层：Ar气压0.6～0.8Pa，偏压降至300V，Ti靶电流70A，沉积温度250℃，电弧镀Ti过渡层3～4min；
(4)沉积Ti/Al/Cr过渡层：Ar气压0.6～0.7Pa，偏压260V，电弧Ti靶电流80A，电弧Al靶电流70A，中频磁控溅射Cr靶电流为35A，复合沉积Ti/Al/Cr过渡层7～8min；
(5)沉积Ti-Al-Cr-N-Mo-S多元层：Ar气压0.5～0.6Pa，偏压220V，沉积温度230～250℃；电弧Ti靶电流100A，电弧Al靶电流85A；中频磁控溅射Cr靶电流45A；开启非平衡磁控溅射MoS2靶电源，电流1.6～1.8A；开启N2，N2气压为1.2～1.3Pa；复合沉积Ti-Al-Cr-N-Mo-S多元层80min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例二
一种Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具，该刀具为普通麻花钻，其刀具基体材料为：高速钢W18Cr4V；沉积方式为采用电弧镀+中频磁控溅射+非平衡磁控溅射复合镀膜方法，沉积时使用两个电弧靶：1个Ti靶，1个Al靶，1个中频磁控溅射Cr靶，2个非平衡磁控溅射MoS2。首先电弧离子镀沉积Ti过渡层，然后电弧离子镀+中频磁控溅射复合沉积Ti/Al/Cr过渡层，最后采用非平衡磁控溅射MoS2、电弧离子镀Ti、Al及中频磁控溅射Cr复合沉积 Ti-Al-Cr-N-Mo-S多元复合增强涂层，其制备工艺为：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各40min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至6.0×10-3Pa，加热至350℃，保温45～50min；
(2)离子清洗：通Ar气，其压力为1.8Pa，开启偏压电源，电压800V，占空比0.25，辉光放电清洗20min；降低偏压至650V，开启离子源离子清洗20min，开启Ti靶的电弧源靶电流60A，偏压450V，离子轰击Ti靶1～2min；
(3)沉积Ti过渡层：Ar气压0.6～0.8Pa，偏压降至300V，Ti靶电流70A，沉积温度250℃，电弧镀Ti过渡层3～4min；
(4)沉积Ti/Al/Cr过渡层：Ar气压0.6～0.7Pa，偏压260V，电弧Ti靶电流80A，电弧Al靶电流70A，中频磁控溅射Cr靶电流为35A，复合沉积Ti/Al/Cr过渡层7～8min；
(5)沉积Ti-Al-Cr-N-Mo-S多元层：Ar气压0.5～0.6Pa，偏压220V，沉积温度230～250℃；电弧Ti靶电流100A，电弧Al靶电流85A；中频磁控溅射Cr靶电流45A；开启非平衡磁控溅射MoS2靶电源，电流1.6～1.8A；开启N2，N2气压为1.2～1.3Pa；复合沉积Ti-Al-Cr-N-Mo-S多元层80min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (2)

1.Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具的制备工艺，刀具基体材料为高速钢、硬质合金、陶瓷、金刚石或立方氮化硼，表面为Ti-Al-Cr-N-Mo-S多元复合增强涂层，刀具基体和Ti-Al-Cr-N-Mo-S多元复合增强涂层之间依次为Ti过渡层和Ti/Al/Cr过渡层，其特征在于，沉积方式为采用电弧镀+中频磁控溅射+非平衡磁控溅射复合镀膜方法，沉积时使用两个电弧靶：1个Ti靶，1个Al靶，1个中频磁控溅射Cr靶，2个非平衡磁控溅射MoS2靶：首先电弧离子镀沉积Ti过渡层，然后电弧离子镀+中频磁控溅射复合沉积Ti/Al/Cr过渡层，最后采用非平衡磁控溅射MoS2、电弧离子镀Ti、Al及中频磁控溅射Cr复合沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层，具体包括以下步骤：
(1)前处理：将刀具基体表面抛光，去除表面杂质，然后依次放入酒精和丙酮中，超声清洗，经干燥后迅速放入镀膜机，抽真空至6.0×10-3Pa，加热至350℃，保温45～50min；
(2)离子清洗：通Ar气，其压力为1.8Pa，开启偏压电源，电压800V，占空比0.25，辉光放电清洗20min；降低偏压至650V，开启离子源离子清洗20min，开启Ti靶的电弧源靶电流60A，偏压450V，离子轰击Ti靶1～2min；
(3)沉积Ti过渡层：Ar气压0.6～0.8Pa，偏压降至300V，Ti靶电流70A，沉积温度250℃，电弧镀Ti过渡层3～4min；
(4)沉积Ti/Al/Cr过渡层：Ar气压0.6～0.7Pa，偏压260V，电弧Ti靶电流80A，电弧Al靶电流70A，中频磁控溅射Cr靶电流为35A，复合沉积Ti/Al/Cr过渡层7～8min；
(5)沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层：Ar气压0.5～0.6Pa，偏压220V，沉积温度230～250℃；电弧Ti靶电流100A，电弧Al靶电流85A；中频磁控溅射Cr靶电流45A；开启非平衡磁控溅射MoS2靶电源，电流1.6～1.8A；开启N2，N2气压为1.2～1.3Pa；复合沉积Ti-Al-Cr-N-Mo-S多元复合增强涂层80min；
(6)后处理：关闭各电源、离子源及气体源，涂层结束。
2.如权利要求1所述的工艺制备的Ti-Al-Cr-N-Mo-S多元复合增强涂层刀具，刀具基体材料为高速钢、硬质合金、陶瓷、金刚石或立方氮化硼，其特征在于，表面为Ti-Al-Cr-N-Mo-S多元复合增强涂层，刀具基体和Ti-Al-Cr-N-Mo-S多元复合增强涂层之间依次为Ti过渡层和Ti/Al/Cr过渡层。
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CN102277554A (zh) * 2011-07-29 2011-12-14 山推工程机械股份有限公司 梯度叠层涂层刀具及其制备方法
CN102517546A (zh) * 2011-12-30 2012-06-27 山推工程机械股份有限公司 一种耐磨刀具的加工方法
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CN102517546A (zh) * 2011-12-30 2012-06-27 山推工程机械股份有限公司 一种耐磨刀具的加工方法
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