CN112695281A - 具有织构与自适应润滑涂层的切削刀具及其制备方法 - Google Patents
具有织构与自适应润滑涂层的切削刀具及其制备方法 Download PDFInfo
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- 238000002360 preparation method Methods 0.000 title claims description 9
- 239000002131 composite material Substances 0.000 claims abstract description 31
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- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 12
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 12
- 229910016021 MoTe2 Inorganic materials 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000004506 ultrasonic cleaning Methods 0.000 claims description 11
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- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000005461 lubrication Methods 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052760 oxygen Inorganic materials 0.000 abstract description 3
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- 229910052961 molybdenite Inorganic materials 0.000 description 1
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 description 1
- 229910052982 molybdenum disulfide Inorganic materials 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- BYMUNNMMXKDFEZ-UHFFFAOYSA-K trifluorolanthanum Chemical compound F[La](F)F BYMUNNMMXKDFEZ-UHFFFAOYSA-K 0.000 description 1
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Abstract
本发明提供一种具有织构与自适应润滑涂层的切削刀具,包括刀具基体、复合织构和润滑涂层,复合织构设置在刀具基体的前刀面和后刀面,润滑涂层沉积在复合织构的表面;润滑涂层包括ZrAgVN层和MoTeBC层,ZrAgVN层和MoTeBC层交替叠加。发明的刀具在宽温域切削范围内具有良好的自润滑作用;温度较低时,MoTeBC层能够起到润滑作用;切削温度较高时,ZrAgVN、MoTeBC及空气中氧气会发生反应,生成具有高温润滑作用的Ag3VO4和Ag2MoO4化合物,从而在高温作用下起到良好的润滑作用;ZrAgVN+MoTeBC叠层涂层提高了单一涂层的性能,增加了涂层刀具适用范围。
Description
技术领域
本发明涉及刀具制造技术领域,具体来说,涉及一种具有织构与自适应润滑涂层的切削刀具及其制备方法。
背景技术
刀具切削过程接触区处于高温、高压状态,接触面存在较大摩擦,产生很大的切削压力和摩擦热,导致刀具磨损严重,寿命降低。自润滑刀具能够实现干切削过程中的润滑,减小刀具切削过程中摩擦磨损,从而提高刀具寿命。然而,如何提高宽温度范围或交变温度条件下切削刀具润滑性能成为刀具切削过程存在的难题。
中国专利申请号201810076691.1公开了一种梯度涂层刀具及其制备方法,该刀具涂层为添加MoS2、BN和LaF3的硬质合金和陶瓷层交替的叠层涂层,能够实现宽温度切削范围内刀具自润滑功效。中国专利申请号201810575624.4公开了一种多层多元纳米复合自润滑硬质涂层及其制备方法和应用,该刀具将AlTiN和MoVCuN涂层结合,可实现一定宽温域范围的自润滑效果。中国专利申请号201610812045.8公开了一种微织构ZrVSiN自适应涂层刀具及其制备工艺,该刀具切削过程中ZrVSiN涂层与空气中的氧气反应在刀具表面生成具有润滑作用的氧化膜,从而起到自润滑功效;然而其温度较低时润滑效果不明显。
发明内容
本发明所要解决的技术问题是:提供一种具有织构与自适应润滑涂层的切削刀具及其制备方法,该刀具表面涂层在宽温域及交变温度范围内具有良好的自适应润滑能力,可实现刀具干切削过程中的自润滑;同时,该刀具表面纳织构能够提高基体与涂层结合强度,微织构能够收集磨屑及高温润滑相,起到二次润滑作用,从而减小刀具磨损,提高刀具寿命。
为解决上述技术问题,本发明一方面提供一种具有织构与自适应润滑涂层的切削刀具,包括刀具基体、复合织构和润滑涂层,所述复合织构设置在刀具基体的前刀面和后刀面,所述润滑涂层沉积在所述复合织构的表面;所述润滑涂层包括ZrAgVN层和MoTeBC层,所述ZrAgVN层和MoTeBC层交替叠加。
作为本发明实施例的进一步改进,所述润滑涂层包括至少5层ZrAgVN层和至少5层MoTeBC层,ZrAgVN层和MoTeBC层的单层厚度均小于等于100nm。
作为本发明实施例的进一步改进,所述ZrAgVN层中,Zr元素原子百分比为30-50%,Ag元素原子百分比为15-25%,V元素原子百分比为5-15%,N元素原子百分比为20-40%,所述Zr、Ag、V和N元素原子百分比之和为100%。
作为本发明实施例的进一步改进,所述MoTeBC层中,Mo元素原子百分比为20-25%,Te元素原子百分比为40-50%,B元素原子百分比为10-20%,C元素原子百分比为10-20%,所述Mo、Te、B、C元素原子百分比之和为100%。
作为本发明实施例的进一步改进,所述复合织构包括微织构和纳织构,所述微织构的宽度为10-80μm,微织构的深度为10-200μm;所述纳织构的宽度为300-600nm,纳织构的深度为50-200nm。
作为本发明实施例的进一步改进,所述刀具基体由高速钢、硬质合金、CBN或陶瓷制成。
另一方面,本发明实施例还提供一种制备上述具有织构与自适应润滑涂层的切削刀具的制备方法,包括以下步骤:
步骤1、将刀具基体研磨抛光,并依次放入酒精和丙酮中超声清洗各20-30min,去除表面油渍污染物;
步骤2、采用激光加工技术在刀具基体的表面制备复合织构;
步骤3、采用多弧离子镀与中频磁控溅射共沉积的方法,在复合织构的表面制备润滑涂层,得到具有织构与自适应润滑涂层的切削刀具。
作为本发明实施例的进一步改进,所述步骤2具体包括:
采用纳秒激光在刀具基体的前刀面和后刀面分别加工出微织构,微织构的宽度为10-80μm,微织构的深度为10-200μm;
采用飞秒激光在刀具基体的前刀面和后刀面分别加工出纳织构,纳织构的宽度为300-600nm,纳织构的深度为50-200nm。
作为本发明实施例的进一步改进,所述步骤3具体包括:
步骤31、将步骤2得到的表面具有复合织构的刀具基体放入酒精溶液中超声清洗20-30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为7.0×10-3-8.0×10-3Pa,加热至150-250℃,保温时间30-40min;
步骤32、通入Ar2,压力为0.5-2.0Pa,开启偏压电源,电压为700-1000V,占空比为0.25-0.3,辉光放电清洗20-30min;偏压降低至300-800V,开启离子源离子清洗20-30min,开启电弧源Zr靶,偏压为400-600V,靶电流为50-80A,离子轰击Zr靶0.5-1.5min;
步骤33、调整工作气压为0.5-2.5Pa,偏压为100-300V,调整Zr靶电流为100-160A,开启Ag靶,靶电流调至80-100A,开启VN电弧电源,靶电流调至80-120A,沉积ZrAgVN层1-10min;
步骤34、关闭Zr靶、Ag靶和VN靶,调整工作气压为0.5-2.0Pa,偏压为200-400V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为80-120A,BC靶电流为60-80A,沉积MoTeBC层1-10min;
步骤35、重复步骤33和步骤34,交替沉积ZrAgVN层和MoTeBC层,使润滑涂层的总厚度为1-5μm;
步骤36、关闭所有靶材,关闭偏压电源及气体源,保温30-60min,得到具有织构与自适应润滑涂层的切削刀具。
与现有技术相比,本发明的技术方案具有以下有益效果:1.本发明的刀具在宽温域切削范围内具有良好的自润滑作用;温度较低时,MoTeBC涂层能够起到润滑作用;切削温度较高时,ZrAgVN、MoTeBC及空气中氧气会发生反应,生成具有高温润滑作用的Ag3VO4和Ag2MoO4化合物,从而在高温作用下起到良好的润滑作用;2.该刀具表面纳织构能够提高基体与涂层结合强度,微织构能够收集磨屑及高温润滑相,起到二次润滑作用,同时微织构能够减小磨粒磨损,提高刀具寿命;3.ZrAgVN+MoTeBC叠层涂层提高了单一涂层的性能,增加了涂层刀具适用范围;4.该涂层刀具能够适应不同温度范围内切削,可广泛应用于干切削及难加工材料的切削加工。
附图说明
图1为本发明实施例的具有织构与自适应润滑涂层的切削刀具的结构示意图。
图中:刀具基体1、复合织构2、微织构21、纳织构22、ZrAgVN层31、MoTeBC层32。
具体实施方式
下面结合附图,对本发明的技术方案进行详细的说明。
实施例1
本发明的一种具有织构与自适应润滑涂层的切削刀具,刀具基体材料为YG6硬质合金,刀具前刀具和后刀面具有复合织构,复合织构表面沉积ZrAgVN+MoTeBC交替分布的润滑涂层。该润滑涂层含有10层ZrAgVN层和10层MoTeBC层,且ZrAgVN与MoTeBC单个层的单层厚度为100nm。
本发明的一种具有织构与自适应润滑涂层的切削刀具,微织构宽度为20μm,微织构深度为20μm,纳织构宽度为300nm,纳织构深度为50nm;ZrAgVN涂层中Zr元素原子百分比为50%,Ag元素原子百分比为20%,V元素原子百分比为10%,N元素原子百分比为20%,所述Zr、Ag、V、N元素原子百分比之和为100%;MoTeBC涂层中Mo元素原子百分比为20%,Te元素原子百分比为40%,B元素原子百分比为20%,N元素原子百分比为20%,所述Mo、Te、B、C元素原子百分比之和为100%。
本发明的一种具有织构与自适应润滑涂层的切削刀具,其制备方法包括以下步骤:
(1)加工复合织构
(1-1)前处理:将刀具基体研磨抛光,并依次放入酒精和丙酮中超声清洗各20min,去除表面油渍污染物;
(1-2)加工微织构:采用纳秒激光在刀具前刀面和后刀面加工出微织构,微织构宽度为20μm,微织构深度为20μm;
(1-3)加工纳织构:采用飞秒激光在刀具前刀面和后刀面加工出纳织构,纳织构宽度为300nm,纳织构深度为50nm。
(2)沉积润滑涂层
(2-1)前处理:将步骤(1)中得到的具有复合织构的刀具基体放入酒精溶液中超声清洗30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为7.0×10-3Pa,加热至150℃,保温时间30min;
(2-2)离子清洗:通入Ar2,其压力为0.5Pa,开启偏压电源,电压为700V,占空比为0.25,辉光放电清洗20min;偏压降低至300V,开启离子源离子清洗20min,开启电弧源Zr靶,偏压为400V,靶电流为50A,离子轰击Zr靶0.5min;
(2-3)沉积ZrAgVN层:调整工作气压为1.0Pa,偏压为120V,调整Zr靶电流为150A,开启Ag靶,靶电流调至80A,开启VN电弧电源,靶电流调至90A,沉积ZrAgVN涂层8min;
(2-4)沉积MoTeBC层:关闭Zr靶、Ag靶和VN靶,调整工作气压为2.0Pa,偏压为300V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为90A,BC靶电流为80A,沉积MoTeBC涂层8min;
(2-5)沉积ZrAgVN+MoTeBC叠层涂层:重复以上步骤(2-3)和(2-4),交替沉积ZrAgVN层和MoTeBC层,使润滑涂层总厚度为2μm。
(2-6)后处理:关闭所有靶材,关闭偏压电源及气体源,保温30min,涂层结束。
实施例2
一种具有织构与自适应润滑涂层的切削刀具,刀具基体材料为CBN,刀具前刀具和后刀面具有复合织构,复合织构表面沉积ZrAgVN+MoTeBC交替分布的润滑涂层。该润滑涂层含有50层ZrAgVN层和50层MoTeBC层,且ZrAgVN与MoTeBC单个层的单层厚度为40nm。
本发明的一种具有织构与自适应润滑涂层的切削刀具,微织构宽度为50μm,微织构深度为200μm,纳织构宽度为600nm,纳织构深度为200nm;ZrAgVN涂层中Zr元素原子百分比为30%,Ag元素原子百分比为25%,V元素原子百分比为15%,N元素原子百分比为30%,所述Zr、Ag、V、N元素原子百分比之和为100%;MoTeBC涂层中Mo元素原子百分比为25%,Te元素原子百分比为45%,B元素原子百分比为15%,N元素原子百分比为15%,所述Mo、Te、B、C元素原子百分比之和为100%。
本发明的一种具有织构与自适应润滑涂层的切削刀具,其制备方法包括以下步骤:
(1)加工复合织构
(1-1)前处理:将刀具基体研磨抛光,并依次放入酒精和丙酮中超声清洗各30min,去除表面油渍污染物;
(1-2)加工微织构:采用纳秒激光在刀具前刀面和后刀面加工出微织构,微织构宽度为50μm,微织构深度为200μm;
(1-3)加工纳织构:采用飞秒激光在刀具前刀面和后刀面加工出纳织构,纳织构宽度为600nm,纳织构深度为200nm。
(2)沉积润滑涂层
(2-1)前处理:将步骤(1)中得到的微/纳复合织构刀具放入酒精溶液中超声清洗30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为8.0×10- 3Pa,加热至230℃,保温时间40min;
(2-2)离子清洗:通入Ar2,其压力为2.0Pa,开启偏压电源,电压为900V,占空比为0.3,辉光放电清洗30min;偏压降低至600V,开启离子源离子清洗30min,开启电弧源Zr靶,偏压为600V,靶电流为70A,离子轰击Zr靶1.5min;
(2-3)沉积ZrAgVN层:调整工作气压为2.5Pa,偏压为250V,调整Zr靶电流为180A,开启Ag靶,靶电流调至100A,开启VN电弧电源,靶电流调至100A,沉积ZrAgVN涂层2min;
(2-4)沉积MoTeBC层:关闭Zr靶、Ag靶和VN靶,调整工作气压为1.5Pa,偏压为200V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为120A,BC靶电流为60A,沉积MoTeBC涂层2min;
(2-5)沉积ZrAgVN+MoTeBC叠层涂层:重复以上步骤(2-3)和(2-4),交替沉积ZrAgVN层和MoTeBC层,使润滑涂层总厚度为4μm。
(2-6)后处理:关闭所有靶材,关闭偏压电源及气体源,保温50min,涂层结束。
实施例3
本发明的一种具有织构与自适应润滑涂层的切削刀具,刀具基体材料为YG6硬质合金,刀具前刀具和后刀面具有复合织构,复合织构表面沉积ZrAgVN+MoTeBC交替分布的润滑涂层。该润滑涂层含有5层ZrAgVN层和5层MoTeBC层,且ZrAgVN与MoTeBC单个层的单层厚度为100nm。
本发明的一种具有织构与自适应润滑涂层的切削刀具,微织构宽度为10μm,微织构深度为10μm,纳织构宽度为400nm,纳织构深度为100nm;ZrAgVN涂层中Zr元素原子百分比为40%,Ag元素原子百分比为15%,V元素原子百分比为5%,N元素原子百分比为40%,所述Zr、Ag、V、N元素原子百分比之和为100%;MoTeBC涂层中Mo元素原子百分比为25%,Te元素原子百分比为45%,B元素原子百分比为20%,N元素原子百分比为10%,所述Mo、Te、B、C元素原子百分比之和为100%。
本发明的一种具有织构与自适应润滑涂层的切削刀具,其制备方法包括以下步骤:
(1)加工复合织构
(1-1)前处理:将刀具基体研磨抛光,并依次放入酒精和丙酮中超声清洗各20min,去除表面油渍污染物;
(1-2)加工微织构:采用纳秒激光在刀具前刀面和后刀面加工出微织构,微织构宽度为10μm,微织构深度为10μm;
(1-3)加工纳织构:采用飞秒激光在刀具前刀面和后刀面加工出纳织构,纳织构宽度为400nm,纳织构深度为100nm。
(2)沉积润滑涂层
(2-1)前处理:将步骤(1)中得到的具有复合织构的刀具基体放入酒精溶液中超声清洗30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为7.0×10-3Pa,加热至150℃,保温时间30min;
(2-2)离子清洗:通入Ar2,其压力为0.5Pa,开启偏压电源,电压为700V,占空比为0.25,辉光放电清洗20min;偏压降低至300V,开启离子源离子清洗20min,开启电弧源Zr靶,偏压为400V,靶电流为50A,离子轰击Zr靶0.5min;
(2-3)沉积ZrAgVN层:调整工作气压为1.0Pa,偏压为120V,调整Zr靶电流为150A,开启Ag靶,靶电流调至80A,开启VN电弧电源,靶电流调至90A,沉积ZrAgVN涂层8min;
(2-4)沉积MoTeBC层:关闭Zr靶、Ag靶和VN靶,调整工作气压为2.0Pa,偏压为300V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为90A,BC靶电流为80A,沉积MoTeBC涂层8min;
(2-5)沉积ZrAgVN+MoTeBC叠层涂层:重复以上步骤(2-3)和(2-4),交替沉积ZrAgVN层和MoTeBC层,使润滑涂层总厚度为1μm。
(2-6)后处理:关闭所有靶材,关闭偏压电源及气体源,保温30min,涂层结束。
实施例4
一种具有织构与自适应润滑涂层的切削刀具,刀具基体材料为CBN,刀具前刀具和后刀面具有复合织构,复合织构表面沉积ZrAgVN+MoTeBC交替分布的润滑涂层。该润滑涂层含有50层ZrAgVN层和50层MoTeBC层,且ZrAgVN与MoTeBC单个层的单层厚度为50nm。
本发明的一种具有织构与自适应润滑涂层的切削刀具,微织构宽度为80μm,微织构深度为100μm,纳织构宽度为500nm,纳织构深度为200nm;ZrAgVN涂层中Zr元素原子百分比为40%,Ag元素原子百分比为15%,V元素原子百分比为5%,N元素原子百分比为40%,所述Zr、Ag、V、N元素原子百分比之和为100%;MoTeBC涂层中Mo元素原子百分比为22%,Te元素原子百分比为50%,B元素原子百分比为10%,N元素原子百分比为18%,所述Mo、Te、B、C元素原子百分比之和为100%。
本发明的一种具有织构与自适应润滑涂层的切削刀具,其制备方法包括以下步骤:
(1)加工复合织构
(1-1)前处理:将刀具基体研磨抛光,并依次放入酒精和丙酮中超声清洗各30min,去除表面油渍污染物;
(1-2)加工微织构:采用纳秒激光在刀具前刀面和后刀面加工出微织构,微织构宽度为50μm,微织构深度为200μm;
(1-3)加工纳织构:采用飞秒激光在刀具前刀面和后刀面加工出纳织构,纳织构宽度为600nm,纳织构深度为200nm。
(2)沉积自适应润滑涂层
(2-1)前处理:将步骤(1)中得到的具有复合织构的刀具基体放入酒精溶液中超声清洗30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为8.0×10-3Pa,加热至230℃,保温时间40min;
(2-2)离子清洗:通入Ar2,其压力为2.0Pa,开启偏压电源,电压为900V,占空比为0.3,辉光放电清洗30min;偏压降低至600V,开启离子源离子清洗30min,开启电弧源Zr靶,偏压为600V,靶电流为70A,离子轰击Zr靶1.5min;
(2-3)沉积ZrAgVN层:调整工作气压为2.5Pa,偏压为250V,调整Zr靶电流为180A,开启Ag靶,靶电流调至100A,开启VN电弧电源,靶电流调至100A,沉积ZrAgVN涂层2min;
(2-4)沉积MoTeBC层:关闭Zr靶、Ag靶和VN靶,调整工作气压为1.5Pa,偏压为200V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为120A,BC靶电流为60A,沉积MoTeBC涂层2min;
(2-5)沉积ZrAgVN+MoTeBC叠层涂层:重复以上步骤(2-3)和(2-4),交替沉积ZrAgVN层和MoTeBC层,使润滑涂层总厚度为5μm。
(2-6)后处理:关闭所有靶材,关闭偏压电源及气体源,保温50min,涂层结束。
以上显示和描述了本发明的基本原理、主要特征和优点。本领域的技术人员应该了解,本发明不受上述具体实施例的限制,上述具体实施例和说明书中的描述只是为了进一步说明本发明的原理,在不脱离本发明精神和范围的前提下,本发明还会有各种变化和改进,这些变化和改进都落入要求保护的本发明范围内。本发明要求保护的范围由权利要求书及其等效物界定。
Claims (9)
1.一种具有织构与自适应润滑涂层的切削刀具,其特征在于,包括刀具基体(1)、复合织构(2)和润滑涂层,所述复合织构(2)设置在刀具基体(1)的前刀面和后刀面,所述润滑涂层沉积在所述复合织构(2)的表面;所述润滑涂层包括ZrAgVN层(31)和MoTeBC层(32),所述ZrAgVN层(31)和MoTeBC层(32)交替叠加。
2.根据权利要求1所述的具有织构与自适应润滑涂层的切削刀具,其特征在于,所述润滑涂层包括至少5层ZrAgVN层(31)和至少5层MoTeBC层(32),ZrAgVN层(31)和MoTeBC层(32)的单层厚度均小于等于100nm。
3.根据权利要求1所述的具有织构与自适应润滑涂层的切削刀具,其特征在于,所述ZrAgVN层(31)中,Zr元素原子百分比为30-50%,Ag元素原子百分比为15-25%,V元素原子百分比为5-15%,N元素原子百分比为20-40%,所述Zr、Ag、V和N元素原子百分比之和为100%。
4.根据权利要求1所述的具有织构与自适应润滑涂层的切削刀具,其特征在于,所述MoTeBC层(32)中,Mo元素原子百分比为20-25%,Te元素原子百分比为40-50%,B元素原子百分比为10-20%,C元素原子百分比为10-20%,所述Mo、Te、B、C元素原子百分比之和为100%。
5.根据权利要求1所述的具有织构与自适应润滑涂层的切削刀具,其特征在于,所述复合织构(2)包括微织构和纳织构,所述微织构的宽度为10-80μm,微织构的深度为10-200μm;所述纳织构的宽度为300-600nm,纳织构的深度为50-200nm。
6.根据权利要求1所述的具有织构与自适应润滑涂层的切削刀具,其特征在于,所述刀具基体(1)由高速钢、硬质合金、CBN或陶瓷制成。
7.一种制备权利要求1-6任意一项所述的具有织构与自适应润滑涂层的切削刀具的制备方法,其特征在于,包括以下步骤:
步骤1、将刀具基体(1)研磨抛光,并依次放入酒精和丙酮中超声清洗各20-30min,去除表面油渍污染物;
步骤2、采用激光加工技术在刀具基体(1)的表面制备复合织构(2);
步骤3、采用多弧离子镀与中频磁控溅射共沉积的方法,在复合织构(2)的表面制备润滑涂层,得到具有织构与自适应润滑涂层的切削刀具。
8.根据权利要求7所述的制备方法,其特征在于,所述步骤2具体包括:
采用纳秒激光在刀具基体的前刀面和后刀面分别加工出微织构,微织构的宽度为10-80μm,微织构的深度为10-200μm;
采用飞秒激光在刀具基体的前刀面和后刀面分别加工出纳织构,纳织构的宽度为300-600nm,纳织构的深度为50-200nm。
9.根据权利要求7所述的制备方法,其特征在于,所述步骤3具体包括:
步骤31、将步骤2得到的表面具有复合织构的刀具基体放入酒精溶液中超声清洗20-30min,采用真空干燥箱充分干燥后迅速放入镀膜机真空室,真空室本底真空为7.0×10-3-8.0×10-3Pa,加热至150-250℃,保温时间30-40min;
步骤32、通入Ar2,压力为0.5-2.0Pa,开启偏压电源,电压为700-1000V,占空比为0.25-0.3,辉光放电清洗20-30min;偏压降低至300-800V,开启离子源离子清洗20-30min,开启电弧源Zr靶,偏压为400-600V,靶电流为50-80A,离子轰击Zr靶0.5-1.5min;
步骤33、调整工作气压为0.5-2.5Pa,偏压为100-300V,调整Zr靶电流为100-160A,开启Ag靶,靶电流调至80-100A,开启VN电弧电源,靶电流调至80-120A,沉积ZrAgVN层1-10min;
步骤34、关闭Zr靶、Ag靶和VN靶,调整工作气压为0.5-2.0Pa,偏压为200-400V,开启MoTe2靶和BC靶电弧电源,MoTe2靶电流为80-120A,BC靶电流为60-80A,沉积MoTeBC层1-10min;
步骤35、重复步骤33和步骤34,交替沉积ZrAgVN层和MoTeBC层,使润滑涂层的总厚度为1-5μm;
步骤36、关闭所有靶材,关闭偏压电源及气体源,保温30-60min,得到具有织构与自适应润滑涂层的切削刀具。
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