CN107058951B - ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺 - Google Patents

ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺 Download PDF

Info

Publication number
CN107058951B
CN107058951B CN201710298823.0A CN201710298823A CN107058951B CN 107058951 B CN107058951 B CN 107058951B CN 201710298823 A CN201710298823 A CN 201710298823A CN 107058951 B CN107058951 B CN 107058951B
Authority
CN
China
Prior art keywords
coating
zralcn
zralc
electric arc
transition zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201710298823.0A
Other languages
English (en)
Other versions
CN107058951A (zh
Inventor
宋文龙
周珂
王首军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu Hongxun Locomotive Co., Ltd
Original Assignee
Jining University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jining University filed Critical Jining University
Priority to CN201710298823.0A priority Critical patent/CN107058951B/zh
Publication of CN107058951A publication Critical patent/CN107058951A/zh
Application granted granted Critical
Publication of CN107058951B publication Critical patent/CN107058951B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0664—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/40—Coatings including alternating layers following a pattern, a periodic or defined repetition
    • C23C28/42—Coatings including alternating layers following a pattern, a periodic or defined repetition characterized by the composition of the alternating layers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

本发明属于机械制造切削刀具领域，特别是涉及一种ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺。本发明采用中频磁控溅射+电弧镀的复合镀膜方法制备的ZrAlC/ZrAlCN叠层涂层刀具。刀具最外层ZrAlCN涂层，刀具基体与涂层间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层与ZrAlCN涂层交替的复合叠层结构。本发明涂层沉积时沉积温度控制在300℃以下，可在更为广泛的刀具基体上制备。所制备ZrAlC/ZrAlCN叠层复合涂层刀具综合了四元碳氮化合物涂层、三元碳化物涂层及叠层结构的优点，具有高硬度、耐磨性和良好的减摩润滑性能，提高了涂层刀具的综合使用性能，可广泛应用于冷硬铸铁、球墨铸铁、有色金属及合金的粗精加工，以及高锰钢、淬火钢及合金钢等的半精加工与精加工。

Description

ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺
技术领域
本发明属于机械制造切削刀具领域，特别是涉及一种ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺。
背景技术
随着切削技术向高速、高效、高精、绿色方向发展，切削加工对刀具的性能提出了更高的要求，无涂层刀具由于表面硬度低、耐磨性差等缺陷，已经难以满足干式、高速条件下以及对钛合金等难加工材料的切削加工要求。涂层刀具因具有高的表面硬度、良好的耐磨性和高温稳定性等，已成为现代切削加工的主要选择。TiC和TiN涂层是最早应用在刀具表面上的涂层。然而，随着切削加工技术的发展以及高速切削技术的推广，二元氮化物硬质涂层相对较弱的韧性和耐磨性限制了其应用。通过制备多元复合结构的涂层可以显著提高涂层的韧性、强度及耐冲击性等综合性能，涂层的多元复合结构已经成为涂层刀具的重要发展方向。TiCN是目前最广泛使用的三元碳氮化合物涂层，TiCN涂层由于兼具TiC的高硬度和TiN的良好韧性，显著提高了其摩擦磨损性能(Jinlong Li,Shihong Zhang,MingxiLi.Influence ofthe C2H2flow rate on gradient TiCN films deposited by multi-arcion plating[J].Applied Surface Science,2013(283):134-144.)，已广泛应用于铣削、攻牙、冲压、成型及滚齿的加工，在高速切削时比普通硬质合金刀具的耐磨性高5-8倍。中国专利“汽轮机转子轮槽铣刀表面TiCN多层复合涂层制备工艺”(专利号201510564738.5)利用Ti、氮气(N2)与乙炔气体(C2H2)在450℃沉积温度下合成了TiCN涂层铣刀，解决了26NiCrMov145材料转子加工难题。
TiCN涂层虽然具有高硬度、低摩擦系数的优点，但同时因其热稳定性和红硬性较差，仅适合应用于低速切削或具有良好冷却条件的场合，需要对传统TiCN涂层结构和制备工艺进行改进。目前，多元化是材料改善力学性能、耐蚀性和耐磨性的有效途径，通过制备多元复合涂层，既可提高涂层与基体的结合强度，又兼顾多种单涂层的综合性能，显著提高涂层刀具的性能。
目前TiCN等碳氮化合物主要通过化学气相沉积技术(CVD)等技术制备，即通过TiCl4(或Ti靶)、CH4(或C2H2)以及N2等气体反应生成，沉积温度通常超过400℃，对基体产生不利影响，同时气体碳源容易对涂层设备造成污染，制约了其广泛应用。
层状复合材料是近几年发展起来的材料增强增韧新技术，这种结构是通过模仿贝壳而来，因此又叫仿生叠层复合材料。自然界中贝壳的珍珠层是一种天然的层状结构材料，其断裂韧性却比普通单一均质结构高出3000倍以上。因此，通过模仿生物材料结构形式的层间设计，制备出的叠层复合涂层可以提高目前碳氮化合物涂层的韧性、稳定性及减摩耐磨性等综合性能。
发明内容
本发明的目的在于克服目前现有碳氮化合物涂层刀具性能及制备方法的不足，结合层状复合材料结构的优点提供一种ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺。
本发明所述的ZrAlC/ZrAlCN叠层复合涂层刀具，刀具基体最外层为ZrAlCN涂层，刀具基体与ZrAlCN涂层之间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层与ZrAlCN涂层交替的复合叠层结构。
刀具基体的材料为高速钢、工具钢、模具钢、硬质合金、陶瓷、金刚石或立方氮化硼中的一种。
本发明所述的ZrAlC/ZrAlCN叠层复合涂层刀具的制备工艺，沉积方式为采用中频磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个复合ZrAlC中频磁控溅射靶，2个电弧Ti靶：首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法交替沉积ZrAlC涂层与ZrAlCN涂层，最外层为ZrAlCN涂层；其中，ZrAlC中频磁控溅射靶中包含重量分数为40％-60％的Zr、20％-40％的Al和10％-20％的C。
具体包括如下步骤：
(1)刀具基体表面前处理；
(2)刀具基体表面离子清洗；
(3)采用电弧镀在刀具基体表面沉积Ti过渡层；
(4)采用中频磁控溅射在Ti过渡层上沉积ZrAlC涂层；
(5)采用中频磁控溅射在ZrAlC涂层上沉积ZrAlCN涂层；
(6)采用中频磁控溅射在ZrAlCN涂层上沉积ZrAlC涂层；
(7)重复(5)、(6)、(5)……(5)，交替沉积ZrAlCN涂层、ZrAlC涂层、ZrAlCN涂层……ZrAlCN涂层共90min；
(8)后处理：关闭各电源、离子源及气体源，涂层结束。
其中：
步骤(1)中首先将刀具基体表面抛光，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具基体表面油污、锈迹等杂质，干燥后放入镀膜机，抽真空至5.0×10-3Pa，加热至280℃，保温25～30min。
步骤(2)中通入Ar气，控制其压力为1.5Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗20min；降低偏压至400V，开启离子源离子清洗15min，开启电弧Ti靶电源，Ti靶电流60A，偏压300V，离子轰击1～2min。
步骤(3)中调Ar气压0.6～0.7Pa，偏压降至250V，Ti靶电流60A，沉积温度220℃，电弧镀Ti过渡层4～5min。
步骤(4)中调Ar气压0.5～0.6Pa，偏压调至200V，关闭电弧Ti靶电源，开启中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC涂层3～4min。
步骤(5)中开启N2，N2气压为1.5Pa，调Ar气压0.5Pa，偏压220V，中频磁控溅射ZrAlC靶电流40A，沉积温度250℃，沉积ZrAlCN涂层3～4min，沉积完成后关闭N2。
步骤(6)中调Ar气压0.5～0.6Pa，偏压调至200V，关闭电弧Ti靶电源，开启中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC涂层3～4min。
本发明所述ZrAlC中频磁控溅射靶采用真空热压法制备，即将装有Zr粉末、Al粉末、C粉末混合粉的模具置入真空热压炉，经热压烧结后成型所得。
本发明所述的ZrAlC/ZrAlCN叠层复合涂层刀具，刀具表面为ZrAlCN涂层，刀具基体与涂层间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层和ZrAlCN涂层交替的复合叠层结构。基体上的Ti过渡层主要作用是减缓因涂层成分突变造成的层间应力，提高了涂层与刀具基体间的结合性能，Zr元素对涂层起到固溶强化作用，提高了涂层的硬度、强度和抗磨损特性，Al元素能够形成致密的Al2O3保护膜，改善涂层的高温氧化性能，使涂层刀具具有更优异的化学稳定性和抗高温氧化能力，可显著改善涂层刀具的摩擦磨损性能，提高刀具的切削寿命和加工效率，C元素降低了涂层表面的摩擦系数，使涂层具备优异的减摩润滑及耐摩擦磨损性能。同时该叠层复合结构的层间界面可阻止涂层柱状晶的生长，阻碍裂纹和缺陷的扩展，提高涂层的硬度、韧性和耐冲击性。
本发明与现有技术相比，具有以下有益效果。
本发明沉积方式为采用中频磁控溅射+电弧镀的复合镀膜方法，且沉积温度控制在300℃以下，可在更为广泛的刀具基体上制备。本发明所制得的ZrAlC/ZrAlCN叠层复合涂层刀具，综合了超硬碳氮化合物涂层、碳化物涂层及叠层结构的优点，可明显改善传统TiCN涂层刀具的物理机械性能，该叠层复合刀具可使切削过程的切削力和切削温度降低25-30％，涂层刀具热稳定性提高50％，刀具磨损减小30-35％，涂层刀具使用寿命提高35％以上。同时，ZrAlC/ZrAlCN叠层复合结构通过不同材料结构和成分组成的层间界面可以减缓涂层的过早剥落和裂纹的扩展，该ZrAlC/ZrAlCN叠层复合涂层刀具可广泛应用于冷硬铸铁、球墨铸铁、有色金属及合金的粗精加工，以及高锰钢、淬火钢及合金钢等的半精加工与精加工。
附图说明
图1、本发明的ZrAlC/ZrAlCN叠层复合涂层刀具的涂层结构示意图。
图中：1、刀具基体2、Ti过渡层3、ZrAlC涂层4、ZrAlCN涂层5、ZrAlC涂层与ZrAlCN涂层交替的叠层复合结构。
具体实施方式
下面给出本发明的二个最佳实施例：
实施例1
一种ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺，该刀具为普通的铣刀片，其基体材料为：硬质合金YG8，刀具基体最外层为ZrAlCN涂层，刀具基体与ZrAlCN涂层之间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层与ZrAlCN涂层交替的复合叠层结构。本发明沉积方式为采用中频磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个复合ZrAlC中频磁控溅射靶，2个电弧Ti靶：首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法交替沉积ZrAlC涂层与ZrAlCN涂层，最外层为ZrAlCN涂层，其中，ZrAlC中频磁控溅射靶中包含重量分数为40％的Zr、40％的Al和20％的C。
制备工艺具体包括如下步骤：
(1)刀具基体表面前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至280℃，保温25～30min；
(2)刀具基体表面离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗20min；降低偏压至400V，开启离子源离子清洗15min，开启电弧Ti靶电源，Ti靶电流60A，偏压300V，离子轰击1～2min；
(3)采用电弧镀在刀具基体表面沉积Ti过渡层：Ar气压0.6～0.7Pa，偏压降至250V，Ti靶电流60A，沉积温度220℃，电弧镀Ti过渡层4～5min；
(4)采用中频磁控溅射在Ti过渡层上沉积ZrAlC涂层：Ar气压0.5～0.6Pa，偏压调至200V，关闭电弧Ti靶电源，开启中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC层3～4min；
(5)采用中频磁控溅射在ZrAlC涂层上沉积ZrAlCN涂层：开启N2，N2气压为1.5Pa，Ar气压0.5Pa，偏压220V，中频磁控溅射ZrAlC靶电流40A，沉积温度250℃，复合沉积ZrAlCN涂层3～4min；
(6)采用中频磁控溅射在ZrAlCN涂层上沉积ZrAlC涂层：Ar气压0.5～0.6Pa，偏压调至200V，调中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC涂层3～4min；
(7)重复(5)、(6)、(5)……(5)，交替沉积ZrAlCN涂层、ZrAlC涂层、ZrAlCN涂层……ZrAlCN涂层共90min；
(8)后处理：关闭各电源、离子源及气体源，涂层结束。
实施例2
一种ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺，该刀具为普通麻花钻，其刀具基体材料为：高速钢W18Cr4V，刀具基体最外层为ZrAlCN涂层，刀具基体与ZrAlCN涂层之间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层与ZrAlCN涂层交替的复合叠层结构。本发明沉积方式为采用中频磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个复合ZrAlC中频磁控溅射靶，2个电弧Ti靶：首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法交替沉积ZrAlC涂层与ZrAlCN涂层，最外层为ZrAlCN涂层；其中，ZrAlC中频磁控溅射靶中包含重量分数为60％的Zr、20％的Al和20％的C。
制备工艺具体包括如下步骤：
(1)刀具基体表面前处理：将刀具基体表面抛光，去除表面油污、锈迹等杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至280℃，保温25～30min；
(2)刀具基体表面离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗20min；降低偏压至400V，开启离子源离子清洗15min，开启电弧Ti靶电源，Ti靶电流60A，偏压300V，离子轰击1～2min；
(3)采用电弧镀在刀具基体表面沉积Ti过渡层：Ar气压0.6～0.7Pa，偏压降至250V，Ti靶电流60A，沉积温度220℃，电弧镀Ti过渡层4～5min；
(4)采用中频磁控溅射在Ti过渡层上沉积ZrAlC涂层：Ar气压0.5～0.6Pa，偏压调至200V，关闭电弧Ti靶电源，开启中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC层3～4min；
(5)采用中频磁控溅射在ZrAlC涂层上沉积ZrAlCN涂层：开启N2，N2气压为1.5Pa，Ar气压0.5Pa，偏压220V，中频磁控溅射ZrAlC靶电流40A，沉积温度250℃，复合沉积ZrAlCN涂层3～4min；
(6)采用中频磁控溅射在ZrAlCN涂层上沉积ZrAlC涂层：Ar气压0.5～0.6Pa，偏压调至200V，调中频磁控溅射ZrAlC靶电流35A，沉积ZrAlC涂层3～4min；
(7)重复(5)、(6)、(5)……(5)，交替沉积ZrAlCN涂层、ZrAlC涂层、ZrAlCN涂层……ZrAlCN涂层共90min；
(8)后处理：关闭各电源、离子源及气体源，涂层结束。

Claims (1)

1.一种ZrAlC/ZrAlCN叠层复合涂层刀具的制备工艺，其特征在于：刀具基体的材料为高速钢、工具钢、模具钢、硬质合金、陶瓷、金刚石或立方氮化硼中的一种，刀具基体最外层为ZrAlCN涂层，刀具基体与ZrAlCN涂层之间有Ti过渡层，ZrAlCN涂层与Ti过渡层之间是ZrAlC涂层与ZrAlCN涂层交替的复合叠层结构；沉积方式为采用中频磁控溅射+电弧镀的复合镀膜方法，沉积时使用2个复合ZrAlC中频磁控溅射靶，2个电弧Ti靶：首先采用电弧镀沉积Ti过渡层，然后采用中频磁控溅射方法交替沉积ZrAlC涂层与ZrAlCN涂层，最外层为ZrAlCN涂层；其中，ZrAlC中频磁控溅射靶中包含重量分数为40％-60％的Zr、20％-40％的Al和10％-20％的C；具体包括以下步骤：
(1)前处理：将刀具基体表面抛光，去除表面油污、锈迹杂质，然后依次放入酒精和丙酮中，超声清洗各20min，去除刀具表面油污和其它附着物，电吹风干燥充分后迅速放入镀膜机，抽真空至5.0×10-3Pa，加热至280℃，保温25～30min；
(2)离子清洗：通Ar气，其压力为1.5Pa，开启偏压电源，电压600V，占空比0.3，辉光放电清洗20min；降低偏压至400V，开启离子源离子清洗15min，开启电弧Ti靶电源，Ti靶电流60A，偏压300V，离子轰击1～2min；
(3)沉积Ti过渡层：Ar气压0.6～0.7Pa，偏压降至250V，Ti靶电流60A，沉积温度220℃，电弧镀Ti过渡层4～5min；
(4)沉积ZrAlC层：Ar气压0.5～0.6Pa，偏压调至200V，关闭电弧Ti靶电源，开启磁控溅射ZrAlC靶电流35A，沉积ZrAlC层3～4min；
(5)沉积ZrAlCN层：开启N2，N2气压为1.5Pa，Ar气压0.5Pa，偏压220V，ZrAlC靶电流40A，沉积温度250℃，复合沉积ZrAlCN层3～4min；
(6)沉积ZrAlC层：关闭N2，重复(4)；
(7)沉积ZrAlCN层：开启N2，重复(5)；
(8)重复(4)、(5)、(4)…：交替沉积ZrAlC层、ZrAlCN层、ZrAlC层…ZrAlCN层共90min；
(9)后处理：关闭各电源、离子源及气体源，涂层结束。
CN201710298823.0A 2017-04-27 2017-04-27 ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺 Active CN107058951B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710298823.0A CN107058951B (zh) 2017-04-27 2017-04-27 ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710298823.0A CN107058951B (zh) 2017-04-27 2017-04-27 ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺

Publications (2)

Publication Number Publication Date
CN107058951A CN107058951A (zh) 2017-08-18
CN107058951B true CN107058951B (zh) 2019-05-07

Family

ID=59605299

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710298823.0A Active CN107058951B (zh) 2017-04-27 2017-04-27 ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺

Country Status (1)

Country Link
CN (1) CN107058951B (zh)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SE530861C2 (sv) * 2006-12-15 2008-09-30 Sandvik Intellectual Property Belagd hårdmetallpinnfräs för medel- och finbearbetning av härdade stål och förfarande för dess framställning
CN106086787B (zh) * 2016-06-15 2018-09-28 广东银鹰实业集团有限公司 Ti-TiN+MoS2/Ti叠层复合涂层刀具及其制备工艺

Also Published As

Publication number Publication date
CN107058951A (zh) 2017-08-18

Similar Documents

Publication Publication Date Title
CN105624618B (zh) TiAlSiZrN基复合涂层、具有该复合涂层的梯度超细硬质合金刀具及其制备方法
CN110016642A (zh) 一种微织构梯度涂层刀具及其制备方法
CN105088127B (zh) 一种涂层及其制备方法
CN105887024B (zh) TiCrN＆MoS2/Cr/Ti叠层涂层刀具及其制备工艺
CN104928638A (zh) 一种AlCrSiN基多层纳米复合刀具涂层及其制备方法
CN110158044A (zh) 一种多元复合梯度涂层刀具及其制备方法
CN108251797B (zh) 一种钛合金切削刀具用TiAlN/CrN多层涂层及其制备方法
CN107523790A (zh) 一种AlCrSiCuN纳米多层涂层及其制备方法
CN110306190A (zh) 一种多元纳米梯度涂层刀具及其制备方法
CN107338411B (zh) AlNbCN多元梯度复合涂层刀具及其制备方法
CN109097731A (zh) 一种AlCrN/AlCrYN多元多层涂层及其制备方法和应用
CN107177827B (zh) SiNbC/SiNbCN叠层复合涂层刀具及其制备工艺
CN106893975B (zh) AlC/AlCN叠层涂层刀具及其制备工艺
CN107177828B (zh) SiZrCN梯度复合涂层刀具及其制备方法
CN105861997B (zh) TiCrN/MoS2多元减摩润滑涂层刀具及其制备工艺
CN107177825B (zh) ZrNbC/ZrNbCN叠层涂层刀具及其制备工艺
CN107099778B (zh) 一种铝合金干式加工用非晶刀具涂层及其制备方法
CN107354431A (zh) TiMoCN梯度复合涂层刀具及其制备方法
CN107058951B (zh) ZrAlC/ZrAlCN叠层复合涂层刀具及其制备工艺
CN107338412A (zh) CrNbC/CrNbCN叠层复合涂层刀具及其制备工艺
CN107177826B (zh) MoNbC/MoNbCN叠层复合涂层刀具及其制备工艺
CN107354432A (zh) ZrCrCN梯度复合涂层刀具及其制备方法
CN103938157B (zh) 一种ZrNbAlN超晶格涂层及制备方法
CN107119275B (zh) ZrCrC/ZrCrCN叠层复合涂层刀具及其制备工艺
CN207176061U (zh) 一种物理气相沉积Ta‑C涂层及设有该涂层的工件

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20201026

Address after: Fengxian County 221700 Jiangsu city of Xuzhou province Zhao Zhuang Zhen single Xifeng Road North

Patentee after: Jiangsu Hongxun Locomotive Co., Ltd

Address before: 272001 Shandong city of Jining province high tech Zone Haichuan Road No. 16 Jining high tech Zone University Park

Patentee before: JINING University

EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Application publication date: 20170818

Assignee: Xuzhou Dajiangjun Electric Vehicle Technology Co.,Ltd.

Assignor: Jiangsu Hongxun Locomotive Co.,Ltd.

Contract record no.: X2022320000006

Denomination of invention: Zralc / zralcn laminated composite coating tool and its preparation process

Granted publication date: 20190507

License type: Exclusive License

Record date: 20220111