CN109836035A - 基板搬出装置 - Google Patents

基板搬出装置 Download PDF

Info

Publication number
CN109836035A
CN109836035A CN201811430289.5A CN201811430289A CN109836035A CN 109836035 A CN109836035 A CN 109836035A CN 201811430289 A CN201811430289 A CN 201811430289A CN 109836035 A CN109836035 A CN 109836035A
Authority
CN
China
Prior art keywords
substrate
placing portion
conveyance device
sheet material
placing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201811430289.5A
Other languages
English (en)
Chinese (zh)
Inventor
西尾仁孝
高松生芳
上野勉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsuboshi Diamond Industrial Co Ltd
Original Assignee
Mitsuboshi Diamond Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsuboshi Diamond Industrial Co Ltd filed Critical Mitsuboshi Diamond Industrial Co Ltd
Publication of CN109836035A publication Critical patent/CN109836035A/zh
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles
    • B65G2201/0214—Articles of special size, shape or weigh
    • B65G2201/022—Flat

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Folding Of Thin Sheet-Like Materials, Special Discharging Devices, And Others (AREA)
CN201811430289.5A 2017-11-29 2018-11-27 基板搬出装置 Withdrawn CN109836035A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-229391 2017-11-29
JP2017229391A JP2019102540A (ja) 2017-11-29 2017-11-29 基板搬出装置

Publications (1)

Publication Number Publication Date
CN109836035A true CN109836035A (zh) 2019-06-04

Family

ID=66850202

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811430289.5A Withdrawn CN109836035A (zh) 2017-11-29 2018-11-27 基板搬出装置

Country Status (4)

Country Link
JP (1) JP2019102540A (ja)
KR (1) KR20190063406A (ja)
CN (1) CN109836035A (ja)
TW (1) TW201925115A (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116728630B (zh) * 2023-08-09 2023-11-03 泉州富桥机械有限公司 一种圆盘锯锯切石板材的自动卸板设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000016826A (ja) * 1998-06-29 2000-01-18 Nippon Electric Glass Co Ltd フラットパネルディスプレイ用ガラス基板の製造方法
CN1678439A (zh) * 2002-07-02 2005-10-05 三星钻石工业股份有限公司 贴合基板的基板截断系统及基板截断方法
CN1705097A (zh) * 2004-06-03 2005-12-07 芝浦机械电子株式会社 基板的输送装置以及输送方法
CN1828828A (zh) * 2005-02-28 2006-09-06 东京毅力科创株式会社 基板处理装置、基板处理方法和基板处理程序
CN102441931A (zh) * 2010-10-05 2012-05-09 三星钻石工业股份有限公司 脆性材料基板的分断装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11348032A (ja) * 1998-06-09 1999-12-21 Futaba Corp 基板切断装置
JP2001206728A (ja) * 2000-01-21 2001-07-31 Nakamura Tome Precision Ind Co Ltd ガラス基板のブレーク装置
JP2011035146A (ja) * 2009-07-31 2011-02-17 Toppan Printing Co Ltd 基板保持方法および基板処理装置
JP2012086301A (ja) * 2010-10-19 2012-05-10 Renesas Electronics Corp 半導体製造装置、及び半導体製造方法
JP5374545B2 (ja) 2011-06-01 2013-12-25 三星ダイヤモンド工業株式会社 基板分断装置
JP6518405B2 (ja) * 2014-03-28 2019-05-22 株式会社東京精密 半導体製造装置及び半導体の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000016826A (ja) * 1998-06-29 2000-01-18 Nippon Electric Glass Co Ltd フラットパネルディスプレイ用ガラス基板の製造方法
CN1678439A (zh) * 2002-07-02 2005-10-05 三星钻石工业股份有限公司 贴合基板的基板截断系统及基板截断方法
CN1705097A (zh) * 2004-06-03 2005-12-07 芝浦机械电子株式会社 基板的输送装置以及输送方法
CN1828828A (zh) * 2005-02-28 2006-09-06 东京毅力科创株式会社 基板处理装置、基板处理方法和基板处理程序
CN102441931A (zh) * 2010-10-05 2012-05-09 三星钻石工业股份有限公司 脆性材料基板的分断装置

Also Published As

Publication number Publication date
KR20190063406A (ko) 2019-06-07
JP2019102540A (ja) 2019-06-24
TW201925115A (zh) 2019-07-01

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Application publication date: 20190604

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