CN1090344A - 立式舟形架和晶片支承件 - Google Patents

立式舟形架和晶片支承件 Download PDF

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Publication number
CN1090344A
CN1090344A CN93112769A CN93112769A CN1090344A CN 1090344 A CN1090344 A CN 1090344A CN 93112769 A CN93112769 A CN 93112769A CN 93112769 A CN93112769 A CN 93112769A CN 1090344 A CN1090344 A CN 1090344A
Authority
CN
China
Prior art keywords
wafer supports
boat
wafer
silicon carbide
supports
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN93112769A
Other languages
English (en)
Chinese (zh)
Inventor
斯蒂芬·E·普罗亚
布赖恩D·福斯特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Saint Gobain Ceramics and Plastics Inc
Original Assignee
Saint Gobain Norton Industrial Ceramics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Saint Gobain Norton Industrial Ceramics Corp filed Critical Saint Gobain Norton Industrial Ceramics Corp
Publication of CN1090344A publication Critical patent/CN1090344A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/123—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by a material, a roughness, a coating or the like
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/10—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]
    • H10P72/12—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements
    • H10P72/127—Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements characterised by the substrate support

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
  • Furnace Charging Or Discharging (AREA)
  • Packaging Of Annular Or Rod-Shaped Articles, Wearing Apparel, Cassettes, Or The Like (AREA)
CN93112769A 1992-12-03 1993-12-03 立式舟形架和晶片支承件 Pending CN1090344A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US98616192A 1992-12-03 1992-12-03
US07/986,161 1992-12-03

Publications (1)

Publication Number Publication Date
CN1090344A true CN1090344A (zh) 1994-08-03

Family

ID=25532141

Family Applications (1)

Application Number Title Priority Date Filing Date
CN93112769A Pending CN1090344A (zh) 1992-12-03 1993-12-03 立式舟形架和晶片支承件

Country Status (7)

Country Link
EP (1) EP0600516A1 (enExample)
JP (1) JPH0778777A (enExample)
KR (1) KR940016668A (enExample)
CN (1) CN1090344A (enExample)
CA (1) CA2109654A1 (enExample)
NO (1) NO934238L (enExample)
TW (1) TW242196B (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101018885B (zh) * 2004-08-24 2010-07-14 圣戈本陶瓷及塑料股份有限公司 半导体加工部件及用该部件进行的半导体加工
US7778556B2 (en) 2006-03-27 2010-08-17 Sharp Kabushiki Kaisha Toner supply device, image forming apparatus and toner shortage detecting method
CN102231406A (zh) * 2011-06-24 2011-11-02 苏州凯西石英电子有限公司 一种用于太阳能电池硅片生产的石英舟
CN106298616A (zh) * 2015-06-04 2017-01-04 有研半导体材料有限公司 一种硅片承载部件及降低高温退火片体金属含量的方法
CN107527971A (zh) * 2017-08-14 2017-12-29 深圳市拉普拉斯能源技术有限公司 一种硅片扩散装置及硅片插片方法
CN107954719A (zh) * 2017-10-31 2018-04-24 苏州纳朴材料科技有限公司 一种用于LED外延晶圆制程的SiC承载盘制备方法
CN108475650A (zh) * 2015-12-04 2018-08-31 洛克系统私人有限公司 改善的基底加工和装置
CN108800953A (zh) * 2018-08-24 2018-11-13 洛阳恒立窑炉有限公司 一种管式电窑炉的料舟与加热管配合结构

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2732224B2 (ja) * 1994-09-30 1998-03-25 信越半導体株式会社 ウエーハ支持ボート
US5618351A (en) * 1995-03-03 1997-04-08 Silicon Valley Group, Inc. Thermal processing apparatus and process
KR100234530B1 (ko) * 1996-08-23 1999-12-15 윤종용 반도체 웨이퍼 보트
US6395363B1 (en) * 1996-11-05 2002-05-28 Applied Materials, Inc. Sloped substrate support
JP3377996B1 (ja) 2001-12-27 2003-02-17 東京エレクトロン株式会社 熱処理用ボート及び縦型熱処理装置
KR100492977B1 (ko) * 2002-12-12 2005-06-07 삼성전자주식회사 다공성 실리카 박막의 소결을 위한 웨이퍼 보트
US7727588B2 (en) * 2003-09-05 2010-06-01 Yield Engineering Systems, Inc. Apparatus for the efficient coating of substrates
KR100657501B1 (ko) * 2004-08-19 2006-12-13 주식회사 테라세미콘 고온공정용 반도체 제조공정에서의 웨이퍼 지지방법 및고온공정용 반도체 제조장치의 웨이퍼 홀더

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4386255A (en) * 1979-12-17 1983-05-31 Rca Corporation Susceptor for rotary disc reactor
JPS60152675A (ja) * 1984-01-20 1985-08-10 Toshiba Mach Co Ltd 縦型拡散炉型気相成長装置
JPS61191015A (ja) * 1985-02-20 1986-08-25 Hitachi Ltd 半導体の気相成長方法及びその装置

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101018885B (zh) * 2004-08-24 2010-07-14 圣戈本陶瓷及塑料股份有限公司 半导体加工部件及用该部件进行的半导体加工
US7778556B2 (en) 2006-03-27 2010-08-17 Sharp Kabushiki Kaisha Toner supply device, image forming apparatus and toner shortage detecting method
CN102231406A (zh) * 2011-06-24 2011-11-02 苏州凯西石英电子有限公司 一种用于太阳能电池硅片生产的石英舟
CN106298616A (zh) * 2015-06-04 2017-01-04 有研半导体材料有限公司 一种硅片承载部件及降低高温退火片体金属含量的方法
CN108475650A (zh) * 2015-12-04 2018-08-31 洛克系统私人有限公司 改善的基底加工和装置
CN108475650B (zh) * 2015-12-04 2022-07-12 洛克系统私人有限公司 改善的基底加工和装置
CN107527971A (zh) * 2017-08-14 2017-12-29 深圳市拉普拉斯能源技术有限公司 一种硅片扩散装置及硅片插片方法
CN107954719A (zh) * 2017-10-31 2018-04-24 苏州纳朴材料科技有限公司 一种用于LED外延晶圆制程的SiC承载盘制备方法
CN108800953A (zh) * 2018-08-24 2018-11-13 洛阳恒立窑炉有限公司 一种管式电窑炉的料舟与加热管配合结构
CN108800953B (zh) * 2018-08-24 2024-05-17 宁波市北仑区汉朝模具科技有限公司 一种管式电窑炉的料舟与加热管配合结构

Also Published As

Publication number Publication date
NO934238L (no) 1994-06-06
KR940016668A (ko) 1994-07-23
NO934238D0 (no) 1993-11-23
JPH0778777A (ja) 1995-03-20
CA2109654A1 (en) 1994-06-04
TW242196B (enExample) 1995-03-01
EP0600516A1 (en) 1994-06-08

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C06 Publication
PB01 Publication
C01 Deemed withdrawal of patent application (patent law 1993)
WD01 Invention patent application deemed withdrawn after publication