CN108780763B - 各向异性导电连接构造体 - Google Patents
各向异性导电连接构造体 Download PDFInfo
- Publication number
- CN108780763B CN108780763B CN201780017937.1A CN201780017937A CN108780763B CN 108780763 B CN108780763 B CN 108780763B CN 201780017937 A CN201780017937 A CN 201780017937A CN 108780763 B CN108780763 B CN 108780763B
- Authority
- CN
- China
- Prior art keywords
- electrode terminal
- anisotropic conductive
- connection structure
- ratio
- conductive particles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/16—Non-insulated conductors or conductive bodies characterised by their form comprising conductive material in insulating or poorly conductive material, e.g. conductive rubber
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistors
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives
- H05K3/323—Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/36—Assembling printed circuits with other printed circuits
- H05K3/368—Assembling printed circuits with other printed circuits parallel to each other
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W99/00—Subject matter not provided for in other groups of this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/072—Connecting or disconnecting of bump connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07332—Compression bonding, e.g. thermocompression bonding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/074—Connecting or disconnecting of anisotropic conductive adhesives
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/231—Shapes
- H10W72/234—Cross-sectional shape, i.e. in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/241—Dispositions, e.g. layouts
- H10W72/242—Dispositions, e.g. layouts relative to the surface, e.g. recessed, protruding
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/251—Materials
- H10W72/252—Materials comprising solid metals or solid metalloids, e.g. PbSn, Ag or Cu
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/20—Bump connectors, e.g. solder bumps or copper pillars; Dummy bumps; Thermal bumps
- H10W72/261—Functions other than electrical connecting
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/321—Structures or relative sizes of die-attach connectors
- H10W72/325—Die-attach connectors having a filler embedded in a matrix
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/352—Materials of die-attach connectors comprising metals or metalloids, e.g. solders
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/951—Materials of bond pads
- H10W72/952—Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W74/00—Encapsulations, e.g. protective coatings
- H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
- H10W74/15—Encapsulations, e.g. protective coatings characterised by their shape or disposition on active surfaces of flip-chip devices, e.g. underfills
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/722—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/721—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors
- H10W90/724—Package configurations characterised by the relative positions of pads or connectors relative to package parts of bump connectors between a chip and a stacked insulating package substrate, interposer or RDL
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/732—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between stacked chips
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W90/00—Package configurations
- H10W90/701—Package configurations characterised by the relative positions of pads or connectors relative to package parts
- H10W90/731—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
- H10W90/734—Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Combinations Of Printed Boards (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016-073087 | 2016-03-31 | ||
| JP2016073087A JP6945276B2 (ja) | 2016-03-31 | 2016-03-31 | 異方性導電接続構造体 |
| PCT/JP2017/012408 WO2017170412A1 (ja) | 2016-03-31 | 2017-03-27 | 異方性導電接続構造体 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108780763A CN108780763A (zh) | 2018-11-09 |
| CN108780763B true CN108780763B (zh) | 2022-12-06 |
Family
ID=59964518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780017937.1A Active CN108780763B (zh) | 2016-03-31 | 2017-03-27 | 各向异性导电连接构造体 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10602619B2 (https=) |
| JP (1) | JP6945276B2 (https=) |
| KR (1) | KR102081570B1 (https=) |
| CN (1) | CN108780763B (https=) |
| TW (1) | TWI759290B (https=) |
| WO (1) | WO2017170412A1 (https=) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6945276B2 (ja) * | 2016-03-31 | 2021-10-06 | デクセリアルズ株式会社 | 異方性導電接続構造体 |
| CN108987439A (zh) * | 2018-06-21 | 2018-12-11 | 武汉华星光电半导体显示技术有限公司 | 显示面板和显示装置 |
| TWI671921B (zh) | 2018-09-14 | 2019-09-11 | 頎邦科技股份有限公司 | 晶片封裝構造及其晶片 |
| CN111179750A (zh) * | 2019-12-12 | 2020-05-19 | 武汉华星光电技术有限公司 | 显示面板的结构和其制作方法 |
| JP7334198B2 (ja) | 2021-02-01 | 2023-08-28 | プライムプラネットエナジー&ソリューションズ株式会社 | 電極端子および該電極端子を備えた二次電池 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004186411A (ja) * | 2002-12-03 | 2004-07-02 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| CN104145329A (zh) * | 2012-03-05 | 2014-11-12 | 迪睿合电子材料有限公司 | 使用各向异性导电材料的连接方法及各向异性导电接合体 |
| JP2015028920A (ja) * | 2013-06-26 | 2015-02-12 | 積水化学工業株式会社 | 接続構造体 |
| JP2015146379A (ja) * | 2014-02-03 | 2015-08-13 | デクセリアルズ株式会社 | 接続体 |
| JP2016029698A (ja) * | 2014-07-22 | 2016-03-03 | デクセリアルズ株式会社 | 接続体、及び接続体の製造方法 |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2699951B2 (ja) * | 1995-09-28 | 1998-01-19 | 日本電気株式会社 | 電子部品の接続構造及び製造方法 |
| JPH1131698A (ja) | 1997-07-14 | 1999-02-02 | Texas Instr Japan Ltd | 半導体装置、その製造方法及び実装構造 |
| KR100539060B1 (ko) * | 1997-10-28 | 2007-04-25 | 소니 케미카루 가부시키가이샤 | 이방도전성접착제및접착용막 |
| JP3624729B2 (ja) * | 1998-04-06 | 2005-03-02 | セイコーエプソン株式会社 | Icチップ、ic構造体、液晶装置及び電子機器 |
| KR20000057810A (ko) * | 1999-01-28 | 2000-09-25 | 가나이 쓰토무 | 반도체 장치 |
| JP2001028280A (ja) * | 1999-07-13 | 2001-01-30 | Three Bond Co Ltd | 回路接続部材 |
| US6451875B1 (en) * | 1999-10-12 | 2002-09-17 | Sony Chemicals Corporation | Connecting material for anisotropically electroconductive connection |
| JP2002151551A (ja) * | 2000-11-10 | 2002-05-24 | Hitachi Ltd | フリップチップ実装構造、その実装構造を有する半導体装置及び実装方法 |
| US7154206B2 (en) * | 2002-07-31 | 2006-12-26 | Kyocera Corporation | Surface acoustic wave device and method for manufacturing same |
| JP4115832B2 (ja) * | 2002-12-27 | 2008-07-09 | 東芝松下ディスプレイテクノロジー株式会社 | 半導体素子及び液晶表示パネル |
| JP2005093978A (ja) | 2003-08-12 | 2005-04-07 | Seiko Instruments Inc | 半導体装置の製造方法 |
| US7393771B2 (en) * | 2004-06-29 | 2008-07-01 | Hitachi, Ltd. | Method for mounting an electronic part on a substrate using a liquid containing metal particles |
| JP3964911B2 (ja) * | 2004-09-03 | 2007-08-22 | 松下電器産業株式会社 | バンプ付き基板の製造方法 |
| CN100495677C (zh) * | 2005-03-29 | 2009-06-03 | 松下电器产业株式会社 | 倒装芯片封装方法及其焊锡点形成方法 |
| JP4743322B2 (ja) * | 2007-05-15 | 2011-08-10 | 日立化成工業株式会社 | 回路接続材料及び回路部材の接続構造 |
| CN102206480A (zh) * | 2007-10-02 | 2011-10-05 | 日立化成工业株式会社 | 连接材料作为电路连接材料的应用 |
| JP2008047943A (ja) * | 2007-11-01 | 2008-02-28 | Renesas Technology Corp | 半導体装置 |
| US20090278213A1 (en) * | 2008-05-08 | 2009-11-12 | International Business Machines Corporation | Electrode arrays and methods of fabricating the same using printing plates to arrange particles in an array |
| RU2454843C1 (ru) * | 2008-09-29 | 2012-06-27 | Шарп Кабусики Кайся | Модуль платы и способ для его производства |
| WO2010061428A1 (ja) * | 2008-11-28 | 2010-06-03 | 富士通株式会社 | 電子装置の製造方法、電子部品搭載用基板及びその製造方法 |
| JP5599680B2 (ja) * | 2010-08-27 | 2014-10-01 | 富士フイルム株式会社 | 導電接合構造、実装構造体及び導電接合方法 |
| KR101716987B1 (ko) * | 2012-08-24 | 2017-03-15 | 데쿠세리아루즈 가부시키가이샤 | 이방성 도전 필름의 제조 방법 및 이방성 도전 필름 |
| JP6321910B2 (ja) * | 2013-03-26 | 2018-05-09 | 日東電工株式会社 | 封止シート、半導体装置の製造方法及び封止シート付き基板 |
| KR101628440B1 (ko) * | 2013-10-31 | 2016-06-08 | 제일모직주식회사 | 이방성 도전 필름 및 이를 이용한 반도체 장치 |
| KR102430609B1 (ko) * | 2014-03-31 | 2022-08-08 | 데쿠세리아루즈 가부시키가이샤 | 이방성 도전 필름 및 그 제조 방법 |
| KR101900175B1 (ko) * | 2014-06-02 | 2018-09-18 | 후지필름 가부시키가이샤 | 산화물 입자 및 그 제조 방법, 산화물 입자 분산액, 산화물 입자 박막의 형성 방법, 박막 트랜지스터, 그리고 전자 소자 |
| JP6750197B2 (ja) * | 2015-07-13 | 2020-09-02 | デクセリアルズ株式会社 | 異方性導電フィルム及び接続構造体 |
| JP6945276B2 (ja) * | 2016-03-31 | 2021-10-06 | デクセリアルズ株式会社 | 異方性導電接続構造体 |
-
2016
- 2016-03-31 JP JP2016073087A patent/JP6945276B2/ja active Active
-
2017
- 2017-03-27 WO PCT/JP2017/012408 patent/WO2017170412A1/ja not_active Ceased
- 2017-03-27 CN CN201780017937.1A patent/CN108780763B/zh active Active
- 2017-03-27 KR KR1020187013065A patent/KR102081570B1/ko active Active
- 2017-03-27 US US16/077,785 patent/US10602619B2/en active Active
- 2017-03-29 TW TW106110549A patent/TWI759290B/zh active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004186411A (ja) * | 2002-12-03 | 2004-07-02 | Renesas Technology Corp | 半導体装置およびその製造方法 |
| CN104145329A (zh) * | 2012-03-05 | 2014-11-12 | 迪睿合电子材料有限公司 | 使用各向异性导电材料的连接方法及各向异性导电接合体 |
| JP2015028920A (ja) * | 2013-06-26 | 2015-02-12 | 積水化学工業株式会社 | 接続構造体 |
| JP2015146379A (ja) * | 2014-02-03 | 2015-08-13 | デクセリアルズ株式会社 | 接続体 |
| JP2016029698A (ja) * | 2014-07-22 | 2016-03-03 | デクセリアルズ株式会社 | 接続体、及び接続体の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180066178A (ko) | 2018-06-18 |
| WO2017170412A1 (ja) | 2017-10-05 |
| US10602619B2 (en) | 2020-03-24 |
| CN108780763A (zh) | 2018-11-09 |
| JP2017183664A (ja) | 2017-10-05 |
| KR102081570B1 (ko) | 2020-02-26 |
| JP6945276B2 (ja) | 2021-10-06 |
| TWI759290B (zh) | 2022-04-01 |
| US20190053383A1 (en) | 2019-02-14 |
| TW201804583A (zh) | 2018-02-01 |
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