CN108352217B - 透光性导电薄膜和调光薄膜 - Google Patents

透光性导电薄膜和调光薄膜 Download PDF

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Publication number
CN108352217B
CN108352217B CN201680065213.XA CN201680065213A CN108352217B CN 108352217 B CN108352217 B CN 108352217B CN 201680065213 A CN201680065213 A CN 201680065213A CN 108352217 B CN108352217 B CN 108352217B
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light
amorphous
conductive layer
film
conductive film
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CN108352217A (zh
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藤野望
梨木智刚
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Nitto Denko Corp
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Nitto Denko Corp
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Priority to CN202010214957.1A priority Critical patent/CN111391427B/zh
Priority claimed from PCT/JP2016/083033 external-priority patent/WO2017082229A1/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/023—Optical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/025—Electric or magnetic properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
    • B32B7/02—Physical, chemical or physicochemical properties
    • B32B7/027—Thermal properties
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
    • C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
    • C08J5/18—Manufacture of films or sheets
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08—Oxides
    • C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
    • H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
    • H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/0073—Optical laminates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2250/00—Layers arrangement
    • B32B2250/02—2 layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/30—Properties of the layers or laminate having particular thermal properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/30—Properties of the layers or laminate having particular thermal properties
    • B32B2307/308—Heat stability
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2307/00—Properties of the layers or laminate
    • B32B2307/40—Properties of the layers or laminate having particular optical properties
    • B32B2307/412—Transparent
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1343—Electrodes
    • G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Nonlinear Science (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Polymers & Plastics (AREA)
  • Health & Medical Sciences (AREA)
  • Medicinal Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Laminated Bodies (AREA)
  • Non-Insulated Conductors (AREA)
  • Liquid Crystal (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
CN201680065213.XA 2015-11-09 2016-11-08 透光性导电薄膜和调光薄膜 Active CN108352217B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010214957.1A CN111391427B (zh) 2015-11-09 2016-11-08 透光性导电薄膜和调光薄膜

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP2015-219593 2015-11-09
JP2015219593 2015-11-09
JP2016217529A JP6412539B2 (ja) 2015-11-09 2016-11-07 光透過性導電フィルムおよび調光フィルム
JP2016-217529 2016-11-07
PCT/JP2016/083033 WO2017082229A1 (ja) 2015-11-09 2016-11-08 光透過性導電フィルムおよび調光フィルム

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CN108352217A CN108352217A (zh) 2018-07-31
CN108352217B true CN108352217B (zh) 2020-04-17

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US (1) US10720264B2 (enExample)
EP (1) EP3376508A4 (enExample)
JP (4) JP6412539B2 (enExample)
KR (1) KR102618086B1 (enExample)
CN (1) CN108352217B (enExample)
TW (1) TWI716486B (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2019065080A1 (ja) * 2017-09-29 2020-10-22 日東電工株式会社 エレクトロクロミック調光部材、光透過性導電ガラスフィルムおよびエレクトロクロミック調光素子
JP7024852B2 (ja) * 2018-02-28 2022-02-24 Tdk株式会社 透明導電体、調光体及び透明発熱体
TWI822743B (zh) * 2018-03-28 2023-11-21 日商日東電工股份有限公司 含玻璃薄膜之調光元件
WO2020031632A1 (ja) * 2018-08-06 2020-02-13 日東電工株式会社 光透過性導電フィルムおよび調光フィルム
JP7469043B2 (ja) * 2018-11-07 2024-04-16 日東電工株式会社 タッチパネル用光透過性導電層付きフィルム、光透過性導電層付き偏光フィルムおよびタッチパネル表示装置
JP7287802B2 (ja) * 2019-03-14 2023-06-06 日東電工株式会社 光透過性導電フィルム
TW202042254A (zh) * 2019-02-22 2020-11-16 日商日東電工股份有限公司 透光性導電膜
US12156330B2 (en) 2020-03-19 2024-11-26 Nitto Denko Corporation Light-transmitting electroconductive film and transparent electroconductive film
JP7073589B2 (ja) * 2020-03-19 2022-05-23 日東電工株式会社 透明導電層および透明導電性フィルム
CN115298758A (zh) * 2020-03-19 2022-11-04 日东电工株式会社 透明导电性薄膜
JP7628397B2 (ja) * 2020-05-25 2025-02-10 日東電工株式会社 光透過性導電性シート、タッチセンサ、調光素子、光電変換素子、熱線制御部材、アンテナ、電磁波シールド部材および画像表示装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102666910A (zh) * 2009-12-16 2012-09-12 三菱综合材料株式会社 透明导电膜、利用该透明导电膜的太阳能电池及用于形成透明导电膜的溅射靶以及其制造方法
CN103282539A (zh) * 2010-12-24 2013-09-04 日东电工株式会社 透明导电性薄膜及其制造方法
JP2014065303A (ja) * 2008-06-23 2014-04-17 Hitachi Ltd 透明導電膜付き基板，透明導電膜付き基板を用いた表示素子及び透明導電膜付き基板を用いた太陽電池
CN103999166A (zh) * 2012-06-07 2014-08-20 日东电工株式会社 透明导电性膜

Family Cites Families (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4010587B2 (ja) * 1995-12-20 2007-11-21 三井化学株式会社 透明導電性積層体及びそれを用いたエレクトロルミネッセンス発光素子
US6351068B2 (en) 1995-12-20 2002-02-26 Mitsui Chemicals, Inc. Transparent conductive laminate and electroluminescence light-emitting element using same
JP3478368B2 (ja) 1997-05-30 2003-12-15 住友ベークライト株式会社 透明帯電防止バリアフィルム
JP3785109B2 (ja) 2002-04-08 2006-06-14 日東電工株式会社 透明導電積層体の製造方法
US9000461B2 (en) 2003-07-04 2015-04-07 Epistar Corporation Optoelectronic element and manufacturing method thereof
JP3749531B2 (ja) * 2003-08-29 2006-03-01 日東電工株式会社 透明導電積層体の製造方法
KR101272098B1 (ko) * 2005-02-08 2013-06-07 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광소자, 발광장치 및 전자기기
US7166359B2 (en) * 2005-06-27 2007-01-23 Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) Blue colored coated article with low-E coating
JP2007031178A (ja) * 2005-07-25 2007-02-08 Utsunomiya Univ ＣｄＴｅ系酸化物薄膜及びその形成方法
US8059331B2 (en) * 2006-12-21 2011-11-15 Hitachi Chemical Co., Ltd. Light control film and light control glass
CN101636796B (zh) * 2007-03-19 2013-04-10 旭硝子株式会社 导电体的制造方法
JP5229919B2 (ja) * 2007-05-23 2013-07-03 独立行政法人産業技術総合研究所 酸化物透明導電膜を用いた光電変換素子及び光検出素子
CN101911303B (zh) 2007-12-25 2013-03-27 出光兴产株式会社 氧化物半导体场效应晶体管及其制造方法
KR101671543B1 (ko) * 2008-11-20 2016-11-01 이데미쓰 고산 가부시키가이샤 ＺｎＯ-ＳｎＯ₂-Ｉｎ₂Ｏ₃계 산화물 소결체 및 비정질 투명 도전막
TWI390554B (zh) * 2009-08-25 2013-03-21 Efun Technology Co Ltd A transparent conductive film with crystals
JP4843083B2 (ja) * 2009-11-19 2011-12-21 出光興産株式会社 Ｉｎ−Ｇａ−Ｚｎ系酸化物スパッタリングターゲット
US20130095292A1 (en) * 2010-10-29 2013-04-18 Cardinal Solar Technologies Company TCO Coating and Coated Substrate for High Temperature Applications
JP2012230491A (ja) * 2011-04-25 2012-11-22 Nitto Denko Corp タッチパネル用透明導電性フィルムおよび画像表示装置
JP2012017258A (ja) 2011-10-05 2012-01-26 Idemitsu Kosan Co Ltd Ｉｎ−Ｇａ−Ｚｎ系酸化物スパッタリングターゲット
JP2013152827A (ja) * 2012-01-24 2013-08-08 Kaneka Corp 透明電極付き基板およびその製造方法
US9696751B2 (en) 2012-05-17 2017-07-04 Kaneka Corporation Substrate with transparent electrode, method for manufacturing same, and touch panel
JP6215062B2 (ja) * 2013-01-16 2017-10-18 日東電工株式会社 透明導電フィルムの製造方法
JP6239330B2 (ja) * 2013-09-26 2017-11-29 日東電工株式会社 透明導電性フィルムの製造方法
JP6270442B2 (ja) * 2013-12-02 2018-01-31 株式会社カネカ 透明積層体フィルム及び透明電極付き基板の製造方法
JP6524068B2 (ja) * 2014-03-28 2019-06-05 株式会社カネカ 透明導電フィルムおよびその製造方法
US10186346B2 (en) 2014-04-30 2019-01-22 Nitto Denko Corporation Transparent conductive film
JP6548910B2 (ja) 2015-02-25 2019-07-24 日東電工株式会社 電界駆動型調光素子用透明導電性フィルム、調光フィルム、および電界駆動型調光素子
CN107533883B (zh) * 2015-09-30 2021-09-28 积水化学工业株式会社 透光性导电膜、及经退火处理的透光性导电膜的制造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014065303A (ja) * 2008-06-23 2014-04-17 Hitachi Ltd 透明導電膜付き基板，透明導電膜付き基板を用いた表示素子及び透明導電膜付き基板を用いた太陽電池
CN102666910A (zh) * 2009-12-16 2012-09-12 三菱综合材料株式会社 透明导电膜、利用该透明导电膜的太阳能电池及用于形成透明导电膜的溅射靶以及其制造方法
CN103282539A (zh) * 2010-12-24 2013-09-04 日东电工株式会社 透明导电性薄膜及其制造方法
CN103999166A (zh) * 2012-06-07 2014-08-20 日东电工株式会社 透明导电性膜

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