JP6637565B2 - 光透過性導電フィルム - Google Patents
光透過性導電フィルム Download PDFInfo
- Publication number
- JP6637565B2 JP6637565B2 JP2018184493A JP2018184493A JP6637565B2 JP 6637565 B2 JP6637565 B2 JP 6637565B2 JP 2018184493 A JP2018184493 A JP 2018184493A JP 2018184493 A JP2018184493 A JP 2018184493A JP 6637565 B2 JP6637565 B2 JP 6637565B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- transmitting conductive
- amorphous
- conductive layer
- conductive film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 claims description 49
- 239000000463 material Substances 0.000 claims description 11
- 229910052738 indium Inorganic materials 0.000 claims description 9
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims description 8
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 151
- 239000000758 substrate Substances 0.000 description 46
- 229910052760 oxygen Inorganic materials 0.000 description 26
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 24
- 239000001301 oxygen Substances 0.000 description 24
- 238000004544 sputter deposition Methods 0.000 description 20
- 238000000034 method Methods 0.000 description 17
- 239000007789 gas Substances 0.000 description 15
- 229910044991 metal oxide Inorganic materials 0.000 description 13
- 150000004706 metal oxides Chemical class 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 9
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 8
- 229910001882 dioxygen Inorganic materials 0.000 description 8
- -1 polyethylene terephthalate Polymers 0.000 description 8
- 229920006254 polymer film Polymers 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 239000002346 layers by function Substances 0.000 description 7
- 229920000139 polyethylene terephthalate Polymers 0.000 description 7
- 239000005020 polyethylene terephthalate Substances 0.000 description 7
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 7
- 229910001887 tin oxide Inorganic materials 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000012535 impurity Substances 0.000 description 6
- 239000002131 composite material Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229920002799 BoPET Polymers 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 238000001035 drying Methods 0.000 description 4
- 238000011156 evaluation Methods 0.000 description 4
- 238000001755 magnetron sputter deposition Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052718 tin Inorganic materials 0.000 description 4
- 229910052787 antimony Inorganic materials 0.000 description 3
- 125000004429 atom Chemical group 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 229910052733 gallium Inorganic materials 0.000 description 3
- 229910003437 indium oxide Inorganic materials 0.000 description 3
- RHZWSUVWRRXEJF-UHFFFAOYSA-N indium tin Chemical compound [In].[Sn] RHZWSUVWRRXEJF-UHFFFAOYSA-N 0.000 description 3
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 3
- 239000011261 inert gas Substances 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000005406 washing Methods 0.000 description 3
- 239000004925 Acrylic resin Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 2
- 230000005355 Hall effect Effects 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 229910052749 magnesium Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004033 plastic Substances 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920001225 polyester resin Polymers 0.000 description 2
- 239000004645 polyester resin Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 241001074085 Scophthalmus aquosus Species 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- GVFOJDIFWSDNOY-UHFFFAOYSA-N antimony tin Chemical compound [Sn].[Sb] GVFOJDIFWSDNOY-UHFFFAOYSA-N 0.000 description 1
- 239000012461 cellulose resin Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 238000010348 incorporation Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 238000001659 ion-beam spectroscopy Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000113 methacrylic resin Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000001956 neutron scattering Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- JFNLZVQOOSMTJK-KNVOCYPGSA-N norbornene Chemical compound C1[C@@H]2CC[C@H]1C=C2 JFNLZVQOOSMTJK-KNVOCYPGSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 1
- 229920006122 polyamide resin Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000011112 polyethylene naphthalate Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 229920000193 polymethacrylate Polymers 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920005990 polystyrene resin Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 238000005001 rutherford backscattering spectroscopy Methods 0.000 description 1
- 239000004984 smart glass Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B5/00—Non-insulated conductors or conductive bodies characterised by their form
- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B9/00—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
- B32B9/04—Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00 comprising such particular substance as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B33/00—Layered products characterised by particular properties or particular surface features, e.g. particular surface coatings; Layered products designed for particular purposes not covered by another single class
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/023—Optical properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/025—Electric or magnetic properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/02—Physical, chemical or physicochemical properties
- B32B7/027—Thermal properties
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/02—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of metals or alloys
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
- H01B1/08—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances oxides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B13/00—Apparatus or processes specially adapted for manufacturing conductors or cables
- H01B13/0026—Apparatus for manufacturing conducting or semi-conducting layers, e.g. deposition of metal
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/0073—Optical laminates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/02—2 layers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/30—Properties of the layers or laminate having particular thermal properties
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/30—Properties of the layers or laminate having particular thermal properties
- B32B2307/308—Heat stability
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/40—Properties of the layers or laminate having particular optical properties
- B32B2307/412—Transparent
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1343—Electrodes
- G02F1/13439—Electrodes characterised by their electrical, optical, physical properties; materials therefor; method of making
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Nonlinear Science (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mathematical Physics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Polymers & Plastics (AREA)
- Health & Medical Sciences (AREA)
- Medicinal Chemistry (AREA)
- Thermal Sciences (AREA)
- Ceramic Engineering (AREA)
- Laminated Bodies (AREA)
- Non-Insulated Conductors (AREA)
- Liquid Crystal (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Description
(1)Xa≦Xc
(2)Ya≧Yc
(3)前記移動距離Lが1.0以上45.0以下である、
本発明[2]は、Xaに対するXcの比(Xc/Xa)が、1.05以上1.80以下である、[1]に記載の光透過性導電フィルムを含んでいる。
光透過性導電フィルム1の一実施形態は、図1に示すように、所定の厚みを有するフィルム形状(シート形状を含む)をなし、厚み方向と直交する所定方向(前後方向および左右方向、すなわち、面方向)に延び、平坦な上面および平坦な下面(2つの主面)を有する。光透過性導電フィルム1は、例えば、調光フィルム4(後述、図2参照)などの一部品であり、つまり、調光装置(後述)ではない。すなわち、光透過性導電フィルム1は、調光フィルム4などを作製するための部品であり、調光機能層5などを含まず、部品単独で流通し、産業上利用可能なデバイスである。
光透過性基材2は、光透過性導電フィルム1の最下層であって、光透過性導電フィルム1の機械強度を確保する支持材である。
非晶質光透過性導電層3は、非晶質の光透過性導電層であって、必要により後の工程でエッチングによりパターニングすることができる導電層である。
次に、光透過性導電フィルム1を製造する方法について説明する。
次に、上記した光透過性導電フィルム1を用いて調光フィルム4を製造する方法について図2を参照して説明する。
図1の実施形態では、光透過性基材2の表面に非晶質光透過性導電層3が直接配置されているが、例えば、図示しないが、光透過性基材2の上面および/または下面に、機能層を設けることができる。
厚み188μmのポリエチレンテレフタレート(PET)フィルム(三菱樹脂製、品名「ダイアホイル」)を準備し、光透過性基材とした。
Ar流量に対するO2流量の比(O2/Ar)を0.0333とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0327とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0296とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0289とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0280とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0264とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0358とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
厚み50μmのポリエチレンテレフタレート(PET)フィルム(三菱樹脂製、品名「ダイアホイル」)を光透過性基材とした。
Ar流量に対するO2流量の比(O2/Ar)を0.0338とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
Ar流量に対するO2流量の比(O2/Ar)を0.0373とした以外は、実施例1と同様にして光透過性導電フィルム(ITO厚み:65nm)を製造した。
気圧を0.4Paとし、Ar流量に対するO2流量の比(O2/Ar)を0.0114とした以外は、実施例9と同様にして、光透過性導電フィルム(ITO厚み:30nm)を製造した。
気圧を0.4Paとし、Ar流量に対するO2流量の比(O2/Ar)を0.0074とし、RF重畳DCマグネトロンスパッタリング法(RF周波数13.56MHz、DC電力に対するRF電力の比(RF電力/DC電力)は0.2)を実施した以外は、実施例9と同様にして光透過性導電フィルム(ITO厚み:30nm)を製造した。
厚み50μmのPETフィルムを用い、Ar流量に対するO2流量の比(O2/Ar)を0.0201とし、ITO層の厚みを30nmとした以外は、実施例1と同様にして光透過性導電フィルムを製造した。
(1)厚み
PETフィルム(透明基材)の厚みは、膜厚計(尾崎製作所社製、装置名「デジタルダイアルゲージ DG−205」)を用いて測定した。ITO層(光透過性導電層)の厚みは、透過型電子顕微鏡(日立製作所製、装置名「HF−2000」)を用いた断面観察により測定した。
ラザフォード後方散乱分光法を測定原理とする測定装置(National Electrostatics Corporation製、「Pelletron 3SDH」)を用いて、各光透過性導電フィルムのITO層中のArの存在原子量を分析した。具体的には、In、Sn、O、Arの4元素を検出対象とし、4元素の総存在原子量に対するArの存在原子量の比率(atomic%)を測定した。
ホール効果測定システム(バイオラッド製、商品名「HL5500PC」)を用いて測定を実施した。キャリア密度は、上記(1)で求めたITO層の厚みを用いて算出した。
各光透過性導電フィルムを、80℃、500時間加熱して、PETフィルム(透明基材)と被加熱ITO層(被加熱光透過性導電層)とを備える被加熱光透過性導電フィルムを得た。
上記(4)および上記(5)で得られたキャリア密度およびホール移動度、下記式を用いて、移動距離Lを算出した。
なお、非晶質光透過性導電層のキャリア密度をXa×1019(/cm3)、ホール移動度をYa(cm2/V・s)とした。被加熱光透過性導電層のキャリア密度をXc×1019(/cm3)、ホール移動度をYc(cm2/V・s)とした。
各光透過性導電フィルムおよび各被加熱光透過性導電フィルムを、塩酸(濃度:5質量%)に15分間浸漬した後、水洗・乾燥し、各導電層の15mm程度の間の二端子間抵抗を測定した。15mm間の二端子間抵抗が10kΩを超過した場合を、非晶質と判断し、10kΩを超過しなかった場合を、結晶質と判断した。
各光透過性導電フィルムのITO層の表面抵抗値はJIS K7194(1994年)に準じて四端子法により求めた。すなわち、まず、各光透過性導電フィルムのITO層の表面抵抗値(Ra)を測定した。次いで、80℃、500時間加熱後の光透過性導電フィルムの光透過性導電層の表面抵抗値(Rc)を測定した。加熱前の表面抵抗値に対する加熱後の表面抵抗値の抵抗変化率(100x(Rc/Ra))を求め、下記基準にて評価を実施した。
○:抵抗変化率が±30%未満
△:抵抗変化率が±(30%〜49%)
×:抵抗変化率が±50%以上
2 光透過性基材
3 非晶質光透過性導電層
Claims (3)
- 光透過性基材と、非晶質光透過性導電層とを備える光透過性導電フィルムであって、
前記非晶質光透過性導電層に含有されるAr元素の含有量が、0.2atomic%以
上であり、
前記非晶質光透過性導電層のキャリア密度をXa×1019(/cm3)、ホール移動
度をYa(cm2/V・s)とし、
前記非晶質光透過性導電層を大気環境下で加熱処理した後の被加熱光透過性導電層のキャリア密度をXc×1019(/cm3)、ホール移動度をYc(cm2/V・s)とし、
移動距離Lを、{(Xc−Xa)2+(Yc−Ya)2}1/2としたときに、
下記(1)〜(3)の条件を満たし、
前記被加熱光透過性導電層は、塩酸(20℃、濃度:5質量%)に浸漬・水洗・乾燥した後に、前記被加熱光透過性導電層における15mm間の端子間抵抗が10kΩ以上であるような非晶質であることを特徴とする、光透過性導電フィルム。
(1)Xa≦Xc、
(2)Ya≧Yc、
(3)前記移動距離Lが1.0以上45.0以下である。 - Xaに対するXcの比(Xc/Xa)が、1.05以上1.80以下であることを特徴
とする、請求項1に記載の光透過性導電フィルム。 - 前記非晶質光透過性導電層は、インジウム系導電性酸化物を含有することを特徴とする
、請求項1または2に記載の光透過性導電フィルム。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015219593 | 2015-11-09 | ||
JP2015219593 | 2015-11-09 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016217529A Division JP6412539B2 (ja) | 2015-11-09 | 2016-11-07 | 光透過性導電フィルムおよび調光フィルム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019033088A JP2019033088A (ja) | 2019-02-28 |
JP6637565B2 true JP6637565B2 (ja) | 2020-01-29 |
Family
ID=58771814
Family Applications (4)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016217529A Active JP6412539B2 (ja) | 2015-11-09 | 2016-11-07 | 光透過性導電フィルムおよび調光フィルム |
JP2018000834A Active JP6637528B2 (ja) | 2015-11-09 | 2018-01-05 | 光透過性導電フィルムおよび調光フィルム |
JP2018139142A Active JP6530118B2 (ja) | 2015-11-09 | 2018-07-25 | 調光フィルム |
JP2018184493A Active JP6637565B2 (ja) | 2015-11-09 | 2018-09-28 | 光透過性導電フィルム |
Family Applications Before (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016217529A Active JP6412539B2 (ja) | 2015-11-09 | 2016-11-07 | 光透過性導電フィルムおよび調光フィルム |
JP2018000834A Active JP6637528B2 (ja) | 2015-11-09 | 2018-01-05 | 光透過性導電フィルムおよび調光フィルム |
JP2018139142A Active JP6530118B2 (ja) | 2015-11-09 | 2018-07-25 | 調光フィルム |
Country Status (6)
Country | Link |
---|---|
US (1) | US10720264B2 (ja) |
EP (1) | EP3376508A4 (ja) |
JP (4) | JP6412539B2 (ja) |
KR (1) | KR102618086B1 (ja) |
CN (1) | CN108352217B (ja) |
TW (1) | TWI716486B (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019065080A1 (ja) * | 2017-09-29 | 2019-04-04 | 日東電工株式会社 | エレクトロクロミック調光部材、光透過性導電ガラスフィルムおよびエレクトロクロミック調光素子 |
JP7024852B2 (ja) * | 2018-02-28 | 2022-02-24 | Tdk株式会社 | 透明導電体、調光体及び透明発熱体 |
TWI822743B (zh) * | 2018-03-28 | 2023-11-21 | 日商日東電工股份有限公司 | 含玻璃薄膜之調光元件 |
KR20210036871A (ko) * | 2018-08-06 | 2021-04-05 | 닛토덴코 가부시키가이샤 | 광 투과성 도전 필름 및 조광 필름 |
JP7469043B2 (ja) * | 2018-11-07 | 2024-04-16 | 日東電工株式会社 | タッチパネル用光透過性導電層付きフィルム、光透過性導電層付き偏光フィルムおよびタッチパネル表示装置 |
JP7287802B2 (ja) * | 2019-03-14 | 2023-06-06 | 日東電工株式会社 | 光透過性導電フィルム |
WO2021187573A1 (ja) * | 2020-03-19 | 2021-09-23 | 日東電工株式会社 | 透明導電性フィルム、および透明導電性フィルムの製造方法 |
JP7240513B2 (ja) * | 2020-03-19 | 2023-03-15 | 日東電工株式会社 | 透明導電性フィルム |
JP2021186966A (ja) * | 2020-05-25 | 2021-12-13 | 日東電工株式会社 | 光透過性導電性シート、タッチセンサ、調光素子、光電変換素子、熱線制御部材、アンテナ、電磁波シールド部材および画像表示装置 |
Family Cites Families (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4010587B2 (ja) * | 1995-12-20 | 2007-11-21 | 三井化学株式会社 | 透明導電性積層体及びそれを用いたエレクトロルミネッセンス発光素子 |
US6351068B2 (en) | 1995-12-20 | 2002-02-26 | Mitsui Chemicals, Inc. | Transparent conductive laminate and electroluminescence light-emitting element using same |
JP3478368B2 (ja) | 1997-05-30 | 2003-12-15 | 住友ベークライト株式会社 | 透明帯電防止バリアフィルム |
JP3785109B2 (ja) * | 2002-04-08 | 2006-06-14 | 日東電工株式会社 | 透明導電積層体の製造方法 |
US9000461B2 (en) | 2003-07-04 | 2015-04-07 | Epistar Corporation | Optoelectronic element and manufacturing method thereof |
JP3749531B2 (ja) * | 2003-08-29 | 2006-03-01 | 日東電工株式会社 | 透明導電積層体の製造方法 |
EP1846963A4 (en) * | 2005-02-08 | 2010-08-04 | Semiconductor Energy Lab | LIGHT ELEMENT, ILLUMINATING ELEMENT AND ELECTRONIC DEVICE |
US7166359B2 (en) * | 2005-06-27 | 2007-01-23 | Centre Luxembourgeois De Recherches Pour Le Verre Et La Ceramique S.A. (C.R.V.C.) | Blue colored coated article with low-E coating |
JP2007031178A (ja) * | 2005-07-25 | 2007-02-08 | Utsunomiya Univ | CdTe系酸化物薄膜及びその形成方法 |
EP2103990B1 (en) | 2006-12-21 | 2017-08-16 | Hitachi Chemical Company, Ltd. | Light control film and light control glass |
CN101636796B (zh) | 2007-03-19 | 2013-04-10 | 旭硝子株式会社 | 导电体的制造方法 |
WO2008146693A1 (ja) * | 2007-05-23 | 2008-12-04 | National Institute Of Advanced Industrial Science And Technology | 酸化物透明導電膜、およびそれを用いた光電変換素子、光検出素子 |
CN101911303B (zh) | 2007-12-25 | 2013-03-27 | 出光兴产株式会社 | 氧化物半导体场效应晶体管及其制造方法 |
JP5449836B2 (ja) * | 2008-06-23 | 2014-03-19 | 株式会社日立製作所 | 透明導電膜付き基板,その製造方法,透明導電膜付き基板を用いた表示素子及び透明導電膜付き基板を用いた太陽電池 |
CN102216237B (zh) * | 2008-11-20 | 2015-05-13 | 出光兴产株式会社 | ZnO-SnO2-In2O3类氧化物烧结体及非晶质透明导电膜 |
TWI390554B (zh) * | 2009-08-25 | 2013-03-21 | Efun Technology Co Ltd | A transparent conductive film with crystals |
JP4843083B2 (ja) * | 2009-11-19 | 2011-12-21 | 出光興産株式会社 | In−Ga−Zn系酸化物スパッタリングターゲット |
KR20120094035A (ko) | 2009-12-16 | 2012-08-23 | 미쓰비시 마테리알 가부시키가이샤 | 투명 도전막, 이 투명 도전막을 사용한 태양 전지 및 투명 도전막을 형성하기 위한 스퍼터링 타깃 및 그 제조 방법 |
US20130095292A1 (en) * | 2010-10-29 | 2013-04-18 | Cardinal Solar Technologies Company | TCO Coating and Coated Substrate for High Temperature Applications |
JP5543907B2 (ja) * | 2010-12-24 | 2014-07-09 | 日東電工株式会社 | 透明導電性フィルムおよびその製造方法 |
JP2012230491A (ja) * | 2011-04-25 | 2012-11-22 | Nitto Denko Corp | タッチパネル用透明導電性フィルムおよび画像表示装置 |
JP2012017258A (ja) | 2011-10-05 | 2012-01-26 | Idemitsu Kosan Co Ltd | In−Ga−Zn系酸化物スパッタリングターゲット |
JP2013152827A (ja) * | 2012-01-24 | 2013-08-08 | Kaneka Corp | 透明電極付き基板およびその製造方法 |
US9696751B2 (en) | 2012-05-17 | 2017-07-04 | Kaneka Corporation | Substrate with transparent electrode, method for manufacturing same, and touch panel |
JPWO2013183564A1 (ja) | 2012-06-07 | 2016-01-28 | 日東電工株式会社 | 透明導電性フィルム |
JP6215062B2 (ja) | 2013-01-16 | 2017-10-18 | 日東電工株式会社 | 透明導電フィルムの製造方法 |
JP6239330B2 (ja) * | 2013-09-26 | 2017-11-29 | 日東電工株式会社 | 透明導電性フィルムの製造方法 |
JP6270442B2 (ja) * | 2013-12-02 | 2018-01-31 | 株式会社カネカ | 透明積層体フィルム及び透明電極付き基板の製造方法 |
CN105874544B (zh) * | 2014-03-28 | 2017-08-11 | 株式会社钟化 | 透明导电膜及其制造方法 |
CN105659198B (zh) | 2014-04-30 | 2019-06-18 | 日东电工株式会社 | 透明导电性薄膜 |
JP6548910B2 (ja) | 2015-02-25 | 2019-07-24 | 日東電工株式会社 | 電界駆動型調光素子用透明導電性フィルム、調光フィルム、および電界駆動型調光素子 |
CN107533883B (zh) * | 2015-09-30 | 2021-09-28 | 积水化学工业株式会社 | 透光性导电膜、及经退火处理的透光性导电膜的制造方法 |
-
2016
- 2016-11-07 JP JP2016217529A patent/JP6412539B2/ja active Active
- 2016-11-08 CN CN201680065213.XA patent/CN108352217B/zh active Active
- 2016-11-08 US US15/772,629 patent/US10720264B2/en active Active
- 2016-11-08 KR KR1020187011488A patent/KR102618086B1/ko active IP Right Grant
- 2016-11-08 EP EP16864190.0A patent/EP3376508A4/en not_active Withdrawn
- 2016-11-09 TW TW105136518A patent/TWI716486B/zh active
-
2018
- 2018-01-05 JP JP2018000834A patent/JP6637528B2/ja active Active
- 2018-07-25 JP JP2018139142A patent/JP6530118B2/ja active Active
- 2018-09-28 JP JP2018184493A patent/JP6637565B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
KR102618086B1 (ko) | 2023-12-26 |
KR20180081048A (ko) | 2018-07-13 |
US20190122784A1 (en) | 2019-04-25 |
JP2017092033A (ja) | 2017-05-25 |
CN108352217A (zh) | 2018-07-31 |
EP3376508A4 (en) | 2019-05-01 |
JP2018081928A (ja) | 2018-05-24 |
JP6412539B2 (ja) | 2018-10-24 |
JP2019033088A (ja) | 2019-02-28 |
TWI716486B (zh) | 2021-01-21 |
US10720264B2 (en) | 2020-07-21 |
JP6637528B2 (ja) | 2020-01-29 |
TW201740396A (zh) | 2017-11-16 |
JP2019025915A (ja) | 2019-02-21 |
JP6530118B2 (ja) | 2019-06-12 |
EP3376508A1 (en) | 2018-09-19 |
CN108352217B (zh) | 2020-04-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6637565B2 (ja) | 光透過性導電フィルム | |
WO2017082229A1 (ja) | 光透過性導電フィルムおよび調光フィルム | |
JP2016157021A (ja) | 電界駆動型調光素子用透明導電性フィルム、調光フィルム、および電界駆動型調光素子 | |
JP6524068B2 (ja) | 透明導電フィルムおよびその製造方法 | |
JP7039506B2 (ja) | 光透過性導電層付きフィルム | |
WO2018207622A1 (ja) | 光透過性導電層付きフィルム、調光フィルムおよび調光装置 | |
WO2020031632A1 (ja) | 光透過性導電フィルムおよび調光フィルム | |
WO2021024944A1 (ja) | 透明導電性フィルム | |
WO2020255947A1 (ja) | 透明導電性フィルム | |
KR20200102932A (ko) | 광 투과성 도전 필름 | |
KR20200102930A (ko) | 광 투과성 도전 필름 | |
KR20200102931A (ko) | 광 투과성 도전 필름 | |
KR20240019750A (ko) | 투명 도전성 필름 | |
KR20240018403A (ko) | 투명 도전성 필름 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180928 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190821 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190910 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20191111 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20191217 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20191220 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6637565 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |