CN105793465B - 磁记录膜形成用溅射靶及其制造方法 - Google Patents

磁记录膜形成用溅射靶及其制造方法 Download PDF

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Publication number
CN105793465B
CN105793465B CN201480063680.XA CN201480063680A CN105793465B CN 105793465 B CN105793465 B CN 105793465B CN 201480063680 A CN201480063680 A CN 201480063680A CN 105793465 B CN105793465 B CN 105793465B
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CN
China
Prior art keywords
sputtering target
phase
alloy
powder
sputter face
Prior art date
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Active
Application number
CN201480063680.XA
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English (en)
Chinese (zh)
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CN105793465A (zh
Inventor
荻野真
荻野真一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JX Nippon Mining and Metals Corp
Original Assignee
JX Nippon Mining and Metals Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by JX Nippon Mining and Metals Corp filed Critical JX Nippon Mining and Metals Corp
Priority to CN201910149068.9A priority Critical patent/CN109943814B/zh
Publication of CN105793465A publication Critical patent/CN105793465A/zh
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Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/851—Coating a support with a magnetic layer by sputtering
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C33/00—Making ferrous alloys
    • C22C33/02—Making ferrous alloys by powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C38/00—Ferrous alloys, e.g. steel alloys
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C5/00—Alloys based on noble metals
    • C22C5/04—Alloys based on a platinum group metal
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
    • C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
    • C—CHEMISTRY; METALLURGY
    • C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
    • C22C—ALLOYS
    • C22C2202/00—Physical properties
    • C22C2202/02—Magnetic

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Powder Metallurgy (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
CN201480063680.XA 2013-11-22 2014-11-14 磁记录膜形成用溅射靶及其制造方法 Active CN105793465B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910149068.9A CN109943814B (zh) 2013-11-22 2014-11-14 磁记录膜形成用溅射靶及其制造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2013-241537 2013-11-22
JP2013241537 2013-11-22
PCT/JP2014/080144 WO2015076190A1 (ja) 2013-11-22 2014-11-14 磁気記録膜形成用スパッタリングターゲット及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN201910149068.9A Division CN109943814B (zh) 2013-11-22 2014-11-14 磁记录膜形成用溅射靶及其制造方法

Publications (2)

Publication Number Publication Date
CN105793465A CN105793465A (zh) 2016-07-20
CN105793465B true CN105793465B (zh) 2019-03-22

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CN201480063680.XA Active CN105793465B (zh) 2013-11-22 2014-11-14 磁记录膜形成用溅射靶及其制造方法

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Country Status (6)

Country Link
JP (2) JP6125661B2 (ja)
CN (2) CN109943814B (ja)
MY (2) MY191633A (ja)
SG (1) SG11201602163YA (ja)
TW (1) TWI642799B (ja)
WO (1) WO2015076190A1 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023079857A1 (ja) * 2021-11-05 2023-05-11 Ｊｘ金属株式会社 Ｆｅ－Ｐｔ－Ｃ系スパッタリングターゲット部材、スパッタリングターゲット組立品、成膜方法、及びスパッタリングターゲット部材の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087858A (zh) * 2010-11-26 2011-06-08 山西师范大学 一种梯度复合磁记录介质及其制备方法
JP6212419B2 (ja) * 2014-03-17 2017-10-11 株式会社Ｓｕｂａｒｕ エンジンの排気凝縮水排出装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2610575B2 (ja) * 1993-11-25 1997-05-14 株式会社 ジャパンエナジー Ｗ−Ｔｉ合金ターゲット
US20070189916A1 (en) * 2002-07-23 2007-08-16 Heraeus Incorporated Sputtering targets and methods for fabricating sputtering targets having multiple materials
KR100470151B1 (ko) * 2002-10-29 2005-02-05 한국과학기술원 ＦｅＰｔＣ 박막을 이용한 고밀도 자기기록매체 및 그제조방법
JP5590322B2 (ja) * 2010-11-12 2014-09-17 三菱マテリアル株式会社 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法
CN103270554B (zh) * 2010-12-20 2016-09-28 吉坤日矿日石金属株式会社 分散有C粒子的Fe-Pt型溅射靶
JP5041262B2 (ja) * 2011-01-31 2012-10-03 三菱マテリアル株式会社 磁気記録媒体膜形成用スパッタリングターゲットおよびその製造方法
JP5912559B2 (ja) * 2011-03-30 2016-04-27 田中貴金属工業株式会社 ＦｅＰｔ−Ｃ系スパッタリングターゲットの製造方法
CN103717781B (zh) * 2011-09-26 2016-02-24 吉坤日矿日石金属株式会社 Fe-Pt-C型溅射靶

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102087858A (zh) * 2010-11-26 2011-06-08 山西师范大学 一种梯度复合磁记录介质及其制备方法
JP6212419B2 (ja) * 2014-03-17 2017-10-11 株式会社Ｓｕｂａｒｕ エンジンの排気凝縮水排出装置

Also Published As

Publication number Publication date
JP6484276B2 (ja) 2019-03-13
SG11201602163YA (en) 2016-04-28
CN109943814A (zh) 2019-06-28
CN105793465A (zh) 2016-07-20
WO2015076190A1 (ja) 2015-05-28
TW201531575A (zh) 2015-08-16
JP2017197840A (ja) 2017-11-02
MY177997A (en) 2020-09-29
JP6125661B2 (ja) 2017-05-17
CN109943814B (zh) 2021-04-20
MY191633A (en) 2022-07-04
JPWO2015076190A1 (ja) 2017-03-16
TWI642799B (zh) 2018-12-01

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