CN105659382B - 用于控制堆叠裸片的位置的技术 - Google Patents

用于控制堆叠裸片的位置的技术 Download PDF

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CN105659382B
CN105659382B CN201480057576.XA CN201480057576A CN105659382B CN 105659382 B CN105659382 B CN 105659382B CN 201480057576 A CN201480057576 A CN 201480057576A CN 105659382 B CN105659382 B CN 105659382B
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bare chip
semiconductor bare
assembling
stair
semiconductor
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CN105659382A (zh
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M·H·S·达伊里格尔
R·D·霍普金斯
A·乔
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Oracle International Corp
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)
  • Die Bonding (AREA)
CN201480057576.XA 2013-10-21 2014-09-24 用于控制堆叠裸片的位置的技术 Active CN105659382B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/059,302 2013-10-21
US14/059,302 US9209165B2 (en) 2013-10-21 2013-10-21 Technique for controlling positions of stacked dies
PCT/US2014/057237 WO2015060978A1 (en) 2013-10-21 2014-09-24 Technique for controlling positions of stacked dies

Publications (2)

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CN105659382A CN105659382A (zh) 2016-06-08
CN105659382B true CN105659382B (zh) 2019-04-12

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US (1) US9209165B2 (https=)
EP (1) EP3061131B1 (https=)
JP (1) JP6534386B2 (https=)
KR (1) KR102174120B1 (https=)
CN (1) CN105659382B (https=)
TW (1) TWI627682B (https=)
WO (1) WO2015060978A1 (https=)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9698093B2 (en) * 2015-08-24 2017-07-04 Nxp Usa,Inc. Universal BGA substrate
US10707171B2 (en) 2015-12-22 2020-07-07 Intel Corporation Ultra small molded module integrated with die by module-on-wafer assembly
US10234626B2 (en) * 2016-02-08 2019-03-19 Skorpios Technologies, Inc. Stepped optical bridge for connecting semiconductor waveguides
CN108878398B (zh) * 2017-05-16 2020-07-21 晟碟半导体(上海)有限公司 包括导电凸块互连的半导体器件
KR20190052957A (ko) * 2017-11-09 2019-05-17 에스케이하이닉스 주식회사 다이 오버시프트 지시 패턴을 포함하는 반도체 패키지
US11521862B2 (en) * 2017-12-15 2022-12-06 Chih-Liang Hu Process for fabricating circuit components in matrix batches
US20190279962A1 (en) * 2018-03-09 2019-09-12 Oracle International Corporation Method and apparatus for stacking warped chips to assemble three-dimensional integrated circuits
KR20200055853A (ko) 2018-11-13 2020-05-22 삼성디스플레이 주식회사 큐디 글래스 에이징 장치 및 그것의 에이징 방법
WO2020132937A1 (zh) * 2018-12-26 2020-07-02 深圳市兴华炜科技有限公司 一种smt精密定位计算方法及相关产品
US20230247795A1 (en) 2022-01-28 2023-08-03 The Research Foundation For The State University Of New York Regenerative preheater for phase change cooling applications

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102460690A (zh) * 2009-06-24 2012-05-16 英特尔公司 多芯片封装和在其中提供管芯到管芯互连的方法
CN102484108A (zh) * 2009-07-22 2012-05-30 甲骨文美国公司 高带宽倾斜叠层芯片封装
CN103081102A (zh) * 2010-08-25 2013-05-01 甲骨文国际公司 斜坡堆栈芯片封装中的光学通信
CN103081103A (zh) * 2010-09-01 2013-05-01 甲骨文国际公司 制造斜坡-叠层芯片封装的固定装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5239447A (en) * 1991-09-13 1993-08-24 International Business Machines Corporation Stepped electronic device package
JPH06291248A (ja) * 1993-04-05 1994-10-18 Toshiba Corp 半導体装置
JP2004228117A (ja) * 2003-01-20 2004-08-12 Idea System Kk 半導体装置および半導体パッケージ
JP2009027067A (ja) * 2007-07-23 2009-02-05 Alps Electric Co Ltd 半導体装置の製造方法および半導体装置
JP2011040418A (ja) * 2007-12-18 2011-02-24 Alps Electric Co Ltd 半導体装置およびその製造方法
KR100997787B1 (ko) * 2008-06-30 2010-12-02 주식회사 하이닉스반도체 적층 반도체 패키지 및 이의 제조 방법
US8283766B2 (en) * 2010-09-02 2012-10-09 Oracle America, Inc Ramp-stack chip package with static bends
JP2013138177A (ja) * 2011-11-28 2013-07-11 Elpida Memory Inc 半導体装置の製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102460690A (zh) * 2009-06-24 2012-05-16 英特尔公司 多芯片封装和在其中提供管芯到管芯互连的方法
CN102484108A (zh) * 2009-07-22 2012-05-30 甲骨文美国公司 高带宽倾斜叠层芯片封装
CN103081102A (zh) * 2010-08-25 2013-05-01 甲骨文国际公司 斜坡堆栈芯片封装中的光学通信
CN103081103A (zh) * 2010-09-01 2013-05-01 甲骨文国际公司 制造斜坡-叠层芯片封装的固定装置

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